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    Chemical vapor deposition process and apparatus for performing the same
    61.
    发明授权
    Chemical vapor deposition process and apparatus for performing the same 失效
    化学气相沉积工艺及其执行装置

    公开(公告)号：US06819969B2

    公开(公告)日：2004-11-16

    申请号：US09963482

    申请日：2001-09-27

    申请人： Hee-Tae Lee ,  Yoon-Sei Park ,  Kwang-Sig Kim ,  Jong-Woo Kim

    发明人： Hee-Tae Lee ,  Yoon-Sei Park ,  Kwang-Sig Kim ,  Jong-Woo Kim

    IPC分类号： G06F1900

    CPC分类号： B08B7/00 ,  B08B7/0035 ,  C23C16/4401 ,  C23C16/4405 ,  Y10T137/7724

    摘要： An apparatus and a method for performing a chemical vapor deposition process that reduces particle contamination of a wafer, wherein a cleaning gas including a fluorine radical is introduced into the process chamber to clean the chamber. After loading a wafer in the process chamber, a deposition gas is introduced into the chamber to form a film on the wafer. An inert gas as a back flow-preventing gas is introduced into the process chamber through a cleaning gas supply line to prevent the deposition gas from flowing back toward the cleaning gas supply line. Thus, the cleaning gas supply line is prevented from being contaminated by the deposition gas and particle formation on the wafer during deposition of the film is reduced, so that yield and reliability of the semiconductor device may be improved.

    摘要翻译： 一种用于执行减少晶片的颗粒污染的化学气相沉积工艺的装置和方法，其中将包含氟自由基的清洁气体引入处理室以清洁室。 在处理室中装载晶片之后，将沉积气体引入室中以在晶片上形成膜。 作为防回流气体的惰性气体通过清洁气体供给管线被引入处理室，以防止沉积气体向清洁气体供应管线流回。 因此，防止清洗气体供给管线被沉积气体污染，并且在沉积膜时晶片上的颗粒形成减少，从而可以提高半导体器件的成品率和可靠性。

    Method of selecting vocoder in code division multiple access mobile communication system
    62.
    发明授权
    Method of selecting vocoder in code division multiple access mobile communication system 失效
    在码分多址移动通信系统中选择声码器的方法

    公开(公告)号：US6154453A

    公开(公告)日：2000-11-28

    申请号：US977448

    申请日：1997-11-24

    申请人： Jong-Woo Kim ,  Dong-Myoung Kim

    发明人： Jong-Woo Kim ,  Dong-Myoung Kim

    IPC分类号： G10L19/00 ,  H04B7/26 ,  H04J13/00 ,  H04W72/08 ,  H04W88/02 ,  H04B7/216

    CPC分类号： G10L19/18

    摘要： A method of selecting a vocoder in a CDMA mobile communication system, includes the steps of: indexing shelves, slots, and vocoders, before sequentially selecting a shelf and a slot according to the order of index, and, after detecting a frame offset of a present call, calculating a number of frame offsets identical with the frame offset of the present call contained in the selected slot; and comparing the number of the frame offsets, which are identical with the present call's frame offset and contained in the slot sequentially selected, with numbers of the identical frame offsets contained in other slots, and selecting a slot having the fewest frame offsets identical with the present call's frame offset.

    摘要翻译： 一种在CDMA移动通信系统中选择声码器的方法，包括以下步骤：在根据索引的顺序依次选择货架和时隙之前对货架，时隙和声码器进行索引，并且在检测到 计算与包含在所选择的时隙中的当前呼叫的帧偏移相同的帧偏移量; 并将与包含在所选择的时隙中的当前呼叫的帧偏移相同的帧偏移量与其他时隙中包含的相同帧偏移量的数目进行比较，并且选择具有与其他时隙相同的最小帧偏移的时隙 当前通话的帧偏移量。