公开(公告)号：US11323878B2

公开(公告)日：2022-05-03

申请号：US17011840

申请日：2020-09-03

申请人： Sheng Sun ,  Yan Xin ,  Wen Tong ,  Kwok Shum Au ,  Osama Aboul-Magd

发明人： Sheng Sun ,  Yan Xin ,  Wen Tong ,  Kwok Shum Au ,  Osama Aboul-Magd

IPC分类号： H04W16/28 ,  H04W12/062 ,  H04L5/00 ,  H04W56/00 ,  H04W72/04 ,  H04W12/06 ,  H04W92/10 ,  H04W80/02 ,  H04W84/12 ,  H04W88/12

摘要： An apparatus for wireless communications. The apparatus includes a network interface configured for wireless communication with one or more personal basic service set (PBSS) control points (PCPs)/access points (APs) serving in one BSS PCP/AP cluster (BPAC) basic service set (BSS). The processor is coupled to the network interface and configured to: transmit synchronization signals to one or more electronic devices (EDs) of the one BPAC BSS and to the one or more PCP/APs of the one BPAC BSS to synchronize transmissions within the one BPAC BSS.

公开(公告)号：US10743194B2

公开(公告)日：2020-08-11

申请号：US15272584

申请日：2016-09-22

申请人： Yan Xin ,  Sheng Sun ,  Osama Aboul-Magd

发明人： Yan Xin ,  Sheng Sun ,  Osama Aboul-Magd

IPC分类号： H04J11/00 ,  H04W16/28 ,  H04B7/06 ,  H04B7/0452 ,  H04B7/08 ,  H04W40/24 ,  H04W72/04 ,  H04W84/12

摘要： An association beamforming training (A-BFT) method between an access point communicatively coupleable to a plurality of stations through a plurality of channels is described. The method includes: receiving a first sector sweep (SSW) frame from a first station on a first channel; receiving a second SSW frame from a second station on a second channel; processing the first and second SSW frames to determine corresponding first and second sector sweep feedback (SSW-feedback) frames; and transmitting the first and second SSW-feedback frames to the first and second stations, respectively, wherein the second SSW frame may be orthogonal to the first SSW frame, and wherein the first SSW frame may be spread using a first spreading sequence, the second SSW frame may be spread using a second spreading sequence, and wherein the first and second spreading sequences are mutually orthogonal.

公开(公告)号：US10609688B2

公开(公告)日：2020-03-31

申请号：US16658845

申请日：2019-10-21

申请人： Yan Xin ,  Sheng Sun ,  Osama Aboul-Magd ,  Kwok Shum Au

发明人： Yan Xin ,  Sheng Sun ,  Osama Aboul-Magd ,  Kwok Shum Au

IPC分类号： H04W72/04 ,  H04L29/08 ,  H04L27/26 ,  H04L5/00 ,  H04W8/24 ,  H04W84/12 ,  H04W74/00

摘要： Methods for communicating support of operations or capabilities for enhanced directional multi-gigabit (EDMG) communications are described. A supported channel width field or operating channel width field is used in a capabilities element or operation element. The supported channel width field or operating channel width field includes bit positions with bit values that are set to indicate support of operation or a capability of the transmit device from among defined options, the defined options including: the transmit device can perform channel bonding only, the transmit device can perform carrier aggregation only, and the transmit device can perform both channel bonding and carrier aggregation.

公开(公告)号：US20190254066A1

公开(公告)日：2019-08-15

申请号：US15894481

申请日：2018-02-12

申请人： Mengyao Ma ,  Sheng Sun ,  Yan Xin ,  Kwok Shum Au

发明人： Mengyao Ma ,  Sheng Sun ,  Yan Xin ,  Kwok Shum Au

IPC分类号： H04W74/00 ,  H04W76/10

CPC分类号： H04W74/006 ,  H04W76/10 ,  H04W84/12 ,  H04W88/12

摘要： Methods and systems for channel access in a BSS having two or more PCP/APs. A C-PCP/AP transmits at least a first management/extension frame, the management/extension frame including information for channel access by a STA. The C-PCP/AP receives, from the STA, at least a second management/extension frame. Based on information exchanged between the C-PCP/AP and the STA via at least the first and second management/extension frames, the STA is provided with channel access within the BSS by: the C-PCP/AP establishing a communication link for the C-PCP/AP to serve the STA; or the C-PCP/AP assigning a second PCP/AP in the BSS to serve the STA.

公开(公告)号：US20180199324A1

公开(公告)日：2018-07-12

申请号：US15661508

申请日：2017-07-27

申请人： Sheng Sun ,  Yan Xin

发明人： Sheng Sun ,  Yan Xin

IPC分类号： H04W72/04 ,  H04W16/28 ,  H04W76/02

摘要： Systems and methods for wireless discovery and connectivity in 802.11 networks. A management frame from an access point (AP) or personal basic service set (PBSS) control point (PCP) indicates which designated channels are operating and which are non-operating, for purposes of subsequent wireless communications, such as Association Beamforming Training (A-BFT). The management frame contains a bitmap or other forms for indicating which of the designated channels are operating and which are non-operating. In response to the information received through the management frame, one or more stations (STA) can select any one of the operating channels for transmitting of frames in A-BFT communication or other access periods in the Beacon Interval.

公开(公告)号：US20110038349A1

公开(公告)日：2011-02-17

申请号：US12913583

申请日：2010-10-27

申请人： Sheng Sun ,  John Dunning

发明人： Sheng Sun ,  John Dunning

IPC分类号： H04W36/00 ,  H04W4/00

CPC分类号： H04W36/0016 ,  H04W36/18 ,  H04W76/15 ,  H04W92/20

摘要： Multiple simultaneous associations with Wireless Access Points (WAPs) may be formed by a given wireless client to enable handoffs between the WAPs to be accelerated and, optionally, to enable both WAPs to provide simultaneous wireless services to the wireless client. Upon forming a primary association with one WAP the wireless client scans for beacon signals from other WAPs. Upon detecting another WAP, the wireless client transmits a Request To Send (RTS) message to the new WAP indicating the identity of the primary WAP. The wireless client may also identify the new WAP to the primary WAP using a RTS message. The primary and secondary WAPs exchange information so that, in the event of a handoff, the required information has already been shared with the new WAP. Optionally, the several WAPs may provide simultaneous service to the wireless client.

摘要翻译： 可以由给定的无线客户端形成与无线接入点（WAP）的多个同时关联，以使WAP之间的切换能够被加速，并且可选地使两个WAP能够向无线客户端提供同时的无线服务。 当与一个WAP形成主关联时，无线客户端扫描来自其他WAP的信标信号。 在检测到另一个WAP时，无线客户端向新的WAP发送请求发送（RTS）消息，指示主WAP的身份。 无线客户端还可以使用RTS消息来识别到主WAP的新WAP。 主要和次要WAP交换信息，以便在切换的情况下，所需的信息已经与新的WAP共享。 可选地，多个WAP可以提供与无线客户端的同时服务。

公开(公告)号：US20050220984A1

公开(公告)日：2005-10-06

申请号：US10817611

申请日：2004-04-02

申请人： Sheng Sun ,  Cecilia Mak ,  Kam Law

发明人： Sheng Sun ,  Cecilia Mak ,  Kam Law

IPC分类号： C23C4/12 ,  C23C8/36 ,  C23C16/52 ,  G02B6/132 ,  H01J37/32 ,  H01L21/66 ,  B05D1/00

CPC分类号： C23C4/12 ,  C23C4/134 ,  C23C8/36 ,  C23C16/52 ,  G02B6/132 ,  H01J37/32935 ,  H01J37/3299

摘要： Methods and systems are provided for processing a film over a substrate in a process chamber using plasma deposition. A plasma is formed in the process chamber and a process gas mixture suitable for processing the film is flowed into the process chamber under a set of process conditions. The process gas mixture may include a silicon-containing gas and an oxygen-containing gas to deposit a silicate glass, which may in some instances also be doped to obtain specifically desired optical properties. A parameter is monitored during processing of the film so that the process conditions may be changed in accordance with a correlation among a value of the parameter, an optical property of the film, and the process conditions.

摘要翻译： 提供了用于使用等离子体沉积在处理室中的衬底上处理膜的方法和系统。 在处理室中形成等离子体，并且适合于处理膜的处理气体混合物在一组工艺条件下流入处理室。 工艺气体混合物可以包括含硅气体和含氧气体以沉积硅酸盐玻璃，其在一些情况下也可以被掺杂以获得特别期望的光学性质。 在膜的处理期间监测参数，使得可以根据参数值，膜的光学性质和工艺条件之间的相关性来改变工艺条件。

公开(公告)号：US06857387B1

公开(公告)日：2005-02-22

申请号：US09563963

申请日：2000-05-03

申请人： Sheng Sun ,  Jeff C. Olsen ,  Sanjay Yadav ,  Quanyuan Shang ,  Kam S. Law

发明人： Sheng Sun ,  Jeff C. Olsen ,  Sanjay Yadav ,  Quanyuan Shang ,  Kam S. Law

IPC分类号： H05H1/46 ,  B01J19/08 ,  C23C16/34 ,  C23C16/509 ,  C23C16/52 ,  H01J37/32 ,  H01L21/302 ,  H01L21/3065 ,  H01L21/31 ,  C23C16/505 ,  C23F1/00 ,  H01L21/306

CPC分类号： C23C16/5096 ,  C23C16/345 ,  C23C16/52 ,  H01J37/32082 ,  H01J37/32165

摘要： An apparatus and method for fabricating an electronic workpiece in which first and second electrodes within a plasma chamber are respectively connected to low frequency and high frequency RF power supplies. At least one capacitor is connected between the first electrode and electrical ground. The one or more capacitors can reduce or eliminate the coupling of high frequency RF power to any plasma outside the region directly between the two electrodes. Consequently, the invention can improve the performance of the plasma process by concentrating more of the RF power in the region between the two electrodes.

摘要翻译： 一种用于制造电子工件的装置和方法，其中等离子体室内的第一和第二电极分别连接到低频和高频RF电源。 至少一个电容器连接在第一电极和电接地之间。 一个或多个电容器可以减少或消除高频RF功率与直接在两个电极之间的区域外的任何等离子体的耦合。 因此，本发明可以通过将更多的RF功率集中在两个电极之间的区域来提高等离子体处理的性能。

公开(公告)号：US06647993B2

公开(公告)日：2003-11-18

申请号：US09740596

申请日：2000-12-19

申请人： Quanyuan Shang ,  Sheng Sun ,  Kam S. Law ,  Emanuel Beer

发明人： Quanyuan Shang ,  Sheng Sun ,  Kam S. Law ,  Emanuel Beer

IPC分类号： B08B704

CPC分类号： C23C16/45565 ,  C23C16/4404 ,  C23C16/4405 ,  G03F7/70925 ,  H01J37/32357 ,  H01J37/3244 ,  H01J37/32522 ,  H01J2237/3325 ,  H01J2237/334 ,  Y10S438/905

摘要： A substrate processing system includes a processing chamber and a plasma source located external to the chamber. A conduit connects the plasma source to an interior region of the chamber to provide a reactive species to the chamber interior for cleaning interior surfaces of the chamber. A shower head, disposed between the plasma source and an interior region of the chamber, can serve as an electrode and also can serve as a gas distribution mechanism. The shower head includes a surface treatment, such as a non-anodized aluminum outer layer, an electro-polished surface of bare aluminum, or a fluorine-based protective outer layer. The surface-treated shower head improves the rate of removal of materials deposited on the interior surfaces of the chamber during cleaning, reduces contamination of substrates during processing, and provides more efficient use of the power source used for heating the substrate during processing.

摘要翻译： 衬底处理系统包括位于腔室外部的处理室和等离子体源。 导管将等离子体源连接到腔室的内部区域，以向腔室内部提供反应物质以清洁腔室的内表面。 设置在等离子体源和室的内部区域之间的喷头可以用作电极，并且还可以用作气体分配机构。 淋浴头包括表面处理，例如非阳极氧化的铝外层，裸铝的电抛光表面或氟基保护外层。 表面处理的花洒头在清洁过程中提高了沉积在室内表面上的材料的去除速度，减少了处理过程中衬底的污染，并且在加工过程中提供了用于加热衬底的电源的更有效的使用。

公开(公告)号：US06432255B1

公开(公告)日：2002-08-13

申请号：US09494581

申请日：2000-01-31

申请人： Sheng Sun ,  Quanyuan Shang ,  William R. Harshbarger ,  Robert I. Greene

发明人： Sheng Sun ,  Quanyuan Shang ,  William R. Harshbarger ,  Robert I. Greene

IPC分类号： H05H100

CPC分类号： H01L21/67063 ,  H01L21/67069

摘要： A system for processing substrates within a chamber and for cleaning accumulated material from chamber components is provided. The system includes a reactive species generator adapted to generate a reactive gas species for chemically etching accumulated material from chamber components, and a processing chamber having at least one component with a mirror polished surface which is exposed to the reactive species. Preferably to have the greatest impact on chamber cleaning efficiency, the mirror polished surface is a surface of a component such as a gas distribution plate or a backing plate, and/or is a surface of a plurality of smaller components (e.g., chamber wall liners, a gas conductance line, etc.) so as to constitute a large percentage of the surface area exposed to the reactive species. Most preferably all bare aluminum surfaces which the reactive species contacts are mirror polished.

摘要翻译： 提供了一种用于在室内处理基板并且用于从腔室部件清洗积聚的材料的系统。 该系统包括适于产生反应性气体种类的反应物种发生器，用于从腔室部件化学蚀刻积聚的材料，以及处理室，其具有至少一个具有暴露于反应性物质的镜面抛光表面的部件。 优选地，对室清洁效率具有最大的影响，镜面抛光表面是诸如气体分配板或背板的部件的表面，和/或是多个较小部件的表面（例如，室壁衬套 ，气体导电线等），以便构成暴露于反应性物质的大部分表面积。 最优选地，反应性物质接触的所有裸铝表面被镜面抛光。