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公开(公告)号:US11705512B2
公开(公告)日:2023-07-18
申请号:US17676799
申请日:2022-02-21
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Kuo-Hsing Lee , Yi-Chung Sheng , Sheng-Yuan Hsueh , Chih-Kai Kang , Guan-Kai Huang , Chien-Liang Wu
IPC: H01L29/778 , H01L29/66
CPC classification number: H01L29/7787 , H01L29/66462
Abstract: A high electron mobility transistor (HEMT) includes a carrier transit layer, a carrier supply layer, a main gate, a control gate, a source electrode and a drain electrode. The carrier transit layer is on a substrate. The carrier supply layer is on the carrier transit layer. The main gate and the control gate are on the carrier supply layer. A fluoride ion doped region is formed right below the main gate in the carrier supply layer. The source electrode and the drain electrode are at two opposite sides of the main gate and the control gate, wherein the source electrode is electrically connected to the control gate by a metal interconnect. The present invention also provides a method of forming a high electron mobility transistor (HEMT).
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公开(公告)号:US20230223400A1
公开(公告)日:2023-07-13
申请号:US18119260
申请日:2023-03-08
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Kuo-Hsing Lee , Sheng-Yuan Hsueh , Chien-Liang Wu , Te-Wei Yeh , Yi-Chun Chen
IPC: H01L27/06 , H01L29/778 , H01L21/306 , H01L29/205 , H01L21/765 , H01L29/40 , H01L21/8252 , H01L29/66 , H01L29/20
CPC classification number: H01L27/0605 , H01L21/765 , H01L21/8252 , H01L21/30621 , H01L27/0629 , H01L28/20 , H01L29/205 , H01L29/402 , H01L29/2003 , H01L29/7786 , H01L29/66462
Abstract: A resistor-transistor-logic circuit with GaN structures, including a 2DEG resistor having a drain connected with an operating voltage, and a logic FET having a gate connected to an input voltage, a source grounded and a drain connected with a source of the 2DEG resistor and connected collectively to an output voltage.
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公开(公告)号:US11688800B2
公开(公告)日:2023-06-27
申请号:US16994646
申请日:2020-08-16
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Kuo-Hsing Lee , Sheng-Yuan Hsueh , Chien-Liang Wu , Kuo-Yu Liao
IPC: H01L29/778 , H01L27/06 , H01L29/20 , H01L29/66 , H01L29/06
CPC classification number: H01L29/778 , H01L27/0629 , H01L29/0649 , H01L29/2003 , H01L29/66462
Abstract: A semiconductor device includes a substrate having a high electron mobility transistor (HEMT) region and a capacitor region, a first mesa isolation on the HEMT region, a HEMT on the first mesa isolation, a second mesa isolation on the capacitor region, and a capacitor on the second mesa isolation. The semiconductor device further includes buffer layer between the substrate, the first mesa isolation, and the second mesa isolation, in which bottom surfaces of the first mesa isolation and the second mesa isolation are coplanar.
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公开(公告)号:US11665891B2
公开(公告)日:2023-05-30
申请号:US17314061
申请日:2021-05-07
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Kuo-Hsing Lee , Chang-Chien Wong , Sheng-Yuan Hsueh , Ching-Hsiang Tseng , Chi-Horn Pai , Shih-Chieh Hsu
IPC: H10B20/20
CPC classification number: H10B20/20
Abstract: A one-time programmable (OTP) memory cell includes a substrate comprising an active area surrounded by an isolation region, a transistor disposed on the active area, and a diffusion-contact fuse electrically coupled to the transistor. The diffusion-contact fuse includes a diffusion region in the active area, a silicide layer on the diffusion region, and a contact partially landed on the silicide layer and partially landed on the isolation region.
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公开(公告)号:US20230081533A1
公开(公告)日:2023-03-16
申请号:US17502056
申请日:2021-10-15
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Kuo-Hsing Lee , Chien-Liang Wu , Wen-Kai Lin , Te-Wei Yeh , Sheng-Yuan Hsueh , Chi-Horn Pai
Abstract: A semiconductor memory structure includes a substrate having thereon a transistor forming region and a capacitor forming region. A transistor is disposed on the substrate within the transistor forming region. A capacitor is disposed within the capacitor forming region and electrically coupled to the transistor. A first inter-layer dielectric layer covers the transistor forming region and the capacitor forming region. The first inter-layer dielectric layer surrounds a metal gate of the transistor and a bottom plate of the capacitor. A cap layer is disposed on the first inter-layer dielectric layer. The cap layer has a first thickness within the transistor forming region and a second thickness within the capacitor forming region. The first thickness is greater than the second thickness. The cap layer within the capacitor forming region acts as a capacitor dielectric layer of the capacitor.
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公开(公告)号:US11569295B2
公开(公告)日:2023-01-31
申请号:US16924169
申请日:2020-07-08
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Kuo-Hsing Lee , Sheng-Yuan Hsueh , Te-Wei Yeh , Chien-Liang Wu
Abstract: A magnetoresistive random access memory (MRAM) includes a first transistor and a second transistor on a substrate, a source line coupled to a first source/drain region of the first transistor, and a first metal interconnection coupled to a second source/drain region of the first transistor. Preferably, the first metal interconnection is extended to overlap the first transistor and the second transistor and the first metal interconnection further includes a first end coupled to the second source/drain region of the first transistor and a second end coupled to a magnetic tunneling junction (MTJ).
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公开(公告)号:US20220173236A1
公开(公告)日:2022-06-02
申请号:US17676799
申请日:2022-02-21
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Kuo-Hsing Lee , Yi-Chung Sheng , Sheng-Yuan Hsueh , Chih-Kai Kang , Guan-Kai Huang , Chien-Liang Wu
IPC: H01L29/778 , H01L29/66
Abstract: A high electron mobility transistor (HEMT) includes a carrier transit layer, a carrier supply layer, a main gate, a control gate, a source electrode and a drain electrode. The carrier transit layer is on a substrate. The carrier supply layer is on the carrier transit layer. The main gate and the control gate are on the carrier supply layer. A fluoride ion doped region is formed right below the main gate in the carrier supply layer. The source electrode and the drain electrode are at two opposite sides of the main gate and the control gate, wherein the source electrode is electrically connected to the control gate by a metal interconnect. The present invention also provides a method of forming a high electron mobility transistor (HEMT).
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公开(公告)号:US20220123200A1
公开(公告)日:2022-04-21
申请号:US17095752
申请日:2020-11-12
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Kuo-Hsing Lee , Chun-Hsien Lin , Sheng-Yuan Hsueh
Abstract: The present invention provides a semiconductor device and a method of forming the same, and the semiconductor device includes a substrate, a first interconnect layer and a second interconnect layer. The first interconnect layer is disposed on the substrate, and the first interconnect layer includes a first dielectric layer around a plurality of first magnetic tunneling junction (MTJ) structures. The second interconnect layer is disposed on the first interconnect layer, and the second interconnect layer includes a second dielectric layer around a plurality of second MTJ structures, wherein, the second MTJ structures and the first MTJ structures are alternately arranged along a direction. The semiconductor device may obtain a reduced size of each bit cell under a permissible process window, so as to improve the integration of components.
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公开(公告)号:US20220029005A1
公开(公告)日:2022-01-27
申请号:US16994646
申请日:2020-08-16
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Kuo-Hsing Lee , Sheng-Yuan Hsueh , Chien-Liang Wu , Kuo-Yu Liao
IPC: H01L29/778 , H01L27/06 , H01L29/06 , H01L29/66 , H01L29/20
Abstract: A semiconductor device includes a substrate having a high electron mobility transistor (HEMT) region and a capacitor region, a first mesa isolation on the HEMT region, a HEMT on the first mesa isolation, a second mesa isolation on the capacitor region, and a capacitor on the second mesa isolation. The semiconductor device further includes buffer layer between the substrate, the first mesa isolation, and the second mesa isolation, in which bottom surfaces of the first mesa isolation and the second mesa isolation are coplanar.
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公开(公告)号:US20200152768A1
公开(公告)日:2020-05-14
申请号:US16741725
申请日:2020-01-13
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Kuo-Hsing Lee , Yi-Chung Sheng , Sheng-Yuan Hsueh , Chih-Kai Kang
IPC: H01L29/66 , H01L21/8238 , H01L27/092 , H01L29/78 , H01L27/088 , H01L21/8234
Abstract: A method of forming a fin forced stack inverter includes the following steps. A substrate including a first fin, a second fin and a third fin across a first active area along a first direction is provided, wherein the first fin, the second fin and the third fin are arranged side by side. A fin remove inside active process is performed to remove at least a part of the second fin in the first active area. A first gate is formed across the first fin and the third fin in the first active area along a second direction. The present invention also provides a 1-1 fin forced fin stack inverter formed by said method.
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