High voltage vacuum feedthrough
    80.
    发明授权

    公开(公告)号:US11443912B2

    公开(公告)日:2022-09-13

    申请号:US17140699

    申请日:2021-01-04

    Abstract: A feedthrough for providing an electrical connection is provided. The feedthrough comprises a conductor and a quartz or a glass structure configured to surround at least a portion of the conductor and provide isolation to the conductor. The conductor and the quartz or glass structure may be coaxially arranged. The feedthrough can provide an electrical connection between an inside and outside of a vacuum chamber that contains a sample.

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