公开(公告)号：US20050030508A1

公开(公告)日：2005-02-10

申请号：US10939334

申请日：2004-09-14

申请人： Noriaki Tokuda ,  Kenichi Shiraishi

发明人： Noriaki Tokuda ,  Kenichi Shiraishi

IPC分类号： G03F7/20 ,  G03B27/72

CPC分类号： G03F7/70066 ,  G03F7/70191 ,  G03F7/70358 ,  G03F7/70558 ,  G03F7/70941

摘要： A control system adjusts the exposure of a wafer according to the transfer error of a pattern line width caused when a certain integrated exposure over the whole shot areas is made a desired value when a pattern is transferred to a wafer and according to information corresponding to the desired value of the integrated exposure stored in a storage device, then performing scanning exposure. As a result, influences such as of fog exposure due to flare are mitigated, and the uniformity of line width distribution with high precision is ensure over the shot regions on the wafer, achieving pattern transfer to each shot region.

摘要翻译： 控制系统根据当将图案转印到晶片时在整个拍摄区域上的某个集成曝光被制成期望值时根据图案线宽度的转印误差调整晶片的曝光，并且根据对应于 存储在存储装置中的集成曝光的期望值，然后执行扫描曝光。 结果，减轻了由于火炬引起的雾化的影响，并且确保了晶片上的照射区域的高精度的线宽分布的均匀性，从而实现了到每个照射区域的图案转印。

公开(公告)号：US06813321B1

公开(公告)日：2004-11-02

申请号：US09582229

申请日：2000-07-21

申请人： Hisakazu Katoh ,  Akinori Hashimoto ,  Yuichi Iwadate ,  Kazuhiko Shibuya ,  Fumiaki Minematsu ,  Shigeyuki Itoh ,  Tomohiro Saito ,  Kenichi Shiraishi ,  Akihiro Horii ,  Shoji Matsuda ,  Soichi Shinjo

发明人： Hisakazu Katoh ,  Akinori Hashimoto ,  Yuichi Iwadate ,  Kazuhiko Shibuya ,  Fumiaki Minematsu ,  Shigeyuki Itoh ,  Tomohiro Saito ,  Kenichi Shiraishi ,  Akihiro Horii ,  Shoji Matsuda ,  Soichi Shinjo

IPC分类号： H03D322

CPC分类号： H04L27/2273 ,  H04L7/042 ,  H04L27/0014 ,  H04L2027/0057 ,  H04L2027/0067 ,  H04L2027/0077 ,  H04L2027/0095

摘要： A digital demodulator which will need no absolute phasing circuit is provided. A known-pattern BPSK signal generating circuit 6 generates the same known-pattern BPSK signal as a known-pattern BPSK signal in a received digital modulated wave in synchronism with the known-pattern BPSK signal in the received digital modulated wave, a carrier-reproducing phase error detecting circuit 7 has a phase error table where one of reference phases in a signal point position of a demodulation baseband signal is made a convergence point, a phase error voltage corresponding to a phase error between a phase determined from the signal point position of the demodulation baseband signals and a phase convergence point is sent out, by enable-controlling a carrier-reproducing loop filter 8 according to the known-pattern BPSK signal outputted from the known-pattern BPSK signal generating circuit 6, the phase error voltage is smoothed, and carrier reproduction is performed while controlling the frequency of a reproduced carrier according to the smoothed output so that the phase in the signal point position coincides with the phase convergence point.

摘要翻译： 提供了不需要绝对定相电路的数字解调器。 已知模式BPSK信号发生电路6与接收的数字调制波中的已知模式BPSK信号同步地产生与接收的数字调制波中已知模式BPSK信号相同的已知模式BPSK信号，载波再现 相位误差检测电路7具有相位误差表，其中解调基带信号的信号点位置中的参考相位之一成为会聚点，相位误差电压对应于从信号点位置确定的相位之间的相位误差 通过根据从已知模式BPSK信号发生电路6输出的已知模式BPSK信号启用控制载波再现环路滤波器8，发送解调基带信号和相位收敛点，平滑相位误差电压 并且在根据平滑输出控制再现载波的频率的同时执行载波再现，使得si中的相位 点位置与相位收敛点一致。

公开(公告)号：US06690745B1

公开(公告)日：2004-02-10

申请号：US09463233

申请日：2000-01-21

申请人： Akihiro Horii ,  Kenichi Shiraishi

发明人： Akihiro Horii ,  Kenichi Shiraishi

IPC分类号： H04L2706

CPC分类号： H04L27/2332 ,  H04L2027/0065

摘要： A received signal phase detecting circuit in provided in which the circuit scale is small. The circuit functions so as to capture a frame synchronizing signal from a demodulated baseband signal, extract a symbol stream during the period of frame synchronizing signal from the demodulated baseband signal through delay circuits (41, 42) at a timing matching the bit stream of the captured synchronizing signal, rotating the phase of a corresponding symbol extracted from the symbol stream when the big in the bit in the bit stream is logic “0” by 80°, outputting the symbol after the phase rotation and a corresponding symbol extracted from the symbol stream when the bit in the bit stream is logic “1” from a 0°/180° phase rotating circuit (43), operating the cumulative average of the output from the 0°/180° phase rotating circuit (43) for a specific period through cumulative averaging circuits (45, 46), rotating the phase of the outputs therefrom through a 22.5° phase rotating circuit (48), and determining the phase of the output therefrom by a phase determining circuit (49).

摘要翻译： 一种接收信号相位检测电路，其中电路规模小。 电路起作用以从解调的基带信号中捕获帧同步信号，在帧同步信号的周期期间，通过延迟电路（41,42），在与 捕获的同步信号，当比特流中的比特中的大比特是逻辑“0”80°时，旋转从符号流提取的对应符号的相位，在相位旋转之后输出符号，并从符号中提取相应的符号 当位流中的位是从0°/ 180°相位旋转电路（43）的逻辑“1”时，对来自0°/ 180°相位旋转电路（43）的输出的累积平均值进行特定操作 通过累积平均电路（45,46），通过22.5°相位旋转电路（48）旋转其输出的相位，并且通过相位确定电路（49）确定其输出的相位。

公开(公告)号：US06678342B1

公开(公告)日：2004-01-13

申请号：US09446460

申请日：1999-12-22

申请人： Akihiro Horii ,  Kenichi Shiraishi

发明人： Akihiro Horii ,  Kenichi Shiraishi

IPC分类号： H04L704

CPC分类号： H04L27/2273 ,  H04L27/22 ,  H04L27/2332 ,  H04L2027/0046 ,  H04L2027/0067

摘要： A small-scale absolute-phasing synchronization capturing circuit for absolute phasing of a received signal by selectively transmitting a baseband signal demodulated through a demodulator (1), a baseband signal subjected to phase rotation through a remapper (11), a baseband signal output from a first inverting means, a baseband signal output from a second inverting means based on the phase angle of the received signal relative to the phase rotation of the transmission signal. The most significant bit in the demodulated baseband signal and the most significant bit in the baseband signal subjected to phase rotation through the remapper (11) are extracted and a frame synchronization signal is captured according to the extracted significant bit.

摘要翻译： 一种用于通过选择性地发送通过解调器（1）解调的基带信号，通过再映射器（11）进行相位旋转的基带信号，从基站信号输出的基带信号，用于绝对定相接收信号的小型绝对定相同步捕获电路 第一反相装置，基于接收信号相对于发送信号的相位旋转的相位角从第二反相装置输出的基带信号。 解调的基带信号中的最高有效位和通过再映射器（11）进行相位旋转的基带信号中的最高有效位被提取，并且根据提取的有效位捕获帧同步信号。

公开(公告)号：US06301295B1

公开(公告)日：2001-10-09

申请号：US09257048

申请日：1999-02-25

申请人： Atsushi Shinoda ,  Kenichi Shiraishi

发明人： Atsushi Shinoda ,  Kenichi Shiraishi

IPC分类号： H04L2706

CPC分类号： H04L27/206 ,  H03D5/00

摘要： The present invention provides an AM modulated wave eliminating circuit which is capable of extracting a digital modulated wave by cancelling an AM modulated wave from an AM data multiplex modulated wave. A composite wave is composed of an AM carrier wave in-phase signal, an AM carrier wave reverse-phase signal and a digital modulated wave is extracted from an AM data multiplex modulated wave composed of an AM stereo modulated wave multiplexed with a digital modulated wave within the same frequency band, values corresponding to different phase deflection angles of an AM stereo output from a phase level generator (21) are multiplied by the AM carrier wave in-phase signal with multipliers (221 through 22n), multiplication outputs are added to the composite wave with adders (231 through 23n), a phase deflection angle corresponding to an output at a minimum level out of addition outputs is determined with a phase presumer (24), a value corresponding to a determined phase deflection angle is selected from an output of a phase level generator (21) with a phase level selector (25), a selected value is multiplied by an AM carrier wave in-phase signal component with a multiplier (26), a multiplication output is added to the composite wave with an adder (27) and an addition output is used as a digital modulated wave.

摘要翻译： 本发明提供一种能够通过从AM数据多路复用调制波消除AM调制波来提取数字调制波的AM调制波消除电路。 复合波由AM载波同相信号组成，AM载波反相信号和数字调制波从由与数字调制波复用的AM立体声调制波组成的AM数据多路调制波提取 在相同频带内，对应于来自相位电平发生器（21）的AM立体声输出的不同相位偏转角的值与乘法器（221至22n）与AM载波同相信号相乘，乘法输出被加到 具有加法器（231至23n）的复合波，相对于相位输出的最小电平处的输出的相位偏转角由相位推算器（24）确定，与所确定的相位偏转角对应的值从 用相位电平选择器（25）输出相位电平发生器（21），所选择的值与乘法器（26）乘以AM载波同相信号分量，乘法器 使用加法器（27）将阳离子输出添加到复合波，并且使用相加输出作为数字调制波。

公开(公告)号：US5201588A

公开(公告)日：1993-04-13

申请号：US857769

申请日：1992-03-26

申请人： Katsuyuki Sakai ,  Kenichi Shiraishi ,  Shigeru Kida ,  Ryoichi Kawai

发明人： Katsuyuki Sakai ,  Kenichi Shiraishi ,  Shigeru Kida ,  Ryoichi Kawai

IPC分类号： B41J2/32 ,  B41J11/14 ,  B41J15/04 ,  B65H16/02

CPC分类号： B41J15/042 ,  B65H2301/4137

摘要： A printer in which a rolled recording paper is housed in a recording paper cassette formed integrally with a printer proper and openably with respect thereto, and one of a thermal recording head or a platen roller is disposed at an openable free end of the cassette with the other disposed in the printer proper, whereby printing onto the recording paper is effected by conducting electrical current to the recording head while the recording paper being clamped by the recording head and platen roller.

公开(公告)号：US5077618A

公开(公告)日：1991-12-31

申请号：US431775

申请日：1989-11-06

申请人： Katsuyuki Sakai ,  Kenichi Shiraishi ,  Motohiko Hayashi ,  Sadaaki Shimonaga

发明人： Katsuyuki Sakai ,  Kenichi Shiraishi ,  Motohiko Hayashi ,  Sadaaki Shimonaga

IPC分类号： H04N1/00 ,  H04N1/04 ,  H04N1/12 ,  H04N1/193

CPC分类号： H04N1/0461 ,  H04N1/1215 ,  H04N1/0464 ,  H04N1/193

摘要： A facsimile apparatus has a single conveying roller in it, above which an image sensor is set and below which a printing head is set. Pressing pins are set respectively near the upper and lower ends of components supporting the conveying roller to freely rotate. In transmission, the lower pressing pins keep away the printing head from the conveying roller and the image sensor presses an original document onto the conveying roller. In reception, the upper pressing pins keep away the image sensor from the conveying roller and the printing head presses the recording paper onto the conveying roller. In this way, structure of the facsimile apparatus is simplified.

公开(公告)号：US09335639B2

公开(公告)日：2016-05-10

申请号：US13317169

申请日：2011-10-12

申请人： Kenichi Shiraishi ,  Ryuichi Hoshika ,  Tomoharu Fujiwara

发明人： Kenichi Shiraishi ,  Ryuichi Hoshika ,  Tomoharu Fujiwara

IPC分类号： G03B27/42 ,  G03F7/20

CPC分类号： G03F7/70608 ,  G03F7/2041 ,  G03F7/70341 ,  G03F7/70858

摘要： A liquid immersion device that has an mixing mechanism that mixes and dissolves a predetermined substance for adjusting specific resistance of the liquid, which is supplied onto a liquid repellent film on the surface of an object (member) of a projection optical system placed on the light emitting side of projection optical system, and an liquid immersion area is formed by supplying the liquid in which the predetermined liquid is dissolved onto the liquid repellent film.

摘要翻译： 一种液浸装置，其具有混合并溶解用于调节液体的电阻率的预定物质的混合机构，所述混合机构被供给到放置在所述光上的投影光学系统的物体（构件）的表面上的防液膜 投影光学系统的发射侧，并且通过将预定液体溶解在其上的液体供应到防液膜上而形成液浸区域。

公开(公告)号：US08810767B2

公开(公告)日：2014-08-19

申请号：US12453269

申请日：2009-05-05

申请人： Hiroyuki Nagasaka ,  Kenichi Shiraishi ,  Soichi Owa ,  Shigeru Hirukawa

发明人： Hiroyuki Nagasaka ,  Kenichi Shiraishi ,  Soichi Owa ,  Shigeru Hirukawa

IPC分类号： G03B27/52 ,  G03F7/20

CPC分类号： G03F7/70925 ,  G03F7/70341 ,  G03F7/707 ,  G03F7/7085 ,  G03F7/7095 ,  G03F7/70958 ,  G03F7/70975

摘要： A lithography apparatus includes a part having a photocatalytic coating. The lithography apparatus can be an extreme ultraviolet lithography apparatus or an immersion lithography apparatus.

摘要翻译： 光刻设备包括具有光催化涂层的部件。 光刻设备可以是极紫外光刻设备或浸没光刻设备。

公开(公告)号：US08724077B2

公开(公告)日：2014-05-13

申请号：US13299891

申请日：2011-11-18

申请人： Hiroyuki Nagasaka ,  Kenichi Shiraishi ,  Tomoharu Fujiwara ,  Soichi Owa ,  Akihiro Miwa

发明人： Hiroyuki Nagasaka ,  Kenichi Shiraishi ,  Tomoharu Fujiwara ,  Soichi Owa ,  Akihiro Miwa

IPC分类号： G03B27/32 ,  G03B27/42 ,  G03F7/20

CPC分类号： G03F7/70341 ,  G03F7/70858 ,  G03F7/70891

摘要： An exposure apparatus includes an immersion space forming member (70) which fills an optical path space (K1) for exposure light (EL) with a first liquid (LQ) to form an immersion space, and a temperature regulating mechanism (60) which suppresses a change in the temperature of the immersion space forming member (70) accompanying deactivation of formation of the immersion space.

摘要翻译： 曝光装置包括：浸没空间形成部件，其用第一液体（LQ）填充曝光用光（EL）的光路空间（K1），形成浸渍空间;以及温度调节机构（60），其抑制 伴随着形成浸入空间的失活，浸渍空间形成部件（70）的温度变化。