-
71.
公开(公告)号:US20220392511A1
公开(公告)日:2022-12-08
申请号:US17887903
申请日:2022-08-15
Applicant: Micron Technology, Inc.
Inventor: Karthik Sarpatwari , Kamal M. Karda , Durai Vishak Nirmal Ramaswamy
IPC: G11C11/402 , H01L27/105 , G11C11/409 , H01L29/78 , H01L29/22
Abstract: Some embodiments include apparatuses and methods operating the apparatuses. One of the apparatuses includes a first data line located over a substrate, a second data line located over the first data line, a third data line located over the second data line and electrically separated from the first and second data lines, and a memory cell coupled to the first, second, and third data lines. The memory cell includes a first material between the first and second data lines and electrically coupled to the first and second data lines; a second material located over the first data line and the first material, the second material electrically separated from the first material and electrically coupled to the third data line; and a memory element electrically coupled to the second material and electrically separated from the first material and first and second data lines.
-
公开(公告)号:US20220344338A1
公开(公告)日:2022-10-27
申请号:US17237664
申请日:2021-04-22
Applicant: Micron Technology, Inc.
Inventor: Litao Yang , Si-Woo Lee , Haitao Liu , Kamal M. Karda
IPC: H01L27/108 , H01L27/11507 , H01L27/11514
Abstract: Systems, methods, and apparatuses are provided for self-aligned etch back for vertical three dimensional (3D) memory. One example method includes depositing layers of a first dielectric material, a semiconductor material, and a second dielectric material to form a vertical stack, forming first vertical openings to form elongated vertical, pillar columns with first vertical sidewalls in the vertical stack, and forming second vertical openings through the vertical stack to expose second vertical sidewalls. Further, the example method includes removing portions of the semiconductor material to form first horizontal openings and depositing a fill in the first horizontal openings. The method can further include forming third vertical openings to expose third vertical sidewalls in the vertical stack and selectively removing the fill material to form a plurality of second horizontal openings in which to form horizontally oriented storage nodes.
-
公开(公告)号:US11424363B2
公开(公告)日:2022-08-23
申请号:US17170082
申请日:2021-02-08
Applicant: Micron Technology, Inc.
Inventor: Haitao Liu , Kamal M. Karda , Albert Fayrushin
IPC: H01L29/78 , H01L29/423 , H01L29/51 , H01L27/11556 , H01L27/11582 , H01L21/28 , H01L27/11597 , H01L29/792 , H01L27/1157 , H01L27/1159 , H01L29/66
Abstract: A programmable charge-storage transistor comprises channel material, insulative charge-passage material, charge-storage material, a control gate, and charge-blocking material between the charge-storage material and the control gate. The charge-blocking material comprises a non-ferroelectric insulator material and a ferroelectric insulator material. Arrays of elevationally-extending strings of memory cells of memory cells are disclosed, including methods of forming such. Other embodiments, including method, are disclosed.
-
公开(公告)号:US11335684B2
公开(公告)日:2022-05-17
申请号:US17003077
申请日:2020-08-26
Applicant: Micron Technology, Inc.
Inventor: Kamal M. Karda , Karthik Sarpatwari , Haitao Liu , Durai Vishak Nirmal Ramaswamy
IPC: H01L27/00 , H01L29/00 , H01L27/105 , H01L27/12 , H01L29/788 , H01L29/24 , H01L29/786
Abstract: Some embodiments include apparatuses and methods using a substrate, a pillar having a length perpendicular to the substrate, a first conductive plate, a second conductive plate, a memory cell located between the first and second conductive plates and electrically separated from the first and second conductive plates, and a conductive connection. The first conductive plate is located in a first level of the apparatus and being separated from the pillar by a first dielectric located in the first level. The second conductive plate is located in a second level of the apparatus and being separated from the pillar by a second dielectric located in the second level. The memory cell includes a first semiconductor material located in a third level of the apparatus between the first and second levels and contacting the pillar and the conductive connection, and a second semiconductor material located in a fourth level of the apparatus between the first and second levels and contacting the pillar.
-
75.
公开(公告)号:US11164889B2
公开(公告)日:2021-11-02
申请号:US17235848
申请日:2021-04-20
Applicant: Micron Technology, Inc.
Inventor: Kamal M. Karda , Durai Vishak Nirmal Ramaswamy , Haitao Liu
IPC: G11C11/22 , H01L27/1159 , H01L29/78 , H01L29/165 , H01L29/08 , H01L27/11592 , H01L29/10
Abstract: Some embodiments include a ferroelectric transistor having an active region which includes a first source/drain region, a second source/drain region, and a body region between the first and second source/drain regions. The body region has a different semiconductor composition than at least one of the first and second source/drain regions to enable replenishment of carrier within the body region. An insulative material is along the body region. A ferroelectric material is along the insulative material. A conductive gate material is along the ferroelectric material.
-
76.
公开(公告)号:US20210242221A1
公开(公告)日:2021-08-05
申请号:US17235848
申请日:2021-04-20
Applicant: Micron Technology, Inc.
Inventor: Kamal M. Karda , Durai Vishak Nirmal Ramaswamy , Haitao Liu
IPC: H01L27/1159 , H01L29/78 , H01L29/165 , H01L29/08 , H01L27/11592 , G11C11/22 , H01L29/10
Abstract: Some embodiments include a ferroelectric transistor having an active region which includes a first source/drain region, a second source/drain region, and a body region between the first and second source/drain regions. The body region has a different semiconductor composition than at least one of the first and second source/drain regions to enable replenishment of carrier within the body region. An insulative material is along the body region. A ferroelectric material is along the insulative material. A conductive gate material is along the ferroelectric material.
-
公开(公告)号:US20210184044A1
公开(公告)日:2021-06-17
申请号:US17170082
申请日:2021-02-08
Applicant: Micron Technology, Inc.
Inventor: Haitao Liu , Kamal M. Karda , Albert Fayrushin
IPC: H01L29/78 , H01L29/423 , H01L27/11582 , H01L29/51 , H01L27/11556 , H01L21/28 , H01L27/11597 , H01L29/792 , H01L27/1157 , H01L27/1159 , H01L29/66
Abstract: A programmable charge-storage transistor comprises channel material, insulative charge-passage material, charge-storage material, a control gate, and charge-blocking material between the charge-storage material and the control gate. The charge-blocking material comprises a non-ferroelectric insulator material and a ferroelectric insulator material. Arrays of elevationally-extending strings of memory cells of memory cells are disclosed, including methods of forming such. Other embodiments, including method, are disclosed.
-
78.
公开(公告)号:US10998338B2
公开(公告)日:2021-05-04
申请号:US16188432
申请日:2018-11-13
Applicant: Micron Technology, Inc.
Inventor: Kamal M. Karda , Durai Vishak Nirmal Ramaswamy , Haitao Liu
IPC: G11C11/12 , H01L27/1159 , H01L29/78 , H01L29/165 , H01L29/08 , H01L27/11592 , G11C11/22 , H01L29/10
Abstract: Some embodiments include a ferroelectric transistor having an active region which includes a first source/drain region, a second source/drain region, and a body region between the first and second source/drain regions. The body region has a different semiconductor composition than at least one of the first and second source/drain regions to enable replenishment of carrier within the body region. An insulative material is along the body region. A ferroelectric material is along the insulative material. A conductive gate material is along the ferroelectric material.
-
公开(公告)号:US10943953B2
公开(公告)日:2021-03-09
申请号:US16118110
申请日:2018-08-30
Applicant: Micron Technology, Inc.
Inventor: Kamal M. Karda , Haitao Liu , Durai Vishak Nirmal Ramaswamy
IPC: H01L27/24 , G11C13/00 , H01L27/12 , H01L21/8234 , H01L29/49 , H01L29/66 , H01L29/78 , H01L45/00 , H01L29/786 , G11C11/401 , G11C11/16
Abstract: A semiconductor device is disclosed. The semiconductor device includes a hybrid transistor including a gate electrode, a drain material, a source material, and a channel material operatively coupled between the drain material and the source material. The source material and the drain material include a low bandgap high mobility material relative to the channel material that is high bandgap low mobility material. Memory arrays, semiconductor devices, and systems incorporating memory cells, and hybrid transistors are also disclosed, as well as related methods for forming and operating such devices.
-
公开(公告)号:US20210066502A1
公开(公告)日:2021-03-04
申请号:US16983841
申请日:2020-08-03
Applicant: Micron Technology, Inc.
Inventor: Kamal M. Karda , Haitao Liu , Durai Vishak Nirmal Ramaswamy
Abstract: Some embodiments include a ferroelectric transistor having a first electrode and a second electrode. The second electrode is offset from the first electrode by an active region. A transistor gate is along a portion of the active region. The active region includes a first source/drain region adjacent the first electrode, a second source/drain region adjacent the second electrode, and a body region between the first and second source/drain regions. The body region includes a gated channel region adjacent the transistor gate. The active region includes at least one barrier between the second electrode and the gated channel region which is permeable to electrons but not to holes. Ferroelectric material is between the transistor gate and the gated channel region.
-
-
-
-
-
-
-
-
-