Light-adjusting-panel structure
    57.
    发明授权
    Light-adjusting-panel structure 有权
    调光板结构

    公开(公告)号:US09586461B2

    公开(公告)日:2017-03-07

    申请号:US14785463

    申请日:2014-04-16

    发明人: Yuichiro Okuda

    摘要: In a light-adjusting-panel structure, a light-adjusting sheet is bonded, using a first adhesive, to the back surface of a first transparent panel. In this light-adjusting-panel structure, the end section of the light-adjusting sheet is drawn out to a position closer to the end section of the first transparent panel than the end surface of the first adhesive, in a direction along the panel surface of the first transparent panel. Further, the light-adjusting-panel structure covers the drawn-out end section and the end surface of the first adhesive, the light-adjusting-panel structure being provided with a seal material having lower moisture permeability than the first adhesive.

    摘要翻译: 在调光板结构中,使用第一粘合剂将调光片粘合到第一透明面板的背面。 在该调光板结构中,调光片的端部沿着面板表面的方向被拉出到比第一粘合剂的端面更靠近第一透明面板的端部的位置 的第一透明面板。 此外,调光板结构覆盖第一粘合剂的拉出端部和端面,调光板结构具有比第一粘合剂低的透湿性的密封材料。

    SMART WINDOW FOR SEMICONDUCTOR PROCESSING TOOL
    59.
    发明申请
    SMART WINDOW FOR SEMICONDUCTOR PROCESSING TOOL 有权
    用于半导体加工工具的SMART WINDOW

    公开(公告)号:US20170010218A1

    公开(公告)日:2017-01-12

    申请号:US14795785

    申请日:2015-07-09

    摘要: Semiconductor processing tool smart window kits, and smart windows for semiconductor processing tools and semiconductor processing tool doors, are discussed herein. Some smart windows may include a smart film with an active area that is electronically controllable between an opaque state and a transparent state, and that may be configured to prevent light from passing through the smart window and entering into a semiconductor processing tool and/or semiconductor processing chamber when in the opaque state. Additional components, configurations, and/or systems of some kits and smart windows are further discussed herein, which may include an electrical contact cover that may be configured to electrically connect the smart film to a power source and a smart film controller that may be configured to cause a smart film to transition between the opaque and transparent states.

    摘要翻译: 本文讨论了半导体加工工具智能窗口套件以及用于半导体加工工具和半导体加工工具门的智能窗口。 一些智能窗口可以包括具有在不透明状态和透明状态之间可电子控制的有源区域的智能膜,并且可以被配置为防止光通过智能窗并进入半导体处理工具和/或半导体 处理室处于不透明状态。 本文进一步讨论了一些套件和智能窗口的附加组件,配置和/或系统,其中可包括可被配置为将智能膜电连接到电源的电接触盖和可配置的智能膜控制器 使智能电影在不透明状态和透明状态之间转换。