公开(公告)号：US11253994B2

公开(公告)日：2022-02-22

申请号：US16043757

申请日：2018-07-24

Applicant: BROOKS AUTOMATION, INC.

Inventor： Izya Kremerman

IPC: B25J9/04 ,  B25J9/12 ,  H01L21/677 ,  B25J15/02

Abstract: A robot assembly for transporting a substrate is presented. The robot assembly having a first arm and a second arm supported by a column, the first arm further having a first limb, the first limb having a first set of revolute joint/line pairs configured to provide translation and rotation of the distal most link of the first limb in the horizontal plane. The assembly further having a second arm further having a second limb, the second limb comprising a second set of revolute joint/link pairs configured to provide translation and rotation of a distalmost link of the second limb in the horizontal plane. The first limb and second limb further having proximal revolute joints having a common vertical axis of rotation and a proximal inner joint housed in a common housing. The assembly further having an actuator assembly coupled to the first set of revolute joint/link pairs and to the second set of revolute joint/link pairs to effect rotation and translation of the distalmost links of the first limb and the second limb, each of the first limb and the second limb defining, in conjunction with the actuator assembly, at least three degrees of freedom per limb, whereby the distalmost links of the first limb and the second limb are independently horizontally translatable for extension and retraction.

公开(公告)号：US20210407831A1

公开(公告)日：2021-12-30

申请号：US17362599

申请日：2021-06-29

Applicant: Brooks Automation, Inc.

Inventor： Radik Sunugatov ,  Roy R. Wang ,  Karl Shieh ,  Justo Graciano ,  Austin Wise ,  Caspar Hansen ,  Erick Pastor

IPC: H01L21/67 ,  H01L21/673 ,  H01L21/677 ,  G06T7/13

Abstract: A semiconductor wafer mapping apparatus comprising a frame forming a wafer load opening communicating with a load station for a substrate carrier disposed to hold more than one wafers vertically distributed in the substrate carrier for loading through the wafer load opening, a movable arm movably mounted to the frame so as to move relative to the wafer load opening and having at least one end effector movably mounted to the movable arm to load wafers from the substrate carrier through the wafer load opening, an image acquisition system including an array of cameras arranged on a common support and each camera fixed with respect to the common support that is static with respect to each camera of the array of cameras, wherein each respective camera is positioned with a field of view disposed to view through the wafer load opening with the common support positioned by the movable arm.

公开(公告)号：US11201070B2

公开(公告)日：2021-12-14

申请号：US15986710

申请日：2018-05-22

Applicant: Brooks Automation, Inc.

Inventor： Daniel Babbs ,  William Fosnight ,  Robert C. May ,  William Weaver

IPC: H01L21/673 ,  H01L21/677 ,  H01L21/67

Abstract: A substrate processing system including a processing section arranged to hold a processing atmosphere therein, a carrier having a shell forming an internal volume for holding at least one substrate for transport to the processing section, the shell being configured to allow the internal volume to be pumped down to a predetermined vacuum pressure that is different than an exterior atmosphere outside the substrate processing system, and a load port communicably connected to the processing section to isolate the processing atmosphere from the exterior atmosphere, the load port being configured to couple with the carrier to pump down the internal volume of the carrier and to communicably connect the carrier to the processing section, for loading the substrate into the processing section through the load port.

公开(公告)号：US20210296142A1

公开(公告)日：2021-09-23

申请号：US17341638

申请日：2021-06-08

Applicant: Brooks Automation, Inc.

Inventor： Radik Sunugatov ,  Robert Carlson

IPC: H01L21/67 ,  H01L21/677 ,  H01L21/673 ,  B65G47/90

Abstract: Substrate loading device including a frame adapted to connect the substrate loading device to a substrate processing apparatus, the frame having a transport opening through which substrates are transported between the substrate loading device and the substrate processing apparatus, a cassette support connected to the frame for holding at least one substrate cassette container for transfer of substrates to and from the at least one substrate cassette container through the transport opening, and selectably variable cassette support purge ports with a variable purge port nozzle outlet, variable between more than one selectable predetermined purge port nozzle characteristics, disposed on the cassette support, each of the more than one purge port nozzle characteristics being configured so that the purge port nozzle outlet with each selected predetermined purge port nozzle characteristic complements and couples to at least one purge port of the at least one substrate cassette container.

公开(公告)号：US20210193495A1

公开(公告)日：2021-06-24

申请号：US17136661

申请日：2020-12-29

Applicant: BROOKS AUTOMATION, INC.

Inventor： Leigh F. SHARROCK

IPC: H01L21/68 ,  H01L21/67 ,  H01L21/677

Abstract: A substrate processing apparatus including a frame defining a chamber with a substrate transport opening and a substrate transfer plane defined therein, a valve mounted to the frame and being configured to seal an atmosphere of the chamber when closed, the valve having a door movably disposed to open and close the substrate transport opening, and at least one substrate sensor element disposed on a side of the door and oriented to sense substrates located on the substrate transfer plane.

公开(公告)号：US20210183675A1

公开(公告)日：2021-06-17

申请号：US17108530

申请日：2020-12-01

Applicant: Brooks Automation, Inc.

Inventor： Alexander Krupyshev ,  Joseph Hallisey ,  Kevin Bourbeau ,  Emilien Audebrand

IPC: H01L21/677

Abstract: A substrate transport apparatus having a drive section and at least one articulated multi-link arm having an upper arm joined at one end to the drive section and a forearm joined to the upper arm. The upper arm being a substantially rigid unarticulated link. Dual end effector links that are separate and distinct from each other are each rotatably and separately joined to a common end of the forearm about a common axis of rotation. Each end effector link has at least one holding station. The holding station of at least one end effector link includes one holding station at opposite ends of the at least one end effector link that is substantially rigid and unarticulated between the opposite ends, and the holding station at one of the opposite ends is substantially coplanar with the holding station of each other end effector link.

公开(公告)号：US10854478B2

公开(公告)日：2020-12-01

申请号：US16722930

申请日：2019-12-20

Applicant: Brooks Automation, Inc.

Inventor： Christopher Hofmeister ,  Martin R. Elliott ,  Alexander Krupyshev ,  Joseph Hallisey ,  Joseph A. Kraus ,  William Fosnight ,  Craig J. Carbone ,  Jeffrey C. Blahnik ,  Ho Yin Owen Fong

IPC: H01L21/67

Abstract: A semiconductor processing tool is disclosed, the tool having a frame forming at least one chamber with an opening and having a sealing surface around a periphery of the opening, a door configured to interact with the sealing surface for sealing the opening, the door having sides perpendicular to the door sealing surface and perpendicular to a transfer plane of a substrate, and at least one drive located on the frame to a side of at least one of the sides that are substantially perpendicular to the door sealing surface and substantially perpendicular to the transfer plane of the substrate, the drive having actuators located at least partially in front of the sealing surface and the actuators being coupled to one of the sides of the door for moving the door from a sealed position. The at least one drive is located outside of a substrate transfer zone.

公开(公告)号：US20200256919A1

公开(公告)日：2020-08-13

申请号：US16793623

申请日：2020-02-18

Applicant: Brooks Automation, Inc.

Inventor： Jairo T. MOURA ,  Nathan SPIKER ,  Aaron GAWLIK ,  Jayaraman KRISHNASAMY

IPC: G01R31/34 ,  G01L3/22 ,  H02P25/098 ,  H02P6/10 ,  H02P23/00 ,  H02P23/12

Abstract: A variable reluctance motor load mapping apparatus includes a frame, an interface disposed on the frame configured for mounting a variable reluctance motor, a static load cell mounted to the frame and coupled to the variable reluctance motor, and a controller communicably coupled to the static load cell and the variable reluctance motor, the controller being configured to select at least one motor phase of the variable reluctance motor, energize the at least one motor phase, and receive motor operational data from at least the static load cell for mapping and generating an array of motor operational data look up tables.

公开(公告)号：US20200161153A1

公开(公告)日：2020-05-21

申请号：US16552881

申请日：2019-08-27

Applicant: Brooks Automation, Inc.

Inventor： Daniel Babbs ,  Robert T. Caveney ,  Robert C. May ,  Krysztof A. Majczak

IPC: H01L21/677 ,  H01L21/67 ,  H01L21/673

Abstract: A substrate transport system includes a carrier having a housing forming an interior environment having an opening for holding at least one substrate and a door for sealing the opening from an outside atmosphere where when sealed the interior environment is configured to maintain an interior atmosphere therein, the housing including a fluid reservoir exterior to the interior environment and configured to contain a fluid, forming a different atmosphere in the fluid reservoir than the interior atmosphere, to form a fluidic barrier seal that seals the interior environment from an environment exterior to the carrier.

公开(公告)号：US10600665B2

公开(公告)日：2020-03-24

申请号：US16444225

申请日：2019-06-18

Applicant: BROOKS AUTOMATION, INC.

Inventor： Robert T. Caveney ,  Jayaraman Krishnasamy ,  Ulysses Gilchrist ,  Mitchell Drew ,  Jairo T. Moura

IPC: H01L21/00 ,  H01L21/677 ,  B25J9/04 ,  B25J11/00 ,  B25J18/04

Abstract: A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.