公开(公告)号：US06755932B2

公开(公告)日：2004-06-29

申请号：US09788463

申请日：2001-02-21

申请人： Toshio Masuda ,  Tatehito Usui ,  Mitsuru Suehiro ,  Hiroshi Kanekiyo ,  Hideyuki Yamamoto ,  Kazue Takahashi ,  Hiromichi Enami

发明人： Toshio Masuda ,  Tatehito Usui ,  Mitsuru Suehiro ,  Hiroshi Kanekiyo ,  Hideyuki Yamamoto ,  Kazue Takahashi ,  Hiromichi Enami

IPC分类号： H05H100

CPC分类号： H01L21/67069 ,  G01N21/68 ,  H01J37/32082 ,  H01J37/32935 ,  H01J37/32972

摘要： The object of the present invention is to provide a plasma processing apparatus wherein plasma is generated in process chamber to treat a sample. Said plasma processing apparatus is further characterized in that multiple closely packed through-holes are formed on the plate installed on the UHF antenna arranged opposite to the sample, an optical transmitter is installed almost in contact with the back of the through-holes, and an optical transmission means is arranged on the other end of said optical transmitter, thereby measuring optical information coming from the sample and plasma through optical transmitter and optical transmission means by means of a measuring instrument. No abnormal discharge or particle contamination occur to through-holes even in long-term discharge process, and no deterioration occurs to the optical performance at the end face of the optical transmitter. Said plasma processing apparatus ensures stable and high precision measurement of the state of the surface of sample and plasma for a long time.

摘要翻译： 本发明的目的是提供一种等离子体处理装置，其中在处理室中产生等离子体以处理样品。 所述等离子体处理装置的特征还在于，在安装在与样品相对布置的UHF天线上的板上形成多个紧密堆积的通孔，光发射器几乎与通孔背面几乎接触，并且 光传输装置设置在所述光发射机的另一端，借助于测量仪器通过光发射机和光传输装置测量来自样本和等离子体的光信息。 即使在长期放电过程中也不会对通孔发生异常放电或颗粒污染，并且在光发射机的端面处的光学性能不会劣化。 所述等离子体处理装置长时间保证对样品和等离子体表面的状态的稳定和高精度的测量。

公开(公告)号：US06677167B2

公开(公告)日：2004-01-13

申请号：US10086722

申请日：2002-03-04

申请人： Seiichiro Kanno ,  Hironobu Kawahara ,  Mitsuru Suehiro ,  Saburou Kanai ,  Toshio Masuda

发明人： Seiichiro Kanno ,  Hironobu Kawahara ,  Mitsuru Suehiro ,  Saburou Kanai ,  Toshio Masuda

IPC分类号： H01L2166

CPC分类号： H01L21/67109

摘要： A wafer processing apparatus comprising a wafer stage, wherein a semiconductor wafer is mounted on the wafer stage so as to process the semiconductor wafer, wherein a holding mechanism of the wafer stage is commonly used for a plurality of wafer stages, and accordingly, the wafer stage can be changed into a wafer stage having a different function so as to process the semiconductor wafer.

摘要翻译： 一种晶片处理装置，包括晶圆台，其中半导体晶片安装在晶片台上以便处理半导体晶片，其中晶片台的保持机构通常用于多个晶片台，因此，晶片 可以将阶段改变为具有不同功能的晶片台，以便处理半导体晶片。

公开(公告)号：US06503364B1

公开(公告)日：2003-01-07

申请号：US09651720

申请日：2000-08-30

申请人： Toshio Masuda ,  Tatehito Usui ,  Shigeru Shirayone ,  Kazue Takahashi ,  Mitsuru Suehiro

发明人： Toshio Masuda ,  Tatehito Usui ,  Shigeru Shirayone ,  Kazue Takahashi ,  Mitsuru Suehiro

IPC分类号： C23C1600

CPC分类号： H01J37/32935 ,  H01J37/32009 ,  H01J37/32972

摘要： In the plasma processing apparatus for generating plasma in a processing chamber and processing a wafer by mutual action of electromagnetic waves radiated from a UHF band antenna installed in the processing chamber and a magnetic field formed by a magnetic field generator installed around the processing chamber, a hollow tube having one end in communication with an opening in the side wall of the processing chamber and another end, outside the processing chamber, which has a measuring window of plasma optical emission. By setting the lines of force of the magnetic field formed by the magnetic field generator so as to form an angle relative to the hollow tube, entry of plasma into the hollow tube can be prevented, and adhesion of deposits onto the measuring window can be suppressed, whereby the transmission factor of the measuring window can be kept constant over a long period of use.

摘要翻译： 在处理室中产生等离子体的等离子体处理装置中，通过从安装在处理室中的UHF带状天线辐射的电磁波的相互作用和由设置在处理室周围的磁场发生部形成的磁场进行相互作用来处理晶片， 中空管具有与处理室的侧壁中的开口连通的一端，以及具有等离子体光发射测量窗的处理室外的另一端。 通过设置由磁场发生器形成的磁场的力线以相对于中空管形成一个角度，可以防止等离子体进入中空管，并且可以抑制沉积物粘附到测量窗口上 由此，可以在长时间使用时测量窗口的透射系数保持恒定。

公开(公告)号：US06422172B1

公开(公告)日：2002-07-23

申请号：US09040404

申请日：1998-03-18

申请人： Jyunichi Tanaka ,  Toru Otsubo ,  Toshio Masuda ,  Ichiro Sasaki ,  Tetsunori Kaji ,  Katsuya Watanabe

发明人： Jyunichi Tanaka ,  Toru Otsubo ,  Toshio Masuda ,  Ichiro Sasaki ,  Tetsunori Kaji ,  Katsuya Watanabe

IPC分类号： C23F102

CPC分类号： H01J37/32082 ,  C23C16/505 ,  H01J37/32422

摘要： A plasma processing apparatus has plasma generating means including a means for generating capacitive coupled discharge and a means for radiating electromagnetic waves, so that the energy state of electrons is independently controlled by a combination of a plasma due to capacitive coupled discharge and a plasma due to radiation of electromagnetic waves of a high-frequency, to thereby control the occurrence of radical species, and thereby establishing a compatibility, for example, between high selective etching and high accuracy and high speed in etching or between film quality and film formation rate. Since the density distribution of the plasma can be controlled without any change in hardware configuration by adjusting distributions of the power for capacitive coupled discharge and the power for radiation of electromagnetic waves, the entire surface of a large-sized substrate can be etched at a high accuracy into a fine pattern. The apparatus is also intended to prevent the occurrence of dust caused by plasma processing and changes in characteristics of plasma processing, and hence to enhance productivity of semiconductor devices and/or liquid crystal display elements.

摘要翻译： 等离子体处理装置具有等离子体产生装置，其包括用于产生电容耦合放电的装置和用于辐射电磁波的装置，从而由​​于电容耦合放电引起的等离子体和等离子体的组合独立地控制电子的能量状态，由于 辐射高频的电磁波，从而控制自由基物质的发生，从而在高选择性蚀刻和高精度和高速蚀刻或膜质量和成膜速率之间建立兼容性。 由于可以通过调节用于电容耦合放电的功率的分布和电磁波的辐射功率来控制等离子体的密度分布而没有硬件配置的任何变化，因此可以将高尺寸基板的整个表面以高 精确到精细模式。 该装置还旨在防止等离子体处理引起的灰尘的发生和等离子体处理的特性的变化，从而提高半导体器件和/或液晶显示元件的生产率。

公开(公告)号：US06086141A

公开(公告)日：2000-07-11

申请号：US114913

申请日：1998-07-14

申请人： Toshio Masuda ,  Masayuki Honma

发明人： Toshio Masuda ,  Masayuki Honma

IPC分类号： B62D21/15 ,  B62D25/04 ,  B62D25/20

CPC分类号： B62D25/20 ,  B62D21/157 ,  B62D25/025 ,  B62D25/04 ,  B62D25/2036

摘要： A body structure of a motor vehicle includes a roof side rail, a side sill, a center pillar, a floor, a center tunnel and a doubler provided between the side sill and the center tunnel. The doubler has a flat closed cross section formed by the floor and a plurality of U-shaped channels and its lengthwise width is longer than that of the lower end of the center pillar. At the outer end of the doubler there are provided a pillar mating section and a side sill mating section. The doubler is connected by welds at the pillar mating section with the center pillar and at the side sill mating section with the side sill. The center pillar has a yieldable portion thereon and it can absorb an impact energy by bending itself. The center tunnel has a reinforcement panel reinforced from underneath.

摘要翻译： 机动车辆的车身结构包括在侧梁和中心隧道之间设置的车顶侧轨，侧梁，中心柱，地板，中心隧道和倍增器。 倍增器具有由地板和多个U形通道形成的平坦的闭合截面，并且其纵向宽度比中心柱的下端长。 在倍增器的外端设有一个支柱配合部分和一个下纵梁配合部分。 倍增器通过在具有中心柱的柱配合部分处的焊缝连接，并且在与下梁的侧梁配合部分处连接。 中心柱在其上具有可屈服部分，并且可以通过弯曲自身来吸收冲击能量。 中心隧道有一个从下面加强的加强板。

公开(公告)号：US5994439A

公开(公告)日：1999-11-30

申请号：US73341

申请日：1998-05-06

申请人： Toshio Masuda ,  Manabu Ogiwara ,  Hideaki Hayashi ,  Junzo Ukai ,  Hideo Nishimura

发明人： Toshio Masuda ,  Manabu Ogiwara ,  Hideaki Hayashi ,  Junzo Ukai ,  Hideo Nishimura

IPC分类号： C08K5/04 ,  C08K5/10 ,  C08K5/12 ,  C08L27/06 ,  C08J5/10

CPC分类号： C08K5/12 ,  C08L27/06 ,  C08L2205/02

摘要： Provided is a vinyl chloride resin composition for powder molding comprising:(1) 100 parts by weight of a vinyl chloride resin powder having an average polymerization degree p of 600 to 3000 and an internal pore volume of 0.20 ml/g or more,(2) 80 to 150 parts by weight of a trimellitic ester having an alkyl group with a principal chain having an average carbon number n of 6 to 9, and(3) 5 to 25 parts by weight of a fine vinyl chloride resin having an average polymerization degree q of 400 to 1300 and a primary grain size distribution of two modes in which a smaller mode falls in a grain size range of 0.1 to 0.4 .mu.m and a larger mode falls in a grain size range of 0.9 to 1.4 .mu.m,wherein the parts by weight L of the trimellitic ester shown in (2), p and n each described above have the relation satisfying an equation (I):5

摘要翻译： 本发明提供一种粉末成型用氯乙烯系树脂组合物，其特征在于：（1）将100重量份平均聚合度p为600〜3000，内孔体积为0.20ml / g以上的氯乙烯树脂粉末，（2 ）80〜150重量份具有平均碳数n为6〜9的主链的烷基的偏苯三酸酯，（3）平均聚合度为5〜25重量份的氯乙烯系树脂 度q为400〜1300，其中较小的模式落在0.1〜0.4μm的晶粒尺寸范围内的两种模式的一次粒度分布，并且较大的模式落在0.9〜1.4μm的晶粒尺寸范围内，其中 （2）中所示的偏苯三酸酯的重量百分数L和上述每个都具有满足式（I）的关系：5 <[{（n-8）x5 + L} / p]×100 <12 （I）该氯乙烯树脂组合物的耐寒性和耐热劣化性得到改善。

公开(公告)号：US5820204A

公开(公告)日：1998-10-13

申请号：US767295

申请日：1996-12-16

申请人： Toshio Masuda ,  Masayuki Honma

发明人： Toshio Masuda ,  Masayuki Honma

IPC分类号： B62D21/15 ,  B62D25/04 ,  B62D25/20

CPC分类号： B62D25/20 ,  B62D21/157 ,  B62D25/025 ,  B62D25/04 ,  B62D25/2036

摘要： A body structure of a motor vehicle includes a roof side rail, a side sill, a center pillar, a floor, a center tunnel, and a doubler provided between the side sill and the center tunnel. The doubler has a flat closed cross section formed by the floor and a plurality of U-shaped channels and its lengthwise width is longer than that of the lower end of the center pillar. At the outer end of the doubler there are provided a pillar mating section and a side sill mating section. The doubler is connected by welds at the pillar mating section with the center pillar at the side sill mating section with the side sill. The center pillar has a yieldable portion thereon and it can absorb an impact energy by bending with respect to itself. The center tunnel has a reinforcement panel reinforced from underneath.

摘要翻译： 机动车辆的车体结构包括设置在下槛和中心隧道之间的车顶侧轨，下槛梁，中心支柱，地板，中心巷道和倍增器。 倍增器具有由地板和多个U形通道形成的平坦的闭合截面，并且其纵向宽度比中心柱的下端长。 在倍增器的外端设有一个支柱配合部分和一个下纵梁配合部分。 倍增器通过在柱形配合部分处的焊缝连接，中心柱在与下梁的侧梁配合部分处。 中心柱在其上具有可屈服部分，并且可以通过相对于其自身弯曲而吸收冲击能量。 中心隧道有一个从下面加强的加强板。

公开(公告)号：US5641194A

公开(公告)日：1997-06-24

申请号：US510532

申请日：1995-08-02

申请人： Masayuki Honma ,  Toshio Masuda

发明人： Masayuki Honma ,  Toshio Masuda

IPC分类号： B62D21/15 ,  B62D25/02 ,  B62D25/20

CPC分类号： B62D25/02 ,  B62D21/157 ,  B62D25/025 ,  B62D25/2036

摘要： A side body structure of a motor vehicle includes a first and second crash boxes at the connecting portion of a side sill and a rear wheel arch. The first crash box is provided outside of a side sill reinforcement and the second crash box is inside the side sill reinforcement. The second crash box is connected with a cross member extended in a transversal direction of the vehicle. In the event of a side impact, first the first crash box collapses and then the second crash box does. Finally, the impact energy is transferred to and absorbed by other body structures through the cross member. The side sill portion and the rear wheel arch portion can be prevented from intruding into a rear compartment so as to save passengers from serious injury.

摘要翻译： 机动车辆的侧体结构包括在下纵梁和后轮拱的连接部分处的第一和第二碰撞箱。 第一个碰撞箱设置在侧梁加强件外侧，第二个碰撞箱位于下梁架内。 第二碰撞箱与在车辆的横向方向上延伸的横梁连接。 在发生侧面碰撞的情况下，首先碰撞盒第一个崩溃，然后是第二个碰撞盒。 最后，撞击能量通过横梁转移到其他身体结构并被其吸收。 可以防止下纵梁部分和后轮拱形部分进入后隔间，以免乘客受到严重伤害。

公开(公告)号：US5611568A

公开(公告)日：1997-03-18

申请号：US557728

申请日：1995-11-13

申请人： Toshio Masuda

发明人： Toshio Masuda

IPC分类号： B60R21/01 ,  B62D21/15 ,  B62D33/06 ,  B62D7/22

CPC分类号： B60R21/0136 ,  B62D21/152 ,  B62D33/06 ,  B22F2998/00 ,  B60R2021/01006

摘要： A front frame structure of a cab over type vehicle comprises a side member provided in a longitudinal direction of the vehicle, an aluminum-made frame section connected with the front end of the side member, a front cross member connected with the front end of the frame section, a front bumper provided adjacent to the he front cross member, and an aluminum foam inserted in the frame section. When a head-on impact is applied to the vehicle body, an impact energy is transmitted to the aluminum-made frame section through the bumper and the front cross member and the frame section is subjected to a buckling deformation together with the aluminum foam contained therein. The impact energy can be effectively absorbed within a small crush space of the vehicle.

摘要翻译： 一种驾驶室型车辆的前框架结构，包括沿车辆纵向方向设置的侧构件，与侧构件的前端连接的铝制框架部，与横向构件的前端连接的前横梁 框架部分，与其前横梁相邻设置的前保险杠和插入框架部分中的铝泡沫。 当对车体施加正面冲击时，冲击能量通过保险杠和前横梁传递到铝制框架部分，并且框架部分与其中包含的铝泡沫一起经受弯曲变形 。 冲击能量可以有效地吸收在车辆的小碎片空间内。

公开(公告)号：US4778868A

公开(公告)日：1988-10-18

申请号：US50024

申请日：1987-05-15

申请人： Toshinobu Higashimura ,  Toshio Masuda ,  Koichi Takada

发明人： Toshinobu Higashimura ,  Toshio Masuda ,  Koichi Takada

IPC分类号： B01D53/22 ,  B01D71/44 ,  B01D71/70 ,  C01B13/02 ,  C08F138/00 ,  C08F230/08 ,  C08F230/00

CPC分类号： B01D71/44 ,  C01B13/0255 ,  C08F138/00 ,  C01B2210/0046

摘要： A permselective membrane having an improved gas-permeability and selectivity is obtained from a polymer of 1-alkyldimethylsilyl-1-propyne.

摘要翻译： 从1-烷基二甲基甲硅烷基-1-丙炔的聚合物获得具有改善的气体渗透性和选择性的选择性选择性膜。