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公开(公告)号：US08748076B2
公开(公告)日：2014-06-10
申请号：US13345355
申请日：2012-01-06
CPC分类号： G03F7/0045 , G03F7/0046 , G03F7/0397 , G03F7/2041
摘要： There is disclosed a resist composition comprising at least: (A) a polymer containing one or more repeating units having a structure shown by the following general formula (1) and/or (2), an alkaline-solubility of the polymer being increased by an acid, (B) a photo acid generator generating, with responding to a high energy beam, a sulfonic acid shown by the following general formula (3), and (C) an onium sulfonate shown by the following general formula (4). There can be a resist composition showing not only excellent LWR and pattern profile but also extremely good performance in pattern-fall resistance, and to provide a patterning process using the same.
摘要翻译： 公开了一种抗蚀剂组合物，其至少包含：（A）含有一个或多个具有下列通式（1）和/或（2）所示结构的重复单元的聚合物，该聚合物的碱溶性通过 一种酸，（B）一种光酸反应器，其响应于高能束，产生由以下通式（3）表示的磺酸，和（C）由以下通式（4）表示的磺酸盐。 可以存在不仅具有优异的LWR和图案轮廓的抗蚀剂组合物，而且还具有极好的抗倒伏性能，并且提供使用其的图案化工艺。
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公开(公告)号：US08535869B2
公开(公告)日：2013-09-17
申请号：US13214295
申请日：2011-08-22
CPC分类号： C07D333/46 , G03F7/0045 , G03F7/0046 , G03F7/0048 , G03F7/0392 , G03F7/0397 , G03F7/2041
摘要： A sulfonium salt of a naphthylsulfonium cation having a hydrophilic phenolic hydroxyl group or ethylene glycol chain with a specific anion is provided. The sulfonium salt is used as a photoacid generator to form a resist composition which when processed by immersion lithography, offers advantages of restrained dissolution in the immersion water and less pattern dependence or dark-bright difference.
摘要翻译： 提供具有亲水性酚羟基或具有特定阴离子的乙二醇链的萘基锍阳离子的锍盐。 锍盐用作光致酸发生剂以形成抗蚀剂组合物，当通过浸渍光刻加工时，具有抑制浸入水中的溶解和较少图案依赖性或暗亮差异的优点。
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公开(公告)号：US08438586B2
公开(公告)日：2013-05-07
申请号：US13366601
申请日：2012-02-06
申请人： Daisuke Takasaka , Tetsuya Tamura , Masaki Nakatani , Katsuo Ichinohe , Riklya Ueshima , Tomohiro Kobayashi , Yoshiyuki Nakagawa , Yasuhide Mizuta
发明人： Daisuke Takasaka , Tetsuya Tamura , Masaki Nakatani , Katsuo Ichinohe , Riklya Ueshima , Tomohiro Kobayashi , Yoshiyuki Nakagawa , Yasuhide Mizuta
IPC分类号： G11B7/085
CPC分类号： G11B7/08582 , G11B7/22
摘要： A drive device for an optical disc apparatus, wherein the tooth comprises a tooth body fixed to an optical pickup, two support pieces projecting from the tooth body toward a lead screw, two resin spring pieces provided with a base part on the projecting end of each of the support pieces and extending in a direction orthogonal to the axial direction of the lead screw, a plate part having a base part on the extending ends of the resin spring pieces and formed in a direction parallel to the axial direction of the lead screw, meshing cogs formed on the plate part on the side near the lead screw, and a linking part formed across the space between the resin spring pieces.
摘要翻译： 一种光盘装置的驱动装置，其特征在于，所述齿包括固定在光学拾取器上的齿体，从所述齿体朝向导螺杆突出的两个支撑件，在每个所述突出端的突出端上设置有基部的两个树脂弹簧片 的支撑片，并且在与所述丝杠的轴向正交的方向上延伸;板部，其在所述树脂弹簧片的延伸端部具有与所述丝杠的轴向平行的方向形成的基部， 形成在靠近导螺杆的一侧的板部分上的啮合齿，以及跨越树脂弹簧片之间的空间形成的连接部。
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公开(公告)号：US20130065183A1
公开(公告)日：2013-03-14
申请号：US13606297
申请日：2012-09-07
申请人： Tomohiro Kobayashi , Jun Hatakeyama , Masashi Iio , Yuuki Suka , Koji Hasegawa , Yuji Harada
发明人： Tomohiro Kobayashi , Jun Hatakeyama , Masashi Iio , Yuuki Suka , Koji Hasegawa , Yuji Harada
CPC分类号： G03F7/0046 , G03F7/0397 , G03F7/11 , G03F7/2041 , G03F7/325
摘要： A resist composition is provided comprising a polymer comprising recurring units having a protected hydroxyl group, a photoacid generator, an organic solvent, and a hydroxyl-free polymeric additive comprising fluorinated recurring units. A negative pattern is formed by coating the resist composition, prebaking to form a resist film, exposing, baking, and developing the exposed film in an organic solvent-based developer to selectively dissolve the unexposed region of resist film.
摘要翻译： 提供了抗蚀剂组合物，其包含聚合物，其包含具有被保护的羟基的重复单元，光致酸产生剂，有机溶剂和包含氟化重复单元的无羟基聚合物添加剂。 通过涂覆抗蚀剂组合物，预烘烤以形成抗蚀剂膜，在有机溶剂基显影剂中曝光，烘烤和显影曝光的膜以选择性地溶解抗蚀剂膜的未曝光区域，形成负图案。
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公开(公告)号：US20120324486A1
公开(公告)日：2012-12-20
申请号：US13466210
申请日：2012-05-08
申请人： Daisuke TAKASAKA , Tetsuya Tamura , Masaki Nakatani , Katsuo Ichinohe , Rikiya Ueshima , Tomohiro Kobayashi , Yoshiyuki Nakagawa , Yasuhide Mizuta
发明人： Daisuke TAKASAKA , Tetsuya Tamura , Masaki Nakatani , Katsuo Ichinohe , Rikiya Ueshima , Tomohiro Kobayashi , Yoshiyuki Nakagawa , Yasuhide Mizuta
IPC分类号： G11B17/04
CPC分类号： G11B17/0284
摘要： An optical disc device comprises a disc clamper. The disc clamper is provided with: a first member provided with a first circular disc, and with a plurality of upstanding pieces formed with predetermined spaces therebetween along a circle concentric to the first circular disc, the upstanding pieces having an engaging claw at the distal end thereof; and a second member provided with a second circular disc in which are formed a plurality of through-holes into which the plurality of upstanding pieces are inserted, and with a plurality of peripheral walls formed with predetermined spaces therebetween along a circle concentric to the second circular disc. Rotation in a state where the upstanding pieces have been inserted into the through-holes through the spaces between the peripheral walls causes the engaging claws to engage the peripheral walls.
摘要翻译： 光盘装置包括盘夹持器。 盘夹持器设置有：第一构件，设置有第一圆盘，并且多个直立片沿着与第一圆盘同心的圆形在其间形成有预定的空间，直立件在远端具有接合爪 的; 以及设置有第二圆盘的第二构件，其中形成有多个直孔插入其中的多个通孔，并且沿着与第二圆周同心的圆形在其间形成有预定间隔的多个周壁 光盘。 直立片已经通过周壁之间的空间插入通孔的状态下的旋转导致接合爪与周壁接合。
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公开(公告)号：US20120288796A1
公开(公告)日：2012-11-15
申请号：US13469929
申请日：2012-05-11
CPC分类号： G03F7/0045 , G03F7/0046 , G03F7/0397 , G03F7/11 , G03F7/2041 , G03F7/325
摘要： A resist composition is provided comprising a polymer comprising recurring units having a hydroxyl group substituted with an acid labile group, an onium salt PAG capable of generating a sulfonic acid, imide acid or methide acid, and an onium salt PAG capable of generating a carboxylic acid. A resist film of the composition is improved in dissolution contrast during organic solvent development, and from which a hole pattern having minimized nano-edge roughness can be formed via positive/negative reversal.
摘要翻译： 提供了一种抗蚀剂组合物，其包含聚合物，其包含具有被酸不稳定基团取代的羟基的重复单元，能够产生磺酸的鎓盐PAG，酰亚胺酸或甲基化酸，以及能够产生羧酸的鎓盐PAG 。 组合物的抗蚀剂膜在有机溶剂显影期间的溶解对比度得到改善，并且可以通过正/负反转形成具有最小化的纳米边缘粗糙度的孔图案。
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公开(公告)号：US20120276485A1
公开(公告)日：2012-11-01
申请号：US13456705
申请日：2012-04-26
IPC分类号： G03F7/20
CPC分类号： G03F7/0397
摘要： A negative pattern is formed by applying a resist composition onto a substrate, baking, exposing to high-energy radiation, baking (PEB), and developing the exposed resist film in an organic solvent developer to selectively dissolve the unexposed region of resist film. The resist composition comprising a hydrogenated ROMP polymer and a (meth)acrylate resin displays a high dissolution contrast in organic solvent development, and exhibits high dry etch resistance even when the acid labile group is deprotected through exposure and PEB.
摘要翻译： 通过将抗蚀剂组合物涂布在基材上，烘烤，暴露于高能量辐射，烘烤（PEB）和在有机溶剂显影剂中曝光的抗蚀剂膜显影以选择性地溶解抗蚀剂膜的未曝光区域，形成负型图案。 包含氢化ROMP聚合物和（甲基）丙烯酸酯树脂的抗蚀剂组合物在有机溶剂显影中表现出高的溶解对比度，并且即使当酸不稳定基团通过曝光和PEB脱保护时也显示出高的耐干蚀刻性。
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公开(公告)号：US20120214100A1
公开(公告)日：2012-08-23
申请号：US13396081
申请日：2012-02-14
申请人： Tomohiro Kobayashi , Youichi Ohsawa , Yuji Harada , Yuki Suka
发明人： Tomohiro Kobayashi , Youichi Ohsawa , Yuji Harada , Yuki Suka
CPC分类号： G03F7/0045 , G03F7/0046 , G03F7/0382 , G03F7/0397 , G03F7/11 , G03F7/2041
摘要： There is disclosed a resist composition, wherein the composition is used in a lithography and comprises at least: a polymer (A) that becomes a base resin whose alkaline-solubility changes by an acid, a photo acid generator (B) generating a sulfonic acid represented by the following general formula (1) by responding to a high energy beam, and a polymer additive (C) represented by the following general formula (2). There can be provided a resist composition showing not only excellent lithography properties but also a high receding contact angle, and in addition, being capable of suppressing a blob defect in both the immersion exposures using and not using a top coat; and a patterning process using the same.
摘要翻译： 公开了一种抗蚀剂组合物，其中该组合物用于光刻，并且至少包括：成为其酸溶性变化的碱性树脂的聚合物（A），产生磺酸的光酸产生剂（B） 由高能束响应的以下通式（1）表示，和由以下通式（2）表示的聚合物添加剂（C）。 可以提供抗蚀剂组合物，其不仅显示出优异的光刻性能，而且还具有高的后退接触角，此外，还能够使用并不使用顶涂层来抑制浸没曝光中的斑点缺陷; 以及使用其的图案化处理。
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公开(公告)号：US20120204196A1
公开(公告)日：2012-08-09
申请号：US13366539
申请日：2012-02-06
申请人： Daisuke TAKASAKA , Tetsuya Tamura , Masaki Nakatani , Katsuo Ichinohe , Rikiya Ueshima , Tomohiro Kobayashi , Yoshiyuki Nakagawa , Yasuhide Mizuta
发明人： Daisuke TAKASAKA , Tetsuya Tamura , Masaki Nakatani , Katsuo Ichinohe , Rikiya Ueshima , Tomohiro Kobayashi , Yoshiyuki Nakagawa , Yasuhide Mizuta
IPC分类号： G11B17/05
CPC分类号： G11B17/0288
摘要： A drive device for an optical disc apparatus comprising: a lever arm for supporting a traverse chassis while allowing the traverse chassis to be raised and lowered; and a cam slider in cam engagement with the lever arm, the cam slider moving in a direction substantially orthogonal to a movement direction of the lever arm to cause the lever arm to move up and down; wherein the lever arm is provided with a boss projecting toward the cam slider, and a supported part supported by the cam slider in a chucked position of an optical disc; and wherein the cam slider is provided with a groove in engagement with the boss, and a support part for supporting the supported part in the chucked position of the optical disc.
摘要翻译： 一种用于光盘装置的驱动装置，包括：用于在允许横动底盘升高和降低的同时支撑横动底盘的杠杆臂; 以及凸轮与所述杠杆臂凸轮接合的凸轮滑块，所述凸轮滑块沿与所述杠杆臂的移动方向大致正交的方向移动，以使所述杠杆臂上下移动; 其中所述杆臂设置有朝向所述凸轮滑块突出的凸台，以及由所述凸轮滑块支撑在光盘的夹持位置的支撑部分; 并且其中所述凸轮滑块设置有与所述凸台接合的凹槽，以及支撑部分，用于将所述支撑部分支撑在所述光盘的夹持位置。
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公开(公告)号：US20120204195A1
公开(公告)日：2012-08-09
申请号：US13366601
申请日：2012-02-06
申请人： Daisuke Takasaka , Tetsuya Tamura , Masaki Nakatani , Katsuo Ichinohe , Rikiya Ueshima , Tomohiro Kobayashi , Yoshiyuki Nakagawa , Yasuhide Mizuta
发明人： Daisuke Takasaka , Tetsuya Tamura , Masaki Nakatani , Katsuo Ichinohe , Rikiya Ueshima , Tomohiro Kobayashi , Yoshiyuki Nakagawa , Yasuhide Mizuta
IPC分类号： G11B17/03
CPC分类号： G11B7/08582 , G11B7/22
摘要： A drive device for an optical disc apparatus, wherein the tooth comprises a tooth body fixed to an optical pickup, two support pieces projecting from the tooth body toward a lead screw, two resin spring pieces provided with a base part on the projecting end of each of the support pieces and extending in a direction orthogonal to the axial direction of the lead screw, a plate part having a base part on the extending ends of the resin spring pieces and formed in a direction parallel to the axial direction of the lead screw, meshing cogs formed on the plate part on the side near the lead screw, and a linking part formed across the space between the resin spring pieces.
摘要翻译： 一种光盘装置的驱动装置，其特征在于，所述齿部包括固定在光学拾取器上的齿体，从所述齿体朝向导螺杆突出的两个支撑片，在每个所述突出的端部设置有基部的两个树脂弹簧片 的支撑片，并且在与所述丝杠的轴向正交的方向上延伸;板部，其在所述树脂弹簧片的延伸端部具有与所述丝杠的轴向平行的方向形成的基部， 形成在靠近导螺杆的一侧的板部分上的啮合齿，以及跨越树脂弹簧片之间的空间形成的连接部。
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