摘要:
A structure having a pattern is manufactured. An elastically deformable process target is elastically deformed in an inplane direction from a first state. A first pattern is formed on the process target deformed. The elastically deformed process target is made close to or returned to the first state, thereby to form a second pattern having a size and a shape at least one of which differs from those of the first pattern.
摘要:
A scintillator crystal to be used for a radiation detector such as X-ray CT apparatus has a unidirectional phase-separated structure and provides a light guiding function without forming partitions to prevent any crosstalk. The scintillator crystal comprises a phase-separated structure including a plurality of first crystal phases of the columnar crystals with unidirectionality and a second crystal phase covering lateral surfaces of the first crystal phases. At least the second crystal phase comprises CuI and emits light when excited by radiation.
摘要:
A method of producing a mold having an uneven structure and a mold for an optical element are provided. The method includes forming on a nickel substrate a mixed film using nickel and a material which phase separates from nickel simultaneously, the mixed film including a plurality of cylinders including nickel as a component thereof and a matrix region including the material which phase separates from nickel as a component thereof and surrounding the plurality of cylinders; and removing the matrix portion from the mixed film by etching to give a mold including nickel or a nickel alloy. The uneven structure is disposed in plurality on the substrate, and a pitch of the uneven structure is within a range of 30 nm or more and 500 nm or less and a depth of the uneven structure is within a range of 100 nm or more.
摘要:
A method of manufacturing a radiation-detecting device including spaced first columnar scintillators, second columnar scintillators which are located between the neighboring first columnar scintillators and which are spaced from the first columnar scintillators, and photodetecting elements overlapping with the first columnar scintillators includes a step of preparing the substrate such that the substrate has a surface having an uneven section having protruding portions and a plurality of spaced flat sections surrounded by the uneven section and also includes a step of forming the first columnar scintillators and the second columnar scintillators on the flat sections and the protruding portions, respectively, by depositing a scintillator material on the substrate having the uneven section and the flat sections. The uneven section has recessed portions and satisfies the following inequality: h/d≧1 where h is the depth of each recessed portion and d is the distance between the protruding portions.
摘要:
A light emitting device includes a substrate, a first electrode layer, a light emitting layer, a structure layer and a second electrode layer. The structure layer has first domains composed of a first material having a columnar shape and second domains composed of a second material, and on the substrate the structure layer and the light emitting layer are laminated between the first electrode layer and the second electrode layer.
摘要:
To provide patterned media having novel structure. Plural convex members 2991 are provided in an array form on a substrate 2990. The convex member has a shape such that the cross section at each plane in parallel to the substrate tapers toward the substrate. Magnetic recording layers 2992 are provided on upper parts 2993 of the convex members so that they are not in contact with each other between the adjacent upper surface parts.
摘要:
The present invention provides a new method for producing a structure having a three-dimensional network skeleton. The method includes providing a film including a first material and a second material and removing the second material contained in the film by dry etching. The first material contains a noble metal and is dispersed in the second material.
摘要:
A production method of a thin film transistor including an active layer including an amorphous oxide semiconductor film, wherein a step of forming the active layer includes a first step of forming the oxide film in an atmosphere having an introduced oxygen partial pressure of 1×10−3 Pa or less, and a second step of annealing the oxide film in an oxidative atmosphere after the first step.
摘要:
A method for manufacturing a thin film transistor containing an channel layer 11 having indium oxide, including forming an indium oxide film as an channel layer and subjecting the formed indium oxide film to an annealing in an oxidizing atmosphere.
摘要:
A structure has a substrate and a layer containing a magnetic material dispersed in a nonmagnetic material, the magnetic material being comprised of first crystal particles having an easy magnetization axis crytsllographically oriented in the direction of the normal line of the substrate and forming columns perpendicular to the substrate and second crystal particles having a crystallographic orientation in a direction different from the direction of the crystallographic orientation in the first crystal particles, and the ratio of the second crystal particles to the entire crystal particles in the columns ranging from 10% to 50% by weight.