公开(公告)号：USRE36760E

公开(公告)日：2000-07-04

申请号：US108325

申请日：1998-07-01

Applicant: Douglas D. Bloomquist ,  Rudy Buchheit ,  John B. Greenly ,  Dale C. McIntyre ,  Eugene L. Neau ,  Regan W. Stinnett

Inventor： Douglas D. Bloomquist ,  Rudy Buchheit ,  John B. Greenly ,  Dale C. McIntyre ,  Eugene L. Neau ,  Regan W. Stinnett

IPC: B29C35/08 ,  B29C59/16 ,  C23C8/36 ,  C23C14/48 ,  G21K5/04 ,  H01J3/04 ,  H01J27/00 ,  H01J27/08 ,  H01J27/14 ,  H01J37/08 ,  H01L21/48

CPC classification number: C08J7/123 ,  B29C59/16 ,  C23C14/48 ,  C23C8/36 ,  H01J27/14 ,  B29C2035/0872 ,  H01J2237/08 ,  H01J2237/31701

Abstract: A method and apparatus for treating material surfaces using a repetitively pulsed ion beam. In particular, a method of treating magnetic material surfaces in order to reduce surface defects, and product amorphous fine grained magnetic material with properties that can be tailored by adjusting treatment parameters of a pulsed ion beam. In addition, to a method of surface treating materials for wear and corrosion resistance using pulsed particle ion beams.

Abstract translation: 一种使用重复脉冲离子束处理材料表面的方法和装置。 特别是一种处理磁性材料表面以减少表面缺陷的方法，以及具有通过调节脉冲离子束的处理参数可以调整的特性的产品无定形细粒磁性材料。 另外，对于使用脉冲粒子离子束来表面处理材料的耐磨损和耐腐蚀性的方法。

公开(公告)号：US5473165A

公开(公告)日：1995-12-05

申请号：US153248

申请日：1993-11-16

Applicant: Regan W. Stinnett ,  John B. Greenly

Inventor： Regan W. Stinnett ,  John B. Greenly

IPC: B29C35/08 ,  B29C59/16 ,  C23C8/36 ,  C23C14/48 ,  G21K5/04 ,  H01J3/04 ,  H01J27/00 ,  H01J27/08 ,  H01J27/14 ,  H01J37/08 ,  H01L21/48

CPC classification number: C08J7/123 ,  B29C59/16 ,  C23C14/48 ,  C23C8/36 ,  H01J27/14 ,  B29C2035/0872 ,  H01J2237/08 ,  H01J2237/31701

Abstract: Methods and apparatus for thermally altering the near surface characteristics of a material are described. In particular, a repetitively pulsed ion beam system comprising a high energy pulsed power source and an ion beam generator are described which are capable of producing single species high voltage ion beams (0.25-2.5 MeV) at 1-1000 kW average power and over extended operating cycles (10.sup.8). Irradiating materials with such high energy, repetitively pulsed ion beams can yield surface treatments including localized high temperature anneals to melting, both followed by rapid thermal quenching to ambient temperatures to achieve both novel and heretofore commercially unachievable physical characteristics in a near surface layer of material.

公开(公告)号：US4567398A

公开(公告)日：1986-01-28

申请号：US474473

申请日：1983-03-11

Applicant: Tohru Ishitani ,  Hifumi Tamura ,  Akira Shimase

Inventor： Tohru Ishitani ,  Hifumi Tamura ,  Akira Shimase

IPC: H01J37/08 ,  H01J3/04 ,  H01J27/26 ,  H05H1/00 ,  H01J1/02

CPC classification number: H01J27/26

Abstract: A liquid metal ion source according to the present invention has a needle electrode disposed at a position spaced from a reservoir for holding a source material, and is provided with means for freely varying a distance from the reservoir to the fore end of the needle electrode.

Abstract translation: 根据本发明的液体金属离子源具有设置在与用于保持源材料的储存器间隔开的位置处的针电极，并且设置有用于自由地改变从储存器到针电极的前端的距离的装置。

公开(公告)号：US4500787A

公开(公告)日：1985-02-19

申请号：US404044

申请日：1982-08-02

Applicant: Jan B. Le Poole ,  Pieter Kruit

Inventor： Jan B. Le Poole ,  Pieter Kruit

IPC: H01J3/04 ,  H01J27/20 ,  H01J49/14 ,  H01J27/00

CPC classification number: H01J49/14

Abstract: Method and device for furnishing an ion stream by causing gas to flow through a discharge aperture having a diameter of at most 20 .mu.m into an evacuated chamber and ionizing said gas by means of one or a plurality of focused electron beams downstream of said aperture in which the ionization is effected immediately downstream of said discharge aperture.

Abstract translation: 用于通过使气体通过直径至多为20μm的排放孔流入抽真空室来提供离子流的方法和装置，并通过所述孔下游的一个或多个聚焦电子束使所述气体离子化 电离在紧邻所述放电孔的下游进行。

公开(公告)号：US4354113A

公开(公告)日：1982-10-12

申请号：US221308

申请日：1980-12-30

Applicant: Philip D. Goode ,  Michael J. Poole ,  Gordon W. Proctor

Inventor： Philip D. Goode ,  Michael J. Poole ,  Gordon W. Proctor

IPC: H01J3/04 ,  H01J27/02 ,  H01J27/08 ,  H01J37/08 ,  H05H7/08 ,  H01J27/00

CPC classification number: H01J27/02 ,  H01J27/08

Abstract: An ion source comprises a cylindrical chamber having a longitudinal exit slit formed therein and two parallel anode wires extending the length of the chamber in the central region thereof and symmetrically disposed with respect to the longitudinal axis of the chamber and the exit slit, wherein at each end of the exit slit there is positioned at or near the zero potential equipotential a mask, the separation of the inner ends of the masks defining the width of the ion beam emitted by the source.

Abstract translation: 离子源包括圆柱形腔室，其中形成有纵向射出狭缝，以及两个平行的阳极线，其延伸室的中心区域的长度并且相对于腔室的纵向轴线和出口狭缝对称设置，其中每个 出口狭缝的端部位于或接近零电位等电位掩模，掩模的内端的分离限定由源发射的离子束的宽度。

公开(公告)号：US4159423A

公开(公告)日：1979-06-26

申请号：US836963

申请日：1977-09-27

Applicant: Hideki Kambara

Inventor： Hideki Kambara

IPC: H01J37/08 ,  H01J3/04 ,  H01J27/02 ,  H01J49/10 ,  H01J49/14 ,  H01J27/00

CPC classification number: H01J49/145

Abstract: A chemical ionization ion source comprising a firt electrode disposed in a discharge region, a counter electrode disposed to confront the first electrode and having at least one space for introducing electrons generated in the discharge region into an ionization region and means for maintaining the counter electrode at a potential higher than that of the first electrode and applying a direct current voltage between the two electrodes, wherein the discharge region and the ionization region are maintained under substantially the same pressures.

Abstract translation: 一种化学电离离子源，包括设置在放电区域中的贴片电极，配置为面对第一电极并具有至少一个用于将在放电区域中产生的电子引入电离区域的空间的对电极，以及用于将对置电极保持在 电位高于第一电极的电位，并且在两个电极之间施加直流电压，其中放电区域和电离区域保持在基本相同的压力下。

公开(公告)号：US4135094A

公开(公告)日：1979-01-16

申请号：US819388

申请日：1977-07-27

Applicant: Charles W. Hull

Inventor： Charles W. Hull

IPC: G01N27/62 ,  H01J3/04 ,  H01J27/02 ,  H01J27/20 ,  H01J49/10 ,  H01J49/14 ,  H01J27/00

CPC classification number: H01J49/14 ,  H01J49/10

Abstract: Ion sources which become coated with insulative materials are rejuvenated by forming the repeller electrode in the ion source of gold and bombarding such repeller electrode with ions to sputter the gold onto the coated surfaces to render them conductive again. Gold sputtering is accomplished by bombarding the gold repeller electrode with inert argon ions.To perform this method, the slit of the extractor plate on the ion source is greatly reduced in cross-sectional area such that the normally higher sputtering pressures may be maintained within the ion source itself. If a direct sample probe is used, it too may be formed of gold and used to provide the gold sputtering source.

Abstract translation: {PG，1，用绝缘材料涂覆的离子源通过在金离子源中形成排斥电极并用离子轰击这种排斥电极来再生，以将金溅射到涂覆的表面上，使其再次导通。 通过用惰性氩离子轰击金斥极电极来实现金溅射。

公开(公告)号：US4088919A

公开(公告)日：1978-05-09

申请号：US786872

申请日：1977-04-12

Applicant: Roy Clampitt ,  Derek K. Jefferies

Inventor： Roy Clampitt ,  Derek K. Jefferies

IPC: H01J37/08 ,  H01J3/04 ,  H01J27/00 ,  H01J27/26 ,  H05H7/08 ,  H01J1/02 ,  H01J1/30 ,  H05H1/00

CPC classification number: H01J27/26

Abstract: An ion source comprising an electrode consisting of at least one body made of a material such as to be perfectly wetted by a liquid material ions of which are to be emitted by the source and not corrodible by that material, and having a termination the radius of curvature of which is such that a jet of the liquid material will form and be anchored to the termination of the electrode under the influence of an electric field, means for applying the ionizing electric field and a reservoir for the material ions of which are to be emitted by the source.

Abstract translation: 一种离子源，包括由至少一个本体制成的电极组成的电极，该主体由材料完全润湿，液体材料的离子将被源发出并且不被该材料腐蚀，并且具有终止半径 其曲率使得液体材料的射流将在电场的影响下形成并锚定到电极的终端，用于施加电离电场的装置和用于材料离子将存在的储存器 由源发出。

公开(公告)号：US4087721A

公开(公告)日：1978-05-02

申请号：US687087

申请日：1976-05-13

Applicant: Georges Mourier

Inventor： Georges Mourier

IPC: H01J3/04 ,  H01J27/00 ,  H01J27/02 ,  H01J27/08 ,  H05H7/08

CPC classification number: H01J27/08

Abstract: The ion source according to the invention comprises a hollow cathode discharge arrangement 10 in which a plasma is produced by the ionization of a gas under the effect of a positive d.c. voltage applied to an anode 3 in relation to two cathodes 1 and 20. One of these cathodes 20 is formed with holes 30 through which some of the ions of the plasma escape. A filament 7 emits slow electrons towards this cathode, neutralizing the space charge created ahead of this cathode by the ions having left the arrangement and enables them to be propagated towards a point of use 40 situated at a considerable distance. A grid 8 limits the number of these electrons entering the arrangement 10. The source provides ion beams of clearly defined energy and high density.

Abstract translation: 根据本发明的离子源包括中空阴极排放装置10，其中通过在正直流的作用下电离气体而产生等离子体。 相对于两个阴极1和20施加到阳极3的电压。这些阴极20中的一个形成有孔30，等离子体中的一些离子通过孔30逸出。 灯丝7朝向该阴极发射慢电子，通过离开该布置的离子中和由该阴极产生的空间电荷，并使它们能够朝向相当距离的使用点40传播。 栅格8限制进入布置10的这些电子的数量。源提供明确限定的能量和高密度的离子束。

公开(公告)号：US4069665A

公开(公告)日：1978-01-24

申请号：US634638

申请日：1975-11-24

Applicant: Robert E. Bolasny

Inventor： Robert E. Bolasny

IPC: B05B5/00 ,  B01D53/32 ,  B01J19/08 ,  B05B17/06 ,  F01N3/08 ,  F02M27/00 ,  F02M27/04 ,  H01J3/04 ,  H01J27/00 ,  H01J27/02 ,  H01T14/00 ,  H01T23/00 ,  H05H7/08 ,  F02B75/10

CPC classification number: H01T23/00 ,  F01N3/0892 ,  F02M27/00 ,  F02M27/04 ,  Y10S422/906 ,  Y10S422/907

Abstract: A method and apparatus for producing ions wherein an ion generator produces periodic pulses of electric energy of a single polarity for some applications and alternating positive and negative polarities for other applications. A plurality of the electric pulses are limited in amplitude by a substantially sinusoidal half-wave envelope and the positive and negative pulses are preferably of different amplitudes. The ground electrode is arranged about and upstream and downstream of the ionizing electrode to provide a highly effective electric field substantially normal to the gas flow. A heater heats the gas to increase ionization. An ultrasonic sound wave generator pulses the gas with sound waves prior to, during or after ionization of the gas to group the ions of a like charge in distinct pressure wave fronts or distinct areas so as to reduce recombination of ions thereby making more ions available per volume and also increasing the total energy of the ions produced. Multiple sound wave generators increase the energy of the base frequency or selected harmonics. An inlet passage to the generator of a selected length increases the energy. A discharge passage of a selected length reinforces and/or eliminates selected harmonics. A discharge nozzle with angularly inclined and outwardly enlarged venturis cool the heated ionized gas.

Abstract translation: 用于产生离子的方法和装置，其中离子发生器为某些应用产生单个极性的电能的周期性脉冲，并且对于其它应用产生交替的正极性和负极性。 多个电脉冲的幅度受到基本上正弦的半波包络的限制，正和负脉冲优选地具有不同的振幅。 接地电极布置在电离电极的周围和上游和下游，以提供基本上垂直于气体流动的高效电场。 加热器加热气体以增加电离。 超声波波发生器在气体离子化之前，之中或之后用声波脉冲气体，以将不同压力波前或不同区域中的类似电荷的离子组合，以便减少离子的复合，从而使更多的离子可用于每个 体积也增加产生的离子的总能量。 多个声波发生器增加了基频或所选谐波的能量。 到所选发生器的入口通道增加了能量。 所选长度的排放通道加强和/或消除所选择的谐波。 具有角度倾斜和向外扩大的venturis的排出喷嘴冷却加热的电离气体。