公开(公告)号：US20130112670A1

公开(公告)日：2013-05-09

申请号：US13550638

申请日：2012-07-17

申请人： Ken'etsu YOKOGAWA ,  Masatoshi Miyake ,  Takashi Uemura ,  Masaru Izawa ,  Satoshi Sakai

发明人： Ken'etsu YOKOGAWA ,  Masatoshi Miyake ,  Takashi Uemura ,  Masaru Izawa ,  Satoshi Sakai

IPC分类号： B23K9/00

CPC分类号： H01J37/32091 ,  H01J37/32522 ,  H01L21/324 ,  H01L21/67115

摘要： Provided is a heat treatment apparatus that is high in thermal efficiency and can reduce surface roughness of a substrate to be treated even when a specimen is heated at 1200° C. or higher.The heat treatment apparatus heating the specimen includes a heating plate heated by plasma formed in an area of a gap to heat the specimen.

摘要翻译： 提供一种热处理装置，其热效率高，即使在1200℃以上的加热条件下，也能够降低被处理基板的表面粗糙度。 加热试样的热处理装置包括由等离子体加热的加热板，所述等离子体形成在间隙的区域中以加热试样。

公开(公告)号：US07918945B2

公开(公告)日：2011-04-05

申请号：US10771294

申请日：2004-02-05

申请人： Masaru Izawa ,  Kunio Goto

发明人： Masaru Izawa ,  Kunio Goto

IPC分类号： C23C22/08 ,  C23C22/00

CPC分类号： C23C22/08 ,  C23C22/00 ,  C23C22/12 ,  C23C22/18 ,  Y10T428/13 ,  Y10T428/264 ,  Y10T428/265

摘要： A method of manufacturing a surface treated oil well pipe comprising performing chemical conversion treatment on an oil well pipe having a steel composition containing 0.5-13% Cr using a chemical conversion treatment liquid containing zinc and phosphoric acid or manganese and phosphoric acid and further containing potassium tetraborate to form a chemical conversion film of a zinc-phosphate type or a manganese phosphate type, wherein the chemical conversion treatment is carried out in the absence of fluoride ions.

摘要翻译： 一种表面处理油井管的制造方法，其特征在于，在使用含有锌，磷酸或锰，磷酸的化学转化处理液的含有0.5-13％Cr的钢组成的油井管上进行化学转化处理， 四硼酸盐以形成磷酸锌型或磷酸锰型的化学转化膜，其中化学转化处理在不存在氟离子的情况下进行。

公开(公告)号：US20080319709A1

公开(公告)日：2008-12-25

申请号：US12128364

申请日：2008-05-28

申请人： Masaru KURIHARA ,  Masaru Izawa ,  Junichi Tanaka

发明人： Masaru KURIHARA ,  Masaru Izawa ,  Junichi Tanaka

IPC分类号： G01B21/00

CPC分类号： H01L22/12 ,  H01J2237/2813

摘要： A dimension of a specific part of a semiconductor device is measured with high accuracy and at a high speed.The invention provides a dimension measuring apparatus used for measuring a dimension of a semiconductor device having a first pattern of repeated structure and a second pattern that is linear and formed on the first pattern to extend over the repeated structure. The dimension measuring apparatus comprises: a shape information acquisition means, which acquires information on a shape of the first pattern; a width value acquisition means, which acquires a width value of each portion of the second pattern on a basis of an observation result of the second pattern by a microscope; an analytic area setting means, which sets a plurality of analytic areas on the second pattern such that the analytic areas are adapted for the first pattern's shape acquired by the shape information acquisition means; and a dimension determining means, which extracts, for each of the set analytic areas, width values of portions included in the analytic area in question out of width values acquired by the width value acquisition means, and uses the extracted width values to determine a dimension of the second pattern at portions overlapping the first pattern.

摘要翻译： 半导体器件的特定部分的尺寸以高精度和高速度被测量。 本发明提供了一种用于测量具有重复结构的第一图案的半导体器件的尺寸的尺寸测量装置，以及线性形成在第一图案上以在重复结构上延伸的第二图案。 尺寸测量装置包括：形状信息获取装置，其获取关于第一图案的形状的信息; 宽度值获取装置，其基于通过显微镜的第二图案的观察结果获取第二图案的每个部分的宽度值; 分析区域设置装置，其在第二图案上设置多个分析区域，使得分析区域适于由形状信息获取装置获取的第一图案的形状; 以及维度确定装置，其针对每个所设定的分析区域提取由所述宽度值获取装置获取的宽度值中包含在所述分析区域中的部分的宽度值，并且使用所提取的宽度值来确定尺寸 在与第一图案重叠的部分处的第二图案。

公开(公告)号：US07145146B2

公开(公告)日：2006-12-05

申请号：US10788275

申请日：2004-03-01

申请人： Taro Ogawa ,  Toshiki Sugawara ,  Kazuhiko Hosomi ,  Masataka Shirai ,  Toshio Katsuyama ,  Kaoru Umemura ,  Masaru Izawa ,  Kazuhiko Sagara ,  Hiroshi Kakibayashi

发明人： Taro Ogawa ,  Toshiki Sugawara ,  Kazuhiko Hosomi ,  Masataka Shirai ,  Toshio Katsuyama ,  Kaoru Umemura ,  Masaru Izawa ,  Kazuhiko Sagara ,  Hiroshi Kakibayashi

IPC分类号： G01N21/35

CPC分类号： G01N21/31 ,  B01L3/502715 ,  B01L2200/027 ,  B01L2300/0654 ,  B01L2300/0816 ,  B01L2300/0887 ,  G01N21/05 ,  G01N2021/0346 ,  G01N2021/058 ,  G01N2201/0873

摘要： A micro-spectroscopic measuring device having a structure in which a spectroscopic element made of an array of photonic crystals with defects, flow paths for introducing a sample, and light detecting elements with sensitivity to a band from near infrared to infrared are stacked.

摘要翻译： 具有这样的结构的微分光学测量装置被堆叠，其中由具有缺陷的光子晶体阵列制成的分光元件，用于引入样品的流动路径和对从近红外线到红外线的频带具有灵敏度的光检测元件。

公开(公告)号：US06645870B2

公开(公告)日：2003-11-11

申请号：US09928500

申请日：2001-08-14

申请人： Nobuyuki Negishi ,  Masaru Izawa

发明人： Nobuyuki Negishi ,  Masaru Izawa

IPC分类号： H01L2100

CPC分类号： H01L21/02063 ,  H01L21/31116 ,  H01L21/76802 ,  H01L21/76897 ,  H01L2924/0002 ,  H01L2924/3011 ,  H01L2924/00

摘要： Disclosed is a process for fabricating a semiconductor device, which efficiently suppresses a damage layer formed on a base silicon substrate or an interconnection layer and removes a high resistivity layer in the formation of a contact hole, thereby reducing a contact resistance. The contact hole is formed in an etching step of reducing ion energy and an oxygen flow rate as an etching depth progresses, thereby suppressing the damage layer formed on the base. The reduction of the contact resistance is achieved by using a step of removing the high resistivity layer using hydrogen or a hydrogen-containing gas plasma.

摘要翻译： 公开了一种半导体器件的制造方法，其有效地抑制形成在基底硅基板或互连层上的损伤层，并且在形成接触孔时去除高电阻率层，从而降低接触电阻。 在蚀刻深度进行时，以减少离子能量和氧气流量的蚀刻工序形成接触孔，由此抑制形成在基材上的损伤层。 通过使用氢或含氢气体等离子体去除高电阻率层的步骤来实现接触电阻的降低。

公开(公告)号：US08833089B2

公开(公告)日：2014-09-16

申请号：US12538986

申请日：2009-08-11

申请人： Takumi Tandou ,  Masaru Izawa

发明人： Takumi Tandou ,  Masaru Izawa

IPC分类号： F25B9/00 ,  F25B45/00 ,  H01J37/32

CPC分类号： H01J37/32091 ,  F25B45/00 ,  F25B2500/06 ,  H01J2237/2001

摘要： In a plasma processing apparatus, a check valve is installed close to a refrigerant inlet of a compressor. When performing maintenance of a sample stage, refrigerant collected from a refrigerant flow path is temporarily stored in a flow path section extending from an expansion valve to the check valve, making it possible to perform the maintenance without changing the amount of refrigerant in the refrigerating cycle. With a refrigerant storage tank, a refrigerant supply valve, and a refrigerant discharge valve included in the refrigerating cycle, when maintenance of the compressor, a condenser, or the expansion valve is performed, the refrigerant collected from the refrigerating cycle can be put in use again.

摘要翻译： 在等离子体处理装置中，止回阀安装在压缩机的制冷剂入口附近。 在对样品台进行维护时，从制冷剂流路收集的制冷剂暂时存储在从膨胀阀向止回阀延伸的流路部中，能够不改变制冷循环中的制冷剂量而进行维护 。 在冷冻循环中包括的制冷剂储存箱，制冷剂供给阀和制冷剂排出阀中，当执行压缩机，冷凝器或膨胀阀的维护时，可以使用从制冷循环中收集的制冷剂 再次。

公开(公告)号：US08333847B2

公开(公告)日：2012-12-18

申请号：US13039656

申请日：2011-03-03

申请人： Masaru Izawa ,  Kunio Goto

发明人： Masaru Izawa ,  Kunio Goto

IPC分类号： C23C22/18 ,  C23C22/12

CPC分类号： C23C22/08 ,  C23C22/00 ,  C23C22/12 ,  C23C22/18 ,  Y10T428/13 ,  Y10T428/264 ,  Y10T428/265

摘要： A chemical conversion treatment liquid which can stably form a phosphate-type chemical conversion film on a steel material for a joint portion of an oil well steel pipe containing 0.5-13% Cr is developed.Using a chemical conversion treatment liquid to which a prescribed amount of potassium is added, a chemical conversion film containing a prescribed amount of potassium compounds and having a prescribed thickness can be formed on the threaded surface of a joint portion of an oil well steel pipe.

摘要翻译： 开发了可以在含有0.5-13％Cr的油井钢管的接头部分的钢材上稳定地形成磷酸酯型化学转化膜的化学转化处理液。 使用含有规定量的钾的化学转化处理液，能够在油井钢管的接合部的螺纹面上形成含有规定量的钾化合物并具有规定厚度的化学转化膜。

公开(公告)号：US20120273132A1

公开(公告)日：2012-11-01

申请号：US13546071

申请日：2012-07-11

申请人： Takumi Tandou ,  Masaru Izawa

发明人： Takumi Tandou ,  Masaru Izawa

IPC分类号： H05H1/24 ,  B44C1/22

CPC分类号： H01L21/67109 ,  H01L21/67017

摘要： A plasma processing apparatus includes a processing chamber, a wafer table, a refrigerant passage disposed inside the wafer table in which a refrigerant flows, a refrigeration cycle comprising the refrigerant passage in the wafer table as a first evaporator in which the refrigerant is evaporated as a result of a heat-exchange therein, a compressor, a condenser and an expansion valve, a second evaporator, and a controlling unit which adjusts a number of rotations of the compressor based upon a degree of dryness of the refrigerant at a position on the refrigeration cycle after passing through the first evaporation in a range in which dry-out does not occur in the first evaporator, and the dryness of the refrigerant being determined based upon an amount of a heat exchange during the evaporation of the refrigerant in the second evaporator.

摘要翻译： 等离子体处理装置包括处理室，晶片台，布置在制冷剂流动的晶片台内部的制冷剂通道，制冷循环，其包括作为制冷剂蒸发的第一蒸发器的晶片台中的制冷剂通路， 其中热交换的结果，压缩机，冷凝器和膨胀阀，第二蒸发器和控制单元，其基于制冷剂位置上的制冷剂的干燥程度来调节压缩机的转数 在第一蒸发器中不发生干燥的范围内经过第一蒸发之后的循环，并且基于在第二蒸发器中的制冷剂的蒸发期间的热交换量来确定制冷剂的干燥度。

公开(公告)号：US07838792B2

公开(公告)日：2010-11-23

申请号：US11512118

申请日：2006-08-30

申请人： Takumi Tandou ,  Ken'etsu Yokogawa ,  Seiichiro Kanno ,  Masaru Izawa

发明人： Takumi Tandou ,  Ken'etsu Yokogawa ,  Seiichiro Kanno ,  Masaru Izawa

IPC分类号： B23K9/02 ,  H05H1/24

CPC分类号： H01L21/67248 ,  H01J2237/2001 ,  H01L21/67109

摘要： A plasma processing apparatus is provided which processes a sample held on a sample table arranged in a process chamber in a vacuum container by using a plasma formed in the process chamber. The plasma processing apparatus comprises: paths arranged in the sample table in which a coolant is supplied and vaporized as it flows; a refrigeration cycle having the sample table, a compressor, a condenser and an expansion valve connected in that order and having the coolant circulate therein; coolant passages to cause the coolant that has passed through the expansion valve to branch and then merge with a coolant returning from the paths in the sample table toward the compressor; and a regulator to adjust an amount of coolant passing through the paths in the sample table and circulating in the refrigeration cycle and an amount of coolant branching and flowing through the coolant passages.

摘要翻译： 提供一种等离子体处理装置，其通过使用在处理室中形成的等离子体处理在真空容器中布置在处理室中的样品台上保持的样品。 等离子体处理装置包括：布置在样品台中的通道，其中供应冷却剂并在其流动时蒸发; 具有样品台，压缩机，冷凝器和膨胀阀的制冷循环，其顺序连接并使冷却剂在其中循环; 冷却剂通道使已经通过膨胀阀的冷却剂分支，然后与从样品台中的路径朝向压缩机返回的冷却剂合流; 以及调节器，用于调节通过样品台中的路径并在制冷循环中循环的冷却剂的量以及分配并流过冷却剂通道的冷却剂量。

公开(公告)号：US07666266B2

公开(公告)日：2010-02-23

申请号：US11445151

申请日：2006-06-02

申请人： Masaru Izawa ,  Kunio Godo ,  Yoshihisa Ujita ,  Noriko Ujita, legal representative ,  Takahiro Takano

发明人： Masaru Izawa ,  Kunio Godo ,  Yoshihisa Ujita ,  Takahiro Takano

IPC分类号： C23C22/78 ,  C23C22/18 ,  C23C22/00

CPC分类号： F16L15/001 ,  C23C22/78 ,  F16L58/182

摘要： By subjecting a threaded joint for OCTG (oil country tubular goods) to surface conditioning with an aqueous solution of potassium tetraborate or sodium tetraborate prior to manganese phosphate chemical conversion treatment, a manganese phosphate chemical conversion coating having coarse crystal grains with an average crystal grain diameter of 10-110 micrometers is formed on the surface of the steel member which may be any steel including a high Cr steel. This manganese phosphate chemical conversion coating can hold a large amount of a liquid lubricant, and it is effective at preventing the occurrence of galling at the time of makeup of a threaded joint for OCTG.

摘要翻译： 通过在磷酸锰化学转化处理之前，用四甲基硼酸钾或四硼酸钠的水溶液对OCTG（油料管状物品）的螺纹接头进行表面调理，将具有平均晶粒直径的粗晶粒的磷酸锰化学转化膜 在钢构件的表面上形成10-110微米，其可以是包括高Cr钢的任何钢。 该磷酸锰化学转化膜可以容纳大量的液体润滑剂，并且在OCTG的螺纹接头构成时防止发生磨损是有效的。