摘要:
A chemical vapor deposition system that includes a housing configured to form a processing chamber, a substrate holder configured to hold a substrate within the processing chamber, a gas distribution system configured to introduce gases into the processing chamber, a plasma generation system configured to form a plasma within the processing chamber, a processor operatively coupled to control the gas distribution system and the plasma generation system, and a computer-readable memory coupled to the processor that stores a computer-readable program which directs the operation of the chemical vapor deposition system. In one embodiment the computer-readable program comprises instructions that control the gas distribution system to flow a process gas comprising silicon, oxygen and a halogen family member into the chamber to deposit a halogen-doped silicon oxide film on a substrate positioned on the substrate holder and instructions that control the gas distribution system and plasma generation system to densify the halogen-doped silicon oxide film by bombarding the film with ionic species from a plasma of an argon-containing gas source. In another embodiment, the computer-readable program comprises instructions that control the gas distribution system to flow a process gas comprising silicon, oxygen and a halogen family member into the chamber to deposit a halogen-doped silicon oxide film on said substrate and instructions that control the gas distribution system and plasma generation system to form a plasma from a hydrogen containing source gas to bombard the halogen-doped silicon oxide film with hydrogen ions to remove loosely bound halogen atoms from the film.
摘要:
A nonvolatile memory device includes multiple independent nonvolatile memory arrays that concurrently for parallel reading and writing the nonvolatile memory arrays. A serial interface communicates commands, address, device status, and data between a master device and nonvolatile memory arrays for concurrently reading and writing of the nonvolatile memory arrays and sub-arrays. Data is transferred on the serial interface at the rising edge and the falling edge of the synchronizing clock. The serial interface transmits a command code and an address code from a master device and transfers a data code between the master device and the nonvolatile memory device, wherein the data code has a length that is determined by the command code and a location determined by the address code. An enable signal defines a beginning and termination of a reading or writing operation. Reading one nonvolatile memory array may be interrupted for another operation and then resumed.
摘要:
A flat-cell ROM array includes a bank of field effect transistors, each having a source, drain and gate, formed by ion implantation between columns of buried N+ and under rows of polysilicon, wherein adjacent columns of buried N+ are the source and drain of at least one transistor and a corresponding row of polysilicon is the gate of the transistor. Each of these transistors is programmed to have one of a plurality of threshold voltages depending on a desired storage value. Attached to the bank of transistors is an upper selector network associated with the bank connected to a first class of alternating sets of the columns, and a lower selector network associated with the bank connected to a second class of alternating sets of the columns. A method provides steps for performing the present invention.
摘要:
A tapered roller bearing has a porous rib ring against which the large ends of its wrought steel tapered rollers bear so that the ring prevents the rollers from being expelled. The rib ring is formed from porous powdered steel that has been compacted to a density of about 70% to 85% of theoretical and then sintered and machined. Thereafter, the machined rib ring is etched to expose the pores at the surface against which the large ends of the rollers bear. Finally, the rib ring is impregnated with oil. Should the bearing lose its normal supply of lubrication, the critical region of contact between the abutment face on the rib ring and the large ends of the rollers will nevertheless be adequately lubricated for a reasonable time by lubricant which escapes from the pores of the rib ring. The cage of the bearing may be piloted by the rib ring and by a ring-like cup insert that is formed in the same manner as the rib ring.
摘要:
A nonvolatile memory device includes multiple independent nonvolatile memory arrays that concurrently for parallel reading and writing the nonvolatile memory arrays. A parallel interface communicates commands, address, device status, and data between a master device and nonvolatile memory arrays for concurrently reading and writing of the nonvolatile memory arrays and sub-arrays. Data is transferred on the parallel interface at the rising edge and the falling edge of the synchronizing clock. The parallel interface transmits a command code and an address code from a master device and transfers a data code between the master device and the nonvolatile memory device, wherein the data code has a length that is determined by the command code and a location determined by the address code. Reading one nonvolatile memory array may be interrupted for reading another. One reading operation has two sub-addresses with one transferred prior to a command.
摘要:
A nonvolatile memory device includes multiple independent nonvolatile memory arrays that concurrently for parallel reading and writing the nonvolatile memory arrays. A parallel interface communicates commands, address, device status, and data between a master device and nonvolatile memory arrays for concurrently reading and writing of the nonvolatile memory arrays and sub-arrays. Data is transferred on the parallel interface at the rising edge and the falling edge of the synchronizing clock. The parallel interface transmits a command code and an address code from a master device and transfers a data code between the master device and the nonvolatile memory device, wherein the data code has a length that is determined by the command code and a location determined by the address code. Reading one nonvolatile memory array may be interrupted for reading another. One reading operation has two sub-addresses with one transferred prior to a command.
摘要:
A combination volatile and nonvolatile memory integrated circuit has at least one volatile memory array placed on the substrate and multiple nonvolatile memory arrays. The volatile and nonvolatile memory arrays have address space associated with each other such that each array may be addressed with common addressing signals. The combination volatile and nonvolatile memory integrated circuit further has a memory control circuit in communication with external circuitry to receive address, command, and data signals. The memory control circuit interprets the address, command, and data signals, and for transfer to the volatile memory array and the nonvolatile memory arrays for reading, writing, programming, and erasing the volatile and nonvolatile memory arrays. The volatile memory array is may be a SRAM, a pseudo SRAM, or a DRAM. Any of the nonvolatile memory arrays maybe masked programmed ROM arrays, NAND configured flash memory NAND configured EEPROM.
摘要:
In this invention a process for a flash memory cell and an architecture for using the flash memory cell is disclosed to provide a nonvolatile memory having a high storage density. Adjacent columns of cells share the same source and the source line connecting these sources runs vertically in the memory layout, connecting to the sources of adjacent columns memory cells. Bit lines connect to drains of cells in adjacent columns and are laid out vertically, alternating with source lines in an every other column scheme. Wordlines made of a second layer of polysilicon form control gates of the flash memory cells and are continuous over the full width of a memory partition. Programming is done in a vertical page using hot electrons to inject charge onto the floating gates. the cells are erased using Fowler-Nordheim tunneling of electrons from the floating gate to the control gate by way of inter polysilicon oxide formed on the walls of the floating gates.
摘要:
In this invention a process for a flash memory cell and an architecture for using the flash memory cell is disclosed to provide a nonvolatile memory having a high storage density. Adjacent columns of cells share the same source and the source line connecting these sources runs vertically in the memory layout, connecting to the sources of adjacent columns memory cells. Bit lines connect to drains of cells in adjacent columns and are laid out vertically, alternating with source lines in an every other column scheme. Wordlines made of a second layer of polysilicon form control gates of the flash memory cells and are continuous over the full width of a memory partition. Programming is done in a vertical page using hot electrons to inject charge onto the floating gates. The cells are crased using Fowler-Nordheim tunneling of electrons from the floating gate to the control gate by way of inter polysilicon oxide formed on the walls of the floating gates.
摘要:
A multiple time programmable (MTP) memory device is achieved. The device comprises, first, a memory cell array including a means of electrical erasability and electrical programmability. The memory cell array comprises, preferably, a Flash memory cell array. A package has an external pin configuration that conforms to the JEDEC standard for an EPROM device wherein an external, positive programming voltage (VPP) pin is provided. Finally, an external, negative erasing voltage (VNN) pin is provided. The VNN pin is, preferably, multiplexed with the chip enable bar (CEB) pin.