METHOD OF INSPECTING GAS SUPPLY SYSTEM
    51.
    发明申请

    公开(公告)号:US20180374727A1

    公开(公告)日:2018-12-27

    申请号:US16010530

    申请日:2018-06-18

    发明人: Risako MIYOSHI

    IPC分类号: H01L21/67 H01J37/32 G05D11/13

    摘要: In one embodiment, a vaporizer is connected to a chamber of a substrate processing apparatus through a gas supply line and a gas introduction port. An exhaust device is connected to the gas supply line. The substrate processing apparatus includes a pressure sensor that obtains a measurement value of a pressure of the gas supply line. A method according to the embodiment includes supplying a processing gas to the chamber from the vaporizer through the gas supply line, and monitoring a change of the measurement value obtained by the pressure sensor in a state in which supply of the processing gas to the gas supply line is stopped.

    Flow rate ratio control apparatus and program for flow rate ratio control apparatus

    公开(公告)号:US10146233B2

    公开(公告)日:2018-12-04

    申请号:US15091442

    申请日:2016-04-05

    IPC分类号: G05D11/13

    摘要: Provided is a flow rate ratio control device that even in change periods during which the actual flow rates of component gases change along with a change in the target total flow rate or target mixing ratio of mixed gas, can keep the actual total flow rate or actual mixing ratio of the mixed gas constant. Target flow rates set in flow rate control devices have continuous change periods during which target flow rate values continuously change from pre-change to post-change target flow rate values, respectively and correspondingly; and the time lengths of the continuous change periods are set to at least a followable time during which a flow rate control device of which a response speed to an actual component fluid flow rate is lowest allows the actual component fluid flow rate to substantially follow the target flow rate in the continuous change periods.

    Automatic machine tool coolant mixer

    公开(公告)号:US10120366B2

    公开(公告)日:2018-11-06

    申请号:US14848208

    申请日:2015-09-08

    摘要: A machine tool coolant supply system includes a chassis configured to mount the coolant supply system to a coolant storage tank of a machine tool. The coolant supply system further includes a concentrate tank arranged within the chassis, a first flow control valve coupled to the concentrate tank, a second flow control valve coupled to a water supply line, and a mixer configured to mix a concentrate with water. The mixer includes a first inlet coupled to the first flow control valve and configured to receive the concentrate from the concentrate tank via the first flow control valve, a second inlet coupled to the second flow control valve and configured to receive the water from the water supply line via the second flow control valve, and an outlet configured to dispense a mixture of the concentrate and the water into the coolant storage tank of the machine tool. The coolant supply system further includes a control line arranged in electrical communication with the first flow control valve and the second flow control valve, wherein the control line is configured to communicate control signals from a machine tool control system to actuate the first flow control valve and the second flow control valve to control a ratio of the concentrate and the water supplied to the mixer.

    Optimizing matrix acidizing operations

    公开(公告)号:US10047593B2

    公开(公告)日:2018-08-14

    申请号:US14719450

    申请日:2015-05-22

    摘要: In one possible implementation, fresh hydrochloric acid or (partially) spent hydrochloric acid can be pressurized by a pressure source. The pressurized acid from the acid source is injected into a wellbore during an acidizing operation. In addition, a carbon dioxide source may be provided. Acid from the acid source is combined with carbon dioxide from the carbon dioxide source, and the combined acid and carbon dioxide, pressurized by the pressure source, are injected into the wellbore during the acidizing operation. A processor located at the earth's surface or downhole may be provided. The processor can monitor the relative proportions of carbon dioxide and acid in the acid/carbon dioxide combination, as well as the pressure of the acid/carbon dioxide combination at an injection site in the wellbore. Acidizing operation management decisions can be made based on the monitored relative proportions and/or the monitored pressure.