摘要:
A device is described for a very low cost anti-aliasing filter to be used to suppress aliasing artifacts present in discretely sampled solid-state electronic imaging devices. This device includes a transparent substrate upon which a multiplicity of transparent phase spots are placed. The diameter and thickness of the transparent phase spots are designed in such a way to cause just the right amount of blurring to suppress the aliasing artifacts, yet render a reasonable sharp image for spatial frequencies below the sampling frequency of the imager. This suppression is further accomplished over a broad spectral range. The phase noise filter thus formed can be placed either in object space or in image space.
摘要:
The laser transfer machining apparatus comprises a shaping unit for shaping the laser beam so that the laser beam has a beam pattern which corresponds to a desired pattern to be machined in the object to be machined and a generating unit disposed separately from the shaping unit for simultaneously generating a plurality of laser beams each having the beam pattern from the laser beam shaped by the shaping unit. The generating unit is adapted to emit the plural laser beams while simultaneously defining a plurality of radiation directions of the generated plural laser beams to the object to be machined. The laser transfer machining apparatus can provide a high efficiency of utilization of light and reduce the time required for machining. Furthermore, the laser transfer machining apparatus can utilize a laser with a relatively low spatially coherence such as an eximer laser.
摘要:
The present invention resides in a Fourier filter to detect defects on semiconductor wafers. The present invention relates to a Fourier filter to detect defects on semiconductor wafers which is less susceptible to having the filter output affected by vibrations and which avoids the physical contact from conventional damping.
摘要:
An optical system is provided with an adaptable window element at a Fourier plane for spatial filtering. Having a window element made up of individually addressable pixels provides a substantial improvement in the spatial filtering adaptability and precision. When combined with a computer and sensor, the window may become part of a negative feedback loop, thereby providing the optical system with more consistent reproducibility, higher reliability with graceful degradation, and more precise control over final results.
摘要:
An imager with which it is possible to reduce the aliasing noise effectively. An imaging light from an object is condensed by an optical system 1 so as to fall on an optical low-pass filter 2. The optical low-pass filter 2 has trap points corresponding to zero values of the MTF characteristics on two points of 1/2 and 1 of the spatial sampling frequency on horizontal and vertical MTF characteristics, and reduces components less than one-half the spatial sampling frequency as determined by the arraying of the light receiving elements of a CCD 4 of the imaging light. The CCD 4 receives the imaging light, the spatial frequency of which has been suppressed by the spatial low-pass filter 2, and outputs an imaging light.
摘要:
A picture display apparatus is provided with a display device having pixels disposed in a mosaic pattern. A plurality of optical filter surfaces are respectively placed between the display device and a viewer so that both surfaces can be overlapped with each other. Each pixel in the display device is diffracted or refracted by both surfaces to become a plurality of pixels. For each optical filter surface, an element for diffusion such as a diffraction grating and an element for refraction such as a prism can be utilized for the diffraction and refraction.
摘要:
A method and apparatus maps a Gaussian beam into a beam with a uniform irradiance profile by exploiting the Fourier transform properties of lenses. A phase element imparts a design phase onto an input beam and the output optical field from a lens is then the Fourier transform of the input beam and the phase function from the phase element. The phase element is selected in accordance with a dimensionless parameter which is dependent upon the radius of the incoming beam, the desired spot shape, the focal length of the lens and the wavelength of the input beam. This dimensionless parameter can also be used to evaluate the quality of a system. In order to control the radius of the incoming beam, optics such as a telescope can be employed. The size of the target spot and the focal length can be altered by exchanging the transform lens, but the dimensionless parameter will remain the same. The quality of the system, and hence the value of the dimensionless parameter, can be altered by exchanging the phase element. The dimensionless parameter provides design guidance, system evaluation, and indication as to how to improve a given system.
摘要:
An advanced design for a phase plate enables the distribution of spots in arbitrarily shaped patterns with very high uniformity and with a continuously or near-continuously varying phase pattern. A continuous phase pattern eliminates large phase jumps typically expected in a grating that provides arbitrary shapes. Large phase jumps increase scattered light outside of the desired pattern, reduce efficiency and can make the grating difficult to manufacture. When manufacturing capabilities preclude producing a fully continuous grating, the present design can be easily adapted to minimize manufacturing errors and maintain high efficiencies. This continuous grating is significantly more efficient than previously described Dammann gratings, offers much more flexibility in generating spot patterns and is easier to manufacture and replicate than a multi-level phase grating.
摘要:
A polymeric optical low-pass filter of the birefringent type is provided which is lightweight and small, and which can be easily produced. Also provided are a polymeric optical low-pass filter device including the polymeric optical low-pass filter; and a composite optical filter including the polymeric optical low-pass filter. The optical low-pass filter comprises an optically anisotropic polymer film in which the displacement distance S between the ordinary ray and the extraordinary ray represented by the following formula is 1-70 .mu.m: S={(b.sup.2 -a.sup.2)/2c.sup.2 }.multidot.sin 2.phi.e, wherein a=1/n.sub.e, b=1/n.sub.0, c.sup.2 =a.sup.2 sin.sup.2 .phi.+b.sup.2 cos.sup.2 .phi., n.sub.e is the extraordinary-ray refractive index, n.sub.0 is the ordinary-ray refractive index, .phi. is the angle formed between the normal at the plane of incidence of light from a subject and the optic axis of the polymer film, and e is the thickness of the polymer film.
摘要:
An image display device is so adapted as to eliminate image roughness while the resolution of the image is kept as high as possible. The image display device includes an image display body having a plurality of pixels arranged periodically in two dimensions and an optical low-pass filter placed on the front surface of the image display body. The spatial frequency of the initial minimum value of an modulation transfer function in one direction of the optical low-pass filter is decided by two basic frequency vectors M, N for sampling frequencies determined by the arrangement of pixels in the image display body, and the spatial frequency of the initial minimum value of the modulation transfer function in the other direction of the optical low-pass filter is decided by differences .+-.(N-M) between the basic frequency vectors.