公开(公告)号：US5170242A

公开(公告)日：1992-12-08

申请号：US698841

申请日：1991-05-10

申请人： E. Henry Stevens ,  Masahiro Maekawa

发明人： E. Henry Stevens ,  Masahiro Maekawa

IPC分类号： H01L21/285 ,  H01L23/532 ,  H01L29/43 ,  H01L29/45

CPC分类号： H01L21/28518 ,  H01L21/28568 ,  H01L23/53223 ,  H01L29/43 ,  H01L29/456 ,  H01L2924/0002

摘要： A reaction barrier is formed at an interface region between adjacent layers of a multilayer composite integrated circuit by implanting one or more active ionic species at energies effective to place the ionic species at or near the interface. A further step may include annealing the structure formed above to promote efficacy of the reaction barrier.

摘要翻译： 在多层复合集成电路的相邻层之间的界面区域处形成反应势垒，通过在有效将离子物质置于界面处或附近的能量处注入一种或多种活性离子物质。 另外的步骤可以包括退火上述形成的结构以促进反应势垒的功效。

公开(公告)号：US4914627A

公开(公告)日：1990-04-03

申请号：US292776

申请日：1989-01-03

申请人： S. Sheffield Eaton, Jr. ,  Michael Parris

发明人： S. Sheffield Eaton, Jr. ,  Michael Parris

IPC分类号： G11C11/22 ,  G11C14/00

CPC分类号： G11C14/0072 ,  G11C11/22 ,  G11C14/00

摘要： A transpolarizer is employed as a programmable capacitance divider. Two ferroelectric capacitors are coupled in series to form a common node and two extreme poles. The polarization of the two capacitors is set by grounding the two poles and then bringing them both up to VCC while impressing a voltage at the common node corresponding to data to be stored. Therefore, while one pole is held at VSS, the other pole is pulsed from VSS to VCC with the common node floating. A voltage develops at the common node which is above or below the midpoint between VSS and VCC, and will be indicative of the stored data. The capacitance divider is programmed in accordance with data. One such divider is added to a DRAM memory cell to form a shadow DRAM cell. Two such dividers are added to a static RAM memory cell to form a shadow static RAM cell. The same divider arrangement is operable in both volatile and non-volatile modes. An improvement arises by using PZT as dielectric in 54:46 mole ratio.

摘要翻译： 偏振器用作可编程电容分压器。 两个铁电电容器串联耦合以形成公共节点和两个极端极。 两个电容器的极化通过将两极接地而设置，然后将它们两者都设置为VCC，同时在与要存储的数据相对应的公共节点处施加电压。 因此，当一个极点保持在VSS时，另一个极点从VSS脉冲到VCC，公共节点浮动。 在VSS和VCC之间的中点之上或之下的公共节点处产生电压，并且将指示存储的数据。 电容分压器根据数据进行编程。 一个这样的分频器被添加到DRAM存储器单元以形成阴影DRAM单元。 将两个这样的分频器添加到静态RAM存储器单元中以形成阴影静态RAM单元。 相同的分配器布置可在易失性和非易失性模式下操作。 通过使用PZT作为54:46摩尔比的电介质来改善。

公开(公告)号：US4853893A

公开(公告)日：1989-08-01

申请号：US69389

申请日：1987-07-02

申请人： S. Sheffield Eaton, Jr. ,  Michael Parris

发明人： S. Sheffield Eaton, Jr. ,  Michael Parris

IPC分类号： G11C11/22 ,  G11C14/00 ,  H01L21/822 ,  H01L21/8246 ,  H01L21/8247 ,  H01L27/04 ,  H01L27/10 ,  H01L27/105 ,  H01L29/788 ,  H01L29/792

CPC分类号： G11C14/0072 ,  G11C11/22 ,  G11C14/00

摘要： A transpolarizer is employed as a programmable capacitance divider. Two ferroelectric capacitors are coupled in series to form a common node and two extreme poles. The polarization of the two capacitors is set by grounding the two poles and then bringing them both up to VCC while impressing a voltage at the common node corresponding to data to be stored. Later, while one pole is held at VSS, the other pole is pulsed from VSS to VCC with the common node floating. A voltage develops at the common node which is above or below the midpoint between VSS and VCC, and will be indicative of the stored data. The capacitance divider is programmed in accordance with data. One such divider is added to a DRAM memory cell to form a shadow DRAM cell. Two such dividers are added to a static RAM memory cell to form a shadow static RAM cell. The same divider arrangement is operable in both volatile and non-volatile modes. An improvement arises by using PZT as dielectric in 54:46 mole ratio.

公开(公告)号：US5117177A

公开(公告)日：1992-05-26

申请号：US644904

申请日：1991-01-23

申请人： S. Sheffield Eaton, Jr.

发明人： S. Sheffield Eaton, Jr.

IPC分类号： G05F3/24 ,  H02M3/07

CPC分类号： H02M3/07 ,  G05F3/247

摘要： A voltage reference generated for an integrated circuit which produces a source of reference voltage which is self-compensated for variations in operating voltage (V.sub.cc) or in transistor threshold voltages (V.sub.T). The circuit uses a voltage divider coupled between V.sub.cc and ground and has first and second FET transistors. A faced control circuit is coupled to control the conductivity of the first transistor, and the second control circuit is coupled to control the conductivity of the second transistor. The first control circuit produces a control voltage which varies as a function of variations in V.sub.cc, while the second control circuit also provides a control voltage wherein variations are a function of variations in V.sub.cc, but in an opposite direction. Hence, the second control voltage is configured so that variations in V.sub.cc cause the second transistor to compensate for changes in operation of the first transistor, so that the reference voltage remains substantially constant.

摘要翻译： 产生用于集成电路的电压基准，其产生对工作电压（Vcc）或晶体管阈值电压（VT）中的变化进行自补偿的参考电压源。 该电路使用耦合在Vcc和地之间的分压器，并具有第一和第二FET晶体管。 耦合面对的控制电路以控制第一晶体管的导电性，并且第二控制电路被耦合以控制第二晶体管的导电性。 第一控制电路产生作为Vcc变化的函数而变化的控制电压，而第二控制电路还提供控制电压，其中变化是Vcc变化但是在相反方向上的变化。 因此，第二控制电压被配置为使得Vcc的变化使得第二晶体管补偿第一晶体管的操作变化，使得参考电压基本保持不变。

公开(公告)号：US5104822A

公开(公告)日：1992-04-14

申请号：US559466

申请日：1990-07-30

申请人： Douglas B. Butler

发明人： Douglas B. Butler

IPC分类号： H01L27/04 ,  H01L21/822 ,  H01L21/8242 ,  H01L27/10 ,  H01L27/108 ,  H01L29/92

CPC分类号： H01L27/10805 ,  H01L28/40 ,  Y10S257/90

摘要： In a multi-layered integrated memory circuit, a method for using sacrificial layers and insulating "sticks" is disclosed to provide a contact between two layers, where the contact does not short to an intervening layer. This invention provides this with minimal extra processing by using sacrificial layers with appropriate etch and etch stop properties. As these layers are etched, additional layers which alternate in the same conducting/insulating pattern are exposed. Each etch stops on either a conductive or insulative layer. A contact layer may then be deposited which connects the uppermost capacitor plate to the pass transistor of the memory cell.

公开(公告)号：US5024964A

公开(公告)日：1991-06-18

申请号：US793186

申请日：1985-10-31

申请人： George A. Rohrer ,  Larry D. McMillin

发明人： George A. Rohrer ,  Larry D. McMillin

IPC分类号： C23C14/06 ,  H01G7/02

CPC分类号： H01G7/02 ,  C23C14/06 ,  H01G7/025

摘要： A monolithic semiconductor integrated circuit-ferroelectric device is disclosed together with the method of manufacturing same. The ferroelectric device preferably consists of a layer of stable ferroelectric potassium nitrate disposed between electrical contacts positioned on opposite surfaces of the ferroelectric layer. The ferroelectric layer has a thickness of less than 110 microns, and preferably falling within a range of from 100 Angstrom units to 25,000 Angstrom units. The process of manufacturing the monolithic structure is multi-stepped and is particularly adapted for fabricating a potassium nitrate ferroelectric memory on a semiconductor integrated circuit.

摘要翻译： 公开了单片半导体集成电路 - 铁电体器件及其制造方法。 铁电体器件优选由设置在位于铁电层的相对表面上的电触点之间的稳定的铁电硝酸钾层组成。 铁电层的厚度小于110微米，优选在100埃至25,000埃的范围内。 制造整体式结构的方法是多级的，特别适用于在半导体集成电路上制造硝酸钾铁电存储器。

公开(公告)号：US5075817A

公开(公告)日：1991-12-24

申请号：US542573

申请日：1990-06-22

申请人： Douglas B. Butler

发明人： Douglas B. Butler

IPC分类号： H01L27/04 ,  H01L21/822 ,  H01L21/8242 ,  H01L27/10 ,  H01L27/108 ,  H01L29/94

CPC分类号： H01L29/945 ,  Y10T29/435

摘要： A trench capacitor which has a plurality of capacitor plates separated by a dielectric within a trench on a substrate. A plate located closest to the wall of the trench may be a field shield and tied everywhere to ground. The other plate may be polysilicon. Said other plate may be tied to a source of variable potential. A plurality of sacrificial layers are established over the structure and the structure thus formed is then patterened and etched. A pass transistor is formed adjacent to the trench capacitor, and a connecting layer is established connecting the other plate of the trench capacitor to the source/drain region of the pass transistor. The connecting layer makes electrical contact to the other capacitor plate and source/drain of the pass transistor and is insulated from other layers in the capacitor and pass transistor. Bit lines and word lines can then be added, as known in the art.

公开(公告)号：US4918654A

公开(公告)日：1990-04-17

申请号：US292818

申请日：1989-01-03

申请人： S. Sheffield Eaton, Jr. ,  Michael Parris

发明人： S. Sheffield Eaton, Jr. ,  Michael Parris

IPC分类号： G11C11/22 ,  G11C14/00

CPC分类号： G11C14/0072 ,  G11C11/22 ,  G11C14/00

摘要： A transpolarizer is employed as a programmable capacitance divider. Two ferroelectric capacitors are coupled in series to form a common node and two extreme poles. The polarization of the two capacitors is set by grounding the two poles and then bringing them both up to VCC while impressing a voltage at the common node corresponding to data to be stored. Therefore, while one pole is held at VSS, the other pole is pulsed from VSS to VCC with the common node floating. A voltage develops at the common node which is above or below the midpoint between VSS and VCC, and will be indicative of the stored data. The capacitance divider is programmed in accordance with data. One such divider is added to a DRAM memory cell to form a shadow DRAM cell. Two such dividers are added to a static RAM memory cell to form a shadow static RAM cell. The same divider arrangement is operable in both volatile and non-volatile modes. An improvement arises by using PZT as dielectric in 54:46 mole ratio.

摘要翻译： 偏振器用作可编程电容分压器。 两个铁电电容器串联耦合以形成公共节点和两个极端极。 两个电容器的极化通过将两极接地而设置，然后将它们两者都设置为VCC，同时在与要存储的数据相对应的公共节点处施加电压。 因此，当一个极点保持在VSS时，另一个极点从VSS脉冲到VCC，公共节点浮动。 在VSS和VCC之间的中点之上或之下的公共节点处产生电压，并且将指示存储的数据。 电容分压器根据数据进行编程。 一个这样的分频器被添加到DRAM存储器单元以形成阴影DRAM单元。 将两个这样的分频器添加到静态RAM存储器单元中以形成阴影静态RAM单元。 相同的分配器布置可在易失性和非易失性模式下操作。 通过使用PZT作为54:46摩尔比的电介质来改善。

公开(公告)号：US4910708A

公开(公告)日：1990-03-20

申请号：US292891

申请日：1989-01-03

申请人： S. Sheffield Eaton, Jr. ,  Michael Parris

发明人： S. Sheffield Eaton, Jr. ,  Michael Parris

IPC分类号： G11C11/22 ,  G11C14/00

CPC分类号： G11C14/0072 ,  G11C11/22 ,  G11C14/00

摘要： A transpolarizer is employed as a programmable capacitance divider. Two ferroelectric capacitors are coupled in series to form a common node and two extreme poles. The polarization of the two capacitors is set by grounding the two poles and then bringing them both up to VCC while impressing a voltage at the common node corresponding to data to be stored. Therefore, while one pole is held at VSS, the other pole is pulsed from VSS to VCC with the common node floating. A voltage develops at the common node which is above or below the midpoint between VSS and VCC, and will be indicative of the stored data. The capacitance divider is programmed in accordance with data. One such divider is added to a DRAM memory cell to form a shadow DRAM cell. Two such dividers are added to a static RAM memory cell to form a shadow static RAM cell. The same divider arrangement is operable in both volatile and non-volatile modes. An improvement arises by using PZT as dielectric in 54:46 mole ratio.

摘要翻译： 偏振器用作可编程电容分压器。 两个铁电电容器串联耦合以形成公共节点和两个极端极。 两个电容器的极化通过将两极接地而设置，然后将它们两者都设置为VCC，同时在与要存储的数据相对应的公共节点处施加电压。 因此，当一个极点保持在VSS时，另一个极点从VSS脉冲到VCC，公共节点浮动。 在VSS和VCC之间的中点之上或之下的公共节点处产生电压，并且将指示存储的数据。 电容分压器根据数据进行编程。 一个这样的分频器被添加到DRAM存储器单元以形成阴影DRAM单元。 将两个这样的分频器添加到静态RAM存储器单元中以形成阴影静态RAM单元。 相同的分配器布置可在易失性和非易失性模式下操作。 通过使用PZT作为54:46摩尔比的电介质来改善。

公开(公告)号：US4809225A

公开(公告)日：1989-02-28

申请号：US69390

申请日：1987-07-02

申请人： Klaus Dimmler ,  S. Sheffield Eaton, Jr.

发明人： Klaus Dimmler ,  S. Sheffield Eaton, Jr.

IPC分类号： G11C11/22 ,  G11C11/412 ,  G11C14/00 ,  H01L21/822 ,  H01L21/8244 ,  H01L21/8246 ,  H01L21/8247 ,  H01L27/04 ,  H01L27/105 ,  H01L27/11 ,  H01L29/788 ,  H01L29/792 ,  G11C11/00 ,  G11C11/24 ,  G11C11/34

CPC分类号： G11C14/0072 ,  G11C11/22 ,  G11C14/00

摘要： A memory cell includes an SRAM flip-flop cell having two nodes coupled to ferroelectric capacitors so that when the SRAM is powered down, the ferroelectric devices store data and upon power up, transfer the stored data to the SRAM cell. The ferroelectric devices can be bypassed during normal SRAM operations to reduce hysteresis fatigue.