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81.发明申请Method of manufacturing a replica, as well as a replica obtained by carring out a uv light-initiated or thermal curing treatment of a reactive mixture 审中-公开制造复制品的方法，以及通过对反应混合物进行紫外光引发或热固化处理获得的复制品公开(公告)号：US20060157875A1
公开(公告)日：2006-07-20
申请号：US10538106
申请日：2003-11-26
CPC分类号： B29C39/026 , B29C35/02 , B29C39/003 , B29C2035/0827 , B29K2083/00 , C08L83/04 , Y10T428/21
摘要： The present invention relates to a method of manufacturing a replica, which method comprises the provision of a curable resin composition between a mold and a substrate or a blank, carrying out a UV light-initiated or thermal curing treatment and removing the replica thus manufactured from the mold, which replica comprises the substrate and the reproduction of the mold provided thereon. The invention also relates to a replica obtained by carrying out a UV light-initiated or thermal curing treatment of a reactive compound, especially a replica that has a high transparency for low wavelengths, i.e. 190-400 nm.
摘要翻译： 本发明涉及一种制造复制品的方法，该方法包括在模具和基材或坯料之间提供可固化树脂组合物，进行UV光引发或热固化处理，并将由此制备的复制品从 模具，该复制品包括基材和提供在其上的模具的再现。 本发明还涉及通过对反应性化合物进行UV光引发或热固化处理获得的复制品，特别是对于低波长（即190-400nm）具有高透明度的复制品。
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公开(公告)号：US20060154179A1
公开(公告)日：2006-07-13
申请号：US11030326
申请日：2005-01-07
IPC分类号： G03C5/00
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00
摘要： An imprinting method is disclosed which involves irradiating a photo-curable imprintable medium in a flowable state on a substrate with radiation to initiate curing of the medium, after the irradiating, contacting the medium with a template to form an imprint in the medium, allowing the medium to substantially cure such that the medium is in a substantially non-flowable state while the medium is contacted by the template, and separating the template from the medium while the medium is in the substantially non-flowable state.
摘要翻译： 公开了一种压印方法，其包括在辐射下以可流动状态在基板上照射可光固化的可印刷介质以引发介质的固化，在照射之后，使介质与模板接触以在介质中形成印记， 介质基本上固化，使得介质处于基本不可流动的状态，同时介质与模板接触，并且当介质处于基本上不可流动的状态时将模板与介质分离。
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公开(公告)号：US20060110571A1
公开(公告)日：2006-05-25
申请号：US10529687
申请日：2003-09-19
IPC分类号： B32B3/02
CPC分类号： G11B7/2542 , G11B7/252 , G11B7/2534 , G11B7/2545 , G11B2007/24314 , G11B2007/24316 , G11B2007/2571 , G11B2007/25713
摘要： The present invention relates to an optical record carrier for recording and/or information using a radiation beam in the UV wavelength range, in particular having a wavelength in the range from 230 to 270 nm, comprising a substrate layer (S) and an information stack (R) comprising an information layer (P) comprising a material for forming marks and spaces representing an information by irradiation of a UV radiation beam, a transparent cover layer (C) on top of the side of the said record carrier facing the incident UV radiation beam. The cover layer (C) is made of a cured resin composition being a silicon based reactive material, which achieves a high UV transparency required for the recording and/or reading of data. The optical record carrier may further comprise at least one additional information stack and at least one transparent spacer layer for separating the information stacks from each other, said spacer layer (SP) being made of the said resin composition.
摘要翻译： 本发明涉及一种用于记录和/或使用UV波长范围内的辐射束，特别是波长在230至270nm范围内的信息的光学记录载体，包括基底层（S）和信息堆叠 （R）包括信息层（P），所述信息层（P）包括用于形成通过UV辐射束的照射来表示信息的标记和空间的材料;在所述记录载体的面对入射的UV的一侧的顶部上的透明覆盖层 辐射束。 覆盖层（C）由基于硅的反应性材料的固化树脂组合物制成，其实现了数据记录和/或读取所需的高的UV透明度。 光学记录载体还可以包括至少一个附加信息堆叠和用于将信息堆叠彼此分离的至少一个透明间隔层，所述间隔层（SP）由所述树脂组合物制成。
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公开(公告)号：US20050174549A1
公开(公告)日：2005-08-11
申请号：US10773461
申请日：2004-02-09
IPC分类号： H01L21/027 , G03F7/20 , G03B27/52
CPC分类号： G03F7/70341
摘要： An immersion lithographic apparatus includes a voltage generator or power source that applies a potential difference to an object in contact with the immersion liquid such that bubbles and/or particles in the immersion liquid are either attracted or repelled from that object due to the electrokinetic potential of the surface of the bubble in the immersion liquid.
摘要翻译： 浸没式光刻设备包括电压发生器或电源，该电压发生器或电源对与浸入液体接触的物体施加电位差，使得浸没液体中的气泡和/或颗粒被吸引或排斥于该物体，这是由于电动势 浸泡液中的气泡表面。
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公开(公告)号：US06649093B2
公开(公告)日：2003-11-18
申请号：US09915679
申请日：2001-07-26
IPC分类号： B29D1100
CPC分类号： G11B7/122 , G11B7/261 , Y10S425/81
摘要： The invention relates to a method of manufacturing a master mold (1), which is used to manufacture an optical information disc, such as a CD or DVD. According to the method, a substrate (3) is provided with a photosensitive layer (5), which is subsequently irradiated by means of a radiation beam (7), which is focused to a scanning spot (11) on said layer by means of an optical lens system (9). A liquid, such as water, is supplied into a gap (53) present between the photosensitive layer and an auxiliary lens (59) of the lens system facing said layer. As a result, the size of the scanning spot is decreased and the information density of the information disc to be manufactured is increased. According to the invention, the liquid is supplied via a supply opening (69) which is positioned immediately adjacent the auxiliary lens (59), in a direction which, viewed from the scanning spot (11), is contrary to a direction (Z) wherein the substrate (3) is moved with respect to the lens system (9). Thus, the liquid supplied via the supply opening is transported immediately and exclusively into said gap (53), so that the amount of liquid to be supplied to fill the gap is limited. The supply opening is formed in a wall portion (65), which extends in an imaginary plane in which also a side wall (63) of the auxiliary lens (59) facing the photosensitive layer is present. As a result, a homogeneous Couette flow of liquid without air inclusions is obtained in the gap. This Couette flow does not cause any undesirable mechanical vibrations of the lens system. The invention further relates to a method of manufacturing an optical information disc, according to which method a master mold (1) is manufactured in a first step, and the information disc is manufactured in a second step by means of a replica process using said master mold. The invention further relates to a device (25) for the manufacture of a master mold by means of a method according to the invention.
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86.发明授权Process and apparatus for removing gaseous contaminants from gas stream comprising gaseous contaminants 有权用于从包含气态污染物的气流中除去气态污染物的方法和装置公开(公告)号：US09396854B2
公开(公告)日：2016-07-19
申请号：US13061435
申请日：2009-08-27
CPC分类号： H01F5/04 , B01D53/002 , B01D2256/24 , C10L3/10 , C10L3/102 , C10L3/104 , F25J3/061 , F25J3/0635 , F25J3/067 , F25J2205/02 , F25J2205/20 , F25J2210/60 , F25J2215/04 , F25J2215/60 , F25J2215/80 , F25J2220/64 , F25J2220/66 , F25J2240/02 , F25J2240/40 , F25J2240/60 , F25J2245/02 , F25J2270/12 , F25J2270/60 , F25J2270/66 , F25J2290/42 , H01F27/2895 , H01R13/6633 , H01R13/6658 , H01R24/64
摘要： The invention provides a process and a device for removing gaseous contaminants from a feed gas stream which comprises methane and gaseous contaminants, in which process the feed gas stream is cooled to obtain a slurry which comprises solid contaminant, liquid phase contaminant and a methane enriched gaseous phase, the slurry so obtained is introduced into a cryogenic separation device (4) in which from the top the methane enriched gaseous phase is removed (5), the slurry is diluted with liquid phase contaminant (6) and introduced as suction fluid into an ejector (9) via which it is passed into a heat exchanger (10) arranged outside the separation device and wherein solid contaminant is melted into liquid phase contaminant, part of the liquid phase contaminant so obtained is recycled (6) to dilute the slurry of contaminants inside the separation device and part (13) is introduced into the bottom part of the separation device, liquid phase is withdrawn (14) from the bottom part of the separation device, and part of the withdrawn liquid phase contaminant is recovered as a stream product (16) and part is recycled (17) to the ejector for use a motive fluid.
摘要翻译： 本发明提供一种用于从包含甲烷和气态污染物的进料气流中除去气态污染物的方法和装置，在该方法中，将进料气流冷却以获得包含固体污染物，液相污染物和甲烷富集气体的浆料 将如此获得的浆液引入低温分离装置（4），其中从顶部除去甲烷富集的气相（5），将浆液用液相污染物（6）稀释并作为抽吸流体引入 喷射器（9）通过其被传送到布置在分离装置外部的热交换器（10）中，并且其中固体污染物被熔化成液相污染物，所得到的部分液相污染物被再循环（6）以稀释 分离装置和部件（13）内的污染物被引入分离装置的底部，液相从罐底部排出（14） 回收的液相污染物的一部分作为流产物（16）被回收，并且部分被再循环（17）到喷射器以使用运动流体。
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87.发明申请Device for Directing Radiation to a Layer, Apparatus with Such Device and Method Using Such Apparatus 失效用于将辐射定向到层的装置，具有这种装置的装置和使用这种装置的方法公开(公告)号：US20080186549A1
公开(公告)日：2008-08-07
申请号：US11911559
申请日：2006-04-13
IPC分类号： G02B26/08
CPC分类号： G11B7/261 , G03F7/70383 , G03F7/70583
摘要： A device for directing radiation to a layer (1) is described. The device includes a first optical element (L1) for focusing a first radiation beam (B1) originating from a first radiation source (S1) onto said layer, a second optical element (L2) for focusing a second radiation beam (B2) originating from a second radiation source (S2) onto said layer. The wavelengths of the radiation from said first and said second radiation source are different from each other. The first and second optical element are jointly movable with respect to said radiation sources, wherein the focal points of the two radiation beams at least substantially coincide with various movements of the first optical element and the second optical element with respect to the radiation sources. The second optical element (L2) has an aperture (A2) which allows optically undisturbed passage of the first radiation beam (B1). In this way a compact and light configuration of L1 and L2 is achieved as well as an improved radiation beam quality. Further an apparatus comprising such a device and a method using such an apparatus are disclosed.
摘要翻译： 描述了用于将辐射引导到层（1）的装置。 该装置包括用于将源自第一辐射源（S1）的第一辐射束（B 1）聚焦到所述层上的第一光学元件（L 1），用于聚焦第二辐射束的第二光学元件（L 2） B 2）源自第二辐射源（S 2）到所述层上。 来自所述第一和第二辐射源的辐射的波长彼此不同。 第一和第二光学元件可相对于所述辐射源共同移动，其中两个辐射束的焦点至少基本上与第一光学元件和第二光学元件相对于辐射源的各种运动重合。 第二光学元件（L 2）具有允许第一辐射束（B 1）的光学上不受干扰地通过的孔径（A 2）。 以这种方式，实现了L 1和L 2的紧凑和轻型结构以及改进的辐射束质量。 此外，公开了一种包括这种装置的装置和使用这种装置的方法。
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88.发明申请Photolithographic process, stamper, use of said stamper and optical data storage medium 审中-公开光刻工艺，压模，使用所述压模和光学数据存储介质公开(公告)号：US20060246378A1
公开(公告)日：2006-11-02
申请号：US10553720
申请日：2004-04-22
申请人： Jacobus Neijzen , Helmar Van Santen
发明人： Jacobus Neijzen , Helmar Van Santen
IPC分类号： G03F7/26
CPC分类号： G11B7/263 , G03F7/0015 , G03F7/30 , G11B7/261
摘要： A photolithographic process is described. It comprises the steps of: applying a photoresist layer (2) on a substrate (1), locally exposing the photoresist layer (2) to a radiation source with a suitable wavelength, providing a suitable liquid developer composition on the substrate (1), dissolving an exposed or unexposed region of the photoresist layer (2) with the developer composition, rinsing and drying the photoresist layer (2) thereby interrupting said dissolving step. The substrate (1) has a metallic surface (1c) in contact with the photoresist layer (2) and the photoresist layer (2) has a thickness dr
摘要翻译： 描述光刻工艺。 它包括以下步骤：将光致抗蚀剂层（2）施加到基底（1）上，将光刻胶层（2）局部地曝光到具有合适波长的辐射源上，在基底（1）上提供合适的液体显影剂组合物， 用显影剂组合物溶解光致抗蚀剂层（2）的曝光或未曝光区域，漂洗并干燥光致抗蚀剂层（2），从而中断所述溶解步骤。 基板（1）具有与光致抗蚀剂层（2）接触的金属表面（1c），并且光致抗蚀剂层（2）的厚度dr <100nm。 达到70度以上的相对高的光致抗蚀剂壁陡度。 该方法可以用于通过使用通过所述方法生产的压模（3）来生产高密度光学数据存储介质。
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公开(公告)号：US20050134815A1
公开(公告)日：2005-06-23
申请号：US10743271
申请日：2003-12-23
CPC分类号： G03F7/70341 , G03F7/7085
摘要： A liquid supply system for an immersion lithographic projection apparatus is disclosed in which a space is defined between the projection system, a barrier member and a substrate. The barrier member is not sealed such that, during use, immersion liquid is allowed to flow out the space and between the barrier member and the substrate.
摘要翻译： 公开了一种用于浸没式光刻投影装置的液体供应系统，其中在投影系统，阻挡构件和基板之间限定空间。 阻挡构件不被密封，使得在使用期间，允许浸没液体流出空间以及阻挡构件和基底之间。
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公开(公告)号：US06550941B1
公开(公告)日：2003-04-22
申请号：US09717507
申请日：2000-11-21
IPC分类号： F21V500
CPC分类号： F21V5/02 , F21Y2115/10
摘要： A luminaire suitable for accommodating a light source which light source is situated substantially in a first plane. The luminaire has an optical element which is situated substantially in a second plane. The optical element is provided with facets of mutually differing inclination angles at one or both sides. The facets are shaped as substantially parallel prisms. Consecutive facets form a surface which is alternately convex and concave in shape.
摘要翻译： 一种适于容纳光源的照明器，该光源基本上位于第一平面中。 照明器具有基本上位于第二平面中的光学元件。 光学元件设置有在一侧或两侧具有相互不同的倾斜角的小平面。 小面成形为基本平行的棱镜。 连续小面形成交替凸形和凹形的表面。
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