公开(公告)号：US20090175707A1

公开(公告)日：2009-07-09

申请号：US12348276

申请日：2009-01-03

申请人： Anthony C. Bonora

发明人： Anthony C. Bonora

IPC分类号： H01L21/67

CPC分类号： H01L21/67383 ,  H01L21/67386

摘要： A substrate container for storing at least one substrate is provided. The substrate container includes a housing assembly encompassing the at least one substrate, the housing assembly having a container door for access into an inner region of the housing assembly. The housing assembly includes a support structure defined along sidewalls of the housing assembly. The support structure has a plurality of edge support constraints protruding into the inner region of the housing assembly. The plurality of edge support constraints support opposing edge regions of the at least one substrate so as to cause the at least one substrate to deflect around an axis.

摘要翻译： 提供了用于存储至少一个基板的基板容器。 衬底容器包括包围至少一个衬底的壳体组件，壳体组件具有用于进入壳体组件的内部区域的容器门。 壳体组件包括沿壳体组件的侧壁限定的支撑结构。 支撑结构具有突出到壳体组件的内部区域中的多个边缘支撑约束。 所述多个边缘支撑约束支撑所述至少一个基板的相对边缘区域，以便使所述至少一个基板绕轴线偏转。

公开(公告)号：US07217076B2

公开(公告)日：2007-05-15

申请号：US10087092

申请日：2002-03-01

申请人： Anthony C. Bonora ,  Richard H. Gould ,  Roger G. Hine ,  Michael Krolak ,  Jerry A. Speasl

发明人： Anthony C. Bonora ,  Richard H. Gould ,  Roger G. Hine ,  Michael Krolak ,  Jerry A. Speasl

IPC分类号： B65G49/07

CPC分类号： H01L21/67775 ,  H01L21/67766 ,  H01L21/67778 ,  H01L21/68707 ,  Y10S414/139

摘要： The semiconductor material handling system is an EFEM that may either mount to the front end of a processing tool or be integrated into the processing tool. The EFEM is built from a unified frame that the EFEM components, such as a wafer engine and a SMIF pod advance plate, may mount to. The frame serves as a common mounting structure that the EFEM components may use as a reference for alignment purposes. Since the EFEM components do not have to align with respect to the position of each other, the calibration, if any is required, is greatly simplified. The EFEM also has a reduced footprint, allowing the EFEM to mount to the front end of a processing tool and not extend to the fab floor. Thus, space is freed up between the EFEM and the fab floor. By way of example only, this space may be used as a maintenance access area to the processing tool without having to first remove the EFEM.

摘要翻译： 半导体材料处理系统是可以安装到处理工具的前端或被集成到处理工具中的EFEM。 EFEM由统一的框架构成，EFEM组件（如晶片引擎和SMIF盒前进板）可以安装到。 该框架用作通用安装结构，EFEM组件可用作对准目的的参考。 由于EFEM组件不必相对于彼此的位置对准，所以校准（如果需要）被大大简化。 EFEM还具有减少的占地面积，允许EFEM安装到加工工具的前端，而不是延伸到fab楼层。 因此，在EFEM和fab楼之间释放空间。 仅作为示例，该空间可以用作处理工具的维护访问区域，而不必首先去除EFEM。

公开(公告)号：US06623051B2

公开(公告)日：2003-09-23

申请号：US10022309

申请日：2001-12-13

申请人： Anthony C. Bonora

发明人： Anthony C. Bonora

IPC分类号： E05B3902

CPC分类号： H01L21/67373 ,  E05B17/0025 ,  E05B65/006 ,  E05C9/047 ,  H01L21/67763 ,  Y10S292/62 ,  Y10T70/7706 ,  Y10T292/522

摘要： A laterally floating latch hub assembly includes a latch key receptor translatably mounted within a rotatable latch actuation cam. Latch keys within a port door are received within the latch key receptor, which is capable of translating laterally to ensure a proper fit of the latch key within the receptor. Once received within the receptor, torque from the latch keys is transmitted to the latch actuation cam via the latch key receptor.

公开(公告)号：US06579052B1

公开(公告)日：2003-06-17

申请号：US08891543

申请日：1997-07-11

申请人： Anthony C. Bonora ,  Raymond S. Martin ,  Robert Netsch ,  Joshua T. Oen ,  Terry Mosier ,  William J. Fosnight

发明人： Anthony C. Bonora ,  Raymond S. Martin ,  Robert Netsch ,  Joshua T. Oen ,  Terry Mosier ,  William J. Fosnight

IPC分类号： B65G100

CPC分类号： H01L21/67161 ,  H01L21/67769 ,  Y10S414/14

摘要： A storage, delivery and retrieval system having a rear wall to which is affixed a plurality of shelves capable of supporting one or more wafer-carrying pods. The structure further includes a pair of vertical rails lying in a plane spaced from and substantially parallel to the shelf-supporting wall. The horizontal rail extends between and is translationally mounted to the vertical rails, which horizontal rail supports a gripper capable of movement along the horizontal rail. The movement of the horizontal rail along the vertical rails, and the movement of the gripper along the horizontal rail, allows the gripper to be positioned at any location within an X-Z plane including the storage shelves. The system includes a two-dimensional transport system. That is, all transport of the pods by the system occurs without the pods ever leaving the X-Z plane of the shelves. This feature contributes to the overall small footprint of the system. Additionally, the gripper moves around in the same plane as the pods, and the rails have a small profile and operate directly adjacent the storage shelves. These features further contribute to the storage, delivery and retrieval system according to the present invention.

摘要翻译： 具有后壁的储存，输送和取回系统，其上固定有能够支撑一个或多个晶片承载舱的多个搁架。 该结构还包括位于与支架壁间隔开并基本上平行于支架壁的平面中的一对垂直导轨。 水平导轨在垂直轨道之间延伸并且平行地安装在该横向导轨上，该水平轨道支撑能够沿着水平轨道移动的夹具。 水平导轨沿着垂直导轨的移动以及夹持器沿着水平导轨的运动允许夹具定位在包括存储架的X-Z平面内的任何位置处。 该系统包括二维传输系统。 也就是说，系统的所有荚运输都没有荚果离开架子的X-Z平面。 该功能有助于系统的整体体积小。 此外，夹具在与荚一起在同一平面内移动，并且导轨具有小的轮廓并且直接靠近货架。 这些特征进一步有助于根据本发明的存储，传送和检索系统。

公开(公告)号：US06318953B1

公开(公告)日：2001-11-20

申请号：US09351986

申请日：1999-07-12

申请人： Anthony C. Bonora ,  Robert Netsch ,  Patrick Sullivan ,  William J. Fosnight ,  Joshua Shenk ,  Edwin Noma

发明人： Anthony C. Bonora ,  Robert Netsch ,  Patrick Sullivan ,  William J. Fosnight ,  Joshua Shenk ,  Edwin Noma

IPC分类号： B65G6300

CPC分类号： H01L21/67775 ,  Y10S414/135 ,  Y10S414/136

摘要： An ergonomic loading assembly for an I/O port onto which a bare cassette may be easily loaded and unloaded. The loading assembly further provides isolation between the operator and the I/O port after loading of a cassette to minimize safety risks and to minimize the amount of particulates and contaminants around the workpieces while on the port. In a preferred embodiment, the loading assembly includes a cover assembly having a stationary cover section around the port plate, and two pivoting cover sections which open and close like jaws to allow a cassette to positioned within the cover assembly when opened and which enclose the cassette within the cover assembly when closed. The loading assembly further includes a pivoting deck onto which the cassette is loaded when the pivoting cover sections are open. The deck receives the cassette with the workpieces oriented at or near vertical. Thereafter, as the pivoting cover sections are closed, the pivoting deck rotates the cassette and seats the cassette on the port door of the port with the workpieces positioned in a horizontal orientation. Thereafter, the port plate, pivoting deck and cassette may be transferred away from the port plate so that processing of the workpieces in the cassette by the processing tool may take place.

摘要翻译： 用于I / O端口的符合人体工程学的装载组件，裸机盒可以在其上容易地装载和卸载。 装载组件进一步在装载盒之后在操作者和I / O端口之间提供隔离，以最小化安全隐患，并使端口周围的工件周围的颗粒物和污染物的数量最小化。 在优选实施例中，装载组件包括具有围绕端口板的固定盖部分的盖组件，以及两个枢转盖部分，其打开和关闭类似的夹爪，以允许盒在打开时定位在盖组件内并且包围盒 封闭时在盖组件内。 装载组件还包括枢转甲板，当枢转盖部分打开时，该卡盘装载在该枢转甲板上。 工作台接收垂直方向的工件。 此后，当枢转盖部分被关闭时，枢转甲板使盒子旋转，并使工件在水平方向上定位在端口的端口门上。 此后，端口板，枢转甲板和盒可以从端口板转移离开，使得可以通过处理工具对盒中的工件进行处理。

公开(公告)号：US06298280B1

公开(公告)日：2001-10-02

申请号：US09162334

申请日：1998-09-28

申请人： Anthony C. Bonora ,  William J. Fosnight ,  Krishna D. Swamy ,  Mark R. Davis ,  Mike Cookson

发明人： Anthony C. Bonora ,  William J. Fosnight ,  Krishna D. Swamy ,  Mark R. Davis ,  Mike Cookson

IPC分类号： G06F700

CPC分类号： H01L21/681 ,  Y10S414/141

摘要： A system for positioning an end effector of a wafer handling robot with respect to a wafer to be extracted from a cassette, and for thereafter reading an indicial mark on the wafer. The system includes a pair of sensor units fixedly mounted on the end effector, which sensor units are capable of detecting the wafer edge upon approach of the end effector toward the wafer. Based on the positions of the end effector when the first and then the second sensor units detect the edge of the wafer, a computer may determine the orientation of the end effector with respect to the wafer, and adjust a position of the end effector to a center of the wafer. Thereafter, the indicial mark on the wafer may be read by a camera by withdrawing the wafer from the cassette on the end effector, positioning the center of the wafer over the central axis of rotation of the wafer handling robot, and rotating the robot until the indicial mark is located under the camera.

摘要翻译： 一种用于将晶片处理机器人的端部执行器相对于要从盒中提取的晶片定位并且此后读取晶片上的指示标记的系统。 该系统包括固定地安装在末端执行器上的一对传感器单元，这些传感器单元能够在末端执行器朝向晶片接近时检测晶片边缘。 当第一和第二传感器单元检测到晶片的边缘时，基于末端执行器的位置，计算机可以确定端部执行器相对于晶片的取向，并且将末端执行器的位置调整到 晶圆中心。 此后，晶片上的指示标记可以由相机通过从晶片处理机器人的中心旋转轴上定位晶片的中心并将机器人旋转直到 指纹位于相机下方。

公开(公告)号：US5988233A

公开(公告)日：1999-11-23

申请号：US49461

申请日：1998-03-27

申请人： William J. Fosnight ,  Anthony C. Bonora ,  Raymond S. Martin ,  Jay Tatro

发明人： William J. Fosnight ,  Anthony C. Bonora ,  Raymond S. Martin ,  Jay Tatro

IPC分类号： H01L21/677 ,  H01L21/673 ,  B65B1/04

CPC分类号： H01L21/67376 ,  H01L21/67393

摘要： A system for providing uniform, controlled and efficient purge gas flow rates and gas flow patterns for removing contaminants and/or particulates from wafers within a pod. The purge system includes seals at the interfaces between the gas inlet and removal lines to substantially prevent leakage at the interfaces. The system may establish seals at the inlet and outlet without having to use conventional fluid flow pins extending above the support surface. The negative pressure applied at the outlet controls the flow rate through the pod, and the rate at which gas leaves the pod will limit the rate at which gas may enter the pod. In a preferred embodiment, the inlet flow is approximately equal to the outlet flow. With substantially equal inlet and outlet pressures, the purging gas flows through the upper and lower portions of the pod in a substantially uniform flow pattern so that contaminants and particulates are removed evenly from wafers throughout the pod. As an alternative to the normal purge and/or trickle modes of operation, the system may remove a volume of gas from a pod and replace it with a new volume of gas by operating the low pressure source with the high pressure source turned off. Further still, the flow lines may include flow rate control systems that provide purging flow for a predetermined time interval, and thereafter provide a trickle flow as long as the pod is seated on the support surface.

摘要翻译： 一种用于提供均匀，受控和有效的吹扫气体流速和气流模式的系统，用于从荚内的晶片中去除污染物和/或颗粒物。 吹扫系统包括在气体入口和排出管线之间的界面处的密封，以基本上防止在界面处的泄漏。 该系统可以在入口和出口处建立密封件，而不必使用在支撑表面上方延伸的常规流体流动销。 在出口处施加的负压控制通过荚的流速，并且气体离开荚的速率将限制气体可以进入荚的速率。 在优选实施例中，入口流大致等于出口流。 具有基本上相等的入口和出口压力，净化气体以大致均匀的流动方式流过容器的上部和下部，使得污染物和微粒从整个容器中的晶片均匀地除去。 作为正常吹扫和/或滴流操作模式的替代方案，系统可以从容器中去除一定体积的气体，并通过在高压源关闭的情况下操作低压源来替换新的体积的气体。 此外，流动管线可以包括流量控制系统，其提供预定时间间隔的清洗流量，并且此后提供涓流流动，只要荚座位于支撑表面上即可。

公开(公告)号：US5944475A

公开(公告)日：1999-08-31

申请号：US730484

申请日：1996-10-11

申请人： Anthony C. Bonora ,  William J. Fosnight ,  Raymond S. Martin

发明人： Anthony C. Bonora ,  William J. Fosnight ,  Raymond S. Martin

IPC分类号： B65G49/07 ,  H01L21/677

CPC分类号： H01L21/67775 ,  H01L21/67772 ,  Y10S414/14

摘要： A rotating and translating support assembly for receiving a front-opening pod according to applicable SEMI standards, and thereafter rotating the pod to a desired orientation. In this way, a number of pods may be received at interface ports of a minienvironment, and each of the pods and ports may be angled toward and aligned with a single, 2-arm pick and place robot. In a preferred embodiment of the present invention, the rotating and translating support assembly comprises a plate rotationally and translationally mounted on a shelf extending from the minienvironment adjacent to a front-opening interface port. In one embodiment, the support plate may be mounted on a shaft attached to a rotating assembly, such as for example a worm and drive gear. The rotating assembly may in turn be mounted on a translating assembly, such as for example a carriage riding on a lead screw. The rotating and translating assemblies may be controlled by a host computer, so as to rotate and translate a pod received on the support plate, to align the pod with an interface port which may be provided at an angle with respect to the front of the minienvironment.

摘要翻译： 旋转和平移支撑组件，用于根据适用的SEMI标准接收前开口舱，然后将舱旋转到期望的方位。 以这种方式，可以在微型环境的接口端口处接收多个荚，并且每个荚和端口可以朝向和对准单个2臂拾放和放置机器人。 在本发明的优选实施例中，旋转和平移支撑组件包括旋转地并且平移地安装在从邻近前开口接口端口的小环境延伸的搁架上的板。 在一个实施例中，支撑板可以安装在附接到旋转组件的轴上，例如蜗杆和驱动齿轮。 旋转组件可以依次安装在平移组件上，例如骑在导螺杆上的滑架。 旋转和平移组件可以由主计算机控制，以便旋转和平移容纳在支撑板上的容器，以使该容器与可以相对于小型环境的前部以一定角度提供的接口端口对准 。

公开(公告)号：US5895191A

公开(公告)日：1999-04-20

申请号：US518517

申请日：1995-08-23

申请人： Anthony C. Bonora ,  William J. Fosnight

发明人： Anthony C. Bonora ,  William J. Fosnight

IPC分类号： H01L21/673 ,  H01L21/677 ,  B65G49/07

CPC分类号： H01L21/67386 ,  H01L21/67772 ,  Y10S414/14

摘要： A transportable container for storing and carrying articles such as semiconductor wafers or flat panel display substrates which is adapted for horizontal loading and unloading. The container includes a box and a box door. The box door can be sealably attached to the box to isolate the interior of the box from ambient atmospheric conditions. The container is adapted to mate with a port of a canopy which encloses a semiconductor processing apparatus.

摘要翻译： 一种用于存储和携带诸如半导体晶片或平板显示器基板的物品的可移动容器，其适于水平装载和卸载。 容器包括一个盒子和一个盒子门。 箱门可以密封地连接到箱子上，以将箱体的内部与环境大气条件隔离。 容器适于与包围半导体处理装置的罩盖端口配合。

公开(公告)号：US5740845A

公开(公告)日：1998-04-21

申请号：US499588

申请日：1995-07-07

申请人： Anthony C. Bonora ,  Frederick T. Rosenquist ,  Sudhir Jain ,  Mark R. Davis

发明人： Anthony C. Bonora ,  Frederick T. Rosenquist ,  Sudhir Jain ,  Mark R. Davis

IPC分类号： B65D6/40 ,  H01L21/673 ,  B65D85/30

CPC分类号： H01L21/67373 ,  H01L21/67393 ,  Y10S414/14

摘要： A transportable, sealable container, for example a SMIF pod, including a box and box door. The box has a first sealing surface and the box door has a second sealing surface. The two sealing surfaces form a seal when the box door is moved in a sealing position with respect to the box. A latch mechanism is provided in the box door for holding the box door in the sealing position. The container further includes a breather assembly having an aperture, with a filter, that allows gas to flow between the interior of the container and an environment external to the container. A valve, which is actuated by the latch, opens and closes the aperture. When the latch unlocks the box door, the valve opens the aperture. When the door is locked, the valve closes the aperture.

摘要翻译： 可运输，可密封的容器，例如SMIF荚，包括箱和箱门。 该箱具有第一密封表面，并且箱门具有第二密封表面。 当箱门相对于盒子处于密封位置时，两个密封表面形成密封。 在箱门中设有一个闩锁机构，用于将箱门保持在密封位置。 容器还包括具有孔的通气组件，其具有过滤器，其允许气体在容器的内部和容器外部的环境之间流动。 由闩锁致动的阀打开和关闭孔。 当闩锁解锁箱门时，阀打开孔。 当门被锁定时，阀关闭光圈。