公开(公告)号：US06720519B2

公开(公告)日：2004-04-13

申请号：US10252630

申请日：2002-09-23

申请人： Xinbing Liu ,  Chen-Hsiung Cheng

发明人： Xinbing Liu ,  Chen-Hsiung Cheng

IPC分类号： B23K2636

CPC分类号： B41J2/1634 ,  B23K26/04 ,  B23K26/0608 ,  B23K26/0624 ,  B23K26/067 ,  B23K26/073 ,  B23K26/3576 ,  B23K26/384 ,  B23K26/389 ,  B41J2/162

摘要： The present invention is a system for laser micromachining where a scan mirror and milling algorithm are used to produce high precision, controlled hole shapes in a workpiece. A picosecond laser that produces short pulses is used to reduce thermal effects to improve the quality and repeatability of the milled holes, and a Diffractive Optical Element (DOE) is used to split a single beam into a plurality of beams to allow parallel drilling of the workpiece. A method for operating a laser drilling system where high precision, controlled hole shapes in a workpiece are drilled includes using a scan mirror and milling algorithm, and using a picosecond laser in conjunction with a DOE, thus ensuring that spectral bandwidth issues and thermal issues are addressed to improve the quality and repeatability of the holes.

摘要翻译： 本发明是用于激光微加工的系统，其中使用扫描镜和铣削算法来在工件中产生高精度，受控的孔形状。 使用产生短脉冲的皮秒激光器来减少热效应以提高铣削孔的质量和重复性，并且使用衍射光学元件（DOE）将单个光束分成多个光束，以允许平行钻孔 工件。 一种用于操作激光钻孔系统的方法，其中钻出工件中的高精度，受控孔形状包括使用扫描镜和铣削算法，以及使用皮秒激光与DOE结合，从而确保光谱带宽问题和热问题是 旨在提高孔的质量和重复性。

公开(公告)号：US06355908B1

公开(公告)日：2002-03-12

申请号：US09282722

申请日：1999-03-31

申请人： Abdelkrim Tatah ,  Xinbing Liu

发明人： Abdelkrim Tatah ,  Xinbing Liu

IPC分类号： B23K2600

CPC分类号： B23K26/04 ,  B23K26/0624

摘要： A method for focusing an ultrashort pulse laser relative to a workpiece using the position of a plasma formed by a laser. A laser beam is focused to a focal point. The high peak intensity of the ultrashort pulse laser ionizes air at the focal region to form a plasma. The intensity of the plasma varies as its position relative to the workpiece varies. The intensity of the plasma formed by the focused laser beam is detected. The position of the focal point relative to the workpiece is adjusted responsive to the detected intensity of the plasma.

摘要翻译： 使用由激光器形成的等离子体的位置来相对于工件聚焦超短脉冲激光的方法。 激光束聚焦到焦点。 超短脉冲激光器的高峰值强度使焦点区域的空气电离，形成等离子体。 随着其相对于工件的位置变化，等离子体的强度变化。 检测由聚焦激光束形成的等离子体的强度。 响应于检测到的等离子体的强度来调整焦点相对于工件的位置。

公开(公告)号：US5656186A

公开(公告)日：1997-08-12

申请号：US224961

申请日：1994-04-08

申请人： Gerard A. Mourou ,  Detao Du ,  Subrata K. Dutta ,  Victor Elner ,  Ron Kurtz ,  Paul R. Lichter ,  Xinbing Liu ,  Peter P. Pronko ,  Jeffrey A. Squier

发明人： Gerard A. Mourou ,  Detao Du ,  Subrata K. Dutta ,  Victor Elner ,  Ron Kurtz ,  Paul R. Lichter ,  Xinbing Liu ,  Peter P. Pronko ,  Jeffrey A. Squier

IPC分类号： A61B18/20 ,  A61F9/008 ,  B23K26/00 ,  B23K26/06 ,  B23K26/36 ,  B23K26/38 ,  B23K26/40 ,  H01S3/00 ,  B23K26/02

CPC分类号： B23K26/0624 ,  A61B18/20 ,  A61F9/00825 ,  B23K26/0057 ,  B23K26/066 ,  B23K26/382 ,  B23K26/40 ,  B23K26/402 ,  B23K2201/40 ,  B23K2203/08 ,  B23K2203/10 ,  B23K2203/50 ,  B23K2203/54

摘要： In one aspect the invention provides a method for laser induced breakdown of a material with a pulsed laser beam where the material is characterized by a relationship of fluence breakdown threshold (F.sub.th) versus laser beam pulse width (T) that exhibits an abrupt, rapid, and distinct change or at least a clearly detectable and distinct change in slope at a predetermined laser pulse width value. The method comprises generating a beam of laser pulses in which each pulse has a pulse width equal to or less than the predetermined laser pulse width value. The beam is focused to a point at or beneath the surface of a material where laser induced breakdown is desired.The beam may be used in combination with a mask in the beam path. The beam or mask may be moved in the x, y, and Z directions to produce desired features. The technique can produce features smaller than the spot size and Rayleigh range due to enhanced damage threshold accuracy in the short pulse regime.

摘要翻译： 在一个方面，本发明提供了一种用于脉冲激光束的材料的激光诱导击穿的方法，其中材料的特征在于注射击穿阈值（Fth）与激光束脉冲宽度（T）的关系，其显示突然，快速， 并且在预定的激光脉冲宽度值处具有明显的变化或至少清楚可检测和明显的斜率变化。 该方法包括生成激光脉冲束，其中每个脉冲具有等于或小于预定激光脉冲宽度值的脉冲宽度。 光束聚焦到需要激光诱发击穿的材料表面上或下方的点。 光束可以与光束路径中的掩模组合使用。 光束或掩模可以在x，y和z方向上移动以产生期望的特征。 该技术可以产生小于点尺寸和瑞利范围的特征，这是由于在短脉冲状态下增强的损伤阈值精度。

公开(公告)号：US09188712B2

公开(公告)日：2015-11-17

申请号：US13566399

申请日：2012-08-03

申请人： Xinbing Liu

发明人： Xinbing Liu

IPC分类号： G02B5/02 ,  B29C39/10 ,  B29D11/00 ,  G02B27/28 ,  F21V8/00

CPC分类号： G02B5/0236 ,  B29C39/10 ,  B29D11/00798 ,  G02B5/0263 ,  G02B6/0056 ,  G02B27/285

摘要： A light diffuser panel for coupling to an optical element, includes a plurality of first type layers of a first type of material with a refractive index n1, and a plurality of second type layers of a second type of material with a different refractive index n2, wherein each of the first type layers and each of the second type layers are arranged to form a plurality of interface surfaces between alternating first type layers and second type layers, tilted at a plurality of angles with tilt axes that are parallel to a plane of the light diffuser panel, such that visible light from the optical element is transmitted through the light diffuser panel and the interface surfaces, and a portion of the visible light from the optical element is reflected out of the light diffuser panel at each of the interface surfaces.

摘要翻译： 一种用于耦合到光学元件的光漫射板，包括具有折射率n1的第一类型材料的多个第一类型的层和具有不同折射率n2的第二类型材料的多个第二类型层， 其中所述第一类型层和每个所述第二类型层中的每一个被布置成在交替的第一类型层和第二类型层之间形成多个界面，所述交替的第一类型层和第二类型层以与所述第一类型层和所述第二层的平面平行的倾斜轴以多个角度倾斜 光漫射板，使得来自光学元件的可见光透过光漫射板和界面，并且来自光学元件的可见光的一部分在每个界面处被反射出光漫射板。

公开(公告)号：US08338745B2

公开(公告)日：2012-12-25

申请号：US12632143

申请日：2009-12-07

申请人： Xinbing Liu

发明人： Xinbing Liu

IPC分类号： B23K26/00

CPC分类号： B23K26/082 ,  B23K26/384 ,  B23K26/389

摘要： Apparatus and methods for drilling holes in a material with a laser are disclosed. An apparatus for drilling holes in a material with a laser includes a first steering element, a second steering element, and a lens. The first steering element is positioned to steer a beam from the laser. The second steering element is positioned to steer the beam from the first steering element. The lens focuses the beam from the second steering element. The first and second steering elements are configured to move with respect to the beam. Moving the first and second steering elements changes an angle of the beam where it contacts the material. The apparatus is operable to drill holes having no taper or reverse taper.

摘要翻译： 公开了一种用于在具有激光的材料中钻孔的装置和方法。 用于在具有激光的材料中钻孔的装置包括第一转向元件，第二转向元件和透镜。 第一转向元件被定位成引导来自激光器的光束。 第二转向元件定位成转向来自第一转向元件的梁。 透镜将来自第二转向元件的光束聚焦。 第一和第二转向元件构造成相对于梁移动。 移动第一和第二转向元件改变与其接触材料的梁的角度。 该装置可操作以钻出没有锥形或倒锥形的孔。

公开(公告)号：US07773216B2

公开(公告)日：2010-08-10

申请号：US11579521

申请日：2005-05-10

申请人： Chen-Hsiung Cheng ,  Xinbing Liu

发明人： Chen-Hsiung Cheng ,  Xinbing Liu

IPC分类号： G01J3/00

CPC分类号： B23K26/032 ,  B23K26/03 ,  B23K2103/30 ,  B23K2103/50 ,  B32B38/10 ,  B32B2310/0843

摘要： The present invention is a method of selecting composite sheet materials for use in ultra-fast laser patterning of layers of organic thin film material such as OLEDs. The material is selected to accomplish patterning of upper layers without damaging underlying layers by using an ultra-fast laser programmed with the appropriate laser processing parameters. These parameters are derived by examining each layer's absorption spectra, thermal, and chemical characteristics. The method of the present invention includes measuring each layer's absorption spectrum, examining each layer's thermal and chemical characteristics, determining if the layer is ablatable, determining the laser setup, patterning the layer through laser ablation processing, and determining if more layers need to be ablated. Further, the method includes a sub-method of selecting an alternate material if a layer's material characteristics are not favorable for ablation without damaging underlying layers.

摘要翻译： 本发明是选择用于有机薄膜材料如OLED的超快速激光图案化的复合片材的方法。 选择材料以通过使用用适当的激光加工参数编程的超快速激光来实现上层的图案化而不损坏下层。 这些参数是通过检查每层的吸收光谱，热和化学特性得出的。 本发明的方法包括测量每层的吸收光谱，检查每层的热和化学特性，确定层是否可消融，确定激光设置，通过激光烧蚀处理对层进行图案化，以及确定是否需要消除更多的层 。 此外，该方法包括如果层的材料特性不利于消融而不损坏下层，则选择替代材料的子方法。

公开(公告)号：US20080240186A1

公开(公告)日：2008-10-02

申请号：US11729586

申请日：2007-03-29

申请人： Xinbing Liu

发明人： Xinbing Liu

IPC分类号： H01S3/17

CPC分类号： H01S3/0606 ,  H01S3/0602 ,  H01S3/0621 ,  H01S3/07 ,  H01S3/0804 ,  H01S2301/20

摘要： A laser rod and methods of manufacturing a plurality of laser rods such that each laser rod has two polished end surfaces and an optical axis that extends between the two polished end surfaces. The laser rod includes a gain material component that has a substantially prismatic shape. The gain material component includes: a first end surface that is substantially optically smooth; a second end surface that is substantially optically smooth; at least three flat side surfaces; and an optical axis, which is substantially parallel to the flat side surfaces. The optical axis intersects the first end surface at a first incidence angle and it intersects the second end surface at a second incidence angle.

摘要翻译： 激光棒和制造多个激光棒的方法，使得每个激光棒具有两个抛光的端面和在两个抛光的端面之间延伸的光轴。 激光棒包括具有大致棱柱形状的增益材料部件。 所述增益材料部件包括：基本光滑平滑的第一端面; 基本光学平滑的第二端面; 至少三个平坦的侧面; 以及基本上平行于平坦侧表面的光轴。 光轴以第一入射角与第一端面相交，并以第二入射角与第二端面相交。

公开(公告)号：US20080149474A1

公开(公告)日：2008-06-26

申请号：US11884852

申请日：2006-03-06

申请人： Xinbing Liu

发明人： Xinbing Liu

IPC分类号： B23K15/00

CPC分类号： B23B27/20 ,  B23B27/06 ,  B23B2226/31 ,  B23D13/00 ,  B29D11/0074 ,  G02B5/1852 ,  G03H2001/0296 ,  G03H2224/02

摘要： A structured diamond tool having a predefined grayscale grating profile shape allows a corresponding grayscale grating profile to be machined into a work piece with a single pass with high accuracy. Manufacture of grayscale gratings using this technique saves time compared to the situation where the profile is machined by a single-point diamond tool with multiple passes. Also, more time-saving is realized if more than one period is machined in the diamond tool. Such a tool can be manufactured using a high precision focused ion beam (FIB), which is a true nanomachining tool that can machine features on the order of tens of nanometers. The diamond tool made by FIB therefore has extremely fine resolution and features required by the grayscale grating.

摘要翻译： 具有预定灰度光栅轮廓形状的结构化金刚石工具允许相应的灰度级光栅轮廓以高精度单进行加工成工件。 与通过具有多次通过的单点金刚石工具加工型材的情况相比，使用这种技术的灰度光栅的制造节省了时间。 此外，如果在钻石工具中加工了多个时间段，则可以实现更节省时间。 这种工具可以使用高精度聚焦离子束（FIB）来制造，该离子束是一种真正的纳米加工工具，可以加工数十纳米级的特征。 因此，由FIB制造的金刚石工具具有非常精细的分辨率和灰度光栅所需的特征。

公开(公告)号：US20070221019A1

公开(公告)日：2007-09-27

申请号：US11374373

申请日：2006-03-13

申请人： Jon Ethington ,  Xinbing Liu

发明人： Jon Ethington ,  Xinbing Liu

IPC分类号： B23B3/00

CPC分类号： B23B1/00 ,  B23B2226/31 ,  Y10T82/25 ,  Y10T82/2512 ,  Y10T82/2585 ,  Y10T82/2591

摘要： A precision machining system with a variable projected machining width of the cutting surface of the machining tool, including: a workpiece holder to hold a workpiece; a machining tool holder to hold the machining tool such that the Z axis is substantially parallel to the tool's centerline; a Z translation stage and an X translation stage each coupled to one of the workpiece holder or the machining tool holder; a workpiece spindle coupled to the workpiece holder to rotate the workpiece about the workpiece axis that is parallel to the Z axis; a machining path controller electrically coupled to the X translation stage and the workpiece spindle; and a tool spindle coupled to the machining tool holder. The tool spindle rotates the machining tool about the centerline of the machining tool, which varies the width of the cutting surface of the machining tool projected perpendicular to the machining path.

摘要翻译： 一种精密加工系统，具有加工刀具切削面的可变投影加工宽度，包括：工件夹持器，用于夹持工件; 加工工具夹持器，用于保持加工工具，使得Z轴基本上平行于工具的中心线; Z平移台和X平移台，每个平台与工件保持器或加工工具夹具中的一个相连接; 工件主轴，其联接到工件夹持器，以使工件围绕平行于Z轴的工件轴旋转; 电耦合到X平移台和工件主轴的加工路径控制器; 以及联接到加工工具保持器的工具主轴。 工具主轴围绕加工工具的中心线旋转加工工具，这改变了加工刀具垂直于加工路径投影的切削表面的宽度。

公开(公告)号：US20070175860A1

公开(公告)日：2007-08-02

申请号：US11282884

申请日：2005-11-18

申请人： Xinbing Liu

发明人： Xinbing Liu

IPC分类号： C23F1/00 ,  B44C1/22 ,  H01L21/302 ,  C03C25/68

CPC分类号： H01L21/0275 ,  G02B5/1852 ,  G02B5/1895 ,  G03F7/0005 ,  G03F7/0017 ,  G03F7/24 ,  H01L21/308

摘要： A method of etching a feature in a surface of a substrate. The substrate is provided. A photoresist layer is formed on the surface of the substrate. A thickness profile of the formed photoresist layer is determined. A grayscale scanning pattern is determined based on the feature and the thickness profile of the photoresist layer. The determined grayscale scanning pattern is laser written on the photoresist layer to expose a portion of the photoresist layer. The exposed portion of the photoresist layer is removed to form a grayscale pattern in the photoresist layer. The photoresist layer and the surface of the substrate are etched to form the feature in the surface of the substrate.

摘要翻译： 蚀刻衬底表面中的特征的方法。 提供基板。 在基板的表面上形成光致抗蚀剂层。 确定所形成的光致抗蚀剂层的厚度分布。 基于光致抗蚀剂层的特征和厚度分布来确定灰度扫描图案。 确定的灰度扫描图案被激光写在光致抗蚀剂层上以暴露光致抗蚀剂层的一部分。 去除光致抗蚀剂层的暴露部分以在光致抗蚀剂层中形成灰度图案。 蚀刻光致抗蚀剂层和基板的表面以在基板的表面中形成特征。