公开(公告)号：US09010185B2

公开(公告)日：2015-04-21

申请号：US13482989

申请日：2012-05-29

Applicant: Ming-Han Tsai ,  Chih-Ming Sun

Inventor： Ming-Han Tsai ,  Chih-Ming Sun

IPC: G01P15/125 ,  G01P15/18 ,  G01P15/08

CPC classification number: G01P15/125 ,  G01P15/18 ,  G01P2015/082 ,  G01P2015/084 ,  G01P2015/0845

Abstract: The present invention discloses a three-dimensional micro-electro-mechanical-system sensor. The sensor includes movable first electrodes, plural movable second electrodes, plural fixed third electrodes, and plural fixed fourth electrodes. The first electrodes and their adjacent third electrodes form at least one first capacitor and at least one second capacitor, and the second electrodes and their adjacent fourth electrodes form at least one third capacitor. The capacitance change of the first capacitor reflects the displacement of the proof mass along a first axis, the capacitance change of the second capacitor reflects the displacement of the proof mass along a second axis, and the capacitance change of the third capacitor reflects the displacement of the proof mass along a third axis. The first, second, and third axes define a three-dimensional coordinate system.

Abstract translation: 本发明公开了一种三维微机电系统传感器。 传感器包括可移动的第一电极，多个可移动的第二电极，多个固定的第三电极和多个固定的第四电极。 第一电极及其相邻的第三电极形成至少一个第一电容器和至少一个第二电容器，并且第二电极及其相邻的第四电极形成至少一个第三电容器。 第一电容器的电容变化反映了沿着第一轴的检测质量块的位移，第二电容器的电容变化反映了沿第二轴的检验质量块的位移，并且第三电容器的电容变化反映了第三电容器的位移 沿着第三轴的检验质量。 第一，第二和第三轴定义三维坐标系。

公开(公告)号：US20140144234A1

公开(公告)日：2014-05-29

申请号：US14061698

申请日：2013-10-23

Applicant: Ming-Han Tsai ,  Yu-Chia Liu ,  Wei-Leun Fang

Inventor： Ming-Han Tsai ,  Yu-Chia Liu ,  Wei-Leun Fang

IPC: B81B3/00

CPC classification number: B81B3/0081

Abstract: The invention provides a micro-electro-mechanical device which is manufactured by a CMOS manufacturing process. The micro-electro-mechanical device includes a stationary unit, a movable unit, and a connecting member. The stationary unit includes a first capacitive sensing region and a fixed structure region. The movable unit includes a second capacitive sensing region and a proof mass, wherein the first capacitive sensing region and the second capacitive sensing region form a capacitor, and the proof mass region consists of a single material. The connecting member is for connecting the movable unit in a way to allow a relative movement of the movable unit with respect to the stationary unit.

Abstract translation: 本发明提供一种通过CMOS制造工艺制造的微机电装置。 微机电装置包括固定单元，可移动单元和连接构件。 固定单元包括第一电容感测区域和固定结构区域。 可移动单元包括第二电容感测区域和证明质量块，其中第一电容感测区域和第二电容感测区域形成电容器，并且证明质量区域由单一材料组成。 连接构件用于以可允许可移动单元相对于静止单元的相对运动的方式连接可动单元。

公开(公告)号：US20140113401A1

公开(公告)日：2014-04-24

申请号：US13656174

申请日：2012-10-19

Applicant: Jui-Kang Li ,  Yi-Fong Tseng ,  Chien-Hsien Tseng

Inventor： Jui-Kang Li ,  Yi-Fong Tseng ,  Chien-Hsien Tseng

IPC: H01L31/18

CPC classification number: H01L27/14621 ,  H01L27/14627 ,  H01L27/14629

Abstract: The present invention discloses an image sensor device and a method for making an image sensor device. The image sensor device comprises an optical pixel and an electronic circuit, wherein the optical pixel includes: a substrate; an image sensor area formed in the substrate; a masking layer formed above the image sensor area, wherein the masking layer is formed during a process for forming the electronic circuit; and a light passage above the masking layer for increasing light sensing ability of the image sensor area.

Abstract translation: 本发明公开了一种图像传感器装置及其制造方法。 图像传感器装置包括光学像素和电子电路，其中光学像素包括：基板; 形成在所述基板中的图像传感器区域; 形成在图像传感器区域上方的掩模层，其中在用于形成电子电路的处理期间形成掩模层; 以及在掩模层上方的光通道，用于增加图像传感器区域的光感测能力。

公开(公告)号：US20140098062A1

公开(公告)日：2014-04-10

申请号：US13647289

申请日：2012-10-08

Applicant: Chun-Shen Lin ,  Chun-Yi Lu ,  Chi-Chieh Liao ,  Tzung-Min Su ,  Ming-Tsan Kao

Inventor： Chun-Shen Lin ,  Chun-Yi Lu ,  Chi-Chieh Liao ,  Tzung-Min Su ,  Ming-Tsan Kao

IPC: G06F3/042

CPC classification number: G06F3/042 ,  G06F3/0386 ,  G06F3/0414 ,  G06F3/0421 ,  G06F3/0428

Abstract: The present invention discloses an optical touch panel system and a positioning method for positioning an object existing in a touch control area. The system includes: at least one reflective element disposed on a side of the touch control area; at least one light guide module disposed on a side of the touch control area adjacent to or opposite the reflective element and emitting light; an image sensor capturing an image of the object; a plurality of photo detectors arranged on a side of the touch control area adjacent to the image sensor and sensing the object to obtain shade information; and a processor calculating the coordinates of the object according to the image and the shade information.

Abstract translation: 本发明公开了一种用于定位存在于触摸控制区域中的对象的光学触摸面板系统和定位方法。 该系统包括：设置在触摸控制区域一侧的至少一个反射元件; 至少一个光导模块，设置在所述触摸控制区域的与所述反射元件相邻或相对的一侧并发射光; 捕获所述物体的图像的图像传感器; 多个光电检测器，布置在与图像传感器相邻的触摸控制区域的一侧，并感测对象以获得阴影信息; 以及根据图像和阴影信息计算物体的坐标的处理器。

公开(公告)号：US20140085212A1

公开(公告)日：2014-03-27

申请号：US13624815

申请日：2012-09-21

Applicant: Tzung-Min Su ,  Chih-Hsin Lin ,  Han-Ping Cheng ,  Ming-Tsan Kao

Inventor： Tzung-Min Su ,  Chih-Hsin Lin ,  Han-Ping Cheng ,  Ming-Tsan Kao

IPC: G06F3/041

CPC classification number: G06F3/04883 ,  G06F3/0416

Abstract: The present invention discloses a touch panel apparatus, system and an operation method using for the same system. The apparatus recognizes a track of an object for executing a corresponding gesture function, and it includes: a touch control surface for the object to move on or above to form the track; at least one image sensor for capturing a plurality of continuous pictures including images of the object; and a processor for obtaining a plurality of displacement vectors according to changes in positions of the images of the object, comparing the displacement vectors with a set of basic vectors to obtain a code or a set of codes, and recognizing the code or the set of codes to execute the corresponding gesture function.

Abstract translation: 本发明公开了一种用于同一系统的触摸面板装置，系统和操作方法。 该装置识别用于执行相应的手势功能的对象的轨道，并且其包括：用于该对象在其上或之上移动以形成轨道的触摸控制表面; 至少一个图像传感器，用于捕获包括所述对象的图像的多个连续图像; 以及处理器，用于根据对象的图像的位置的变化来获得多个位移向量，将位移矢量与一组基本向量进行比较以获得代码或一组代码，并且识别代码或一组 代码执行相应的手势功能。

公开(公告)号：US20140035807A1

公开(公告)日：2014-02-06

申请号：US13931878

申请日：2013-06-29

Applicant: Chuan-Hsin Lee

Inventor： Chuan-Hsin Lee

IPC: G06F3/03 ,  G06K9/46

CPC classification number: G06F3/0304 ,  G06K9/4661

Abstract: The invention provides an ambient light sensing device which receives at least one visible light image sensed by an image sensor. The ambient light sensing device includes an image sampling unit and an analyzing unit. The image sampling unit divides the visible light image into plural image blocks, extracts at least one sample data in each image block, and generates a comparison data according to a difference between the sample data extracted at different time points. The analyzing unit analyzes the comparison data and generates an output analysis signal accordingly.

Abstract translation: 本发明提供了一种环境光感测装置，其接收由图像传感器感测的至少一个可见光图像。 环境光感测装置包括图像采样单元和分析单元。 图像采样单元将可见光图像分割为多个图像块，提取每个图像块中的至少一个采样数据，并根据在不同时间点提取的样本数据之间的差异生成比较数据。 分析单元分析比较数据，并相应地生成输出分析信号。

公开(公告)号：US08529773B2

公开(公告)日：2013-09-10

申请号：US13632020

申请日：2012-09-30

Applicant: Chuan Wei Wang ,  Sheng Ta Lee

Inventor： Chuan Wei Wang ,  Sheng Ta Lee

IPC: C23F1/00

CPC classification number: B81C1/00246 ,  B81C2203/0714

Abstract: The present invention discloses a method for making a MEMS device, comprising: providing a zero-layer substrate; forming a MEMS device region on the substrate, wherein the MEMS device region is provided with a first sacrificial region to separate a suspension structure of the MEMS device from another part of the MEMS device; removing the first sacrificial region by etching; and micromachining the zero-layer substrate.

Abstract translation: 本发明公开了一种制造MEMS器件的方法，包括：提供零层衬底; 在所述衬底上形成MEMS器件区域，其中所述MEMS器件区域设置有第一牺牲区域以将所述MEMS器件的悬架结构与所述MEMS器件的另一部分分离; 通过蚀刻去除第一牺牲区域; 并微加工零层衬底。

公开(公告)号：US08303827B2

公开(公告)日：2012-11-06

申请号：US12270804

申请日：2008-11-13

Applicant: Chuan Wei Wang ,  Sheng Ta Lee

Inventor： Chuan Wei Wang ,  Sheng Ta Lee

IPC: C23F1/00

CPC classification number: B81C1/00246 ,  B81C2203/0714

Abstract: The present invention discloses a method for making a MEMS device, comprising: providing a zero-layer substrate; forming a MEMS device region on the substrate, wherein the MEMS device region is provided with a first sacrificial region to separate a suspension structure of the MEMS device from another part of the MEMS device; removing the first sacrificial region by etching; and micromachining the zero-layer substrate.

Abstract translation: 本发明公开了一种制造MEMS器件的方法，包括：提供零层衬底; 在所述衬底上形成MEMS器件区域，其中所述MEMS器件区域设置有第一牺牲区域以将所述MEMS器件的悬架结构与所述MEMS器件的另一部分分离; 通过蚀刻去除第一牺牲区域; 并微加工零层衬底。

公开(公告)号：US20120235255A1

公开(公告)日：2012-09-20

申请号：US13068554

申请日：2011-05-14

Applicant: Chuan-Wei Wang

Inventor： Chuan-Wei Wang

IPC: H01L29/84 ,  H01L21/02

CPC classification number: G01L9/0073

Abstract: The present invention discloses a Micro-Electro-Mechanical System (MEMS) acoustic pressure sensor device and a method for making same. The MEMS device includes: a substrate; a fixed electrode provided on the substrate; and a multilayer structure, which includes multiple metal layers and multiple metal plugs, wherein the multiple metal layers are connected by the multiple metal plugs. A cavity is formed between the multilayer structure and the fixed electrode. Each metal layer in the multilayer structure includes multiple metal sections. The multiple metal sections of one metal layer and those of at least another metal layer are staggered to form a substantially blanket surface as viewed from a moving direction of an acoustic wave.

Abstract translation: 本发明公开了一种微机电系统（MEMS）声压传感器装置及其制造方法。 MEMS器件包括：衬底; 设置在基板上的固定电极; 以及包括多个金属层和多个金属插塞的多层结构，其中多个金属层通过多个金属插塞连接。 在多层结构和固定电极之间形成空腔。 多层结构中的每个金属层包括多个金属部分。 从声波的移动方向观察，一个金属层的多个金属部分和至少另一个金属层的多个金属部分交错以形成基本上覆盖的表面。

公开(公告)号：US08117919B2

公开(公告)日：2012-02-21

申请号：US12535572

申请日：2009-08-04

Applicant: Chuan Wei Wang ,  Sheng Ta Lee

Inventor： Chuan Wei Wang ,  Sheng Ta Lee

IPC: H04R19/00

CPC classification number: G01P15/125 ,  B81B3/0072 ,  B81B2201/0257 ,  B81B2203/0127 ,  B81B2203/019 ,  B81B2207/015 ,  G01P15/0802 ,  H04R31/00 ,  H04R2201/003

Abstract: The present invention discloses a micro-electro-mechanical system (MEMS) device, comprising: a substrate with at least one opening; and a membrane supported on the substrate, the membrane including at least two thin segments and a thick segment connected together, wherein the two thin segments are not at the same level, and the thick segment is formed by a plurality of layers including at least two metal layers and a via layer, such that the membrane has a curve cross section.

Abstract translation: 本发明公开了一种微电子机械系统（MEMS）装置，包括：具有至少一个开口的基板; 以及支撑在所述基板上的膜，所述膜包括至少两个细段和连接在一起的厚段，其中所述两个细段不在同一水平，并且所述厚段由多个层形成，所述多个层包括至少两个 金属层和通孔层，使得膜具有曲线横截面。