公开(公告)号：US5882411A

公开(公告)日：1999-03-16

申请号：US735386

申请日：1996-10-21

Applicant: Jun Zhao ,  Alex Schreiber

Inventor： Jun Zhao ,  Alex Schreiber

IPC: H05H1/46 ,  C23C16/44 ,  C23C16/455 ,  C23C16/50 ,  H01J37/32 ,  H01L21/205 ,  H01L21/31 ,  C23C16/00

CPC classification number: C23C16/455 ,  C23C16/45565 ,  H01J37/3244

Abstract: A reactor for plasma-enhanced chemical vapor deposition having a showerhead electrode facing the wafer being CVD deposited, the showerhead having a large number of jetting holes for jetting processing gas towards the wafer. Two deep grooves are formed around the area of the showerhead containing the jetting holes. The grooves are formed from opposite sides of the showerhead and are radially offset from each other, thereby forming a thin wall between the grooves in the body of the showerhead. The thin wall acts as a thermal choke, thus reducing the heat flow to the support of the showerhead and also rendering the temperature distribution more uniform across the face of the showerhead. The thin wall further acts as a mechanical bellows to accommodate differential thermal expansion between the showerhead and its support.

Abstract translation: 一种用于等离子体增强化学气相沉积的反应器，其具有面向晶片的喷头电极被CVD沉积，所述喷头具有用于向晶片喷射处理气体的大量喷射孔。 在包含喷射孔的喷头的区域周围形成两个深槽。 凹槽由喷头的相对侧形成并且彼此径向偏移，从而在喷头体内的凹槽之间形成薄壁。 薄壁用作热扼流圈，从而减少到喷头支撑件的热流，并且使得温度分布在喷头的表面上更均匀。 薄壁还充当机械波纹管，以适应淋浴喷头及其支撑之间的不同热膨胀。

公开(公告)号：US5643364A

公开(公告)日：1997-07-01

申请号：US641948

申请日：1996-05-02

Applicant: Jun Zhao ,  Stefan Wolff ,  Kenneth Smyth ,  William Nixon Taylor, Jr. ,  Gerald McNutt

Inventor： Jun Zhao ,  Stefan Wolff ,  Kenneth Smyth ,  William Nixon Taylor, Jr. ,  Gerald McNutt

IPC: H01L21/02 ,  H01J37/32 ,  H05H1/46 ,  C23C16/00

CPC classification number: H01J37/32174 ,  H01J37/32082 ,  H01J37/32935 ,  H01J37/3299 ,  H05H1/46

Abstract: A plasma chamber RF excitation system includes a high frequency RF power source having a fixed RF match circuit at its output and sensing and control apparatus for sensing the amount of RF power delivered by the RF power source and for regulating the output power level of the RF power source so as to maintain the RF power delivered by the RF power source at a desired level, and an RF plasma chamber including an RF radiator. The power source is mounted proximate or directly on the plasma chamber so that the distance between them is much less than an eighth of a wavelength at thr frequency of the RF source. The system may further include an endpoint detector for a plasma etch process or a chamber cleaning process which halts the process when the VSWR or reflected power ceases to change in response to the progress of the etch process.

Abstract translation: 等离子体室RF激励系统包括在其输出端具有固定RF匹配电路的高频RF电源，以及感测和控制装置，用于感测由RF电源传送的RF功率的量并用于调节RF的输出功率电平 电源，以将由RF电源提供的RF功率维持在期望的水平，以及包括RF辐射器的RF等离子体室。 电源靠近或直接安装在等离子体室上，使得它们之间的距离远小于RF源频率的波长的八分之一。 该系统还可以包括用于等离子体蚀刻工艺的端点检测器或室清洁过程，当VSWR或反射功率响应于蚀刻过程的进行而停止变化时，该过程停止该过程。

公开(公告)号：US5589003A

公开(公告)日：1996-12-31

申请号：US599015

申请日：1996-02-09

Applicant: Jun Zhao ,  Frank P. Chang ,  Charles N. Dornfest

Inventor： Jun Zhao ,  Frank P. Chang ,  Charles N. Dornfest

IPC: C23C16/44 ,  C23C16/458 ,  H01L21/205 ,  C23C16/00

CPC classification number: C23C16/4585

Abstract: A shielded substrate support (2) for deposition chambers (6) includes a heated base (8) having a substrate support surface (16) and a sidewall (18). A corrosion-resistant base shield (10) has cover plate (14, 22) and skirt (24) portions and is used to cover and protect the support surface and a part of the sidewall during cleaning operations. The base and the base shield have first and second CTEs, the second CTE being smaller than the first CTE. The base and base shield include complementary locking surfaces sized and positioned so that only when at a higher temperature will the locking surfaces be opposite one another to prevent removal of the base shield from the base. This eliminates the need for mechanical locking elements, such as threads, pins or twist locks, which increase the cost and can be a source of particle contamination.

Abstract translation: 用于沉积室（6）的屏蔽衬底支撑件（2）包括具有衬底支撑表面（16）和侧壁（18）的加热底座（8）。 耐腐蚀底座（10）具有盖板（14,22）和裙部（24）部分，并且用于在清洁操作期间覆盖和保护支撑表面和侧壁的一部分。 基座和底座具有第一和第二CTE，第二CTE小于第一CTE。 底座和底座包括尺寸和定位的互补锁定表面，使得仅当处于较高温度时，锁定表面将彼此相对，以防止基座从底座移除。 这消除了对机械锁定元件（例如螺纹，销或扭锁）的需要，这增加了成本并且可能是颗粒污染的来源。

公开(公告)号：US20240425473A2

公开(公告)日：2024-12-26

申请号：US18263582

申请日：2022-02-01

Applicant: Pinghui FENG ,  Chao ZHANG ,  Jun ZHAO ,  Biancha ESPINOSA ,  Chao QIN ,  Ali SAVAS ,  Youliang RAO ,  Ting-Yu WANG

Inventor： Pinghui FENG ,  Chao ZHANG ,  Jun ZHAO ,  Biancha ESPINOSA ,  Chao QIN ,  Ali SAVAS ,  Youliang RAO ,  Ting-Yu WANG

IPC: C07D333/38 ,  A61K9/00 ,  A61K9/06 ,  A61K9/20 ,  A61K9/48 ,  A61K47/10 ,  A61K47/12 ,  A61K47/14 ,  A61K47/18 ,  A61K47/26 ,  A61K47/32 ,  A61K47/38 ,  A61K47/44 ,  A61P31/14 ,  C07C233/65 ,  C07C233/75 ,  C07C233/76 ,  C07D233/88 ,  C07D239/94

Abstract: The invention relates to antiviral compounds, compositions comprising antiviral compounds, and methods of use. In particular, the antiviral compounds are cytidine triphosphate synthetase 1 (CTPS1) inhibitors that are effective in treating and/or preventing viral infection and in particular, SARS-CoV-2 infection and/or COVID-19 disease.

公开(公告)号：US10561656B2

公开(公告)日：2020-02-18

申请号：US14125017

申请日：2012-06-11

Applicant: Peng Li ,  Hailin Zheng ,  Jun Zhao ,  Lawrence P. Wennogle

Inventor： Peng Li ,  Hailin Zheng ,  Jun Zhao ,  Lawrence P. Wennogle

IPC: A61K31/519 ,  C07D487/14

Abstract: The present invention relates to PDEI inhibitory compounds of Formula I as described herein, processes for their production, their use as pharmaceuticals and pharmaceutical compositions comprising them.

公开(公告)号：US20180372540A1

公开(公告)日：2018-12-27

申请号：US16053892

申请日：2018-08-03

Applicant: Jun Zhao ,  Xin Jack Zhou ,  Sean Xiaolu Wang

Inventor： Jun Zhao ,  Xin Jack Zhou ,  Sean Xiaolu Wang

IPC: G01J3/02 ,  G01J3/44 ,  G01N21/65

Abstract: This invention relates to a light delivery and collection device for performing spectroscopic analysis of a subject. The light delivery and collection device comprises a reflective cavity with two apertures. The first aperture receives excitation light which then diverges and projects onto the second aperture. The second aperture is applied to the subject such that the reflective cavity substantially forms an enclosure covering an area of the subject. The excitation light interacts with the covered area of the subject to produce inelastic scattering and/or fluorescence emission from the subject. The reflective cavity reflects the excitation light as well as the inelastic scattering and/or fluorescence emission that is reflected and/or back-scattered from the subject and redirects it towards the subject. This causes more excitation light to penetrate into the subject hence enabling sub-surface measurement and also improves the collection efficiency of the inelastic scattering or fluorescence emission. The shape of the reflective cavity is optimized to further improve the collection efficiency.

公开(公告)号：US10119917B2

公开(公告)日：2018-11-06

申请号：US15653636

申请日：2017-07-19

Applicant: Jun Zhao ,  Xin Jack Zhou ,  Sean Xiaolu Wang

Inventor： Jun Zhao ,  Xin Jack Zhou ,  Sean Xiaolu Wang

IPC: G01N21/65 ,  G01N33/15 ,  G01J3/10 ,  G01J3/02

Abstract: This invention relates to an apparatus and method for performing bidirectional Raman spectroscopy of a sample, preferably a diffusely scattering sample, in which two excitation light sources are employed to illuminate the sample from two opposite directions to excite Raman scattering signal from the sample. The Raman scattering signal which transmits through the sample are collected by two optical devices each positioned on the opposite side of the sample to obtain two transmission Raman spectra of the sample, which enables the accurate determination of the composition of the whole sample.

公开(公告)号：US20170231994A1

公开(公告)日：2017-08-17

申请号：US15419902

申请日：2017-01-30

Applicant: Peng LI ,  Hailin ZHENG ,  Jun ZHAO ,  Lawrence P. WENNOGLE

Inventor： Peng LI ,  Hailin ZHENG ,  Jun ZHAO ,  Lawrence P. WENNOGLE

IPC: A61K31/519 ,  A61K31/57 ,  A61K45/06

CPC classification number: A61K31/519 ,  A61K31/5575 ,  A61K31/57 ,  A61K45/06 ,  C07D487/14

Abstract: Provided are PDE1 inhibitors of Formula I, processes for their production, their use as pharmaceuticals, and pharmaceutical compositions comprising them.

公开(公告)号：US09556185B2

公开(公告)日：2017-01-31

申请号：US13701235

申请日：2011-05-31

Applicant: Peng Li ,  Hailin Zheng ,  Jun Zhao ,  Lawrence P. Wennogle

Inventor： Peng Li ,  Hailin Zheng ,  Jun Zhao ,  Lawrence P. Wennogle

IPC: A61K31/165 ,  A61K31/573 ,  A61K31/565 ,  A61K31/557 ,  A61K31/519 ,  A61K31/19 ,  C07D487/04 ,  C07D487/14 ,  A61K45/06

CPC classification number: C07D487/14 ,  A61K31/165 ,  A61K31/19 ,  A61K31/519 ,  A61K31/557 ,  A61K31/565 ,  A61K31/573 ,  A61K45/06 ,  C07D487/04

Abstract: The present invention relates to optionally substituted 4,5,7,8-tetrahydro-(optionally 4-oxo, 4-thioxo or 4-imino)-(1H or 2H)-imidazo[1,2-a]pyrazolo[4,3-e]pyrimidine or 4,5,7,8,9-pentahydro-(optionally 4-oxo, 4-thioxo or 4-imino)-(1H or 2H)-pyrimido[1,2-a]pyrazolo[4,3-e]pyrimidine compounds, and methods of using said compound, e.g., wherein the treatment relates to diseases involving disorders of the dopamine D1 receptor intracellular pathway, such as, among others, Parkinson's disease, depression, narcolepsy, damage to cognitive function, e.g., in schizophrenia.

Abstract translation: 本发明涉及任选取代的4,5,7,8-四氢 - （任选4-氧代，4-硫代或4-亚氨基） - （1H或2H） - 咪唑并[1,2-a]吡唑并[ 3-e]嘧啶或4,5,7,8,9-五氢 - （任选4-氧代，4-硫代或4-亚氨基） - （1H或2H） - 嘧啶并[1,2-a]吡唑并[4 ，3-e]嘧啶化合物，以及使用所述化合物的方法，例如，其中治疗涉及涉及多巴胺D1受体细胞内途径紊乱的疾病，例如帕金森病，抑郁症，发作性睡病，对认知功能的损害 ，例如精神分裂症。

公开(公告)号：US09434730B2

公开(公告)日：2016-09-06

申请号：US13701284

申请日：2011-05-31

Applicant: Peng Li ,  Jun Zhao

Inventor： Peng Li ,  Jun Zhao

IPC: C07D487/04 ,  A61K45/06 ,  A61K31/519

CPC classification number: C07D487/04 ,  A61K31/519 ,  A61K45/06

Abstract: The present invention relates to (1- or 2- and/or 5 and/or 7-substituted)-(3-oxy)-(4H,4-imino, 4-thioxo or 4-oxo)-pyrazolo[3,4-d]pyrimidin-6-ones, e.g., a compound of formula II as described below, processes for their production, their use as pharmaceuticals and pharmaceutical compositions comprising them. Of particular interest are novel compounds useful as inhibitors of phosphodiesterase 1 (PDE1), e.g., in the treatment of diseases involving disorders of the dopamine D1 receptor intracellular pathway, such as Parkinson's disease, depression, narcolepsy, damage to cognitive function, e.g., in schizophrenia, or disorders that may be ameliorated through enhanced progesterone-signaling pathway, e.g., female sexual dysfunction.

Abstract translation: 本发明涉及（1-或2-和/或5和/或7-取代的） - （3-氧） - （4H，4-亚氨基，4-硫代或4-氧代） - 吡唑并[3,4 -d]嘧啶-6-酮，例如下述的式II化合物，其制备方法，它们作为药物的用途和包含它们的药物组合物。 特别令人感兴趣的是可用作磷酸二酯酶1（PDE1）抑制剂的新化合物，例如用于治疗涉及多巴胺D1受体细胞内途径紊乱的疾病，例如帕金森病，抑郁症，发作性睡病，对认知功能的损害，例如 精神分裂症或可通过增强的孕激素信号传导途径改善的疾病，例如女​​性性功能障碍。