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公开(公告)号:US20060030060A1
公开(公告)日:2006-02-09
申请号:US11244080
申请日:2005-10-06
申请人: Minori Noguchi , Yoshimasa Ohshima , Hidetoshi Nishiyama , Shunichi Matsumoto , Yukio Kembo , Ryouji Matsunaga , Keiji Sakai , Takanori Ninomiya , Tetsuya Watanabe , Hisato Nakamura , Takahiro Jingu , Yoshio Morishige , Shuichi Chikamatsu
发明人: Minori Noguchi , Yoshimasa Ohshima , Hidetoshi Nishiyama , Shunichi Matsumoto , Yukio Kembo , Ryouji Matsunaga , Keiji Sakai , Takanori Ninomiya , Tetsuya Watanabe , Hisato Nakamura , Takahiro Jingu , Yoshio Morishige , Shuichi Chikamatsu
CPC分类号: B82Y15/00 , G01N21/94 , G01N21/95623 , G01N21/95684 , G01N2021/8822 , G01R31/308 , H01J37/00 , H01J2237/022 , H01J2237/0225 , H01L21/67253 , H01L21/67288 , H01L21/681 , H01L22/12 , H01L2924/0002 , H01L2924/00
摘要: An apparatus for detecting defects on a specimen including am illumination optical unit which obliquely projects a laser onto a region which is longer in one direction than in a direction transverse to said one direction on a surface of a specimen, a table unit which mounts said specimen and which is movable, a detection optical unit which detects with an image sensor an image of light formed by light reflected from said specimen in both directions of the one direction and the direction transverse and which reflected light in both directions is formed on said image sensor while said table is moving, a signal processor which processes a signal outputted from said image sensor of said detection optical unit to extract defects of said specimen. A display unit which displays information of defects extracted by said signal processor.
摘要翻译: 一种用于检测试样上的缺陷的装置,包括:am照明光学单元,其将激光倾斜地突出到在一个方向上比沿着与所述一个方向横切的方向在一个方向上长的区域;安装所述样本的台单元 检测光学单元,其利用图像传感器检测在所述图像传感器上形成有从所述一个方向的两个方向和横向方向反射的光形成的光,并且在所述图像传感器上形成两个方向的反射光 当所述表移动时,信号处理器处理从所述检测光学单元的所述图像传感器输出的信号,以提取所述样本的缺陷。 一种显示由所述信号处理器提取的缺陷信息的显示单元。
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72.
公开(公告)号:US06890626B1
公开(公告)日:2005-05-10
申请号:US10129844
申请日:2000-11-08
CPC分类号: C08G73/22 , G03F7/0233 , G03F7/039 , H05K1/0346 , Y10T428/24802 , Y10T428/24917 , Y10T428/31681
摘要: A polyimide-based polycondensate which may be used as an insulation film by coating a copper foil with the polycondensate and by heating the coated copper foil, which insulation film does not warp the foil, as well as a production process thereof, is disclosed. The polycondensate according to the invention is a solvent-soluble polycondensate containing a benzoxazole component having a carboxylic group and an imide component having a phenolic hydroxyl group, which is obtained by dehydration-condensing one or more tetracarboxylic dianhydrides with one or more aromatic diamines having an amino group and a phenolic hydroxyl group, the amino group and the phenolic hydroxyl group being located at ortho positions with respect to each other, by heating the one or more tetracarboxylic dianhydrides and the one or more aromatic diamines at 150° C. to 220° C. in the presence of an acid catalyst.
摘要翻译: 公开了一种聚酰亚胺缩聚物,其可以通过用缩聚物涂覆铜箔并加热涂覆的铜箔(该绝缘膜不翘曲箔)作为绝缘膜,以及其制造方法。 根据本发明的缩聚物是含有具有羧基的苯并恶唑组分和具有酚羟基的酰亚胺组分的溶剂可溶性缩聚物,其通过将一种或多种四羧酸二酐与一种或多种芳族二胺进行脱水缩合而获得,所述芳族二胺具有 氨基和酚羟基,氨基和酚羟基相对于彼此位于相邻位置,通过在150℃加热一种或多种四羧酸二酐和一种或多种芳族二胺至220℃ 在酸催化剂存在下。
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公开(公告)号:US06697698B2
公开(公告)日:2004-02-24
申请号:US10198394
申请日:2002-07-17
IPC分类号: G06F1900
CPC分类号: H01L21/67253 , G03F7/70125 , G03F7/705 , G03F7/70525 , G03F7/706 , G03F7/70633
摘要: A system for manufacturing a semiconductor device which predicts a difference in registration error between a circuit pattern and an overlay mark from a pattern dimension, illumination conditions and the wave aberration of an exposure lens, feeds a correction value based on the predicted difference back to an exposure device and modifies an overlay inspection data control limit.
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74.
公开(公告)号:US06639348B1
公开(公告)日:2003-10-28
申请号:US09531453
申请日:2000-03-20
申请人: Hiroshi Ito , Shunichi Matsumoto , Kiyoshi Sento , Kazuyuki Nishimura , Nobuhiko Hosotani , Masatoshi Akiyama
发明人: Hiroshi Ito , Shunichi Matsumoto , Kiyoshi Sento , Kazuyuki Nishimura , Nobuhiko Hosotani , Masatoshi Akiyama
IPC分类号: H01J3100
CPC分类号: H01J29/861 , H01J29/863
摘要: A color cathode ray tube includes an evacuated envelope having a generally rectangular panel portion, a narrow neck portion having a circular cross-section and a funnel portion tapering down from a panel-portion side thereof toward a neck-portion side thereof for connecting the panel portion and the neck portion, a three-color phosphor screen formed on an inner surface of the panel portion, an electron gun housed in the neck portion, and an internal conductive film extending from an inner wall of the neck portion to an inner wall of the funnel portion. The funnel portion is provided with a yoke-mounting portion of generally truncated quadrilateral-pyramidal shape for mounting a beam deflection yoke therearound on the neck-portion side of the funnel portion. The internal conductive film is formed of a first part and a second part, the first part is formed of graphite, metallic oxide and potassium silicate, and the second part is formed of graphite and potassium silicate. The first part extends from the neck portion in the vicinity of a forward end of the electron gun to a position in the yoke-mounting portion spaced a distance in a range of 60 mm to 150 mm from a splice line between the neck portion and the funnel portion, and the second part overlaps with the first part at opposing ends thereof and extends to a vicinity of a seal line between the funnel portion and the panel portion.
摘要翻译: 一种彩色阴极射线管包括具有大致矩形的面板部分的抽真空的外壳,具有圆形横截面的窄颈部和从其面板部分侧向其颈部侧向下锥形的漏斗部分,用于连接面板 部分和颈部,形成在面板部分的内表面上的三色荧光屏,容纳在颈部中的电子枪,以及从颈部的内壁延伸到内壁的内部导电膜 漏斗部分。 漏斗部分设置有大致截头四边形锥形的轭安装部分,用于在漏斗部分的颈部侧上安装光束偏转线圈。 内部导电膜由第一部分和第二部分形成,第一部分由石墨,金属氧化物和硅酸钾形成,第二部分由石墨和硅酸钾形成。 第一部分从电子枪的前端附近的颈部延伸到轭架安装部分中的与颈部和颈部之间的接合线间隔60mm至150mm的范围内的位置 漏斗部分,并且第二部分在其相对端处与第一部分重叠并延伸到漏斗部分和面板部分之间的密封线附近。
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公开(公告)号:US5463095A
公开(公告)日:1995-10-31
申请号:US260237
申请日:1994-06-14
摘要: A process for the production of esters, comprising allowing an olefin, carbon monoxide and an alcohol to react in the presence of hydrogen fluoride, in which the esters can be produced at high yields at a low temperature for a short period of time, the esters can be easily separated from a reaction solution, hydrogen fluoride can be recycled, the esters can be produced at a low cost, a mixture of esters can be easily produced, the kinetic viscosity of the mixture of the esters can be easily adjusted and the coloring of, and an increase in the viscosity of, the esters can be prevented.
摘要翻译: 一种生产酯的方法,包括使烯烃,一氧化碳和醇在氟化氢存在下反应,其中酯可以在低温下以高产率在短时间内生产,酯 可以容易地从反应溶液中分离,氟化氢可以循环使用,可以低成本生产酯,可以容易地生产酯的混合物,可以容易地调节酯的混合物的动力粘度,并且着色 并且可以防止酯的粘度增加。
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公开(公告)号:US4460794A
公开(公告)日:1984-07-17
申请号:US386588
申请日:1982-06-09
CPC分类号: C07C45/49
摘要: Alkylbenzaldehyde is continuously produced in high yield from alkylbenzene by formylation with carbon monoxide in the presence of HF--BF.sub.3, where the alkylbenzene, HF--BF.sub.3 and carbon monoxide under a carbon monoxide partial pressure of at least 5 kg/cm.sup.2 absolute are introduced into the reactor to continuously carry out complexing of the alkylbenzene with HF--BF.sub.3 and formylation with the carbon monoxide successively in one and same reactor.
摘要翻译: 在HF-BF 3存在下,用一氧化碳进行甲酰化从烷基苯连续制备烷基苯甲醛,其中将烷基苯,HF-BF 3和一氧化碳分压为至少5kg / cm2绝对的一氧化碳引入到 反应器中连续进行烷基苯与HF-BF 3的络合,并在一个反应器中依次用一氧化碳进行甲酰化反应。
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公开(公告)号:US4368336A
公开(公告)日:1983-01-11
申请号:US233304
申请日:1981-02-11
IPC分类号: C07C49/76 , B01J27/00 , B01J27/12 , C07B61/00 , C07C45/00 , C07C45/49 , C07C47/542 , C07C67/00
CPC分类号: C07C45/49
摘要: A xylene mixture containing at least one of m-xylene and o-xylene is formylated by carbon monoxide in the presence of hydrogen fluoride and boron trifluoride at a molar ratio of boron trifluoride to sum total of m-xylene and o-xylene in the xylene mixture of not more than 1.5 to selectively and correspondingly produce at least one of 2,4-dimethylbenzaldehyde and 3,4-dimethylbenzaldehyde.
摘要翻译: 包含间二甲苯和邻二甲苯中的至少一种的二甲苯混合物在氟化氢和三氟化硼存在下,通过一氧化碳以三氟化硼的摩尔比与二甲苯中的间二甲苯和邻二甲苯的总和相加来甲酰化 不超过1.5的混合物选择性地并相应地产生2,4-二甲基苯甲醛和3,4-二甲基苯甲醛中的至少一种。
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