Pattern dimension measurement method and charged particle beam apparatus
    52.
    发明授权
    Pattern dimension measurement method and charged particle beam apparatus 有权
    图案尺寸测量方法和带电粒子束装置

    公开(公告)号:US09297649B2

    公开(公告)日:2016-03-29

    申请号:US14001433

    申请日:2011-12-12

    Abstract: The present invention aims to provide a pattern dimension measurement method for accurately measuring an amount of shrinkage of a pattern that shrinks and an original dimension value before the shrinkage and a charged particle beam apparatus.In order to attain the above-mentioned object, there are proposed a pattern dimension measurement method and a charged particle beam apparatus that are characterized by: forming a thin film on a sample including the pattern after carrying out beam scanning onto a first portion of the pattern; acquiring a first measurement value by scanning a beam onto a region corresponding to the first portion on which the thin film is formed; acquiring a second measurement value by scanning a beam onto a second portion that has identical dimensions as those of the first portion on design data; and finding the amount of shrinkage of the pattern based on subtraction processing of subtracting the first measurement value from the second measurement value.

    Abstract translation: 本发明的目的在于提供一种图形尺寸测量方法,用于精确测量收缩的图案的收缩量和收缩前的原始尺寸值以及带电粒子束装置。 为了实现上述目的,提出了一种图案尺寸测量方法和带电粒子束装置,其特征在于:在对包含图案的样品进行束扫描之后,在包含该图案的样品上形成薄膜至第一部分 模式; 通过将光束扫描到与其上形成有薄膜的第一部分对应的区域来获取第一测量值; 通过将光束扫描到与设计数据上的第一部分具有相同尺寸的第二部分上来获取第二测量值; 并且基于从第二测量值减去第一测量值的减法处理来找出图案的收缩量。

    Passive wireless antenna sensor for strain, temperature, crack and fatigue measurement
    55.
    发明授权
    Passive wireless antenna sensor for strain, temperature, crack and fatigue measurement 有权
    被动无线天线传感器用于应变,温度,裂纹​​和疲劳测量

    公开(公告)号:US08868355B2

    公开(公告)日:2014-10-21

    申请号:US12867801

    申请日:2009-02-15

    CPC classification number: G01B7/16 G01B15/06 H01Q1/2225 H01Q21/065

    Abstract: An apparatus and method is provided for monitoring a condition of a structure using a passive wireless antenna sensor having a known resonant frequency when mounted on the structure. A series of radio frequency signals are transmitted with sweeping frequencies around the known resonant frequency to the passive wireless antenna sensor. The passive wireless antenna sensor includes a dielectric substrate disposed between an antenna pattern and a ground plane such that a change in the condition of the structure will cause a change in one or more characteristics of the passive wireless sensor. A signal is received from the passive wireless antenna sensor and a resonant frequency of the passive wireless antenna sensor is determined based on the received signal. The determined resonant frequency is then compared to the known resonant frequency, whereby a change in the resonant frequency indicates a change in the condition of the structure.

    Abstract translation: 提供了一种装置和方法,用于当安装在结构上时,使用具有已知共振频率的无源无线天线传感器监测结构的状况。 将一系列射频信号以围绕已知谐振频率的扫频以无源无线天线传感器传输。 无源无线天线传感器包括设置在天线图案和接地平面之间的电介质基板,使得结构状况的变化将导致无源无线传感器的一个或多个特性的改变。 从无源无线天线传感器接收信号,并且基于接收到的信号确定无源无线天线传感器的谐振频率。 然后将确定的谐振频率与已知的谐振频率进行比较,由此谐振频率的变化表示结构状况的变化。

    ARRANGEMENT TO MEASURE THE DEFLECTION OF A BLADE OF A WIND TURBINE
    56.
    发明申请
    ARRANGEMENT TO MEASURE THE DEFLECTION OF A BLADE OF A WIND TURBINE 有权
    测量风力涡轮机叶片的布置的安排

    公开(公告)号:US20140266861A1

    公开(公告)日:2014-09-18

    申请号:US14181689

    申请日:2014-02-16

    Abstract: An arrangement to measure deflection of a blade of a wind turbine is provided. A transmitter is arranged close to the tip end of the blade, while a receiver is arranged close to the root end of the blade. The transmitter and receiver are prepared for a wireless transfer of a monitoring signal, which is sent from the transmitter to the receiver. A monitoring system is arranged close to the root end of the blade. The monitoring system is adapted to generate the monitoring signal. The monitoring system is connected with the transmitter by a cable-bound communication line, thus the monitoring signal is transferred from the monitoring system to the transmitter. The monitoring system is connected with the receiver, thus the monitoring signal is transferred from the receiver to the monitoring system. The monitoring system is adapted to determine the deflection of the blade based on the transferred monitoring signal.

    Abstract translation: 提供了一种用于测量风力涡轮机的叶片的偏转的装置。 发射器布置成靠近叶片的尖端,而接收器布置成靠近叶片的根端。 准备发射机和接收机用于从发射机发送到接收机的监视信号的无线传输。 监视系统靠近叶片的根端设置。 监控系统适于产生监控信号。 监控系统通过电缆绑定通信线路与发射机连接,监控信号从监控系统传输到发射机。 监控系统与接收器连接,监控信号从接收器传输到监控系统。 监测系统适于基于所传送的监视信号来确定叶片的偏转。

    PATTERN DIMENSION MEASUREMENT METHOD AND CHARGED PARTICLE BEAM APPARATUS
    57.
    发明申请
    PATTERN DIMENSION MEASUREMENT METHOD AND CHARGED PARTICLE BEAM APPARATUS 有权
    图案尺寸测量方法和充电颗粒光束装置

    公开(公告)号:US20140048706A1

    公开(公告)日:2014-02-20

    申请号:US14001433

    申请日:2011-12-12

    Abstract: The present invention aims to provide a pattern dimension measurement method for accurately measuring an amount of shrinkage of a pattern that shrinks and an original dimension value before the shrinkage and a charged particle beam apparatus.In order to attain the above-mentioned object, there are proposed a pattern dimension measurement method and a charged particle beam apparatus that are characterized by: forming a thin film on a sample including the pattern after carrying out beam scanning onto a first portion of the pattern; acquiring a first measurement value by scanning a beam onto a region corresponding to the first portion on which the thin film is formed; acquiring a second measurement value by scanning a beam onto a second portion that has identical dimensions as those of the first portion on design data; and finding the amount of shrinkage of the pattern based on subtraction processing of subtracting the first measurement value from the second measurement value.

    Abstract translation: 本发明的目的在于提供一种图形尺寸测量方法,用于精确测量收缩的图案的收缩量和收缩前的原始尺寸值以及带电粒子束装置。 为了实现上述目的,提出了一种图案尺寸测量方法和带电粒子束装置,其特征在于:在对包含图案的样品进行束扫描之后,在包含该图案的样品上形成薄膜至第一部分 模式; 通过将光束扫描到与其上形成有薄膜的第一部分对应的区域来获取第一测量值; 通过将光束扫描到与设计数据上的第一部分具有相同尺寸的第二部分上来获取第二测量值; 并且基于从第二测量值减去第一测量值的减法处理来找出图案的收缩量。

    Passive Wireless Antenna Sensor for Strain, Temperature, Crack and Fatigue Measurement
    58.
    发明申请
    Passive Wireless Antenna Sensor for Strain, Temperature, Crack and Fatigue Measurement 有权
    用于应变,温度,裂纹​​和疲劳测量的无源无线天线传感器

    公开(公告)号:US20110040498A1

    公开(公告)日:2011-02-17

    申请号:US12867801

    申请日:2009-02-15

    CPC classification number: G01B7/16 G01B15/06 H01Q1/2225 H01Q21/065

    Abstract: An apparatus and method is provided for monitoring a condition of a structure using a passive wireless antenna sensor having a known resonant frequency when mounted on the structure. A series of radio frequency signals are transmitted with sweeping frequencies around the known resonant frequency to the passive wireless antenna sensor. The passive wireless antenna sensor includes a dielectric substrate disposed between an antenna pattern and a ground plane such that a change in the condition of the structure will cause a change in one or more characteristics of the passive wireless sensor. A signal is received from the passive wireless antenna sensor and a resonant frequency of the passive wireless antenna sensor is determined based on the received signal. The determined resonant frequency is then compared to the known resonant frequency, whereby a change in the resonant frequency indicates a change in the condition of the structure.

    Abstract translation: 提供了一种装置和方法,用于当安装在结构上时,使用具有已知共振频率的无源无线天线传感器监测结构的状况。 将一系列射频信号以围绕已知谐振频率的扫频以无源无线天线传感器传输。 无源无线天线传感器包括设置在天线图案和接地平面之间的电介质基板,使得结构状态的变化将导致无源无线传感器的一个或多个特性的改变。 从无源无线天线传感器接收信号,并且基于接收到的信号确定无源无线天线传感器的谐振频率。 然后将确定的谐振频率与已知的谐振频率进行比较,由此谐振频率的变化表示结构状况的变化。

    Physical Finite Element Model
    59.
    发明申请
    Physical Finite Element Model 有权
    物理有限元模型

    公开(公告)号:US20090189784A1

    公开(公告)日:2009-07-30

    申请号:US12022320

    申请日:2008-01-30

    CPC classification number: G01B15/06 G01M5/0033 G01M5/0083 G01M5/0091

    Abstract: a plurality of RFIDs is installed on aircraft or other structure. The RFIDs can query one another upon original installation and in response to predetermined event detection, and determine their relative locations within a mesh. The determined location data and other information are stored within the respect memories of the RFIDs. The stored data can be later accessed and used in analyzing damage or structural failure of the aircraft. Corrective measures are thus expedited because before-and-after structural comparisons can be readily made, with or without reference to original engineering data for the aircraft.

    Abstract translation: 多个RFID安装在飞机或其他结构上。 RFID可以在原始安装和响应于预定的事件检测时相互查询,并且确定它们在网格内的相对位置。 确定的位置数据和其他信息被存储在RFID的尊重存储器内。 存储的数据可以稍后被访问并用于分析飞机的损坏或结构故障。 因此,加快了纠正措施,因为可以轻松地进行前后结构比较,有或没有参考飞机的原始工程数据。

    Systems and methods for monitoring thermal growth and controlling clearances, and maintaining health of turbo machinery applications
    60.
    发明申请
    Systems and methods for monitoring thermal growth and controlling clearances, and maintaining health of turbo machinery applications 有权
    用于监测热增长和控制间隙的系统和方法,并保持涡轮机械应用的健康

    公开(公告)号:US20070043497A1

    公开(公告)日:2007-02-22

    申请号:US11204490

    申请日:2005-08-16

    Abstract: A system and method for determining thermal growth of motor or engine parts to thereupon control the clearance of motor or engine fan blades is disclosed herein. In addition, a system and method for monitoring the health of a turbine engine, its components and sub-components is also described herein. The system(s) and method(s) described herein permit continuous monitoring during the life of the engine for radial clearances and blade and rotor vibration problems, which will assist in correcting and retaining performance for a longer on-wing time in operation. In addition, inconsistent engine-to-engine performance variations due to component tolerances, engine operation characteristics, and operation during extremes in ambient temperatures can be eliminated or significantly minimized when employing the system(s) and method(s) described herein.

    Abstract translation: 本文公开了一种用于确定马达或发动机部件的热增长的系统和方法,从而控制马达或发动机风扇叶片的间隙。 此外,还描述了用于监测涡轮发动机,其部件和子部件的健康状态的系统和方法。 本文所述的系统和方法允许在发动机寿命期间对于径向间隙和叶片和转子振动问题进行连续监测,这将有助于校正和保持操作中更长的机翼时间的性能。 此外,当使用本文所述的系统和方法时,可以消除或显着地最小化由于部件公差,发动机操作特性和在环境温度极限期间的操作引起的发动机与发动机性能的不一致。

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