公开(公告)号：US20090309022A1

公开(公告)日：2009-12-17

申请号：US12480443

申请日：2009-06-08

申请人： Yasuhiro GUNJI ,  Akira Fujii ,  Hiroyuki Takahashi ,  Ryuichi Funatsu ,  Toshifumi Honda ,  Takashi Hiroi ,  Hiroshi Makino

发明人： Yasuhiro GUNJI ,  Akira Fujii ,  Hiroyuki Takahashi ,  Ryuichi Funatsu ,  Toshifumi Honda ,  Takashi Hiroi ,  Hiroshi Makino

IPC分类号： G01N23/00 ,  H01J3/14

CPC分类号： G01N23/2251 ,  G01N2223/646 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/202 ,  H01J2237/216 ,  H01J2237/2482 ,  H01J2237/2817

摘要： An object of the present invention provides an inspection apparatus and an inspection method which use an electron beam image to accurately detect a defect that is difficult to detect in an optical image, the apparatus and method also enabling prevention of a possible decrease in focus accuracy of an inspection image which affect the defect detection. To accomplish the object, the present invention includes a height measurement section which measures height of the electron beam irradiation position on the substrate after the substrate is loaded onto a movable stage, a height correction processing section which corrects the measured height, and a control section which adjusts a focus of the electron beam according to the height corrected by the height correction processing section, wherein a stage position set when the height measurement section measures the height differs from a stage position set when the substrate is irradiated with the electron beam, and the height correction processing section corrects a possible deviation in height resulting from movement from the stage position for the height measurement to the stage position for the electron beam irradiation.

摘要翻译： 本发明的目的是提供一种使用电子束图像来精确地检测光学图像中难以检测的缺陷的检查装置和检查方法，该装置和方法还能够防止可能降低聚焦精度 影响缺陷检测的检查图像。 为了实现该目的，本发明包括一个高度测量部分，其测量将基板装载到可移动平台上之后的基板上的电子束照射位置的高度，校正测量高度的高度校正处理部分，以及控制部分 其根据由高度校正处理部校正的高度来调整电子束的焦点，其中当高度测量部分测量高度时设置的台阶位置与当基板被电子束照射时设定的台位置不同，以及 高度校正处理部分校正由高度测量的台位置到用于电子束照射的台位置的运动导致的高度偏差。

公开(公告)号：US07616852B2

公开(公告)日：2009-11-10

申请号：US12043171

申请日：2008-03-06

申请人： Shigemi Ohtsu ,  Toshihiko Suzuki ,  Akira Fujii ,  Kazutoshi Yatsuda ,  Keishi Shimizu ,  Eiichi Akutsu

发明人： Shigemi Ohtsu ,  Toshihiko Suzuki ,  Akira Fujii ,  Kazutoshi Yatsuda ,  Keishi Shimizu ,  Eiichi Akutsu

IPC分类号： G02B6/30

CPC分类号： G02B6/4219 ,  G02B6/4214 ,  G02B6/43

摘要： An optical substrate includes: a submount; a planar optical element which is mounted on the submount; a pair of positioning members which are disposed at an interval across the planar optical element on the submount; an optical waveguide in which a core and a clad are formed by a flexible material; and a holding member which holds the optical waveguide to allow a tip end of the optical waveguide to be inserted between the pair of positioning members, and the optical waveguide to be bent to extend parallel to the submount.

摘要翻译： 光学基板包括：基座; 安装在基座上的平面光学元件; 一对定位构件，其在所述基座上的所述平面光学元件的间隔设置; 其中芯和包层由柔性材料形成的光波导; 以及保持构件，其保持光波导以允许光波导的末端插入在所述一对定位构件之间，并且待弯曲的光波导平行于所述底座延伸。

公开(公告)号：US07539384B2

公开(公告)日：2009-05-26

申请号：US11783032

申请日：2007-04-05

申请人： Akira Fujii ,  Toshihiko Suzuki ,  Keishi Shimizu ,  Kazutoshi Yatsuda ,  Shigemi Ohtsu ,  Eiichi Akutsu

发明人： Akira Fujii ,  Toshihiko Suzuki ,  Keishi Shimizu ,  Kazutoshi Yatsuda ,  Shigemi Ohtsu ,  Eiichi Akutsu

IPC分类号： G02B6/10

CPC分类号： G02B6/138 ,  G02B6/4224

摘要： An optical waveguide comprises: a core for propagating light; a clad covering the core; and a line convex part extending along a line different from the core, the line convex part comprising a cavity used as a positioning mark inside the line convex part.

摘要翻译： 光波导包括：用于传播光的芯; 覆盖核心的覆层; 以及沿着与所述芯不同的线延伸的线凸部，所述线凸部包括用作所述线凸部内的定位标记的空腔。

公开(公告)号：US20090067786A1

公开(公告)日：2009-03-12

申请号：US12053468

申请日：2008-03-21

申请人： Shigemi OHTSU ,  Toshihiko Suzuki ,  Keishi Shimizu ,  Kazutoshi Yatsuda ,  Akira Fujii ,  Eiichi Akutsu

发明人： Shigemi OHTSU ,  Toshihiko Suzuki ,  Keishi Shimizu ,  Kazutoshi Yatsuda ,  Akira Fujii ,  Eiichi Akutsu

IPC分类号： G02B6/26

CPC分类号： G02B6/2817 ,  G02B6/138

摘要： An optical waveguide device includes: a waveguide core that guides light; a mirror surface that deflects light coming from the waveguide core by 90°; a main waveguide core that guides light deflected at the mirror surface; a waveguide core for monitoring that branches the light deflected at the mirror surface off from the main waveguide core, and guides the light in a different direction, the mirror surface being disposed at a branching portion of the waveguide core for monitoring; and a clad portion that surrounds the waveguide core, the main waveguide core and the waveguide core for monitoring.

摘要翻译： 光波导装置包括：引导光的波导芯; 使来自波导芯的光偏转90°的镜面; 引导在镜面偏转的光的主波导芯; 用于监测的波导芯，其将在镜面处偏转的光分离主波导芯，并且引导不同方向的光，所述镜表面设置在波导芯的分支部分处以进行监视; 以及围绕波导芯，主波导芯和用于监视的波导芯的包层部分。

公开(公告)号：US07382960B2

公开(公告)日：2008-06-03

申请号：US11704985

申请日：2007-02-12

申请人： Shigemi Ohtsu ,  Toshihiko Suzuki ,  Keishi Shimizu ,  Kazutoshi Yatsuda ,  Akira Fujii ,  Eiichi Akutsu

发明人： Shigemi Ohtsu ,  Toshihiko Suzuki ,  Keishi Shimizu ,  Kazutoshi Yatsuda ,  Akira Fujii ,  Eiichi Akutsu

IPC分类号： G02B6/10 ,  G02B6/12

CPC分类号： G02B6/1221 ,  G02B6/10 ,  G02B6/138 ,  G02B6/43

摘要： An optical waveguide film that can supply power at extremely low cost, and a light transmission and reception module using this film are provided.A macromolecular optical waveguide film is composed of a square-shaped waveguide core which extends in a film length direction, a conductive wires which extends in the film length direction and is arranged in parallel with the waveguide core, and a cladding which surrounds the waveguide core and the conductive wire. The two conductive wires are provided, and the waveguide core is provided between the two conductive wires.

摘要翻译： 提供可以以极低成本提供电力的光波导膜，以及使用这种膜的光发射和接收模块。 大分子光波导膜由沿膜长度方向延伸的方形波导芯，沿着膜长度方向延伸并且与波导芯平行布置的导线和围绕波导芯的包层构成 和导线。 设置两根导线，并且将波导芯设置在两根导线之间。

公开(公告)号：US20070110182A1

公开(公告)日：2007-05-17

申请号：US11403854

申请日：2006-04-14

申请人： Masafumi Asai ,  Hidenori Sekiguchi ,  Akira Fujii

发明人： Masafumi Asai ,  Hidenori Sekiguchi ,  Akira Fujii

IPC分类号： H04L27/00 ,  H04L5/12 ,  H04B1/02 ,  H04B7/00 ,  H04L23/02

CPC分类号： H04B1/7174 ,  H04B1/71632

摘要： To realize variable control of the output value of impulses with a simple construction, the present device includes an impulse generating unit which generates impulses; and a control unit which controls an output value of impulses output from the impulse generating unit by changing an input signal that is input to the impulse generating unit for generating impulses.

摘要翻译： 为了以简单的结构实现脉冲输出值的可变控制，本装置包括产生脉冲的脉冲发生单元; 以及控制单元，其通过改变输入到脉冲发生单元的用于产生脉冲的输入信号来控制从脉冲发生单元输出的脉冲的输出值。

公开(公告)号：US20070085777A1

公开(公告)日：2007-04-19

申请号：US11563914

申请日：2006-11-28

申请人： Mitsutoshi Kuno ,  Osamu Sagano ,  Akira Fujii

发明人： Mitsutoshi Kuno ,  Osamu Sagano ,  Akira Fujii

IPC分类号： G09G3/22

CPC分类号： G09G3/006 ,  G06F3/147 ,  G09G3/2014 ,  G09G3/22 ,  G09G2300/043 ,  G09G2300/0443 ,  G09G2300/0452 ,  G09G2300/06 ,  G09G2310/0218 ,  G09G2310/0267 ,  G09G2310/027 ,  G09G2310/0275 ,  G09G2320/0285 ,  G09G2320/029 ,  G09G2320/043 ,  G09G2330/02 ,  G09G2330/021 ,  G09G2330/028 ,  G09G2330/04 ,  G09G2330/045 ,  H01J31/127 ,  H01J2201/3165

摘要： An image display apparatus includes a display panel having an electron source, an acceleration electrode for accelerating electrons emitted from the electron source and phosphors for emitting light by collision of electrons accelerated by the acceleration electrode, and a detector for detecting a current flowing through the acceleration electrode during a non-display period. In addition, a controller is provided to decrease the luminance level, stop display driving or transmit warning information when the current detected becomes more than a predetermined value.

摘要翻译： 图像显示装置包括具有电子源的显示面板，用于加速从电子源发射的电子的加速电极和通过加速电极加速的电子的碰撞而发出光的荧光体和检测流过加速度的电流的检测器 电极在非显示期间。 此外，当检测到的电流变得大于预定值时，提供控制器以降低亮度级别，停止显示驱动或发送警告信息。

公开(公告)号：US20060275004A1

公开(公告)日：2006-12-07

申请号：US11274261

申请日：2005-11-16

申请人： Akira Fujii ,  Toshihiko Suzuki ,  Keishi Shimizu ,  Kazutoshi Yatsuda ,  Shigemi Ohtsu ,  Eiichi Akutsu

发明人： Akira Fujii ,  Toshihiko Suzuki ,  Keishi Shimizu ,  Kazutoshi Yatsuda ,  Shigemi Ohtsu ,  Eiichi Akutsu

IPC分类号： G02B6/10

CPC分类号： G02B6/2817 ,  G02B6/138

摘要： The present invention provides an optical waveguide, which at least includes: a waveguide core having a cavity therein; and a clad which encloses the periphery of the waveguide core and has a smaller refractive index than the waveguide core, wherein the optical waveguide changes a direction of a part or all of propagated light by using a part or all of an interface between the waveguide core and the cavity as a reflecting surface. The present invention further provides a method for manufacturing the optical waveguide, which at least includes: forming a core having a cavity therein on a substrate; applying an uncured clad material to a side surface and an upper portion of the core while maintaining the cavity which allows an atmospheric gas to be present in the cavity; and curing the clad material by heat or light to seal the gas in the cavity.

摘要翻译： 本发明提供一种光波导，其至少包括：其中具有空腔的波导芯; 以及包围波导芯的周边并且具有比波导芯更小的折射率的包层，其中光波导通过使用波导芯之间的界面的一部分或全部来改变传播光的一部分或全部的方向 和空腔作为反射面。 本发明还提供一种制造光波导的方法，其至少包括：在基板上形成具有空腔的芯; 将未固化的复合材料施加到所述芯的侧表面和上部，同时保持所述空腔，所述空腔允许所述空腔中存在大气气体; 并通过热或光固化包层材料以密封空腔中的气体。

公开(公告)号：US07073265B2

公开(公告)日：2006-07-11

申请号：US10776335

申请日：2004-02-12

申请人： Takeshi Senoo ,  Nozomu Okumura ,  Yasuhiro Suzuki ,  Isao Mizuno ,  Akira Fujii

发明人： Takeshi Senoo ,  Nozomu Okumura ,  Yasuhiro Suzuki ,  Isao Mizuno ,  Akira Fujii

IPC分类号： H01L41/08

CPC分类号： H01L41/0477 ,  H01L41/0471 ,  H01L41/083 ,  H01L41/0833 ,  H01L41/277

摘要： To provide a stacked piezoelectric device which is inexpensive and excellent in bonding strength between a piezoelectric layer and an internal electrode layer, the piezoelectric device comprises piezoelectric layers and internal electrode layers containing not less than 50 percent by weight of Cu stacked alternately. Between the internal electrode layer and the piezoelectric layer, there is a diffusion region formed by mutual diffusion of components of the internal electrode layer and the piezoelectric layer to the other layer and comprising at least one component of the piezoelectric material and Cu. The diffusion region occupies not less than 90 percent of area of interface between the internal electrode layer and the piezoelectric layer, and a thickness of the diffusion region is not more than 10 percent of a thickness of the internal electrode layer. A piezoelectric material constituting the piezoelectric layer preferably comprises PZT which is a Pb(Zr,Ti)O3— based oxide having a perovskite structure, and Pb, Cu, and O elements coexist in the diffusion region.

摘要翻译： 为了提供廉价且优良的压电层和内部电极层之间的接合强度的层压型压电元件，压电元件包括​​压电层和含有不少于50重量％的交替堆叠的Cu的内部电极层。 在内部电极层和压电体层之间存在扩散区域，该扩散区域通过将内部电极层和压电体层的成分相互扩散到另一层而形成，并且包括至少一种压电材料和Cu。 扩散区域占内部电极层和压电层之间的界面面积的90％以上，扩散区域的厚度不大于内部电极层的厚度的10％。 构成压电体层的压电材料优选含有作为Pb（Zr，Ti）O 3 3系氧化物的PZT，其具有钙钛矿结构，Pb，Cu，O元素共存于扩散区域。

公开(公告)号：US20050174554A1

公开(公告)日：2005-08-11

申请号：US11047675

申请日：2005-02-02

申请人： Tsukasa Sugawara ,  Akira Fujii

发明人： Tsukasa Sugawara ,  Akira Fujii

IPC分类号： H01L21/68 ,  G03B27/58 ,  H01L21/027

CPC分类号： G03B27/58

摘要： A method of controlling a stage comprising: acquiring a first moving speed of the stage based upon position information from a laser interferometer for measuring a position of the stage; controlling the moving speed of the stage based upon the first speed; determining a second moving speed of the stage based upon the number of rotation of a motor for moving the stage; controlling the moving speed of the stage based upon the second moving speed; and acquiring a ratio of the second moving speed to the first moving speed based upon the first moving speed.

摘要翻译： 一种控制舞台的方法，包括：基于来自用于测量舞台位置的激光干涉仪的位置信息，获取舞台的第一移动速度; 基于第一速度控制舞台的移动速度; 基于用于移动所述载物台的马达的转动次数来确定所述载物台的第二移动速度; 基于第二移动速度控制舞台的移动速度; 并且基于所述第一移动速度获取所述第二移动速度与所述第一移动速度的比率。