公开(公告)号：US5656186A

公开(公告)日：1997-08-12

申请号：US224961

申请日：1994-04-08

申请人： Gerard A. Mourou ,  Detao Du ,  Subrata K. Dutta ,  Victor Elner ,  Ron Kurtz ,  Paul R. Lichter ,  Xinbing Liu ,  Peter P. Pronko ,  Jeffrey A. Squier

发明人： Gerard A. Mourou ,  Detao Du ,  Subrata K. Dutta ,  Victor Elner ,  Ron Kurtz ,  Paul R. Lichter ,  Xinbing Liu ,  Peter P. Pronko ,  Jeffrey A. Squier

IPC分类号： A61B18/20 ,  A61F9/008 ,  B23K26/00 ,  B23K26/06 ,  B23K26/36 ,  B23K26/38 ,  B23K26/40 ,  H01S3/00 ,  B23K26/02

CPC分类号： B23K26/0624 ,  A61B18/20 ,  A61F9/00825 ,  B23K26/0057 ,  B23K26/066 ,  B23K26/382 ,  B23K26/40 ,  B23K26/402 ,  B23K2201/40 ,  B23K2203/08 ,  B23K2203/10 ,  B23K2203/50 ,  B23K2203/54

摘要： In one aspect the invention provides a method for laser induced breakdown of a material with a pulsed laser beam where the material is characterized by a relationship of fluence breakdown threshold (F.sub.th) versus laser beam pulse width (T) that exhibits an abrupt, rapid, and distinct change or at least a clearly detectable and distinct change in slope at a predetermined laser pulse width value. The method comprises generating a beam of laser pulses in which each pulse has a pulse width equal to or less than the predetermined laser pulse width value. The beam is focused to a point at or beneath the surface of a material where laser induced breakdown is desired.The beam may be used in combination with a mask in the beam path. The beam or mask may be moved in the x, y, and Z directions to produce desired features. The technique can produce features smaller than the spot size and Rayleigh range due to enhanced damage threshold accuracy in the short pulse regime.

摘要翻译： 在一个方面，本发明提供了一种用于脉冲激光束的材料的激光诱导击穿的方法，其中材料的特征在于注射击穿阈值（Fth）与激光束脉冲宽度（T）的关系，其显示突然，快速， 并且在预定的激光脉冲宽度值处具有明显的变化或至少清楚可检测和明显的斜率变化。 该方法包括生成激光脉冲束，其中每个脉冲具有等于或小于预定激光脉冲宽度值的脉冲宽度。 光束聚焦到需要激光诱发击穿的材料表面上或下方的点。 光束可以与光束路径中的掩模组合使用。 光束或掩模可以在x，y和z方向上移动以产生期望的特征。 该技术可以产生小于点尺寸和瑞利范围的特征，这是由于在短脉冲状态下增强的损伤阈值精度。

公开(公告)号：US4503313A

公开(公告)日：1985-03-05

申请号：US364269

申请日：1982-04-01

申请人： Akira Tsutsumi

发明人： Akira Tsutsumi

IPC分类号： B23K26/10 ,  B23K26/02 ,  B23K26/08 ,  B23K26/36 ,  B23K26/38 ,  B23K26/42 ,  B23K9/00

CPC分类号： B23K26/046 ,  B23K26/02 ,  B23K26/042 ,  B23K26/0853 ,  B23K26/364 ,  B23K26/382 ,  B23K26/40 ,  B23K26/402 ,  B23K26/702 ,  B23K2201/18 ,  B23K2203/04 ,  B23K2203/26 ,  B23K2203/42 ,  B23K2203/50 ,  B23K2203/54

摘要： The present invention relates to an adjustable laser and optic system for processing which includes a laser beam cutting machine for focusing a laser beam including a first base for supporting an overhead beam by a post, the overhead beam having a laser beam conduit, a mirror assembly and a condenser lens for focusing the laser beam. A laser generator is supported on a second base for generating and feeding the laser beam to the laser cutting machine. Thg laser generator has a laser beam outlet arranged in alignment with the axis of the beam conduit in the overhead beam such that the laser beam generated is delivered to the mirror assembly in a straight line. Also provided is an element for connecting the first base and the second base, and an adjustment device associated with the second base for horizontally adjusting the laser generator in relation to the cutting machine, and a workpiece positioning device mounted on the first base for feeding the workpiece to the processing zone.

摘要翻译： 本发明涉及一种用于处理的可调节激光和光学系统，其包括用于聚焦激光束的激光束切割机，所述激光束包括用于通过柱支撑顶部光束的第一基座，所述顶部光束具有激光束导管， 以及用于聚焦激光束的聚光透镜。 激光发生器被支撑在第二基座上，用于产生并将激光束馈送到激光切割机。 激光发生器具有激光束出口​​，其布置成与架空光束中的光束导管的轴线对齐，使得产生的激光束以直线传送到反射镜组件。 还提供了用于连接第一基座和第二基座的元件，以及与第二基座相关联的调节装置，用于相对于切割机水平调节激光发生器，以及安装在第一基座上的工件定位装置， 工件到加工区。

公开(公告)号：US4239789A

公开(公告)日：1980-12-16

申请号：US37073

申请日：1979-05-08

申请人： Samuel E. Blum ,  Zlata Kovac ,  Robert J. von Gutfeld

发明人： Samuel E. Blum ,  Zlata Kovac ,  Robert J. von Gutfeld

IPC分类号： B23K26/34 ,  C23C18/16 ,  C23C18/31 ,  H05K3/18 ,  H05K3/22 ,  B05D3/06

CPC分类号： C23C18/1612 ,  B23K26/32 ,  B23K26/324 ,  B23K26/34 ,  C23C18/161 ,  H05K3/185 ,  B23K2203/08 ,  B23K2203/42 ,  B23K2203/50 ,  B23K2203/54

摘要： A method for high resolution maskless electroless plating is described. Preferential plating results from exposing those regions where plating is sought to an energy beam to increase the plating rate by a factor of 10.sup.3 to 10.sup.4. This enhancement is sufficient to make masking unnecessary.

摘要翻译： 描述了一种用于高分辨率无掩蔽化学镀的方法。 优选电镀是将寻求电镀的那些区域暴露于能量束，从而将电镀速率提高103至104倍。这种增强足以使掩蔽不必要。

公开(公告)号：US5593606A

公开(公告)日：1997-01-14

申请号：US276797

申请日：1994-07-18

申请人： Mark D. Owen ,  James N. O'Brien

发明人： Mark D. Owen ,  James N. O'Brien

IPC分类号： B23K26/00 ,  B23K26/38 ,  B23K26/40 ,  B23K101/42 ,  C23C14/04 ,  C23C14/28 ,  H05K3/00 ,  H05K3/02 ,  H05K3/40 ,  H05K3/42

CPC分类号： H05K3/4076 ,  B23K26/384 ,  B23K26/386 ,  B23K26/388 ,  B23K26/40 ,  B23K26/402 ,  C23C14/046 ,  C23C14/048 ,  C23C14/28 ,  H05K3/0035 ,  H05K3/0038 ,  B23K2203/08 ,  B23K2203/10 ,  B23K2203/12 ,  B23K2203/14 ,  B23K2203/172 ,  B23K2203/26 ,  B23K2203/40 ,  B23K2203/42 ,  B23K2203/50 ,  B23K2203/52 ,  B23K2203/54 ,  H05K2203/107 ,  H05K2203/108 ,  H05K3/027 ,  H05K3/427

摘要： The output of a continuously pumped, Q-switched, Nd:YAG laser (10) is frequency converted to provide ultraviolet light (62) for forming vias (72, 74) in multi-layered targets (40). The parameters of the output pulses (62) are selected to facilitate substantially clean, simultaneous or sequential drilling or via formation in a wide variety of materials such as metals, organic dielectrics, and reinforcement materials having different thermal absorption characteristics in response to ultraviolet light. These parameters typically include at least two of the following criteria: high average power of greater than about 100 milliwatts measured over the beam spot area, a temporal pulse width shorter than about 100 nanoseconds, a spot diameter of less than about 50 microns, and a repetition rate of greater than about one kilohertz. The laser system (10) and method circumvent conventional depth of cut saturation limitations and can achieve an increased depth of cut per pulse in a target (40) formed of either single- or multi-layered material.

摘要翻译： 连续泵浦的Q开关Nd：YAG激光器（10）的输出被频率转换以提供用于在多层靶（40）中形成通孔（72,74）的紫外光（62）。 选择输出脉冲（62）的参数以便于在各种各样的材料（例如响应于紫外光的不同热吸收特性的金属，有机电介质和增强材料）中促进基本清洁，同时或顺序的钻孔或通孔形成。 这些参数通常包括以下标准中的至少两个：在束斑区域上测量的大于约100毫瓦的高平均功率，短于约100纳秒的时间脉冲宽度，小于约50微米的光点直径，以及 重复率大于约1千赫兹。 激光系统（10）和方法规避了传统的切割深度饱和度限制，并且可以实现由单层或多层材料形成的目标（40）中每脉冲的切割深度增加。

公开(公告)号：US5306891A

公开(公告)日：1994-04-26

申请号：US862479

申请日：1992-04-02

申请人： Michael P. Fleming ,  Celia A. Berry ,  Robert W. Shisler

发明人： Michael P. Fleming ,  Celia A. Berry ,  Robert W. Shisler

IPC分类号： B23K26/32 ,  C04B37/02 ,  B23K26/00

CPC分类号： C04B37/026 ,  B23K26/32 ,  B23K2201/34 ,  B23K2203/12 ,  B23K2203/18 ,  B23K2203/50 ,  B23K2203/52 ,  B23K2203/54 ,  C04B2235/665 ,  C04B2237/122 ,  C04B2237/123 ,  C04B2237/125 ,  C04B2237/341 ,  C04B2237/343 ,  C04B2237/366 ,  C04B2237/407 ,  C04B2237/704 ,  C04B2237/706 ,  C04B2237/708 ,  C04B2237/72 ,  C04B2237/82

摘要： A metal sheet is attached to a ceramic substrate utilizing a weld pad formed of tungsten layer that is preformed onto the substrate and features a faying surface coated with a gold film. The sheet is superposed onto the gold film and scanned with a laser beam to fuse the sheet and the gold, without fusing the tungsten, thereby avoiding spalling of the metal and microcracking of the ceramic.

摘要翻译： 使用由钨层形成的焊盘将金属片附着到陶瓷基板上，所述焊盘预先形成在基板上并且具有涂覆有金膜的引线表面。 将薄片叠加在金膜上并用激光束扫描以使片和金熔合，而不熔合钨，从而避免金属的剥落和陶瓷的微裂纹。

公开(公告)号：US3637410A

公开(公告)日：1972-01-25

申请号：US3637410D

申请日：1968-12-18

申请人： GARY L STEVENS

发明人： STEVENS GARY L

IPC分类号： B23K26/00 ,  H01J29/18 ,  H01J31/18 ,  H01J31/20

CPC分类号： H01J31/18 ,  B23K26/0006 ,  B23K2203/16 ,  B23K2203/50 ,  B23K2203/54 ,  H01J29/18

摘要： A method of treating an expanse of phosphor material to remove selected spots which have interfering luminescent properties. The method consists of isolating and identifying spots or areas considered to be objectionable as regards the desired function of the particular phosphor, and then focusing a laser beam of selected wavelength at each spot whereupon the phosphor material absorbs the laser generated radiant energy to develop heat energy sufficient to effect vaporization of the spot of phosphor material.

摘要翻译： 一种处理荧光体材料的方法以去除具有干扰发光性质的所选择的点。 该方法包括分离和识别关于特定荧光体的期望功能被认为是令人反感的斑点或区域，然后将所选波长的激光束聚焦在每个点处，由此磷光体材料吸收激光产生的辐射能以发展热能 足以使磷光体材料的斑点蒸发。

公开(公告)号：US5614114A

公开(公告)日：1997-03-25

申请号：US327484

申请日：1994-10-20

申请人： Mark D. Owen

发明人： Mark D. Owen

IPC分类号： B23K26/00 ,  B23K26/38 ,  B23K26/40 ,  B23K101/42 ,  C23C14/04 ,  C23C14/28 ,  C23C26/00 ,  H05K3/00 ,  H05K3/02 ,  H05K3/40 ,  H05K3/42

CPC分类号： B23K26/384 ,  B23K26/386 ,  B23K26/388 ,  B23K26/40 ,  B23K26/402 ,  C23C14/046 ,  C23C14/048 ,  C23C14/28 ,  H05K3/0035 ,  H05K3/0038 ,  H05K3/4076 ,  B23K2203/08 ,  B23K2203/10 ,  B23K2203/12 ,  B23K2203/14 ,  B23K2203/16 ,  B23K2203/26 ,  B23K2203/40 ,  B23K2203/42 ,  B23K2203/50 ,  B23K2203/54 ,  H05K2203/107 ,  H05K2203/108 ,  H05K3/027 ,  H05K3/427

摘要： The output of a continuously pumped, Q-switched, Nd:YAG laser (10) is frequency converted to provide ultraviolet light (62) for plating internal wall surfaces (79, 126) of vias (72, 74) in multilayered electronic devices (80). The parameters of the output pulses (62) are selected to facilitate substantially uniform deposition of plating material particles explosively vaporized from a substrate (124) onto the internal wall surface (79, 126). These parameters typically include at least two of the following criteria: high average power of greater than about 100 milliwatts measured over the beam spot area, a temporal pulse width shorter than about 100 nanoseconds, a spot diameter of less than about 50 microns, and a repetition rate of greater than about one kilohertz.

摘要翻译： 连续泵浦的Q开关Nd：YAG激光器（10）的输出被频率转换以提供紫外光（62），用于对多层电子设备（72,74）中的通孔（72,74）的内壁表面（79，126） 80）。 选择输出脉冲（62）的参数以促进从衬底（124）爆炸地蒸发到内壁表面（79,126）上的电镀材料颗粒的基本上均匀的沉积。 这些参数通常包括以下标准中的至少两个：在束斑区域上测量的大于约100毫瓦的高平均功率，短于约100纳秒的时间脉冲宽度，小于约50微米的光点直径，以及 重复率大于约1千赫兹。

公开(公告)号：US5122632A

公开(公告)日：1992-06-16

申请号：US598537

申请日：1990-10-16

申请人： Konrad Kinkelin

发明人： Konrad Kinkelin

IPC分类号： B05B7/10 ,  B05B7/14 ,  B05B7/22 ,  B23K26/144 ,  B23K26/32 ,  B23K26/324 ,  B23K26/34 ,  B29C67/00 ,  C23C4/12

CPC分类号： C23C4/12 ,  B05B7/10 ,  B05B7/1486 ,  B05B7/228 ,  B23K26/144 ,  B23K26/32 ,  B23K26/324 ,  B23K26/34 ,  B23K35/365 ,  B29C67/0051 ,  B23K2203/10 ,  B23K2203/18 ,  B23K2203/42 ,  B23K2203/50 ,  B23K2203/52 ,  B23K2203/54 ,  Y02T50/67

摘要： In laser plasma coating, the feeding of the material to be applied is unsatisfactory. Too much material is blown away and not used for the coating. Moreover, the application is inhomogeneous, depending upon the direction in which the laser beam is moved. According to the invention, the material is introduced at an angle coaxial with the laser beam and the angular momentum is then braked at the latest at the position where the powder leaves the feed head.

摘要翻译： 在激光等离子体涂层中，要施加的材料的供给不能令人满意。 太多的材料被吹走，不用于涂层。 此外，根据激光束的移动方向，应用是不均匀的。 根据本发明，以与激光束同轴的角度引入材料，并且最终在粉末离开进料头的位置处制动角动量。

公开(公告)号：US5104480A

公开(公告)日：1992-04-14

申请号：US597255

申请日：1990-10-12

申请人： Robert J. Wojnarowski ,  Charles W. Eichelberger

发明人： Robert J. Wojnarowski ,  Charles W. Eichelberger

IPC分类号： B23K26/18 ,  B23K26/40 ,  H01C17/22 ,  H01C17/242 ,  H01L21/48 ,  H05K1/09 ,  H05K3/00 ,  H05K3/02 ,  H05K3/06 ,  H05K3/08 ,  H05K3/10 ,  H05K3/14 ,  H05K3/22 ,  H05K3/38

CPC分类号： H05K3/225 ,  B23K26/40 ,  H01C17/242 ,  H01L21/4846 ,  H05K3/027 ,  H05K3/062 ,  B23K2203/05 ,  B23K2203/08 ,  B23K2203/12 ,  B23K2203/14 ,  B23K2203/15 ,  B23K2203/16 ,  B23K2203/172 ,  B23K2203/26 ,  B23K2203/42 ,  B23K2203/50 ,  B23K2203/54 ,  H05K2201/0112 ,  H05K2201/0338 ,  H05K2201/2081 ,  H05K2203/0361 ,  H05K2203/0384 ,  H05K2203/173 ,  H05K2203/175 ,  H05K3/108 ,  H05K3/143 ,  H05K3/381 ,  H05K3/388

摘要： Conductive patterns may be formed on the surface of thermally inefficient substrates by depositing a uniform layer of metal thereover whose upper surface is substantially UV light absorbing followed by laser ablation of the deposited metal to leave the deposited metal only in the desired metal pattern. Thermally efficient substrates may be rendered thermally inefficient by the deposition of a thermally inefficient material thereon. That thermally inefficient material may be either electrically insulating or a metal. A two layer metallization comprising a first, thermally inefficient reactive metal and a second UV light absorbing metal is preferred. When disposed on a thermally inefficient substrate, this two layer metallization ablates reactively as the two layers burn off together. This laser ablation process substantially roughens the surface of polymer dielectrics and may be used to repair open traces in printed circuit structures.

公开(公告)号：US4997468A

公开(公告)日：1991-03-05

申请号：US497493

申请日：1990-03-22

申请人： Dimiter A. Dimitrov ,  Mincho S. Dakov ,  Dancho T. Tonchev ,  Hristo A. Kalafirov ,  Todor S. Botev ,  Krassimir E. Shterev ,  Vladimir S. Kojuharov ,  Yordan I. Dimitrov ,  Dimiter V. Tsvetkov

发明人： Dimiter A. Dimitrov ,  Mincho S. Dakov ,  Dancho T. Tonchev ,  Hristo A. Kalafirov ,  Todor S. Botev ,  Krassimir E. Shterev ,  Vladimir S. Kojuharov ,  Yordan I. Dimitrov ,  Dimiter V. Tsvetkov

IPC分类号： B23K26/00 ,  B23K26/06 ,  B23K26/18 ,  B23K26/40 ,  B23K37/04 ,  B41M1/34 ,  B44B7/00 ,  B44C1/00 ,  B44C1/22 ,  C03C23/00 ,  C04B41/00 ,  C04B41/80

CPC分类号： B23K26/0661 ,  B23K26/0006 ,  B23K26/0075 ,  B23K26/06 ,  B23K26/0643 ,  B23K26/0665 ,  B23K26/40 ,  B23K37/0452 ,  B41M1/34 ,  B44B7/00 ,  B44C1/005 ,  B44C1/228 ,  C03C23/0025 ,  C04B41/0036 ,  C04B41/80 ,  B23K2201/007 ,  B23K2203/50 ,  B23K2203/52 ,  B23K2203/54

摘要： The method for decorative processing is performed with repetitively pulsed cross discharge at atmospheric pressure by CO.sub.2 -laser with pulse energy 1 to 5J, power density at operation from 1.10.sup.6 W/cm.sup.2 to 6.10.sup.7 W/cm.sup.2, pulse duration from 50 to 100 ns and average power 1 to 1000W whereby the mated area with one shot is from 0.5 to 2 cm.sup.2.The device for laser engraving comprises a base with mounted console, on which are fastened parallel elements and a screw that is seated in its upper end in a thrust and in its lower end it is linked by a hinge to an electric motor. There is a fork which is seated in parallel elements whereby to this fork by means of handle and fixator is fastened a slide with longitudinal channels and a plate for axial inclination per 15.degree.. To this slide is fastened a second electric motor, and on its axis is mounted a bearer on which is fastened a mask in which is fixed the item to be decorated. On the rotating bearer is fastened a disk on which are mounted 4 spokes with 4 springs and a replaceable stand.