公开(公告)号：US6048774A

公开(公告)日：2000-04-11

申请号：US103935

申请日：1998-06-25

申请人： Toshimasa Yamamoto ,  Nobuyuki Kato ,  Kazuhiko Kano ,  Makiko Sugiura

发明人： Toshimasa Yamamoto ,  Nobuyuki Kato ,  Kazuhiko Kano ,  Makiko Sugiura

IPC分类号： G01P15/08 ,  G01P15/125 ,  H01L29/84 ,  G01P15/13

CPC分类号： G01P15/125 ,  G01P15/0802 ,  G01P2015/0814

摘要： In a method of manufacturing a dynamic amount sensor including a beam structure and a fixed electrode which are respectively supported by anchor parts of a substrate, opening portions are formed on a first semiconductor substrate where the anchor parts are to be formed. Each of the opening portions is composed of a plurality of stripe-like openings. Then a first thin film for forming the anchor parts and a second thin film are formed on the first semiconductor substrate in that order. After the surface of the second thin film is polished, a second semiconductor substrate is bonded to the polished surface of the second thin film. In this method, because the opening portions are composed of the plurality of stripe-like openings, the second thin film is flattened without having any steps thereon.

摘要翻译： 在制造分别由基板的锚定部支撑的梁结构和固定电极的动态量传感器的制造方法中，在要形成锚定部的第一半导体基板上形成开口部。 每个开口部分由多个条状开口组成。 然后在第一半导体衬底上依次形成用于形成锚定部分的第一薄膜和第二薄膜。 在第二薄膜的表面被抛光之后，第二半导体衬底被结合到第二薄膜的抛光表面上。 在该方法中，由于开口部分由多个条状开口组成，所以第二薄膜在其上没有任何步骤而变平。

公开(公告)号：US09348027B2

公开(公告)日：2016-05-24

申请号：US14117050

申请日：2012-06-12

申请人： Makiko Sugiura ,  Hirofumi Higuchi

发明人： Makiko Sugiura ,  Hirofumi Higuchi

IPC分类号： G01S15/50 ,  B06B1/06 ,  G01S7/521

CPC分类号： G01S15/50 ,  B06B1/0666 ,  G01S7/521

摘要： An ultrasonic sensor device includes a substrate, a piezoelectric vibrator, and a Q-factor adjuster. The piezoelectric vibrator includes a pair of detection electrodes that face each other in a thickness direction of the substrate and a piezoelectric body interposed between the electrodes. The piezoelectric vibrator provides a membrane structure which is formed on a surface of the substrate and has rigidity lower than that of a remaining portion of the substrate. An ultrasonic wave is transmitted by the piezoelectric vibrator, and its reflected wave is received by the same piezoelectric vibrator. The Q-factor adjuster adjusts a Q-factor of the piezoelectric vibrator so that the Q-factor can be larger during a transmission period where the piezoelectric vibrator transmits the ultrasonic wave than during a reception period where the piezoelectric vibrator receives the ultrasonic wave.

摘要翻译： 超声波传感器装置包括基板，压电振动器和Q因子调节器。 压电振子包括在基板的厚度方向上彼此相对的一对检测电极和插在电极之间的压电体。 压电振动器提供形成在基板的表面上的膜结构，其刚性低于基板的剩余部分的刚度。 超声波由压电振子传递，其反射波被同一压电振子接收。 Q因子调节器调节压电振动器的Q因子，使得压电振动器发送超声波的传播期间的Q因子可以比在压电振动器接收超声波的接收时段期间更大。

公开(公告)号：US20080068143A1

公开(公告)日：2008-03-20

申请号：US11826061

申请日：2007-07-12

申请人： Makiko Sugiura

发明人： Makiko Sugiura

IPC分类号： G01J1/26 ,  G01J5/00 ,  B60Q1/00 ,  G01J1/42 ,  G08B19/00 ,  G08B13/18 ,  G08B23/00 ,  G08B17/12

CPC分类号： G01J1/429 ,  G01J5/34

摘要： A detector made of lanthanum-doped lead zirconate titanate detects intensity of ultraviolet light radiated inside of a vehicle. The detector sends ultrasonic wave to an incidence direction of ultraviolet light, and detects ultrasonic wave reflected by an object. An electrical unit determines the object to be an occupant of the vehicle or not based on the reflected ultrasonic wave. The electrical unit outputs a signal representing that a predetermined or more amount of ultraviolet light is radiated to the occupant, when the detector detects the predetermined or more amount of ultraviolet light and when the electrical unit determines the object to be the occupant.

摘要翻译： 由镧掺杂的锆钛酸铅钛酸盐制成的检测器检测车辆内部照射的紫外线的强度。 检测器向紫外光的入射方向发送超声波，并检测物体反射的超声波。 电气单元基于反射的超声波确定作为车辆的乘客的物体。 当检测器检测到预定或更多量的紫外线并且当电单元确定作为乘客的物体时，电单元输出表示预定或更多量的紫外线照射到乘员的信号。

公开(公告)号：US20070251324A1

公开(公告)日：2007-11-01

申请号：US11790298

申请日：2007-04-24

申请人： Hiroyuki Wado ,  Makiko Sugiura

发明人： Hiroyuki Wado ,  Makiko Sugiura

IPC分类号： G01H11/00

CPC分类号： B06B1/0688 ,  H01L41/0973

摘要： An ultrasonic sensor is provided with a substrate unit where a thin-walled portion is arranged and a piezoelectric oscillator which is formed at the substrate unit. The piezoelectric oscillator includes two electrodes and a piezoelectric film positioned between the two electrodes. The thin-walled portion and the piezoelectric oscillator construct a membrane structure which will resonate at a predetermined frequency.

摘要翻译： 超声波传感器设置有布置有薄壁部分的基板单元和形成在基板单元处的压电振荡器。 压电振荡器包括两个电极和位于两个电极之间的压电薄膜。 薄壁部分和压电振荡器构成将以预定频率谐振的膜结构。

公开(公告)号：US07112958B2

公开(公告)日：2006-09-26

申请号：US11010451

申请日：2004-12-14

申请人： Toshitaka Yamada ,  Inao Toyoda ,  Makiko Sugiura

发明人： Toshitaka Yamada ,  Inao Toyoda ,  Makiko Sugiura

IPC分类号： G01B7/30

CPC分类号： F02B39/16 ,  F02B37/10 ,  F02B39/10 ,  G01P3/487 ,  Y02T10/144

摘要： A motor-assisted turbocharger is composed of a turbine driven by energy of exhaust gas, a compressor rotated by the turbine and a rotary electric machine for assisting rotation of the compressor. The turbine, the compressor and the rotary electric machine are connected to each other by a common rotating shaft. A polygon nut having magnetic member facing fixed magnetic sensor is connected to an axial end of the rotating shaft. A magnetic field formed between the magnetic member and the magnetic sensor changes according to rotation of the rotating shaft. A rotational speed and a rotational position (or angle) of the compressor are detected based on the changes in the magnetic field. Operation of the turbocharger is electronically controlled based on the detected rotational speed and the rotational position.

摘要翻译： 电动辅助涡轮增压器由废气能量驱动的涡轮机，由涡轮机旋转的压缩机和用于辅助压缩机的旋转的旋转电机组成。 涡轮机，压缩机和旋转电机通过共同的旋转轴彼此连接。 具有面向固定磁传感器的磁性构件的多边形螺母连接到旋转轴的轴向端。 磁性构件和磁性传感器之间形成的磁场根据旋转轴的旋转而变化。 基于磁场的变化来检测压缩机的旋转速度和旋转位置（或角度）。 涡轮增压器的操作基于检测到的转速和旋转位置进行电子控制。

公开(公告)号：US20060186762A1

公开(公告)日：2006-08-24

申请号：US11355114

申请日：2006-02-16

申请人： Makiko Sugiura ,  Tomoki Itoh

发明人： Makiko Sugiura ,  Tomoki Itoh

IPC分类号： H01L41/08

CPC分类号： H03H9/588 ,  B06B1/0692 ,  H03H3/02 ,  H03H9/02133 ,  H03H9/172 ,  H03H9/564 ,  H03H9/583

摘要： An ultrasonic element has a membrane formed as a thin walled portion of a substrate, on which a piezoelectric vibrator is formed. The piezoelectric vibrator comprises a piezoelectric thin film and metal electrode films, which are formed into a sandwiched structure. The piezoelectric vibrator resonates with the membrane at a predetermined ultrasonic wave-band frequency. A hollow-out pattern is formed in the piezoelectric thin film to divide the piezoelectric vibrator into multiple portions, wherein the hollow-out pattern is formed in such an area corresponding to stress concentrated area which appears in vibrations of the membrane in diametrical directions thereof. The membrane is made to be easily deformed in response to vibration of the piezoelectric vibrator, so that an ultrasound of a higher sound pressure can be emitted.

摘要翻译： 超声波元件具有形成为基板的薄壁部分的膜，在其上形成压电振动器。 压电振子包括形成为夹层结构的压电薄膜和金属电极膜。 压电振动器以预定的超声波频带频率与膜谐振。 在压电薄膜中形成中空图案，以将压电振动器分成多个部分，其中，中空图案形成在对应于在其直径方向上的膜的振动中出现的应力集中区域的区域中。 该膜由于压电振子的振动而容易变形，能够发出较高声压的超声波。

公开(公告)号：US20050286104A1

公开(公告)日：2005-12-29

申请号：US11153384

申请日：2005-06-16

申请人： Makiko Sugiura ,  Inao Toyoda

发明人： Makiko Sugiura ,  Inao Toyoda

IPC分类号： G02B26/08 ,  G02B26/10

CPC分类号： G02B26/0858 ,  G02B26/085 ,  G02B26/10

摘要： An optical scanner is provided with a laser diode for emitting a laser beam, a cylinder lens arranged in a laser route of the laser beam, and a static electricity force driving device (or electromagnetic force driving device) for moving the cylinder lens in a direction perpendicular to the laser route. Thus, the incidence position of the laser beam with respect to the cylinder lens is changeable. Accordingly, the laser beam having entered the cylinder lens is refracted at different refraction angles to be dispersed, thus being capable of scanning an object.

摘要翻译： 光学扫描器设置有用于发射激光束的激光二极管，以激光束的激光路径布置的柱面透镜，以及静电力驱动装置（或电磁力驱动装置），用于使气缸透镜沿方向移动 垂直于激光路线。 因此，激光束相对于柱面透镜的入射位置是可变的。 因此，已经进入柱面透镜的激光束以不同的折射角被折射以分散，从而能够扫描物体。

公开(公告)号：US20050182540A1

公开(公告)日：2005-08-18

申请号：US11033481

申请日：2005-01-12

申请人： Makiko Sugiura ,  Inao Toyoda

发明人： Makiko Sugiura ,  Inao Toyoda

IPC分类号： G01V11/00 ,  B60R21/00 ,  B60R21/01 ,  B60R21/0136 ,  B60R21/16 ,  B60R21/34 ,  G01J1/02 ,  G01J5/10 ,  G05D1/00

CPC分类号： B60R21/0134 ,  B60R21/0136

摘要： A pedestrian detection device, a related method, an air bag system and a vehicle are disclosed. The pedestrian detection device 20 includes an infrared ray sensor 30A, which detects a temperature of a detection object approaching to or in contact with the vehicle 10 to provide a temperature signal, an impact sensor 27a to 27c, which generate impact signals when the vehicle encounters a collision, and an impact collision generation unit 21 operative to generate a pedestrian collision signal upon discrimination that the detection object is a pedestrian, discrimination that the impact signal is being outputted, and discrimination that a direction in which the pedestrian is present and a direction in which the impact is applied to the vehicle falls in a substantially same direction.

摘要翻译： 公开了一种行人检测装置，相关方法，气囊系统和车辆。 行人检测装置20包括红外线传感器30A，其检测接近或与车辆10接触的检测对象的温度以提供温度信号;冲击传感器27a至27c，其产生冲击信号， 车辆遇到碰撞，冲击碰撞产生单元21，在判断为检测对象是行人时产生行人碰撞信号，辨别出影响信号被输出，以及判断行人存在的方向 并且对车辆施加冲击的方向落在基本相同的方向上。