Polishing apparatus and exception handling method thereof
    61.
    发明授权
    Polishing apparatus and exception handling method thereof 有权
    抛光装置及其异常处理方法

    公开(公告)号:US08858817B2

    公开(公告)日:2014-10-14

    申请号:US13176674

    申请日:2011-07-05

    申请人: Li Jiang Mingqi Li

    发明人: Li Jiang Mingqi Li

    摘要: A polishing apparatus and exception handling method thereof is disclosed, the exception handling method of polishing apparatus includes: sending an alarm signal when an alarm is generated because of an exception during polishing; and processing a wafer in the polishing apparatus with organic acid solution according to the received alarm signal. The method and apparatus prevent the metal material from corrosion which causes device failure, when there is an alarm generated because of an exception which stops the apparatus during polishing.

    摘要翻译: 公开了一种研磨装置及其例外处理方法,抛光装置的异常处理方法包括:在抛光时由于异常而产生报警时发送报警信号; 并根据所接收的报警信号,在有机酸溶液中处理抛光装置中的晶片。 当由于在抛光期间停止装置的异常而产生报警时,该方法和装置防止金属材料腐蚀,导致装置故障。

    Semiconductor device having metal alloy gate and method for manufacturing the same
    63.
    发明授权
    Semiconductor device having metal alloy gate and method for manufacturing the same 有权
    具有金属合金栅极的半导体器件及其制造方法

    公开(公告)号:US08815728B2

    公开(公告)日:2014-08-26

    申请号:US13486994

    申请日:2012-06-01

    IPC分类号: H01L21/3205

    摘要: A semiconductor device and a method for manufacturing the semiconductor device are provided. The semiconductor device uses an aluminum alloy, rather than aluminum, for a metal gate. Therefore, the surface of the high-k metal gate after the CMP is aluminum alloy rather than pure aluminum, which can greatly reduce defects, such as corrosion, pits and damage, in the metal gate and improve reliability of the semiconductor device.

    摘要翻译: 提供半导体器件和制造半导体器件的方法。 半导体器件使用铝合金而不是铝合金作为金属栅极。 因此,CMP后的高k金属栅极的表面是铝合金而不是纯铝,这可以大大减少金属栅极中的腐蚀,凹坑和损伤等缺陷,提高半导体器件的可靠性。

    Electronic device and method for controlling probe measurements
    64.
    发明授权
    Electronic device and method for controlling probe measurements 失效
    用于控制探头测量的电子设备和方法

    公开(公告)号:US08630826B2

    公开(公告)日:2014-01-14

    申请号:US13245879

    申请日:2011-09-27

    IPC分类号: G06F7/60 G06F17/10

    CPC分类号: G01B21/047

    摘要: A method controls probe measurement using an electronic device. The method receives user-defined identification data of a probe if a preset configuration file is not stored in a storage device of the electronic device, and fits a three dimensional (3D) model of the probe according to the user-defined identification data of the probe. The method further updates the user-defined identification data of the probe if the fitted 3D model does not match the probe, or stores the user-defined identification data of the probe in a user-defined configuration file if the fitted 3D model matches the probe, and controls the probe to execute measurement according to the user-defined configuration file.

    摘要翻译: 一种方法使用电子设备控制探针测量。 如果预设的配置文件未被存储在电子设备的存储设备中,则该方法接收用户定义的探测器的识别数据,并且根据用户定义的识别数据符合探测器的三维(3D)模型 探测。 如果拟合的3D模型与探针不匹配,则该方法进一步更新探测器的用户定义的识别数据,或者如果拟合的3D模型匹配探针则将探测器的用户定义的识别数据存储在用户定义的配置文件中 并根据用户定义的配置文件控制探头执行测量。

    Electro-chemical sensor
    65.
    发明授权
    Electro-chemical sensor 失效
    电化学传感器

    公开(公告)号:US08613843B2

    公开(公告)日:2013-12-24

    申请号:US11628823

    申请日:2005-06-03

    IPC分类号: G01N27/407

    CPC分类号: G01N33/0047 E21B49/10

    摘要: An electro-chemical sensor for methane is described having a catalyst to react methane or other low molecular weight hydrocarbons and a detector to detect the turnover or reaction rate and using such information to determine the concentration of the methane or other low molecular weight species. The sensor is preferably used for measurements in a wellbore.

    摘要翻译: 描述了一种用于甲烷的电化学传感器,其具有用于反应甲烷或其它低分子量烃的催化剂和检测器以检测周转或反应速率,并使用这些信息来确定甲烷或其它低分子量物质的浓度。 该传感器优选用于井眼中的测量。

    Polishing method and method for forming a gate
    66.
    发明授权
    Polishing method and method for forming a gate 有权
    抛光方法及形成栅极的方法

    公开(公告)号:US08541308B2

    公开(公告)日:2013-09-24

    申请号:US13244196

    申请日:2011-09-23

    申请人: Li Jiang Mingqi Li

    发明人: Li Jiang Mingqi Li

    IPC分类号: H01L21/461 H01L21/302

    摘要: A polishing method and a method for forming a gate are provided. The method includes forming a dummy gate on a semiconductor substrate including a sacrificial oxide layer and a polysilicon layer which covers the sacrificial oxide layer, forming spacers around the dummy gate, and successively forming a silicon nitride layer and a dielectric layer covering the silicon nitride layer. The method further includes polishing the dielectric layer until the silicon nitride layer is exposed, polishing the silicon nitride layer on a fixed abrasive pad until the polysilicon layer is exposed by using a polishing slurry with a PH value ranging from 10.5 to 11 and comprising an anionic surfactant or a zwitterionic surfactant. Additionally, the method includes forming an opening after removing the dummy gate, and forming a gate in the opening. The method eliminates potential erosion and dishing caused in the polishing of the silicon nitride layer.

    摘要翻译: 提供了一种用于形成栅极的抛光方法和方法。 该方法包括在包括牺牲氧化物层和覆盖牺牲氧化物层的多晶硅层的半导体衬底上形成伪栅极,在虚拟栅极周围形成间隔物,并且依次形成氮化硅层和覆盖氮化硅层的电介质层 。 该方法还包括抛光电介质层,直到暴露氮化硅层,在固定的研磨垫上抛光氮化硅层,直到通过使用pH值范围为10.5至11的抛光浆料暴露多晶硅层,并且包含阴离子 表面活性剂或两性离子表面活性剂。 此外,该方法包括在去除虚拟门之后形成开口,并在开口中形成栅极。 该方法消除了在氮化硅层的抛光中引起的潜在的腐蚀和凹陷。

    Method for forming metal gate and MOS transistor
    67.
    发明授权
    Method for forming metal gate and MOS transistor 有权
    金属栅极和MOS晶体管的形成方法

    公开(公告)号:US08507336B2

    公开(公告)日:2013-08-13

    申请号:US13176678

    申请日:2011-07-05

    申请人: Li Jiang Mingqi Li

    发明人: Li Jiang Mingqi Li

    IPC分类号: H01L21/336 H01L21/28

    摘要: The invention provides a method for forming a metal gate and a method for forming a MOS transistor. The method for forming a metal gate includes: providing a substrate; forming a sacrificial oxide layer and a polysilicon gate on the substrate; forming a silicon oxide layer on sidewalls of the sacrificial oxide layer and the polysilicon gate; forming a stop layer that covers the substrate; removing a part of the stop layer in the spacers; forming a second interlayer dielectric layer that covers the first interlayer dielectric layer, the spacers and the polysilicon gate; polishing the second interlayer dielectric layer to expose the spacers and the polysilicon gate; removing the polysilicon gate to form a trench; removing the sacrificial oxide layer in the trench; and forming a metal gate in the trench. The invention prevents from recesses and therefore metal bridge and metal residuals in the recesses.

    摘要翻译: 本发明提供一种用于形成金属栅极的方法和用于形成MOS晶体管的方法。 形成金属栅极的方法包括:提供基板; 在所述基板上形成牺牲氧化物层和多晶硅栅极; 在所述牺牲氧化物层和所述多晶硅栅极的侧壁上形成氧化硅层; 形成覆盖所述基板的停止层; 去除隔离物中的一部分停止层; 形成覆盖所述第一层间电介质层,所述间隔物和所述多晶硅栅极的第二层间电介质层; 抛光所述第二层间电介质层以暴露所述间隔物和所述多晶硅栅极; 去除多晶硅栅极以形成沟槽; 去除沟槽中的牺牲氧化物层; 并在沟槽中形成金属栅极。 本发明防止了凹槽中的金属桥和凹陷中的金属残留物。

    OUTLET MECHANISM WITH PULSING AND ROTATING WATER EFFECT AND A WATER PROCESSOR WITH PULSING AND ROTATING WATER EFFECT
    68.
    发明申请
    OUTLET MECHANISM WITH PULSING AND ROTATING WATER EFFECT AND A WATER PROCESSOR WITH PULSING AND ROTATING WATER EFFECT 审中-公开
    具有脉冲和旋转水效应的出口机构和具有脉冲和旋转水效应的水处理器

    公开(公告)号:US20130193234A1

    公开(公告)日:2013-08-01

    申请号:US13824379

    申请日:2011-09-22

    IPC分类号: B05B1/34

    摘要: The present invention is provided with an outlet mechanism with pulsing and rotating water effect, wherein comprising a body and a water processor, the body is disposed with an inlet end and an outlet end, a waterway connected to the inlet end and the outlet end is disposed inside the body, the waterway is disposed with a first cavity, the first cavity is disposed with an inlet hole connected to the inlet end, the section area of the inlet hole is smaller than the discharge area of the first cavity; the water processor is disposed with a corkscrew waterway, which is connected to the inlet end and the outlet end. The outlet mechanism is with simple structure, and it needs less components to be fitting to industrial production.

    摘要翻译: 本发明提供了具有脉动和旋转水效应的出口机构,其中包括主体和水处理器,主体设置有入口端和出口端,连接到入口端和出口端的水道是 所述水路设置在所述主体内,所述水路配置有第一空腔,所述第一空腔配置有与所述入口端连接的入口孔,所述入口孔的截面面积小于所述第一空腔的排出面积; 水处理器设置有螺塞水道,其连接到入口端和出口端。 出口机构结构简单,需要较少的部件适应工业生产。

    FUEL GOVERNOR FOR CONTROLLED AUTOIGNITION ENGINES
    69.
    发明申请
    FUEL GOVERNOR FOR CONTROLLED AUTOIGNITION ENGINES 有权
    用于控制自动引擎的燃油总监

    公开(公告)号:US20130090837A1

    公开(公告)日:2013-04-11

    申请号:US13621425

    申请日:2012-09-17

    IPC分类号: F02D41/32

    摘要: Methods and systems for controlling combustion performance of an engine are provided. A desired fuel quantity for a first combustion cycle is determined. One or more engine actuator settings are identified that would be required during a subsequent combustion cycle to cause the engine to approach a target combustion phasing. If the identified actuator settings are within a defined acceptable operating range, the desired fuel quantity is injected during the first combustion cycle. If not, an attenuated fuel quantity is determined and the attenuated fuel quantity is injected during the first combustion cycle.

    摘要翻译: 提供了用于控制发动机的燃烧性能的方法和系统。 确定用于第一燃烧循环的期望燃料量。 识别在随后的燃烧循环期间需要一个或多个发动机执行器设置,以使发动机接近目标燃烧定相。 如果所识别的致动器设定在规定的可接受工作范围内,则在第一燃烧循环期间喷射所需燃料量。 如果不是,则确定减燃燃料量,并且在第一燃烧循环期间喷射减毒燃料量。

    System and method for measuring a border of an image of an object
    70.
    发明授权
    System and method for measuring a border of an image of an object 失效
    用于测量物体的图像的边界的系统和方法

    公开(公告)号:US08390731B2

    公开(公告)日:2013-03-05

    申请号:US13587874

    申请日:2012-08-16

    IPC分类号: G03B13/36

    摘要: A system and method for measuring a border of an image of an object includes setting measurement parameters, selecting a start point, an end point, and a image capture direction, and marking isS=true, moving a CCD lens to a current point, capturing an image by the CCD lens, and obtaining sequential border points of the image. The method further includes determining if the sequential border points are fuzzy, performing an automatic focus function if the sequential border points are fuzzy, or further determining the border of the object has been completely captured if the sequential border points are clear, calculating accurate border points if the border of the object has not been completely captured, and determining a new start point to capture the next image of the object.

    摘要翻译: 用于测量对象的图像的边界的系统和方法包括设置测量参数,选择起始点,终点和图像捕获方向,并且标记isS = true,将CCD透镜移动到当前点,捕获 通过CCD透镜的图像,并获得图像的顺序边界点。 该方法还包括确定顺序边界点是否模糊,如果顺序边界点模糊,则执行自动对焦功能,或者如果顺序边界点清晰,则进一步确定对象的边界已被完全捕获,计算准确的边界点 如果对象的边框尚未完全捕获,并且确定新的起始点以捕获对象的下一个图像。