公开(公告)号：US07057251B2

公开(公告)日：2006-06-06

申请号：US10198389

申请日：2002-07-17

Applicant: Jason S. Reid

Inventor： Jason S. Reid

IPC: H01L31/0232

CPC classification number: B81B3/0078 ,  B81B2201/045 ,  B81B2203/0118

Abstract: Micromechanical devices are provided that are capable of movement due to a flexible portion. The micromechanical device can have a flexible portion formed of an oxide of preferably an element from groups 3A to 6A of the periodic table (preferably from the first two rows of these groups) and a late transition metal (preferably from groups 8B or 1B of the periodic table). The micromechanical devices can be any device, particularly MEMS sensors or actuators preferably having a flexible portion such as an accelerometer, DC relay or RF switch, optical cross connect or optical switch, or a micromirror part of an array for direct view and projection displays. The flexible portion is preferably formed by sputtering a target having a group 8B or 1B element and a selected group 3A to 6A element, namely B, Al, In, Si, Ge, Sn, or Pb. The target can have other major constituents or impurities (e.g. additional group 3A to 6A element(s)). The target is reactively sputtered in a oxygen ambient so as to result in a sputtered hinge. It is possible to form both stiff and/or flexible portions of the micromechanical device in this way.

公开(公告)号：US07057246B2

公开(公告)日：2006-06-06

申请号：US09910537

申请日：2001-07-20

Applicant: Jason S. Reid

Inventor： Jason S. Reid

IPC: H01L29/82

CPC classification number: B81B3/0078 ,  B81B2201/045 ,  B81B2203/0118 ,  H01G5/18 ,  H01G5/40

Abstract: Micromechanical devices are provided that are capable of movement due to a flexible portion. The micromechanical device can have a flexible portion formed of a nitride of preferably an element from groups 3A to 6A of the periodic table (preferably from the first two rows of these groups) and a late transition metal (preferably from groups 8B or 1B of the periodic table). The micromechanical devices can be any device, particularly MEMS sensors or actuators preferably having a flexible portion such as an accelerometer, DC relay or RF switch, optical cross connect or optical switch, or a micromirror part of an array for direct view and projection displays. The flexible portion is preferably formed by sputtering a target having a group 8B or 1B element and a group 3A to 6A element. The target can have other major constituents or impurities (e.g. additional group 3A to 6A element(s)). The target is reactively sputtered in a nitrogen ambient so as to result in a sputtered hinge. It is possible to form both stiff and/or flexible portions of the micromechanical device in this way.

公开(公告)号：US07046411B1

公开(公告)日：2006-05-16

申请号：US11118573

申请日：2005-04-29

Applicant: James G. Fleming

Inventor： James G. Fleming

IPC: H01H51/22 ,  G02B26/08

CPC classification number: B81B3/0032 ,  B81B2201/045 ,  B81B2203/053 ,  B81C2201/0164 ,  B81C2201/0167 ,  G02B26/0841 ,  Y10S359/904

Abstract: A microelectromechanical (MEM) apparatus is disclosed which includes one or more tensile-stressed actuators that are coupled through flexures to a stage on a substrate. The tensile-stressed actuators, which can be formed from tensile-stressed tungsten or silicon nitride, initially raise the stage above the substrate without any applied electrical voltage, and can then be used to control the height or tilt angle of the stage. An electrostatic actuator can also be used in combination with each tensile-stressed actuator. The MEM apparatus has applications for forming piston micromirrors or tiltable micromirrors and independently addressable arrays of such devices.

Abstract translation: 公开了一种微机电（MEM）装置，其包括一个或多个拉伸应力致动器，其通过挠曲件耦合到基板上的台。 可以由拉应力钨或氮化硅形成的拉伸应力致动器最初将基底升高到基板上方，而没有任何施加的电压，然后可用于控制载物台的高度或倾斜角度。 静电致动器也可以与每个拉伸应力致动器组合使用。 MEM装置具有用于形成活塞微镜或可倾斜的微反射镜以及这种装置的独立可寻址阵列的应用。

公开(公告)号：US06989921B2

公开(公告)日：2006-01-24

申请号：US09939422

申请日：2001-08-24

Applicant: Jonathan Bernstein ,  William P. Taylor ,  Gregory A. Kirkos ,  Marc Waelti

Inventor： Jonathan Bernstein ,  William P. Taylor ,  Gregory A. Kirkos ,  Marc Waelti

IPC: G02B26/00

CPC classification number: B81B3/0062 ,  B81B7/04 ,  B81B2201/045 ,  B81B2207/015 ,  B81C2203/0109 ,  B81C2203/035 ,  G02B26/0841 ,  G02B26/085

Abstract: An array of magnetically actuated MEMS mirror devices is provided having stationary magnets configured to provide strong magnetic fields in the plane of the mirrors without any magnets or magnet-system components in the plane of the mirrors. Also, a magnetically actuated mirror device is provided that includes an improved actuation coil configuration that provides greater torque during mirror actuation. In addition, a mechanism is provided to detect the angular deflection of a moveable mirror. Also, an improved process is provided for manufacturing MEMS mirror devices.

公开(公告)号：US06954301B2

公开(公告)日：2005-10-11

申请号：US10426372

申请日：2003-04-29

Applicant: Clark T.-C. Nguyen ,  Yuan Xie

Inventor： Clark T.-C. Nguyen ,  Yuan Xie

IPC: B81B3/00 ,  G02B7/00 ,  G02B7/182 ,  G02B26/08 ,  G02B6/26 ,  G02B26/00 ,  H04J14/02

CPC classification number: B81B3/004 ,  B81B2201/045 ,  G02B7/003 ,  G02B7/1827

Abstract: A low-voltage electromechanical device including a tiltable microplatform, method of tilting same and array of such devices are provided. The tiltable or steerable microplatform utilizes a bent-beam actuator to achieve large tilting angles with low actuation voltages. Thin beams of the actuator are bent in such a way as to cause the microplatform to pivot around a dimple support that generates a torsional force leading to angular motion in suspension beams attached perpendicular to the thin beams and, in turn, leading to angular or tilting motion in the suspended microplatform. Some of the key features include (1) the low-voltage bent-beam actuator; (2) a dimple-supported microplatform with a hole underneath in the substrate to allow light to pass through and to allow unhindered tilting of the microplatform; and (3) a method for constructing a microprism on the tiltable transparent microplatform for color dispersion purposes in an adaptive vision system.

Abstract translation: 提供了包括可倾斜微平台，倾斜方法和这种装置阵列的低压机电装置。 可倾斜或可操纵的微平台利用弯梁致动器来实现具有低致动电压的大倾角。 致动器的薄梁被弯曲成使得微平台围绕凹坑支撑枢转，该凹坑支撑件产生扭转力，导致垂直于薄梁附接的悬挂梁中的角运动，并且进而导致角度或倾斜 悬浮微量平台中的运动。 一些关键特征包括（1）低压弯梁致动器; （2）一个凹坑支撑的微平台，其在基底下方具有孔，以允许光通过并允许微平台的不受阻碍的倾斜; 和（3）用于在自适应视觉系统中用于色散目的的可倾斜透明微平台上构造微棱镜的方法。

公开(公告)号：US06936950B2

公开(公告)日：2005-08-30

申请号：US10792427

申请日：2004-03-02

Applicant: Keiichi Akagawa ,  Junji Suzuki ,  Tohru Ishizuya ,  Yoshihiko Suzuki

Inventor： Keiichi Akagawa ,  Junji Suzuki ,  Tohru Ishizuya ,  Yoshihiko Suzuki

IPC: G02B26/08 ,  B81B3/00 ,  B81B7/02 ,  G02B6/12 ,  G02B6/35 ,  H04Q11/00 ,  H02N1/00 ,  G02B26/10

CPC classification number: G02B6/358 ,  B81B3/0037 ,  B81B2201/045 ,  B81B2203/0109 ,  B81B2203/053 ,  G02B6/3514 ,  G02B6/3546 ,  G02B6/357 ,  G02B6/3572 ,  G02B6/3584 ,  G02B2006/12104

Abstract: The movable part 21 is fastened to the substrate 11 via flexure parts 27a and 27b, and can move upward and downward with respect to the substrate 11. The substrate 11 also serves as a fixed electrode. The movable part 21 has second electrode parts 23a and 23b which can generate an electrostatic force between these electrode parts and the substrate 11 by means of a voltage that is applied across these electrode parts and the substrate 11, and a current path 25 which is disposed in a magnetic field, and which generates a Lorentz force when a current is passed through this current path. A mirror 12 which advances into and withdraws from the light path is disposed on the movable part 21. As a result, the mobility range of the movable part can be broadened, and the power consumption can be reduced, without applying a high voltage or sacrificing small size.

Abstract translation: 可动部21经由弯曲部件27a，27b被固定在基板11上，能够相对于基板11上下移动。基板11也用作固定电极。 可动部21具有可以通过施加在这些电极部和基板11上的电压而在这些电极部和基板11之间产生静电力的第二电极部23a和23b，以及电流路径25 设置在磁场中，并且当电流通过该电流路径时产生洛伦兹力。 在可移动部分21上设置有进入和退出光路的反射镜12.结果，可以扩大可移动部分的移动范围，并且可以在不施加高电压或牺牲的情况下降低功耗 小尺寸。

公开(公告)号：US06925710B1

公开(公告)日：2005-08-09

申请号：US10112063

申请日：2002-03-27

Applicant: Jennifer Scalf ,  Satinderpal Pannu

Inventor： Jennifer Scalf ,  Satinderpal Pannu

IPC: B81B3/00 ,  H05K3/02

CPC classification number: B81C1/00126 ,  B81B2201/033 ,  B81B2201/045 ,  B81B2203/0136 ,  B81C2203/051 ,  Y10T29/49126 ,  Y10T29/49155 ,  Y10T29/49156

Abstract: Methods of making microelectromechanical combdrive devices are disclosed. The device may optionally be formed using three device layers. A moveable element and flexure may be formed from a first device layer. The second device layer may be attached to the first and a first set of comb teeth are formed from the second device layer. One or more comb teeth in the first set extend from a major surface of the moveable element. A third device layer is attached to the second device layer and a second set of comb teeth are formed from the third device layer. An alignment target is formed in the first device layer. Corresponding alignment holes are formed in the second or third device layers.

Abstract translation: 公开了制造微机电梳状驱动装置的方法。 该装置可以可选地使用三个装置层形成。 可移动元件和挠曲可以由第一器件层形成。 第二装置层可以附接到第一装置层，并且第一组梳齿由第二装置层形成。 第一组中的一个或多个梳齿从可移动元件的主表面延伸。 第三器件层附接到第二器件层，并且第二组梳齿由第三器件层形成。 在第一器件层中形成对准靶。 相应的对准孔形成在第二或第三器件层中。

公开(公告)号：US06907153B2

公开(公告)日：2005-06-14

申请号：US09799923

申请日：2001-03-05

Applicant: Carl O. Bozler ,  Steven Rabe

Inventor： Carl O. Bozler ,  Steven Rabe

IPC: B81B3/00 ,  G02B6/35 ,  G02B26/02 ,  G02B26/08

CPC classification number: B81B3/0072 ,  B81B3/0008 ,  B81B2201/045 ,  G02B6/3518 ,  G02B6/3546 ,  G02B6/3564 ,  G02B6/357 ,  G02B6/358 ,  G02B6/3584 ,  G02B26/02 ,  G02B26/0816

Abstract: An optical switch device includes a rolling shutter or membrane attached at one of its edges to a substrate near an optical port in the substrate. The rolling shutter can assume one of two states. In a first closed state, the membrane is uncoiled onto the substrate over the port such that light directed at the port impinges on the shutter. In a second open state, the membrane is rolled up away from the port such that light directed at the port impinges on the port. In one embodiment, a mirror is formed on the membrane such that when the membrane is in the closed state over the substrate, light directed at the port is reflected by the mirror. In one configuration, the optical port includes a hole or aperture such light passed through the port without interference. The device can include a latch electrode the far end of the membrane such that when it is rolled out, it can be held in position by a latching voltage applied across the latch electrode and the substrate. Slits can be formed in the membrane to keep the mirror flat by relieving strain in the membrane and to allow gases in proximity to the device to pass through the membrane as it is activated. The shutter can include dimples to minimize the area of contact between the membrane and the substrate to reduce the probability of the two sticking together. The attachment edge of the membrane can be made shorter than its width to reduce distortions in the membrane to keep the mirror flat. A raised annular rim can be provided around the port such that when the shutter is held down over the port it is pulled taut and flat over the rim. This feature is also used to maintain flatness in the mirror. The switch device can be used as part of an array of optical switches.

Abstract translation: 一种光学开关装置包括将其一个边缘附接到衬底附近的光学端口的基板的卷帘门或薄膜。 滚动快门可以采取两种状态之一。 在第一关闭状态下，膜在端口上展开到基板上，使得指向端口的光照射在快门上。 在第二打开状态下，膜从端口卷起，使得指向端口的光照射在端口上。 在一个实施例中，在膜上形成反射镜，使得当膜在衬底上处于关闭状态时，指向端口的光被反射镜反射。 在一个配置中，光学端口包括孔或孔，这样的光通过端口而不受干扰。 该装置可以包括位于膜的远端的闩锁电极，使得当其被推出时，其可以通过施加在闩锁电极和基板上的锁存电压而保持就位。 可以在膜中形成狭缝，以通过减轻膜中的应变来保持反射镜平坦，并允许邻近装置的气体在被激活时通过膜。 快门可以包括凹坑以最小化膜和基底之间的接触面积，以减少两者粘在一起的可能性。 膜的附着边缘可以比其宽度短，以减少膜中的变形，以保持镜子平坦。 可以围绕端口设置凸起的环形边缘，使得当快门被按压在端口上时，其被拉紧并在边缘上平坦。 此功能也用于保持镜子的平整度。 开关器件可用作光开关阵列的一部分。

公开(公告)号：US20040256686A1

公开(公告)日：2004-12-23

申请号：US10821263

申请日：2004-04-08

Applicant: STMicroelectronics S.r.l.

Inventor： Simone Sassolini ,  Mauro Marchi ,  Marco Del Sarto ,  Lorenzo Baldo

IPC: H01L029/82 ,  H01L021/30

CPC classification number: H01L21/76898 ,  B81B2201/033 ,  B81B2201/045 ,  B81C1/00484 ,  B81C1/00896 ,  B81C2201/019 ,  G02B6/357 ,  G02B6/3584

Abstract: A method for manufacturing a micro-electro-mechanical device, which has supporting parts and operative parts, includes providing a first semiconductor wafer, having a first layer of semiconductor material and a second layer of semiconductor material arranged on top of the first layer, forming first supporting parts and first operative parts of the device in the second layer, forming temporary anchors in the first layer, and bonding the first wafer to a second wafer, with the second layer facing the second wafer. After bonding the first wafer and the second wafer together, second supporting parts and second operative parts of said device are formed in the first layer. The temporary anchors are removed from the first layer to free the operative parts formed therein.

Abstract translation: 一种具有支撑部件和操作部件的微电子机械装置的制造方法，包括提供具有第一层半导体材料的第一半导体晶片和布置在第一层顶部的第二半导体材料层，形成 在第二层中的装置的第一支撑部分和第一操作部分，在第一层中形成临时锚固件，以及将第一晶片结合到第二晶片，第二层面向第二晶片。 在将第一晶片和第二晶片接合在一起之后，所述器件的第二支撑部件和第二操作部分形成在第一层中。 将临时锚固件从第一层移除以释放其中形成的操作部件。

公开(公告)号：US20040245217A1

公开(公告)日：2004-12-09

申请号：US10891916

申请日：2004-07-15

Inventor： James A. Hunter

IPC: C23F001/00

CPC classification number: G02B26/0833 ,  B81B2201/045 ,  B81C1/00531 ,  B81C2201/0132 ,  G02B26/0841

Abstract: In one embodiment, a micro device is formed by depositing a sacrificial layer over a metallic electrode, forming a moveable structure over the sacrificial layer, and then etching the sacrificial layer with a noble gas fluoride. Because the metallic electrode is comprised of a metallic material that also serves as an etch stop in the sacrificial layer etch, charge does not appreciably build up in the metallic electrode. This helps stabilize the driving characteristic of the moveable structure. In one embodiment, the moveable structure is a ribbon in a light modulator.

Abstract translation: 在一个实施例中，通过在金属电极上沉积牺牲层来形成微器件，在牺牲层上形成可移动结构，然后用惰性气体氟化物蚀刻牺牲层。 因为金属电极由在牺牲层蚀刻中也用作蚀刻停止层的金属材料组成，所以电荷在金属电极中不会明显地积聚。 这有助于稳定可移动结构的驱动特性。 在一个实施例中，可移动结构是光调制器中的带状物。