公开(公告)号：US11195950B2

公开(公告)日：2021-12-07

申请号：US16722622

申请日：2019-12-20

Applicant: Samsung Electronics Co., Ltd.

Inventor： Kyujin Kim ,  Hui-Jung Kim ,  Junsoo Kim ,  Sangho Lee ,  Jae-Hwan Cho ,  Yoosang Hwang

IPC: H01L29/78 ,  H01L21/762 ,  H01L21/311 ,  H01L27/108 ,  H01L29/66 ,  H01L29/423 ,  H01L21/8234

Abstract: A semiconductor device may include active patterns extended in a first direction and spaced apart from each other in the first direction, a device isolation layer defining the active patterns, an insulating structure provided between the active patterns and between the device isolation layer, and a gate structure disposed on the insulating structure and extended in a second direction crossing the first direction. The gate structure may include an upper portion and a lower portion. The lower portion of the gate structure may be enclosed by the insulating structure.

公开(公告)号：US20210351184A1

公开(公告)日：2021-11-11

申请号：US17384347

申请日：2021-07-23

Applicant: Samsung Electronics Co., Ltd.

Inventor： Hyosub Kim ,  Keunnam Kim ,  Dongoh Kim ,  Bongsoo Kim ,  Euna Kim ,  Chansic Yoon ,  Kiseok Lee ,  Hyeonok Jung ,  Sunghee Han ,  Yoosang Hwang

IPC: H01L27/108 ,  H01L23/528

Abstract: A semiconductor device includes: an active region defined by a device isolation layer formed in a substrate; a word line configured to cross the active region, the word line extending in a first direction and being formed in the substrate; a bit line extending in a second direction perpendicular to the first direction on the word line; a first contact connecting the bit line to the active region; a first mask for forming the active region, the first mask being formed on the active region; and a second mask of which a height of a top surface thereof is greater than a height of a top surface of the active region, the second mask covering the word line, wherein the active region has a bar shape that extends to form an acute angle with respect to the first direction.

公开(公告)号：US20210249417A1

公开(公告)日：2021-08-12

申请号：US17240486

申请日：2021-04-26

Applicant: Samsung Electronics Co., Ltd.

Inventor： Hui-Jung Kim ,  Min Hee Cho ,  Bong-Soo Kim ,  Junsoo Kim ,  Satoru Yamada ,  Wonsok Lee ,  Yoosang Hwang

IPC: H01L27/108 ,  H01L21/28 ,  H01L29/49 ,  H01L29/06

Abstract: Semiconductor memory devices are provided. A semiconductor memory device includes an isolation layer in a first trench and a first gate electrode portion on the isolation layer. The semiconductor memory device includes a second gate electrode portion in a second trench. In some embodiments, the second gate electrode portion is wider, in a direction, than the first gate electrode portion. Moreover, in some embodiments, an upper region of the second trench is spaced apart from the first trench by a greater distance, in the direction, than a lower region of the second trench. Related methods of forming semiconductor memory devices are also provided.

公开(公告)号：US20210210432A1

公开(公告)日：2021-07-08

申请号：US17205462

申请日：2021-03-18

Applicant: Samsung Electronics Co., Ltd.

Inventor： Eunjung Kim ,  Hui-Jung Kim ,  Keunnam Kim ,  Daeik Kim ,  Bong-soo Kim ,  Yoosang Hwang

IPC: H01L23/532 ,  H01L21/764 ,  H01L27/108 ,  H01L23/522 ,  H01L23/528

Abstract: A semiconductor memory device includes word lines extending in a first direction on a semiconductor substrate, bit line structures crossing over the word lines and extending in a second direction intersecting the first direction, and contact pad structures between the word lines and between the bit line structures in plan view. A spacer structure extends between the bit line structures and the contact pad structures. The spacer structure includes a first air gap extending in the second direction along sidewalls of the bit line structures and a second air gap surrounding each of the contact pad structures and coupled to the first air gap.

公开(公告)号：US10991699B2

公开(公告)日：2021-04-27

申请号：US16820006

申请日：2020-03-16

Applicant: Samsung Electronics Co., Ltd.

Inventor： Hui-Jung Kim ,  Min Hee Cho ,  Bong-Soo Kim ,  Junsoo Kim ,  Satoru Yamada ,  Wonsok Lee ,  Yoosang Hwang

IPC: H01L27/108 ,  H01L21/28 ,  H01L29/49 ,  H01L29/06

Abstract: Semiconductor memory devices are provided. A semiconductor memory device includes an isolation layer in a first trench and a first gate electrode portion on the isolation layer. The semiconductor memory device includes a second gate electrode portion in a second trench. In some embodiments, the second gate electrode portion is wider, in a direction, than the first gate electrode portion. Moreover, in some embodiments, an upper region of the second trench is spaced apart from the first trench by a greater distance, in the direction, than a lower region of the second trench. Related methods of forming semiconductor memory devices are also provided.

公开(公告)号：US10937833B2

公开(公告)日：2021-03-02

申请号：US16455791

申请日：2019-06-28

Applicant: Samsung Electronics Co., Ltd.

Inventor： Hui-Jung Kim ,  Kiseok Lee ,  Keunnam Kim ,  Yoosang Hwang

IPC: H01L47/00 ,  H01L27/24 ,  H01L45/00 ,  H01L43/08

Abstract: Disclosed is a variable resistance memory device including a first conductive line extending in a first direction parallel to a top surface of the substrate, memory cells spaced apart from each other in the first direction on a side of the first conductive line and connected to the first conductive line, and second conductive lines respectively connected to the memory cells. Each second conductive line is spaced apart in a second direction from the first conductive line. The second direction is parallel to the top surface of the substrate and intersects the first direction. The second conductive lines extend in a third direction perpendicular to the top surface of the substrate and are spaced apart from each other in the first direction. Each memory cell includes a variable resistance element and a select element that are positioned at a same level horizontally arranged in the second direction.

公开(公告)号：US10910378B2

公开(公告)日：2021-02-02

申请号：US16268748

申请日：2019-02-06

Applicant: Samsung Electronics Co., Ltd.

Inventor： Kiseok Lee ,  Bong-Soo Kim ,  Jiyoung Kim ,  Hui-Jung Kim ,  Seokhan Park ,  Hunkook Lee ,  Yoosang Hwang

IPC: H01L27/108 ,  H01L23/528 ,  H01L29/08 ,  H01L29/165 ,  H01L29/10 ,  H01L23/522 ,  H01L49/02

Abstract: Semiconductor memory devices may include first and second stacks on a substrate and first and second interconnection lines on the first and second stacks. Each of the first and second stacks may include semiconductor patterns vertically stacked on the substrate, conductive lines connected to the semiconductor patterns, respectively, and a gate electrode that is adjacent to the semiconductor patterns and extends in a vertical direction. The first stack may include a first conductive line and a first gate electrode, and the second stack may include a second conductive line and a second gate electrode. Lower surfaces of the first and second conductive lines may be coplanar. The first interconnection line may be electrically connected to at least one of the first and second conductive lines. The second interconnection line may be electrically connected to at least one of the first and second gate electrodes.

公开(公告)号：US10910261B2

公开(公告)日：2021-02-02

申请号：US16577429

申请日：2019-09-20

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Byoungdeog Choi ,  JungWoo Seo ,  Sangyeon Han ,  Hyun-Woo Chung ,  Hongrae Kim ,  Yoosang Hwang

IPC: H01L27/108 ,  H01L21/768 ,  H01L23/498 ,  H01L27/22 ,  H01L27/24 ,  H01L45/00 ,  H01L23/522 ,  H01L23/528 ,  H01L23/532

Abstract: A semiconductor device includes bit line structures on a substrate, the bit line structures extending along a first direction and being spaced apart from each other along a second direction perpendicular to the first direction, contact plugs spaced apart from each other along the first direction and being on active regions of the substrate between adjacent bit line structures, a linear spacer on each longitudinal sidewall of a bit line structure, landing pads on the contact plugs, respectively, the landing pads being electrically connected to the contact plugs, respectively, and landing pads that are adjacent to each other along the first direction being offset with respect to each other along the second direction, as viewed in a top view, a conductive pad between each of the contact plugs and a corresponding active region, a vertical axes of the conductive pad and corresponding active region being horizontally offset.

公开(公告)号：US10784272B2

公开(公告)日：2020-09-22

申请号：US16027887

申请日：2018-07-05

Applicant: Samsung Electronics Co., Ltd.

Inventor： Kiseok Lee ,  Junsoo Kim ,  Hui-Jung Kim ,  Bong-Soo Kim ,  Satoru Yamada ,  Kyupil Lee ,  Sunghee Han ,  HyeongSun Hong ,  Yoosang Hwang

IPC: H01L27/11556 ,  H01L23/532 ,  G11C7/18 ,  H01L49/02 ,  G11C8/14 ,  H01L27/11524 ,  G11C11/404 ,  G11C11/4097

Abstract: A semiconductor memory device comprises a stack structure including a plurality of layers vertically stacked on a substrate. Each of the plurality of layers includes a first dielectric layer, a semiconductor layer, and a second dielectric layer that are sequentially stacked, and a first conductive line in the second dielectric layer and extending in a first direction. The device also comprises a second conductive line extending vertically through the stack structure, and a capacitor in the stack structure and spaced apart from the second conductive line. The semiconductor layer comprises semiconductor patterns extending in a second direction intersecting the first direction between the first conductive line and the substrate. The second conductive line is between a pair of the semiconductor patterns adjacent to each other in the first direction. An end of each of the semiconductor patterns is electrically connected to a first electrode of the capacitor.

公开(公告)号：US10468414B2

公开(公告)日：2019-11-05

申请号：US16115693

申请日：2018-08-29

Applicant: Samsung Electronics Co., Ltd.

Inventor： Hui-Jung Kim ,  Kiseok Lee ,  Junsoo Kim ,  Sunghee Han ,  Bong-Soo Kim ,  Yoosang Hwang

IPC: H01L27/11578 ,  H01L27/108 ,  H01L29/10 ,  H01L29/78 ,  H01L29/08 ,  H01L29/45 ,  H01L23/528 ,  H01L29/792

Abstract: Semiconductor memory devices are provided. A semiconductor memory device includes a substrate and a stack including a plurality of layers on the substrate. Each of the plurality of layers includes semiconductor patterns and a first conductive line that is connected to at least one of the semiconductor patterns. A second conductive line and a third conductive line penetrate the stack. The semiconductor patterns include a first semiconductor pattern and a second semiconductor pattern that are adjacent and spaced apart from each other in a first layer among the plurality of layers. The third conductive line is between, and connected in common to, the first and second semiconductor patterns.