公开(公告)号：US06787454B1

公开(公告)日：2004-09-07

申请号：US10683392

申请日：2003-10-14

申请人： Takayuki Saito

发明人： Takayuki Saito

IPC分类号： H01L214763

CPC分类号： H01L21/76808

摘要： A via hole is formed to reach a Cu interconnection through an interlayer insulating film that covers the Cu interconnection. A conductive polymeric member is buried in the via hole electrolytically. A resist pattern is formed on the interlayer insulating film by photolithography, and a trench is formed, connected to the via hole, by etching, using the resist pattern as a mask. The resist pattern and the conductive polymeric member are removed thereafter.

摘要翻译： 形成通孔，以通过覆盖Cu互连的层间绝缘膜到达Cu互连。 导电性聚合物部件电解埋设在通孔中。 通过光刻法在层间绝缘膜上形成抗蚀剂图案，并使用抗蚀剂图案作为掩模，通过蚀刻形成连接到通孔的沟槽。 之后去除抗蚀剂图案和导电聚合物构件。

公开(公告)号：US06514122B2

公开(公告)日：2003-02-04

申请号：US09773497

申请日：2001-02-02

申请人： Takayuki Saito ,  Tadashi Miyagi ,  Takuya Matsushita

发明人： Takayuki Saito ,  Tadashi Miyagi ,  Takuya Matsushita

IPC分类号： B24D4900

CPC分类号： G03F7/70258 ,  G03F7/70641 ,  G03F9/7026

摘要： A product pattern and a test pattern for managing a focus offset value are patterned onto a product wafer by means of exposure, and is patterned onto the product wafer by means of exposure. The exposed product wafer is developed. A measurement section measures the dimension of the test pattern patterned on the product wafer. On the basis of the thus-measured dimension of the test pattern, the focus off set value set in a system for manufacturing a semiconductor device is computed by a computation section. The focus offset value set in a projection optical system of the system for manufacturing a semiconductor device is adjusted by means of an adjustment section so as to become identical with the computed focus offset value.

摘要翻译： 通过曝光将产品图案和用于管理聚焦偏移值的测试图案图案化到产品晶片上，并通过曝光将其图案化到产品晶片上。 曝光的产品晶片被开发出来。 测量部分测量在产品晶片上图案化的测试图案的尺寸。 基于这样测量的测试尺寸的尺寸，通过计算部分计算用于制造半导体器件的系统中设定的聚焦设定值。 通过调整部调整用于制造半导体器件的系统的投影光学系统中设置的聚焦偏移值，使其与计算出的聚焦偏移值相同。

公开(公告)号：US06394428B2

公开(公告)日：2002-05-28

申请号：US09794048

申请日：2001-02-28

申请人： Yasutoshi Hinada ,  Sanai Kosugi ,  Ken Watanabe ,  Kentaro Niwa ,  Takayuki Saito

发明人： Yasutoshi Hinada ,  Sanai Kosugi ,  Ken Watanabe ,  Kentaro Niwa ,  Takayuki Saito

IPC分类号： B01F304

CPC分类号： B01F3/0451 ,  B01D53/1475 ,  B01D2257/504 ,  B01F13/0049 ,  Y02C10/06 ,  Y10S261/07

摘要： Waste carbon dioxide gas discharged in large quantities from stationary gas generating facilities such as thermal power plants, is dissolved in sea water and isolated deep in the sea to prevent global warming. A vessel is installed in the sea or at the water surface or in the vicinity thereof. A pipe forming a short leg is open at a lower end, functions as a dissolving pipe, and is equipped with a device for blowing a water-soluble gas. A pipe forming a long leg is open at a lower end portion and functions as a sinking pipe. The pipe forming a short leg and the pipe forming a long leg are connected through the vessel, and undissolved gas is diffused into the atmosphere or into the sea from the liquid surface within the vessel.

摘要翻译： 从火力发电厂等固定式气体发生设备大批量排放的二氧化碳废水溶解在海水中，隔离在海洋深处，防止全球变暖。 船舶安装在海洋或水面或其附近。 形成短腿的管子在下端开放，用作溶解管，并且配备有用于吹入水溶性气体的装置。 形成长腿的管在下端部开口，作为下沉管而起作用。 形成短腿的管和形成长腿的管通过容器连接，并且未溶解的气体从容器内的液体表面扩散到大气中或进入大海。

公开(公告)号：US06372023B1

公开(公告)日：2002-04-16

申请号：US09628648

申请日：2000-07-28

申请人： Fumio Kiyono ,  Takayuki Saito

发明人： Fumio Kiyono ,  Takayuki Saito

IPC分类号： B01D4706

CPC分类号： B01D53/62 ,  C01B32/50 ,  Y02C10/04 ,  Y02P20/152

摘要： There is disclosed a method of separating and recovering carbon dioxide from combustion exhausted gas, which method includes: bringing the combustion exhausted gas in contact with water, under a pressure-increased condition, to form carbon dioxide hydrate; and thus separating and recovering carbon dioxide contained in the combustion exhausted gas. According to the method, CO2 of high purity can be separated and recovered from the combustion exhausted gas at low cost and with low energy consumption. There is also disclosed an apparatus for separation and recovery of CO2 which apparatus is employed in the method.

摘要翻译： 公开了一种从燃烧废气中分离回收二氧化碳的方法，该方法包括：在增压条件下使燃烧废气与水接触，形成二氧化碳水合物; 从而分离和回收包含在燃烧废气中的二氧化碳。 根据该方法，可以低成本，低能耗地从燃烧废气中分离回收高纯度的二氧化碳。 还公开了一种用于分离和回收CO 2的装置，该装置用于该方法中。

公开(公告)号：US06344790B1

公开(公告)日：2002-02-05

申请号：US08907881

申请日：1997-08-11

申请人： Naoyuki Ochi ,  Masahiro Hirama ,  Hiroshi Tomoto ,  Atsushi Miyazaki ,  Takayuki Saito ,  Kaoru Uchiyama

发明人： Naoyuki Ochi ,  Masahiro Hirama ,  Hiroshi Tomoto ,  Atsushi Miyazaki ,  Takayuki Saito ,  Kaoru Uchiyama

IPC分类号： H01C710

CPC分类号： H01C17/02 ,  H01C1/024 ,  H01C1/1406 ,  H01C1/1413

摘要： Corrosion resistant material is used for lead wires of the thermistor, and an exposed portion of electrodes of the thermistor and a portion surrounding a weld portion of the lead wires are coated with corrosion resistant material. Since the lead wires themselves are made of corrosion resistant material, no corrosion occurs in the welding portion and a cut working portion. Further, the lead wires and the exposed portion of the electrodes are coated with corrosion resistant material. Thereby an electronic device having extremely high corrosion resistivity and hence high durability and reliability is produced, with the result that the electronic device can be used for a long period without corrosion under the heavily corrosive environment, such as sulfur dioxide gas atmosphere.

摘要翻译： 耐热材料用于热敏电阻的引线，并且热敏电阻的电极的暴露部分和围绕引线的焊接部分的部分涂覆有耐腐蚀材料。 由于引线本身由耐腐蚀材料制成，所以在焊接部分和切割加工部分中不会发生腐蚀。 此外，引线和电极的暴露部分涂覆有耐腐蚀材料。 因此，制造了具有极高耐腐蚀性，因此具有高耐久性和可靠性的电子器件，结果是电子器件可长期使用，而且在诸如二氧化硫气体环境的严酷腐蚀性环境下不会发生腐蚀。

公开(公告)号：US06217319B1

公开(公告)日：2001-04-17

申请号：US09088702

申请日：1998-06-02

申请人： Tadashi Miyagi ,  Yoshiaki Yamada ,  Takayuki Saito

发明人： Tadashi Miyagi ,  Yoshiaki Yamada ,  Takayuki Saito

IPC分类号： F27B516

CPC分类号： H01L21/67115 ,  H01L21/67109

摘要： A hot plate unit includes a cover. The cover includes an inner wall and an outlet. There is provided immediately under the outlet a plate having a ventilation hole. The distance between the plate and a main surface is identical to the distance between the main surface and the internal wall face. The hot plate unit has an displacement control valve for restricting displacement at a level in the range from at least 0.1 L/min to at most 1 L/min.

摘要翻译： 热板单元包括盖。 盖子包括内壁和出口。 在出口的正下方设有具有通风孔的板。 板和主表面之间的距离与主表面和内壁面之间的距离相同。 热板单元具有位移控制阀，用于将位移限制在从至少0.1L / min至至多1L / min的范围内的水平。

公开(公告)号：US5789673A

公开(公告)日：1998-08-04

申请号：US452867

申请日：1995-05-30

申请人： Shinya Igarashi ,  Chihiro Kobayashi ,  Hiroshi Hirayama ,  Takayuki Saito ,  Nobukatsu Arai

发明人： Shinya Igarashi ,  Chihiro Kobayashi ,  Hiroshi Hirayama ,  Takayuki Saito ,  Nobukatsu Arai

IPC分类号： G01F1/684 ,  G01F5/00

CPC分类号： G01F5/00 ,  G01F1/6842

摘要： A thermal type air flow measuring instrument is mounted to a main passage forming an intake air passage of an internal combustion engine and is provided with an auxiliary passage which includes a heating resistor and a temperature sensing resistor therein and an electronic circuit which is electrically connected to the heating resistor and the temperature sensing resistor. The auxiliary passage is a passage including at least one bent portion composed of a first path substantially parallel to the main passage and a second path having a path different in flow direction from the first path. A member forming the auxiliary passage is fixed in a united form to only a case member for interiorly protecting the electronic circuit, and the case member is fixed to the outer wall surface of the intake air passage. The auxiliary passage structure capable of being handled as a single module united to the case member is effective to the mass production of an air flow control system and the reduction in cost thereof since the structure can be mounted to different kinds of internal combustion engines.

公开(公告)号：USD384935S

公开(公告)日：1997-10-14

申请号：US44646

申请日：1995-09-28

申请人： Tadashi Fukuhara ,  Hideki Shibata ,  Takayuki Saito ,  Katsuji Mukai ,  Kimitoshi Fukae ,  Yuji Inoue ,  Masahiro Mori

设计人： Tadashi Fukuhara ,  Hideki Shibata ,  Takayuki Saito ,  Katsuji Mukai ,  Kimitoshi Fukae ,  Yuji Inoue ,  Masahiro Mori

公开(公告)号：US5670094A

公开(公告)日：1997-09-23

申请号：US590361

申请日：1996-01-25

申请人： Kenichi Sasaki ,  Takayuki Saito ,  Ken Nakajima ,  Mitsuru Imai

发明人： Kenichi Sasaki ,  Takayuki Saito ,  Ken Nakajima ,  Mitsuru Imai

IPC分类号： B01F1/00 ,  B01F3/04 ,  B01F5/04 ,  B01J19/00 ,  C01B13/11 ,  C02F1/00 ,  C02F1/78

CPC分类号： C02F1/78 ,  B01F3/0446 ,  B01F5/0476 ,  B01F2003/04858 ,  B01F2215/0431 ,  B01F2215/045 ,  B01F2215/0468 ,  C02F1/008 ,  C02F2201/782 ,  Y10S261/42

摘要： In an ozonized water producing apparatus in which a pressurized ozone gas generated by an electric discharge type ozonizer is dissolved in water to be treated through a porous hollow-fiber membrane, an infinite variable-speed control type pump is provided upstream of the hollow-fiber membrane to maintain the water pressure inside the hollow fibers higher than the ozone gas pressure and to control the water pressure and flow rate, and a control mechanism is provided to control the ozone concentration in the treated water on the basis of the ozone gas concentration. Thereby treated water containing neither tiny bubbles nor impurities is obtained, and the concentration, flow rate and pressure of the treated water are controlled at constant levels.

摘要翻译： 在通过放电型臭氧发生器产生的加压臭氧气体通过多孔中空纤维膜溶解在待处理水中的臭氧化水生产装置中，在中空纤维的上游设置无限变速控制型泵 以保持中空纤维内的水分压力高于臭氧气体压力并控制水压和流量，并且提供控制机制以根据臭氧气体浓度控制处理水中的臭氧浓度。 由此得到既不含微小气泡也不含杂质的处理水，处理水的浓度，流量和压力控制在恒定水平。

公开(公告)号：US5102962A

公开(公告)日：1992-04-07

申请号：US499701

申请日：1990-03-27

申请人： Tohru Kikuchi ,  Hiroyuki Kawakami ,  Takayuki Saito

发明人： Tohru Kikuchi ,  Hiroyuki Kawakami ,  Takayuki Saito

IPC分类号： C07C37/16 ,  C08G61/02

CPC分类号： C08G61/02 ,  C07C37/14 ,  C07C37/16

摘要： A phenolic polymer obtained by reacting a phenolic compound with a bis(hydroxyalkyl)benzene, followed by alkylation of ortho positions or para position with respect to the hydroxyl group of the terminal phenol groups of the produced polymer is suitable for use as a heat resistant antioxidant for thermoplastic resins.

摘要翻译： 通过使酚类化合物与双（羟烷基）苯反应，然后相对于所制备的聚合物的末端苯酚基团的羟基进行邻位烷基化或对位而获得的酚醛聚合物适合用作耐热抗氧化剂 用于热塑性树脂。