公开(公告)号：US20050005648A1

公开(公告)日：2005-01-13

申请号：US10498628

申请日：2003-06-30

申请人： Bong-Hoon Lee ,  Chan-Yong Park

发明人： Bong-Hoon Lee ,  Chan-Yong Park

IPC分类号： G02B6/00 ,  C03B37/014 ,  C03B37/018 ,  C03B37/07

CPC分类号： C03B37/0142 ,  C03B37/01486 ,  C03B2201/31 ,  C03B2207/06 ,  C03B2207/20 ,  C03B2207/36 ,  C03B2207/62 ,  C03B2207/66 ,  C03B2207/70

摘要： Disclosed are method and apparatus for fabricating an optical fiber preform in OVD (Outside Vapor Deposition) by depositing soot particles, generated by reaction of gas emitted from a burner, on a surface of a rotating mandrel. In the method and apparatus, it is controlled so that deposition concentration of the soot particles deposited on the preform is kept constant regardless of a radius of the preform or gradually increasing outward by keeping constant or gradually decreasing a trajectory velocity of a certain time on the surface of the rotating preform while depositing the soot particles.

摘要翻译： 公开了通过将通过从燃烧器发射的气体的反应产生的烟灰颗粒沉积在旋转心轴的表面上来制造OVD（外部气相沉积）中的光纤预制件的方法和装置。 在该方法和装置中，控制沉积在预成型体上的烟灰颗粒的沉积浓度保持恒定，而不管预成型件的半径如何，或者通过保持恒定或逐渐减小一定时间的轨迹速度而向外逐渐增加 旋转的预制件的表面，同时沉积烟灰颗粒。

公开(公告)号：US20050000251A1

公开(公告)日：2005-01-06

申请号：US10897784

申请日：2004-07-23

申请人： Franklin Dabby ,  Bedros Orchanian

发明人： Franklin Dabby ,  Bedros Orchanian

IPC分类号： C03B37/014 ,  C03B19/01 ,  C03B37/018

CPC分类号： C03B37/01486 ,  C03B37/01406 ,  C03B37/0142 ,  C03B2207/36 ,  C03B2207/66 ,  C03B2207/70 ,  C03B2207/80

摘要： A deposition system for depositing a chemical vapor onto a workpiece, including a deposition chamber having a plurality of components for performing chemical vapor deposition on the workpiece. The deposition chamber includes an inner skin made of Hasteloy for sealing the plurality of components and the workpiece from the air surrounding the deposition system, and an outer skin that encloses the inner skin and is separated from the inner skin by an air gap. The outer skin includes vents that create a convection current in the air gap between the inner skin and outer skin of the deposition chamber. The deposition system also has a gas panel for regulating the flow of gases and vapors into the deposition chamber, and a computer for controlling operation of the gas panel and the components in the deposition chamber.

摘要翻译： 一种用于将化学蒸气沉积到工件上的沉积系统，包括具有用于在工件上进行化学气相沉积的多个部件的沉积室。 沉积室包括由Hasteloy制成的内表皮，用于将多个部件和工件从围绕沉积系统的空气密封，外表皮包围内皮，并通过气隙与内皮隔开。 外皮包括在沉积室的内表皮和外表皮之间的气隙中产生对流的排气口。 沉积系统还具有用于调节进入沉积室的气体和蒸汽的流动的气体面板，以及用于控制气体面板和沉积室中的部件的操作的计算机。

公开(公告)号：US20030037568A1

公开(公告)日：2003-02-27

申请号：US10139358

申请日：2002-05-07

申请人： NIKON CORPORATION

发明人： Seishi Fujiwara ,  Hiroyuki Hiraiwa ,  Kazuhiro Nakagawa ,  Shouji Yajima ,  Norio Komine ,  Hiroki Jinbo

IPC分类号： C03B020/00 ,  C03B008/04

CPC分类号： C03B19/14 ,  C03B37/014 ,  C03B37/0142 ,  C03B2201/07 ,  C03B2207/66 ,  C03C3/06 ,  C03C4/0085 ,  C03C2201/12 ,  C03C2201/21 ,  C03C2201/23 ,  C03C2203/42 ,  C03C2203/46 ,  G03F7/2004 ,  Y02P40/57 ,  Y10S501/905

摘要： The invention relates to fluorine-containing silica glasses, and methods of their production. The silica glass may be used for an ultraviolet light optical system in which light in a wavelength region of 200 mn or less, such as an ArF (193 nm) excimer laser, is used The invention also relates to a projection exposure apparatus containing fluorine-containing glass of the invention.

摘要翻译： 本发明涉及含氟二氧化硅玻璃及其制造方法。 石英玻璃可以用于其中使用200nm以下的波长区域的光，例如ArF（193nm）准分子激光器的紫外光学系统。本发明还涉及一种投影曝光装置， 含有玻璃的本发明。

公开(公告)号：US20030024273A1

公开(公告)日：2003-02-06

申请号：US10201136

申请日：2002-10-11

申请人： Sumitomo Electric Industries, Ltd.

发明人： Tomohiro Ishihara

IPC分类号： C03B037/07

CPC分类号： C03B37/01486 ,  C03B37/01413 ,  C03B2207/36 ,  C03B2207/52 ,  C03B2207/66 ,  C03B2207/70 ,  C03B2207/80

摘要： A method and an apparatus for producing a glass preform having a uniform J ratio by adjusting the weight of glass particles to be deposited on a starting glass rod. The method uses an OVD method by which glass particles are successively deposited on an external cylindrical surface of a starting glass rod to create a growing soot layer thereon and the soot layer is then vitrified into a transparent glassy body, wherein the glass particle deposition is conducted by adjusting an amount of glass particles to be deposited based on data of J ratio fluctuations (where the J ratio is a ratio of an outer diameter of a glass preform to an outer diameter of a starting glass rod) of a previously produced glass preform in its longitudinal direction so that the glass preform to be produced can attain a uniform J ratio in its longitudinal direction.

摘要翻译： 通过调节待沉积在起始玻璃棒上的玻璃颗粒的重量来制造具有均匀J比率的玻璃预制品的方法和装置。 该方法使用OVD方法，通过该方法将玻璃颗粒依次沉积在起始玻璃棒的外部圆柱形表面上以在其上产生增长的烟灰层，然后将烟灰层玻璃化成透明玻璃体，其中进行玻璃颗粒沉积 通过基于J比率波动（其中J比率是玻璃预制棒的外径与起始玻璃棒的外径的比率）之前的玻璃预制件的数据来调节要沉积的玻璃颗粒的量 其长度方向使得待制造的玻璃预制件在其纵向方向上可获得均匀的J比。

公开(公告)号：US20030003228A1

公开(公告)日：2003-01-02

申请号：US10181822

申请日：2002-07-23

发明人： Toshihiro Ooishi ,  Motonori Nakamura ,  Yoshio Yokoyama

IPC分类号： B05D001/12

CPC分类号： C03B37/0142 ,  C03B2207/52 ,  C03B2207/66 ,  C03B2207/70

摘要： In a method in which a rotating starting rod and glass particle synthesizing burners are relatively reciprocally moved in parallel with each other, so that while a turn-back position of the relative movement is shifted in a predetermined direction, glass particles (soot) are deposited on a surface of the starting rod to thereby produce a glass particles deposit, the deposition of soot is performed under a condition that an interval between a burner located at any one of both ends in a direction of the relative movement and a burner located adjacent thereto is shorter than another interval between any two of intermediate burners other than the two burners located at the both ends.

摘要翻译： 在旋转起始杆和合成燃烧器的玻璃粒子相互平行移动的方法中，使得相对运动的折返位置在预定方向上偏移的同时，沉积玻璃粒子（烟灰） 在起始杆的表面上，由此产生玻璃颗粒沉积物，在相对运动方向上的两端中的任一个的燃烧器与位于其相邻的燃烧器之间的间隔的情况下进行烟灰的沉积 比位于两端的两个燃烧器之外的任何两个中间燃烧器之间的间隔短。

公开(公告)号：US20020090466A1

公开(公告)日：2002-07-11

申请号：US10045339

申请日：2001-11-07

发明人： Heinz Fabian

IPC分类号： B05D001/04

CPC分类号： C03B37/0142 ,  C03B19/1423 ,  C03B2207/46 ,  C03B2207/52 ,  C03B2207/66 ,  C03B2207/70

摘要： In a known method for producing an SiO2 blank, SiO2 particles are formed in a burner flame of a deposition burner and are deposited under the effect of an electrical field on a substrate. Starting therefrom, in order to indicate a simple and inexpensive method by means of which blanks can be produced with a predetermined, in particular axially homogeneous, mass and density distribution, it is suggested according to the invention that the geometrical shape of the burner flame (8) is adjusted by the effect of the electrical field (9) in dependence upon the geometrical parameter of a deposition surface (12; 21) of the substrate (1) that is assigned to the burner flame (8). An apparatus suited for performing the method comprises a substrate, at least one deposition burner for producing SiO2 particles in a burner flame assigned to the deposition burner, a measuring device for sensing a geometrical parameter in the area of a deposition surface of the SiO2 blank, and a pair of electrodes connected to a source of voltage for producing an electrical field (9) which is operative in the area of the burner flame and is adjustable in dependence upon the geometrical parameter of that deposition surface (21; 21) of the substrate that is assigned to the burner flame (8).

摘要翻译： 在已知的用于制备SiO 2坯料的方法中，SiO 2颗粒在沉积燃烧器的燃烧器火焰中形成，并且在电场作用下沉积在衬底上。 从其开始，为了表示简单且便宜的方法，通过该方法可以以预定的，特别是轴向均匀的质量和密度分布来生产坯料，根据本发明，建议燃烧器火焰的几何形状 8）由电场（9）的影响根据分配给燃烧器火焰（8）的衬底（1）的沉积表面（12; 21）的几何参数来调节。 适用于执行该方法的装置包括：衬底，用于在分配给沉积燃烧器的燃烧器火焰中产生SiO 2颗粒的至少一个沉积燃烧器;用于感测SiO 2坯料的沉积表面区域中的几何参数的测量装置， 以及连接到电压源的一对电极，用于产生电场（9），所述电场在所述燃烧器火焰的区域中操作，并且可根据所述衬底的所述沉积表面（21; 21）的几何参数来调节 分配给燃烧器火焰（8）。

公开(公告)号：US20020078714A1

公开(公告)日：2002-06-27

申请号：US10017767

申请日：2001-12-13

发明人： Lindwood A. Bird ,  James H. Faler ,  Dale R. Powers ,  Bruce W. Reding ,  Manivannan Ravichandran

IPC分类号： C03B037/018

CPC分类号： C03B37/01406 ,  C03B37/0142 ,  C03B37/0146 ,  C03B37/0253 ,  C03B37/027 ,  C03B37/02736 ,  C03B37/029 ,  C03B2205/30 ,  C03B2205/40 ,  C03B2205/44 ,  C03B2205/63 ,  C03B2205/80 ,  C03B2205/81 ,  C03B2207/50 ,  C03B2207/52 ,  C03B2207/62 ,  C03B2207/66 ,  C03B2207/70 ,  Y02P40/57

摘要： A method an apparatus for continuously producing optical waveguide fiber and preforms. A continuous supply of core cane is provided to a walled deposition chamber upon which glass soot is deposited to form a soot preform. The preform is passed through an aligned drying, consolidation and draw chambers from which an optical fiber may be drawn. In one embodiment, a plurality of burners are positioned at different radial distances from a longitudinal axis of the cane in the deposition chamber. One or more environmental seal(s) are provided to prevent process gasses or contaminants from flowing into or between the chambers.

摘要翻译： 一种用于连续生产光波导纤维和预制件的设备的方法。 将核心甘蔗的连续供应提供给壁沉积室，在其上沉积玻璃烟炱以形成烟炱预制件。 将预成型件通过对准的干燥，固结和拉伸室，可从中拉出光纤。 在一个实施例中，多个燃烧器定位在与沉积室中的拐杖的纵向轴线不同的径向距离处。 提供一个或多个环境密封件以防止过程气体或污染物流入室中或室之间。

公开(公告)号：US20020062666A1

公开(公告)日：2002-05-30

申请号：US09995857

申请日：2001-11-29

发明人： Toshihiro Ooishi ,  Yuichi Ohga ,  Yoshio Yokoyama ,  Motonori Nakamura

IPC分类号： C03B037/018

CPC分类号： C03B37/0142 ,  C03B2207/52 ,  C03B2207/66 ,  C03B2207/70 ,  Y02P40/57

摘要： A plurality of glass particle synthesizing burners are disposed opposite to a rotating starting rod. The starting rod and the glass particle synthesizing burners are relatively reciprocally moved to each other in parallel to the axial direction, so that glass particles synthesized by the burners are sequentially deposited on the surface of the starting rod. The movement is stopped and restarted repeatedly once or more than once during one reciprocal movement.

摘要翻译： 多个玻璃颗粒合成燃烧器与旋转起始杆相对设置。 起始杆和玻璃粒子合成燃烧器相对于轴向平行地相互往复移动，使得由燃烧器合成的玻璃颗粒依次沉积在起始杆的表面上。 在一个往复运动期间，运动被重复停止并重复重启一次或多次。

公开(公告)号：US5518516A

公开(公告)日：1996-05-21

申请号：US377927

申请日：1995-01-25

申请人： Cheryl J. Garnham

发明人： Cheryl J. Garnham

IPC分类号： C03B37/014 ,  C03B37/018 ,  C03B37/00

CPC分类号： C03B37/01486 ,  C03B37/0142 ,  C03B37/01815 ,  C03B37/01884 ,  C03B2207/66

摘要： In a method of forming a preform from which an optical fibre can be drawn, successive layers of matter (24, 28) are deposited by vapour deposition on a rotating cylindrical body (10) which is traversed by a heat source (15). For the deposition of at least two successive layers (24, 28), a rate of rotation of the body and/or a rate of traverse of the heat source is selected so as to generate in one of said layers a surface profile different to a surface profile generated in the other said layer.

摘要翻译： 在形成可以拉伸光纤的预成型件的方法中，通过气相沉积将连续的物质层（24,28）沉积在由热源（15）穿过的旋转圆柱体（10）上。 为了沉积至少两个连续的层（24,28），选择体的旋转速率和/或热源的横移速率，以便在所述层之一上产生与 在另一个所述层中生成的表面轮廓。

公开(公告)号：US5395413A

公开(公告)日：1995-03-07

申请号：US167185

申请日：1993-12-16

申请人： Daniel R. Sempolinski ,  Latha I. Swaroop

发明人： Daniel R. Sempolinski ,  Latha I. Swaroop

IPC分类号： C03B20/00 ,  C03B8/04 ,  C03B19/14 ,  C04B35/48 ,  C04B38/00 ,  C04B38/06 ,  C08G77/04 ,  C08G77/08 ,  F27D1/00 ,  C03B19/06

CPC分类号： C04B38/0675 ,  C03B19/1407 ,  C03B19/1492 ,  C04B35/481 ,  C03B2207/06 ,  C03B2207/52 ,  C03B2207/66 ,  C04B2111/1025

摘要： A method of producing a fused silica product comprising introducing a silicon-containing, organometallic compound into a flame to form molten silica particles, and collecting the molten silica particles in a furnace having a crown and cup such that a fused silica product is obtained, wherein at least the furnace crown is formed from a porous, fired, zircon refractory having a sodium ion content of less than 30 ppm. The fused silica product produced by the method has a sodium ion contamination level below 100 parts per billion.

摘要翻译： 一种生产熔融二氧化硅产品的方法，包括将含硅有机金属化合物引入火焰中以形成熔融二氧化硅颗粒，并将熔融二氧化硅颗粒收集在具有冠和杯的炉中，使得获得熔融二氧化硅产物，其中 至少炉顶由钠离子含量小于30ppm的多孔烧制的锆石耐火材料形成。 通过该方法生产的熔融二氧化硅产品的钠离子污染水平低于100亿分之一。