PIEZORESISTIVE SENSOR MATERIAL AND PREPARATION METHOD AND USE THEREOF

    公开(公告)号:US20210143321A1

    公开(公告)日:2021-05-13

    申请号:US17094685

    申请日:2020-11-10

    摘要: The present disclosure provides a method for preparing a piezoresistive sensor material, including: preparing a wood fiber aerogel; conducting dopamine self-polymerization on the surface of the aerogel to obtain a wood fiber-based hydrogel; soaking the wood fiber-based hydrogel in a nano conductive phase suspension or a nano conductive phase precursor to form a conductive phase-loaded wood fiber-based hydrogel; subjecting the conductive phase-loaded wood fiber-based hydrogel to reaction with an aqueous solution including a polyelectrolyte monomer, a crosslinker, an initiator and a catalyst to form a conductive phase-wood fiber-based hydrogel composite; and complexing the composite with metal ions. The present disclosure further discloses a piezoresistive sensor including the sensor material, and a preparation method thereof. The sensor material prepared by the method of the present disclosure has excellent mechanical strength and ionic conductivity, and a sensor further prepared has extremely-high sensitivity.

    Wire clamp apparatus calibration method and wire bonding apparatus

    公开(公告)号:US11004822B2

    公开(公告)日:2021-05-11

    申请号:US16327340

    申请日:2017-08-23

    申请人: SHINKAWA LTD.

    摘要: This wire clamp apparatus calibration method comprises: a step for driving a driving piezoelectric element by applying a predetermined frequency that causes a pair of arm portions to vibrate in an opening/closing direction; a step for detecting whether or not end portions of the pair of arm portions collide with each other on the basis of an output current outputted from the driving piezoelectric element when the pair of arm portions are vibrating in the opening/closing direction; a step for calculating, on the basis of the detection result, reference voltages in a state where the pair of arm portions are closed; and a step for performing calibration of a drive voltage to be applied to the driving piezoelectric element on the basis of the reference voltages. Accordingly, accuracy improvement and stabilization in an opening/closing operation of the wire clamp apparatus can be achieved.

    PIEZOELECTRIC DEVICE
    56.
    发明申请

    公开(公告)号:US20210057634A1

    公开(公告)日:2021-02-25

    申请号:US16907400

    申请日:2020-06-22

    摘要: In a piezoelectric device, electrode layers are spaced apart from each other in the direction of the normal thereto. A first piezoelectric layer is interposed between two electrode layers of electrode layers in the direction of the normal. A second piezoelectric layer is provided on an opposite side of the first piezoelectric layer from a base portion. The second piezoelectric layer is interposed between two electrode layers of the electrode layers in the direction of the normal. The half-width of a rocking curve measured by X-ray diffraction for a lattice plane of the first piezoelectric layer substantially parallel to a first main surface is smaller than a half-width for the second piezoelectric layer. The piezoelectric constant of a material defining the first piezoelectric layer is smaller than the piezoelectric constant of a material defining the second piezoelectric layer.

    RESONATOR AND RESONANCE DEVICE
    59.
    发明申请

    公开(公告)号:US20210028763A1

    公开(公告)日:2021-01-28

    申请号:US17038519

    申请日:2020-09-30

    摘要: A resonator includes a vibration portion that has a substrate having a main surface, a lower electrode on the main surface of the substrate, a piezoelectric film on the lower electrode, and an upper electrode on the piezoelectric film. A frame surrounds at least part of the vibration portion. Opening grooves having different widths in a first direction in a plan view of the main surface are provided in a periphery of the vibration portion. In a plan view of the main surface, the upper electrode is provided so as to be spaced from an outer edge of the substrate by a gap which is along the first direction, such that a length of the gap in a region where a width of the opening groove is large is larger than a length of the gap in a region where a width of the opening groove is small.