摘要:
The disclosed device, which, using an electron microscope or the like, minutely observes defects detected by an optical appearance-inspecting device or an optical defect-inspecting device, can reliably insert a defect to be observed into the field of an electron microscope or the like, and can be a device of a smaller scale. The electron microscope (5), which observes defects detected by an optical appearance-inspecting device or by an optical defect-inspecting device, has a configuration wherein an optimal microscope (14) that re-detects defects is incorporated, and a spatial filter and a distribution polarization element are inserted at the pupil plane when making dark-field observations using this optical microscope (14). The electron microscope (5), which observes defects detected by an optical appearance-inspecting device or an optical defect-inspecting device, has a configuration wherein an optimal microscope (14) that re-detects defects is incorporated, and a distribution filter is inserted at the pupil plane when making dark-field observations using this optical microscope (14).
摘要:
A manufacturing method of aseptic packaged food, including filling with food a connected container body 1 in which a plurality of containers are connected with each other; moving the connected container body 1 in the connecting direction of the container part 2 by pushing the connected container body 1 in a connecting direction of the container part 2; performing a predetermined food process to the connected container body 1; sealing the connected container body 1 using a sealing material; and making as a aseptic packaged food 1a by dividing the connected container body 1 into each container part 2.
摘要:
An operation verifying apparatus of a first embodiment acquires a log indicating the content of a sequence of operations performed on a predetermined device, identifies corresponding functions from the log, and automatically generates a program based on the identified functions. Input data, which is to serve as an argument of each of these functions, is set. Execution sets as well as test scenarios are each structured by combining a program and input data. Then each execution set is continuously executed. As a result, an operation test using a test program is executed.
摘要:
Disclosed is a food sterilization method capable of heat-sterilizing foods uniformly by heating steam irrespectively with a shape of an apparatus. The food sterilization method includes introducing the food into the inside of the heat-sterilizing chamber through the opening of the opening and closing part; discharging the air in the inside of the heat-sterilizing chamber through the air discharging part, close contacting the sealing cover and the heat-sterilizing chamber by absorption force of the air to seal the inside of the heat-sterilizing chamber, and then reducing a pressure in the inside of the heat-sterilizing chamber; closing the air discharging part, supplying the steam from the steam supplying part to the inside of the heat-sterilizing chamber to close contact the sealing cover and the opening of the opening and closing part by a pressure of the steam and thereby seal the opening and closing part and the inside of the heat-sterilizing chamber, and then heat-sterilizing the food introduced into the inside of the heat-sterilizing chamber by the steam supplied from the steam supplying part and at the same time, discharging some of the steam in the inside of the heat-sterilizing chamber through the steam discharging part during the heat-sterilization; closing the steam supplying part, and discharging the steam in the inside of the heat-sterilizing chamber through the steam discharging part; and taking the food out of the heat-sterilizing chamber through the opening of the opening and closing part.
摘要:
A method of measuring a pattern shape of performing a shape measurement of a semiconductor pattern at a high accuracy even when a process margin is narrow with respect to miniaturization of a semiconductor device is provided. In the method of measuring a pattern shape, when a best-match calculated waveform cannot be selected, at least one parameter among shape parameters is set as a fixed value based on information obtained by another measurement apparatus that uses a measurement method independent to the pattern shape measurement, a matching of a library and a detected waveform is performed again, a best-match calculated waveform is selected, and shape information of an object pattern is obtained from the best-match calculated waveform.
摘要:
The present invention provides a liquid crystal display device which reduces the occurrence of a squeal. A liquid crystal display device includes a liquid crystal display panel and a backlight arranged on a back surface of the liquid crystal display panel, wherein the backlight includes a base, a plurality of rod-shaped light sources arranged between the liquid crystal display panel and the base, electrode fittings for supporting electrode portions of the respective rod-shaped light sources, connection portions allowing the plurality of electrode fittings to be connected thereto and extending in the direction orthogonal to the longitudinal direction of the rod-shaped light sources, pushing members for pushing the connection portions toward a base side, and friction sound reducing members arranged between the connection portions and the pushing members and/or between the connection portions and the base side.
摘要:
An apparatus and method for detecting defects on a specimen includes an illumination optical unit which obliquely projects a laser focused onto a line on a surface of the specimen, a table unit which mounts the specimen and which is movable, a detection optical unit which detects with an image sensor an image of light formed by light reflected from the specimen and passed through a filter which blocks diffraction light resulting from patterns formed on the specimen, a signal processor which processes a signal outputted from the image sensor of the detection optical unit to extract defects of the specimen, and a display unit which displays information of defects extracted by the signal processor. The filter is adjustable.
摘要:
The present invention prevents the corrosion of a printed circuit board which is connected to a lower side of a display panel in a liquid crystal display panel. In a display device which includes a display panel and a frame member which supports an outer peripheral portion of a display screen of a display panel, a water absorbing member is adhered to a surface of the frame member which faces the display panel in an opposed manner.
摘要:
The present invention provides an apparatus and a method for reviewing a defect with high throughput by detecting the defect to be reviewed with high sensitivity, comprising: an optical microscope; a correction means; and a scanning electron microscope which reviews the defect existed on the sample; wherein the optical microscope has: an optical height detection system which optically detects a vertical position of an upper surface of the sample placed on the stage; an illumination optical system which illuminates the defect with light; an image detection optical system which converges and detects reflected light or scattered light generated from the defect illuminated by the illumination optical system to obtain an image signal; and a focus adjusting means which adjusts a focus position of the optical microscope based on the vertical position of the upper surface of the sample, which is detected by the optical height detection system.
摘要:
An apparatus for detecting defects on a specimen including am illumination optical unit which obliquely projects a laser onto a region which is longer in one direction than in a direction transverse to said one direction on a surface of a specimen, a table unit which mounts said specimen and which is movable, a detection optical unit which detects with an image sensor an image of light formed by light reflected from said specimen in both directions of the one direction and the direction transverse and which reflected light in both directions is formed on said image sensor while said table is moving, a signal processor which processes a signal outputted from said image sensor of said detection optical unit to extract defects of said specimen. A display unit which displays information of defects extracted by said signal processor.