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61.发明授权Interference tabs for avoiding snapdown of optical membrane and fabrication process 有权用于避免光学膜的拆卸和制造过程的干涉片公开(公告)号：US06765710B2
公开(公告)日：2004-07-20
申请号：US10016797
申请日：2001-12-10
IPC分类号： G02B2600
CPC分类号： B81B3/001 , G02B26/001 , G02B26/02
摘要： Tabs or stops are integrated into a membrane structure to prevent its snapdown. Features comprising two surfaces separated by a distance equal to the maximum desired range of movement are produced. When the two surfaces contact, the motion of the structure is arrested or greatly diminished by increasing its rigidity. For an electrostatically actuated MEMS structure, these features can be used to limit the range of motion such that pull-in or snapdown is avoided, greatly enhancing the reliability of the device. One key design feature is that the two contacting surfaces are maintained at the same electrical potential avoiding problems associated with electrostatic cavity discharge.
摘要翻译： 标签或止动件集成到膜结构中以防止其卡扣。 产生包括两个表面分开等于最大期望运动范围的距离的特征。 当两个表面接触时，结构的运动通过增加其刚度而被阻止或大大减小。 对于静电驱动的MEMS结构，这些特征可用于限制运动范围，从而避免拉入或跳跃，大大提高了设备的可靠性。 一个关键设计特征是两个接触表面保持在相同的电位，避免与静电腔排放相关的问题。
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公开(公告)号：US06671078B2
公开(公告)日：2003-12-30
申请号：US09863654
申请日：2001-05-23
IPC分类号： G02B2600
CPC分类号： B81B3/0021 , B81B2201/045 , G02B6/353 , G02B6/3552 , G02B6/3566 , G02B6/357 , G02B6/358 , G02B26/02
摘要： A zipper actuator for optical beam control has an optical port formed through the substrate. The cantilevered beam of the actuator preferably includes a paddle for switching the optical signal. Mirror structures can be provided on the paddle for beam switching. In some embodiments, MEMS or electrode latches are further provided.
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公开(公告)号：US06625372B1
公开(公告)日：2003-09-23
申请号：US09648348
申请日：2000-08-25
IPC分类号： G02B600
CPC分类号： G02B6/3656 , G02B6/32 , G02B6/327 , G02B6/3636 , G02B6/3644 , G02B6/3696 , G02B6/4201 , G02B6/4225 , G02B6/4226 , G02B6/4237 , G02B6/4238 , G02B6/4239 , G02B6/4249 , G02B6/4256 , G02B7/003 , G02B27/62
摘要： Mounting and alignment structures for optical components allow optical components to be connected to an optical bench and then subsequently aligned, i.e., either passively or actively, in a manufacturing or subsequent calibration or recalibration, alignment or realignment processes. The structures comprise quasi-extrusion portions. This portion is “quasi-extrusion” in the sense that it has a substantially constant cross section in a z-axis direction as would be yielded in an extrusion manufacturing process. The structures further comprise at least one base, having a laterally-extending base surface, and an optical component interface. At least one armature connects the optical component interface with the base. In the preferred embodiment, the base surface is securable to an optical bench.
摘要翻译： 用于光学部件的安装和对准结构允许光学部件连接到光学平台，然后在制造或随后的校准或重新校准，对准或重新对准过程中随后对准，即被动地或主动地对准。 该结构包括准挤压部分。 在挤出制造过程中将产生在z轴方向上具有基本恒定的横截面的意义上，该部分是“准挤压”。 所述结构还包括至少一个具有横向延伸的基面的基座和光学部件接口。 至少一个电枢将光学部件接口与基座连接。 在优选实施例中，基座表面可固定到光学平台。
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公开(公告)号：US06424466B1
公开(公告)日：2002-07-23
申请号：US09847685
申请日：2001-05-02
申请人： Dale C. Flanders
发明人： Dale C. Flanders
IPC分类号： G02B2700
CPC分类号： G01J3/26
摘要： A multi-cavity micro-optical Fabry-Perot filter uses electrostatically deflected MEMS membranes. The filter comprises a first electrostatically deflectable membrane device. A curved mirror structure is formed on its optical membrane. Similarly, a second electro-statically deflectable membrane device is provided, which has a second curved mirror structure on the membrane. The spacer is used to separate the first membrane device from the second membrane device. The spacer supports a mirror between the first and second curved mirror structures. Wafer-level and device level assembly techniques are also described.
摘要翻译： 多腔微光法布里 - 珀罗滤光片使用静电偏转的MEMS膜。 该过滤器包括第一静电偏转膜装置。 在其光学膜上形成弯曲的镜子结构。 类似地，提供了第二静电可偏转膜装置，其在膜上具有第二弯曲镜结构。 间隔物用于将第一膜装置与第二膜装置分开。 间隔件在第一和第二弯曲镜结构之间支撑反射镜。 还描述了晶片级和器件级组装技术。
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65.发明授权Tunable laser with polarization anisotropic amplifier for fabry-perot filter reflection isolation 有权具有极化各向异性放大器的可调谐激光器，用于fabry-perot滤光镜反射隔离公开(公告)号：US06339603B1
公开(公告)日：2002-01-15
申请号：US09696055
申请日：2000-10-25
IPC分类号： H01S310
CPC分类号： H01S5/141 , H01S5/02248 , H01S5/0264 , H01S5/0617 , H01S5/0687 , H01S5/142
摘要： A semiconductor tunable laser system includes a tunable Fabry-Perot cavity and a cavity length modulator, which controls an optical length of the cavity at least over a distance corresponding to the spacings between the longitudinal modes of the laser cavity. Thus, the tunable Fabry-Perot cavity allows the laser cavity to have gain at the desired wavelength of operation while the cavity length modulator tunes the cavity length such that a longitudinal cavity mode exists at the desired wavelength of operation. Also, in one embodiment, a wavelength locker system is further provides that has a differential wavelength filter, e.g., stepped etalon, and a multi-element detector, e.g., a quad-detector. The controller then modulators the Fabry-Perot cavity to control the wavelength in response to the signal received from the multi-element detector.
摘要翻译： 半导体可调谐激光器系统包括可调谐的法布里 - 珀罗腔和空腔长度调制器，其控制空腔的光学长度至少在与激光腔的纵向模式之间的间隔相对应的距离上。 因此，可调谐法布里 - 珀罗腔允许激光腔在所需的操作波长下具有增益，而空腔长度调制器调谐腔长度，使得在期望的操作波长处存在纵向腔模式。 而且，在一个实施例中，还提供波长锁存器系统，其具有差分波长滤波器，例如阶梯式标准具，以及多元件检测器，例如四检测器。 然后，控制器调制法布里 - 珀罗腔，以响应于从多元件检测器接收到的信号来控制波长。
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66.发明授权Process for integrating dielectric optical coatings into micro-electromechanical devices 有权将介电光学涂层集成到微机电装置中的工艺公开(公告)号：US06271052B1
公开(公告)日：2001-08-07
申请号：US09692639
申请日：2000-10-19
IPC分类号： H01L2100
CPC分类号： B81B3/0083 , B81B2201/042 , B81C1/00476 , B81C1/00666 , B81C2201/0109 , B81C2201/053 , G02B26/001
摘要： A process for fabricating an optical membrane from polycrystalline silicon comprises first forming a sacrificial layer on a handle wafer. Concavities are etched into the sacrificial layer. Polycrystalline silicon membrane layer is then formed on the sacrificial layer. The polycrystalline membrane layer is subsequently polished to achieve the predetermined membrane thickness and surface smoothness, annealed, and then patterned. Finally, the sacrificial layer is removed to release the membrane. The concavities in the sacrificial layer yield convexities in the polysilicon layer to prevent stiction adhesion to the handle wafer. During processing, a mask used to pattern the membrane layer functions to protect an highly reflecting (HR) coating for the membrane.
摘要翻译： 从多晶硅制造光学膜的方法包括首先在处理晶片上形成牺牲层。 凹陷蚀刻到牺牲层中。 然后在牺牲层上形成多晶硅膜层。 随后抛光多晶膜层以实现预定的膜厚度和表面光滑度，退火，然后图案化。 最后，去除牺牲层以释放膜。 牺牲层中的凹部产生多晶硅层中的凸起以防止对手柄晶片的粘附。 在加工过程中，用于图案膜层的掩模起到保护膜的高反射（HR）涂层的作用。
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公开(公告)号：US4722092A
公开(公告)日：1988-01-26
申请号：US696648
申请日：1985-01-30
IPC分类号： H01S5/042 , H01S5/12 , H01S5/187 , H01S5/227 , H01L21/208
CPC分类号： H01S5/187 , H01S5/1228 , H01S5/227 , H01S5/0425 , H01S5/2275
摘要： A distributed feedback (DFB) type laser and a method and apparatus for forming same wherein a quaternary semiconductor active lasing strip of material is buried between a substrate of binary compound of one type conductivity material and a mesa binary compound body of opposite type conductivity and a periodic grating structure is etched into the plateau of the mesa. In one embodiment, ohmic contacts are provided on either side of the grating structure and the mesa is undercut adjacent the active strip to partly isolate the ohmic contacts from the homojunction formed when the active strip is buried, preferably using a mass-transport process. In another embodiment, the ohmic contacts are formed on the top of a deeply etched grating structure. A buried layer double heterostructure (DH) laser is also described with DFB grating formed on the side wallsGOVERNMENT SUPPORTThe Government has rights in this invention pursuant to Contract No. F19628-85C-0002, awarded by the Department of the Air Force.
摘要翻译： 一种分布式反馈（DFB）型激光器及其形成方法和装置，其中材料的四分半导体有源激光条被掩埋在一种导电材料的二元化合物的衬底和具有相反导电性的台面二元化合物体之间， 周期性光栅结构被蚀刻到台面的平台中。 在一个实施例中，欧姆接触提供在光栅结构的任一侧上，并且台面在有源条附近被切削，以部分地将欧姆接触与当有源带被埋入时形成的均质结合部分地隔离，优选使用质量传输过程。 在另一个实施例中，欧姆接触形成在深蚀刻的光栅结构的顶部。 还描述了掩埋层双异质结构（DH）激光器，其中形成在层的侧壁上的DFB光栅。 另外，描述了具有DFB的表面发射二极管激光器。
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公开(公告)号：US4618261A
公开(公告)日：1986-10-21
申请号：US570918
申请日：1984-01-16
CPC分类号： G03F9/7026 , G01B11/14 , G03F9/7049
摘要： A lens or fiberoptic cable focuses energy from a collimated helium neon laser beam upon a point on a mask. Some of the focused energy is reflected from the mask upon a photodetector array in an image plane, and some of this energy is reflected from a substrate closely adjacent to the mask after passing through the mask upon the photodetector array to produce an interference pattern that is sensed and characterized by a spatial frequency representative of the distance between the mask and substrate.
摘要翻译： 透镜或光纤电缆将来自准直的氦氖激光束的能量聚焦在掩模上的点上。 一些聚焦能量从掩模在图像平面中的光电检测器阵列上被反射，并且这些能量中的一些在通过光电检测器阵列上的掩模之后从与掩模紧密相邻的基板反射，以产生干涉图案， 感测并表征为代表掩模和衬底之间的距离的空间频率。
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69.发明授权Swept frequency laser for FD OCT with intracavity element and method of operation 有权扫频激光器用于具有腔内元件的FD OCT和操作方法公开(公告)号：US09337619B2
公开(公告)日：2016-05-10
申请号：US13271388
申请日：2011-10-12
申请人： Walid Atia , Mark E. Kuznetsov , Dale C. Flanders
发明人： Walid Atia , Mark E. Kuznetsov , Dale C. Flanders
IPC分类号： G01N21/47 , H01S5/14 , H01S5/022 , H01S5/0683 , H01S5/0687
CPC分类号： H01S5/141 , G01N21/4795 , H01S5/02284 , H01S5/0683 , H01S5/0687
摘要： A frequency swept laser source that generates an optical signal that is tuned over a spectral scan band at single discrete wavelengths associated with longitudinal modes of the swept laser source. Laser hopping over discrete single cavity modes allows long laser coherence length even under dynamic very high speed tuning conditions. A ramp drive to the laser is used to linearize laser frequency tuning. A beam splitter is used to divide the optical signal between a reference arm leading to a reference reflector and a sample arm leading to a sample. A detector system detects the optical signal from the reference arm and the sample arm for generating depth profiles and images of the sample.
摘要翻译： 频率扫描激光源，其产生在与扫描的激光源的纵向模式相关联的单独离散波长下在光谱扫描带上调谐的光信号。 在离散单腔模式下的激光跳跃即使在动态非常高速的调谐条件下也能实现长激光相干长度。 激光器的斜坡驱动用于线性化激光频率调谐。 分束器用于将通向参考反射器的参考臂和通向样品的样品臂之间的光信号分开。 检测器系统检测来自参考臂和样品臂的光信号，用于产生样品的深度分布和图像。
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70.发明授权公开(公告)号：US09036235B2
公开(公告)日：2015-05-19
申请号：US13467787
申请日：2012-05-09
CPC分类号： G02B26/001 , G02B26/0825
摘要： An optical membrane device comprises a substrate, at least one support block on a surface of the substrate, and at least one plate. A torsion beam supports the plate above the substrate on the support block. The optical membrane device also includes an optical membrane structure supported by the plate above the substrate and at least one electrode on the substrate underneath the plate. In one implementation, the optical membrane device further comprises a tether for coupling the optical membrane structure to the plate. The tether extends between the optical membrane structure and the plate. In another implementation, the substrate of the optical membrane device has an optical port through the substrate directly below the optical membrane structure. The plate is substantially balanced around the torsion beam to minimize a sensitivity to orientation in a gravitational field.
摘要翻译： 光学膜装置包括基底，在基底表面上的至少一个支撑块和至少一个板。 扭力梁将支撑块上的基板上方的板支撑。 光学膜装置还包括由基板上方的板支撑的光学膜结构和在板下方的基板上的至少一个电极。 在一个实施方式中，光学膜装置还包括用于将光学膜结构耦合到板的系绳。 系绳在光学膜结构和板之间延伸。 在另一实施方式中，光学膜装置的基板具有通过光学膜结构正下方的基板的光学端口。 该板在扭转梁周围基本平衡，以最小化对重力场中的取向的敏感性。
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