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    Vibrating gyroscopic sensor and method of adjusting vibrating gyroscopic sensor
    84.
    发明申请
    Vibrating gyroscopic sensor and method of adjusting vibrating gyroscopic sensor 有权
    振动陀螺传感器及调节振动陀螺传感器的方法

    公开(公告)号：US20060196267A1

    公开(公告)日：2006-09-07

    申请号：US11368153

    申请日：2006-03-03

    申请人： Kazuo Takahashi ,  Teruo Inaguma ,  Manabu Aizawa ,  Koji Suzuki ,  Shin Sasaki ,  Eiji Nakashio

    发明人： Kazuo Takahashi ,  Teruo Inaguma ,  Manabu Aizawa ,  Koji Suzuki ,  Shin Sasaki ,  Eiji Nakashio

    IPC分类号： G01P15/08

    CPC分类号： G01C19/5663 ,  Y10T29/49002

    摘要： A vibrating gyroscopic sensor including a vibrating gyroscopic sensor element including a cantilever vibrator that includes a piezoelectric film, a driving electrode, and a pair of detection electrodes on a first surface, and a support substrate on which the vibrating gyroscopic sensor element is mounted. The vibrating gyroscopic sensor element is mounted on the support substrate so that the first surface of the cantilever vibrator faces the support substrate. An area other than the first surface of the cantilever vibrator is defined as a laser processing area where a depression for adjusting the vibration characteristics of the cantilever vibrator is to be provided.

    摘要翻译： 一种振动陀螺仪传感器，包括振动陀螺传感器元件，所述振动陀螺传感器元件包括悬臂振子，所述振动器包括压电膜，驱动电极和在第一表面上的一对检测电极以及安装所述振动陀螺传感器元件的支撑基板。 振动陀螺传感器元件安装在支撑基板上，使得悬臂振动器的第一表面面向支撑基板。 将悬臂振子的第一面以外的区域定义为要设置用于调节悬臂振动器的振动特性的凹陷的激光加工区域。

    Vibration type gyrosensor device
    86.
    发明申请
    Vibration type gyrosensor device 有权
    振动式陀螺仪器

    公开(公告)号：US20050241395A1

    公开(公告)日：2005-11-03

    申请号：US11088480

    申请日：2005-03-24

    申请人： Kazuo Takahashi ,  Takashi Tamura ,  Junichi Honda ,  Teruo Inaguma

    发明人： Kazuo Takahashi ,  Takashi Tamura ,  Junichi Honda ,  Teruo Inaguma

    IPC分类号： G01C19/56 ,  G01C19/5656 ,  G01C19/5663 ,  H01L41/08 ,  H01L41/18 ,  H01L41/22 ,  H01L41/29 ,  H01L41/311

    CPC分类号： G01C19/5642

    摘要： Disclosed is a small-sized vibration type gyrosensor device of high sensitivity provided with a cantilevered oscillator. A cantilevered oscillator 11, provided with a lower electrode, a piezoelectric film and an upper electrode, formed on a single-crystal silicon substrate by a thin film forming process, includes, as an upper electrode, a driving electrode 6a, formed along the length of the oscillator 11 for applying the voltage for causing oscillations of the oscillator 11, and first and second detection electrodes 6b, 6c, formed on both sides of the driving electrode 6a parallel to the longitudinal direction of the oscillator, without contacting with the driving electrode 6a. With a width W0 of the driving electrode 6a, a width W1 of the first detection electrode 6b, a width W2 of the second detection electrode 6c and with W=W0+W1+W2, the condition of 0.5

    摘要翻译： 公开了一种具有悬臂振荡器的高灵敏度的小型振动式陀螺仪。 通过薄膜形成工艺在单晶硅衬底上形成的具有下电极，压电膜和上电极的悬臂振荡器11包括沿着上电极形成的驱动电极6a， 用于施加用于引起振荡器11的振荡的电压的振荡器11的长度以及形成在驱动电极6的平行于振荡器的纵向的两侧上的第一和第二检测电极6b，6c，而不接触 与驱动电极6a连接。 驱动电极6a的宽度W 0，第一检测电极6b的宽度W 1，第二检测电极6c的宽度W 2，W = W 0 + W 1 + W 2，条件 为0.5 <（W 0 / W）<1。

    Track jump apparatus
    88.
    发明授权
    Track jump apparatus 失效
    轨道跳跃装置

    公开(公告)号：US06442111B1

    公开(公告)日：2002-08-27

    申请号：US09428943

    申请日：1999-10-28

    申请人： Kazuo Takahashi ,  Kiyoshi Tateishi

    发明人： Kazuo Takahashi ,  Kiyoshi Tateishi

    IPC分类号： G11B700

    CPC分类号： G11B7/08541 ,  G11B7/08517 ,  G11B7/08529 ,  G11B7/094

    摘要： A track jump apparatus for making an actuator jump in order to move a spot position of a laser beam emitted through an objective lens of the actuator from a current position to an object position corresponding to a desired recording track on a recording medium. The track jump apparatus includes: an actuator driving device that moves the actuator in accordance with a driving signal; a tracking error signal detecting device that detects a tracking error signal on the basis of a change of return light from the recording medium caused by a change of the spot position of the laser beam relative to the recording track; a feed-forward control device that applies an acceleration pulse and a deceleration pulse to the actuator driving device; and a position control device that controls a position of the actuator using a feedback of the driving signal so as to reduce a difference between an object value and the tracking error signal detected by the tracking error signal detecting device, when making the actuator jump in order to move the spot position of the laser beam from the current position to the object position. The feed-forward control device sets a constant speed period during which neither of the acceleration pulse and the deceleration pulse is applied to the actuator driving device between an acceleration period during which the acceleration pulse is applied to the actuator driving device and a deceleration period during which the deceleration pulse is applied to the actuator driving device.

    摘要翻译： 一种用于使致动器跳跃的轨道跳跃装置，以便将通过致动器的物镜发射的激光束的光点位置从当前位置移动到对应于记录介质上的期望记录轨道的对象位置。 轨道跳跃装置包括：致动器驱动装置，其根据驱动信号使致动器移动; 跟踪误差信号检测装置，其基于由激光束的光点位置相对于记录轨道的变化引起的来自记录介质的返回光的变化来检测跟踪误差信号; 向所述致动器驱动装置施加加速度脉冲和减速脉冲的前馈控制装置; 以及位置控制装置，其使用所述驱动信号的反馈来控制所述致动器的位置，以便在使所述致动器按顺序跳跃时减小由所述跟踪误差信号检测装置检测到的对象值和所述跟踪误差信号之间的差异 将激光束的光点位置从当前位置移动到物体位置。 前馈控制装置设定恒定速度期间，在该恒定速度期间，加速脉冲和减速脉冲都不会在致动器驱动装置施加加速度脉冲的加速期间和致动器驱动装置的加减速期间 减速脉冲施加到致动器驱动装置。

    Polishing apparatus with slurry screening
    89.
    发明授权
    Polishing apparatus with slurry screening 失效
    抛光设备用浆料筛选

    公开(公告)号：US06352469B1

    公开(公告)日：2002-03-05

    申请号：US09433067

    申请日：1999-11-03

    申请人： Kyoichi Miyazaki ,  Matsuomi Nishimura ,  Kazuo Takahashi

    发明人： Kyoichi Miyazaki ,  Matsuomi Nishimura ,  Kazuo Takahashi

    IPC分类号： B24B700

    CPC分类号： B24B37/04 ,  B24B57/02 ,  Y10S451/91

    摘要： A polishing apparatus and a polishing method can effectively prevent large diameter particles from being fed with slurry to an object to be polished. A large-diameter particle screener blocks or disperses large diameter particles from entering the slurry. Then, slurry free from large diameter particles is taken up from a slurry container by an intake pipe and fed to the object to be polished.

    摘要翻译： 抛光装置和抛光方法可以有效地防止大直径颗粒向被抛光物体供给浆料。 大直径颗粒筛选器阻挡或分散大直径颗粒进入浆料。 然后，通过进气管从浆料容器中吸收没有大直径颗粒的浆料并供给到待抛光对象物。

    Polishing apparatus and method
    90.
    发明授权
    Polishing apparatus and method 失效
    抛光设备和方法

    公开(公告)号：US06183345B2

    公开(公告)日：2001-02-06

    申请号：US09045651

    申请日：1998-03-20

    申请人： Takashi Kamono ,  Matsuomi Nishimura ,  Kazuo Takahashi ,  Osamu Ikeda ,  Satoshi Ohta

    发明人： Takashi Kamono ,  Matsuomi Nishimura ,  Kazuo Takahashi ,  Osamu Ikeda ,  Satoshi Ohta

    IPC分类号： B24B2900

    CPC分类号： B24B37/013 ,  B24B27/0023 ,  B24B27/0076 ,  B24B37/042

    摘要： In order to efficiently polish a large-area member to be polished to a desired shape, a polishing apparatus includes a first polishing station including a first holding unit for holding a member to be polished in a state in which a surface to be polished thereof is upwardly placed, and a first polishing head for holding and rotating a polishing pad whose polishing surface is larger than the surface to be polished in a state of contacting the surface to be polished, a detection station for detecting a polished state of the surface to be polished in a state in which the surface to be polished is upwardly placed, and a second polishing station including a second holding unit for holding the member to be polished in a state in which the surface to be polished thereof is upwardly placed, and a second polishing head for holding and rotating a polishing pad whose polishing surface is smaller than the surface to be polished in a state of contacting the surface to be polished.

    摘要翻译： 为了将要抛光的大面积构件有效地研磨成所需的形状，抛光装置包括：第一抛光站，包括：第一保持单元，用于在要抛光的表面被抛光的状态下保持要抛光的构件 向上放置的第一抛光头，以及用于保持和旋转抛光表面的抛光表面大于待抛光表面的抛光表面的第一抛光头，用于检测表面抛光状态的检测站 在抛光表面被向上放置的状态下被抛光;以及第二抛光台，其包括第二保持单元，用于在待抛光表面向上放置的状态下保持待抛光元件， 抛光头，用于在与要抛光的表面接触的状态下保持和旋转其研磨表面小于待抛光表面的抛光垫。