公开(公告)号：US20240178032A1

公开(公告)日：2024-05-30

申请号：US18434329

申请日：2024-02-06

Applicant: Brooks Automation US, LLC

Inventor： Robert T. Caveney ,  Ulysses Gilchrist ,  Alexander Krupyshev

IPC: H01L21/677 ,  B25J9/04 ,  B25J11/00

CPC classification number: H01L21/67742 ,  H01L21/67745 ,  H01L21/67748 ,  B25J9/041 ,  B25J11/0095 ,  B65G2201/0297

Abstract: A transfer apparatus including a frame, multiple arms connected to the frame, each arm having an end effector and an independent drive axis for extension and retraction of the respective arm with respect to other ones of the multiple arms, a linear rail defining a degree of freedom for the independent drive axis for extension and retraction of at least one arm, and a common drive axis shared by each arm and configured to pivot the multiple arms about a common pivot axis, wherein at least one of the multiple arms having another drive axis defining an independent degree of freedom with respect to other ones of the multiple arms.

公开(公告)号：US20240105493A1

公开(公告)日：2024-03-28

申请号：US18516362

申请日：2023-11-21

Applicant: BROOKS AUTOMATION US, LLC

Inventor： Vincent W. TSANG ,  Charles W. SU

IPC: H01L21/687 ,  B25J9/04 ,  B25J9/10 ,  B25J9/16 ,  H01L21/67 ,  H01L21/677

CPC classification number: H01L21/68707 ,  B25J9/043 ,  B25J9/104 ,  B25J9/1682 ,  H01L21/67167 ,  H01L21/67196 ,  H01L21/67742

Abstract: A substrate processing apparatus including a frame, a first SCARA arm having an end effector and being configured to extend and retract along a first axis, a second SCARA arm having an end effector and being configured to extend and retract along a second axis, a drive section including a splitting drive pulley rotatably mounted to rotate at an axis of rotation of the drive section that is shared by the first and second SCARA arms, the splitting drive pulley being coupled to at least two idler pulleys by respective segmented transmission loops of separate band segments so that the splitting drive pulley is a common pulley splitting one degree of freedom of the drive section between the at least two idler pulleys so as to commonly drive the at least two idler pulleys, wherein at least one band of each respective transmission loop share a common band interface level.

公开(公告)号：US11908721B2

公开(公告)日：2024-02-20

申请号：US18045674

申请日：2022-10-11

Applicant: Brooks Automation US, LLC

Inventor： Jairo T. Moura ,  Aaron Gawlik ,  Reza Saeidpourazar

IPC: H01L21/677 ,  H01L21/67 ,  H01L21/68 ,  H01L21/687

CPC classification number: H01L21/67742 ,  H01L21/67265 ,  H01L21/67294 ,  H01L21/67766 ,  H01L21/67778 ,  H01L21/68 ,  H01L21/68707

Abstract: A substrate transport apparatus auto-teach system for auto-teaching a substrate station location, the system including a frame, a substrate transport connected to the frame, the substrate transport having an end effector configured to support a substrate, and a controller configured to move the substrate transport so that the substrate transport biases the substrate supported on the end effector against a substrate station feature causing a change in eccentricity between the substrate and the end effector, determine the change in eccentricity, and determine the substrate station location based on at least the change in eccentricity between the substrate and the end effector.

公开(公告)号：US11894252B2

公开(公告)日：2024-02-06

申请号：US18172128

申请日：2023-02-21

Applicant: Brooks Automation US, LLC

Inventor： Robert T. Caveney ,  Ulysses Gilchrist ,  Alexander Krupyshev

IPC: H01L21/677 ,  B25J9/04 ,  B25J11/00

CPC classification number: H01L21/67742 ,  H01L21/67745 ,  H01L21/67748 ,  B25J9/041 ,  B25J11/0095 ,  B65G2201/0297

Abstract: A transfer apparatus including a frame, multiple arms connected to the frame, each arm having an end effector and an independent drive axis for extension and retraction of the respective arm with respect to other ones of the multiple arms, a linear rail defining a degree of freedom for the independent drive axis for extension and retraction of at least one arm, and a common drive axis shared by each arm and configured to pivot the multiple arms about a common pivot axis, wherein at least one of the multiple arms having another drive axis defining an independent degree of freedom with respect to other ones of the multiple arms.

公开(公告)号：US20230411187A1

公开(公告)日：2023-12-21

申请号：US18187345

申请日：2023-03-21

Applicant: Brooks Automation US, LLC

Inventor： Radik Sunugatov ,  Robert Carlson

IPC: H01L21/67 ,  B65G49/06

CPC classification number: H01L21/67201 ,  B65G49/068

Abstract: Substrate loading device including a frame adapted to connect the substrate loading device to a substrate processing apparatus, the frame having a transport opening through which substrates are transported between the substrate loading device and the substrate processing apparatus, a cassette support connected to the frame for holding at least one substrate cassette container for transfer of substrates to and from the at least one substrate cassette container through the transport opening, and selectably variable cassette support purge ports with a variable purge port nozzle outlet, variable between more than one selectable predetermined purge port nozzle characteristics, disposed on the cassette support, each of the more than one purge port nozzle characteristics being configured so that the purge port nozzle outlet with each selected predetermined purge port nozzle characteristic complements and couples to at least one purge port of the at least one substrate cassette container.

公开(公告)号：US20230386879A1

公开(公告)日：2023-11-30

申请号：US18325324

申请日：2023-05-30

Applicant: BROOKS AUTOMATION US, LLC

Inventor： Leigh F. SHARROCK

IPC: H01L21/68 ,  H01L21/67

CPC classification number: H01L21/681 ,  H01L21/67259 ,  H01L21/67265 ,  H01L21/67772

Abstract: A substrate processing apparatus including a frame defining a chamber with a substrate transport opening and a substrate transfer plane defined therein, a valve mounted to the frame and being configured to seal an atmosphere of the chamber when closed, the valve having a door movably disposed to open and close the substrate transport opening, and at least one substrate sensor element disposed on a side of the door and oriented to sense substrates located on the substrate transfer plane.

公开(公告)号：US11830749B2

公开(公告)日：2023-11-28

申请号：US18165734

申请日：2023-02-07

Applicant: Brooks Automation US, LLC

Inventor： Christopher A. Bussiere ,  Blake R Tashjian

IPC: B25J9/16 ,  H01L21/677 ,  B25J9/04 ,  B25J9/10 ,  H01L21/67

CPC classification number: H01L21/67706 ,  B25J9/04 ,  B25J9/108 ,  B25J9/1664 ,  H01L21/67161 ,  H01L21/67167 ,  H01L21/67173 ,  H01L21/67196 ,  H01L21/67742

Abstract: A substrate transport apparatus including, a torsional motion driver member having an exterior perimeter circumscribing an axis of rotation of the torsional motion driver member, and a torsional motion follower member including a body portion and a bearing collar rotatably coupled to the body portion, the torsional motion follower member being coupled to the torsional motion driver member with a dimensionally substantially invariant interface, wherein the bearing collar is decoupled from the exterior perimeter of the torsional motion driver member so that the exterior perimeter, as a whole, is free of the bearing collar.

公开(公告)号：US11676845B2

公开(公告)日：2023-06-13

申请号：US17362565

申请日：2021-06-29

Applicant: Brooks Automation, Inc.

Inventor： Justo Graciano ,  Helen Hwang ,  Erick Pastor

IPC: B25J9/16 ,  H01L21/68 ,  H01L21/67

CPC classification number: H01L21/681 ,  B25J9/1697 ,  H01L21/67161

Abstract: An automatic teaching system for a substrate processing apparatus, the automatic teaching system comprising a frame having a workpiece load station with a predetermined load station reference location, a robot transport mounted to the frame and having a movable transport arm with an end effector having a predetermined end effector reference location, and a drive section driving the movable transport arm in at least one degree of freedom motion relative to the frame, a machine vision system including both at least one fixed imaging sensor and at least one movable imaging sensor removably connected to the frame and configured to image at least one target of the machine vision system, a load jig disposed for removable engagement with the workpiece load station, with both the at least one fixed imaging sensor and the at least one movable imaging sensor mounted to the load jig, the fixed imaging sensor.

公开(公告)号：US11650581B2

公开(公告)日：2023-05-16

申请号：US17102811

申请日：2020-11-24

Applicant: Brooks Automation US, LLC

Inventor： Martin Hosek ,  Jay Krishnasamy ,  Jan Prochazka

IPC: G06F11/30 ,  G05B23/02 ,  G06F11/22 ,  G05B19/418 ,  B25J9/16

CPC classification number: G05B23/0283 ,  B25J9/1674 ,  G05B19/41875 ,  G05B23/0221 ,  G06F11/2257

Abstract: A system for condition monitoring and fault diagnosis includes a data collection function that acquires time histories of selected variables for one or more of the components, a pre-processing function that calculates specified characteristics of the time histories, an analysis function for evaluating the characteristics to produce one or more hypotheses of a condition of the one or more components, and a reasoning function for determining the condition of the one or more components from the one or more hypotheses.

公开(公告)号：US20230143307A1

公开(公告)日：2023-05-11

申请号：US18050300

申请日：2022-10-27

Applicant: Brooks Automation US, LLC.

Inventor： Jairo T. Moura ,  Vincent Tsang ,  Karanjit Saini ,  Robert T. Caveney ,  Robert C. May ,  Daniel Babbs

IPC: H02N15/00 ,  H01F7/10 ,  H01L21/67 ,  H01L21/677

CPC classification number: H02N15/00 ,  H01F7/10 ,  H01L21/67265 ,  H01L21/67748

Abstract: A linear electrical machine including a frame with a level reference plane, an array of electromagnets connected to the frame and coupled to an alternating current power source energizing each electromagnet, at least one reaction platen of paramagnetic, diamagnetic, or non-magnetic conductive material disposed to cooperate with the electromagnets of the array of electromagnets so that excitation of the electromagnets with alternating current generates levitation and propulsion forces against the reaction platen that controllably levitate and propel the reaction platen along at least one drive line, in a controlled attitude relative to the drive plane, and a controller operably coupled to the array of electromagnets and the alternating current power source and configured so as to sequentially excite the electromagnets with multiphase alternating current with a predetermined excitation characteristic so that each reaction platen is levitated and propelled with up to six degrees of freedom.