Intermetallic aluminum-transition metal compound Schottky contact
    82.
    发明授权
    Intermetallic aluminum-transition metal compound Schottky contact 失效
    金属间铝过渡金属化合物肖特基接触

    公开(公告)号:US4141020A

    公开(公告)日:1979-02-20

    申请号:US755272

    申请日:1976-12-29

    CPC分类号: H01L29/47 H01L21/28537

    摘要: An aluminum-transition metal Schottky barrier contact, and methods of fabrication thereof are disclosed. In one preferred embodiment, the junction is comprised of an aluminum-tantalum intermetallic layer abutting a silicon substrate. Alternate embodiments utilize an intermetallic compound of a metal selected from the group of tantalum, zirconium, hafnium, niobium, titanium and nickel in combination with aluminum. The preferred embodiments can be fabricated by evaporation of a layer of a metal selected from the above mentioned group followed by evaporation of a layer of aluminum on a silicon substrate, after which an annealing step is utilized which creates the desired intermetallic compound in a layer abutting the silicon surface. Alternatively, the junction can be created by hot or cold sputtering of a preselected intermetallic compound of one of the metals with aluminum directly upon the silicon substrate, followed by deposition of a conductive layer such as aluminum. In the case of cold sputtering an annealing step is required to perfect the desired intermetallic compound structure; and in the case of hot sputtering an annealing step may be useful in perfecting the desired intermetallic structure, although it is not essential. The resulting devices are highly thermally stable with predictable barrier heights; and exhibit excellent electrical properties while they are capable of fabrication with good planarity.

    摘要翻译: 公开了铝 - 过渡金属肖特基势垒接触及其制造方法。 在一个优选实施例中,接合部包括邻接硅衬底的铝 - 钽金属间化合物层。 替代实施例使用选自钽,锆,铪,铌,钛和镍的金属的金属间化合物与铝的组合。 优选的实施方案可以通过蒸发选自上述组的金属层,然后在硅衬底上蒸发一层铝制成,之后利用退火步骤,其形成邻接的层中所需的金属间化合物 硅表面。 或者,可以通过在硅衬底上直接将铝中一种金属的预选金属间化合物用铝直接溅射,然后沉积诸如铝的导电层来产生结。 在冷溅射的情况下,需要退火步骤来完善所需的金属间化合物结构; 并且在热溅射的情况下,退火步骤可用于完善所需的金属间结构,尽管不是必需的。 所得到的器件具有高度的热稳定性和可预测的阻挡高度; 并且具有优异的电性能,同时它们能够以良好的平面度制造。

    Process for the preparation of unsaturated acids from unsaturated
aldehydes

    公开(公告)号:US4136110A

    公开(公告)日:1979-01-23

    申请号:US763775

    申请日:1977-01-31

    摘要: Methacrylic acid or acrylic acid is produced by the oxidation of methacrolein or acrolein respectively, with molecular oxygen in the vapor phase in the presence of a catalytic oxide of molybdenum and phosphorus, promoted with chromium or at least one element selected from the group consisting of thallium, rubidium, cesium, potassium, titanium, and arsenic, or a mixture thereof, wherein at least part of the molybdenum employed in the preparation of the catalyst is supplied in the form of molybdenum trioxide. The oxidation of methacrolein in the presence of a catalyst wherein all the molybdenum employed in the preparation of the catalyst has been supplied by molybdenum trioxide gives especially desirable high yields and selectivities to methacrylic acid.

    Preparation of maleic anhydride from four-carbon hydrocarbons
    85.
    发明授权
    Preparation of maleic anhydride from four-carbon hydrocarbons 失效
    从四碳烃制备马来酸酐

    公开(公告)号:US4120876A

    公开(公告)日:1978-10-17

    申请号:US733739

    申请日:1976-10-19

    CPC分类号: C07C51/215 C07C51/252

    摘要: Maleic anhydride is produced by the oxidation of n-butane, n-butenes, 1,3-butadiene or mixture thereof with molecular oxygen in the vapor phase in the presence of a catalytic oxide of molybdenum, phosphorus, arsenic, oxygen, and at least one element selected from the group consisting of Sn, rare earth metal, Zr, Rh, Mn, Re, Ru, Cu, Pb, Zn, Ti and Cr, Nb, Al, Ga, and alkaline earth metal.

    摘要翻译: 马来酸酐通过在钼,磷,砷,氧的催化氧化物的存在下,在气相中氧化正丁烷,正丁烯,1,3-丁二烯或其与分子氧的混合物产生,并且至少 选自Sn,稀土金属,Zr,Rh,Mn,Re,Ru,Cu,Pb,Zn,Ti和Cr,Nb,Al,Ga和碱土金属的一种元素。