公开(公告)号：US20080142375A1

公开(公告)日：2008-06-19

申请号：US11864254

申请日：2007-09-28

Applicant: Francois Doniat ,  Matthew L. Fisher ,  Alan D. Zdunek ,  Alexandro A. Barajas ,  Ian Suni ,  Xiangfeng Chu ,  Abhinav Tripathi ,  Yuzhuo Li

Inventor： Francois Doniat ,  Matthew L. Fisher ,  Alan D. Zdunek ,  Alexandro A. Barajas ,  Ian Suni ,  Xiangfeng Chu ,  Abhinav Tripathi ,  Yuzhuo Li

IPC: B23H3/00

CPC classification number: C09G1/02 ,  C25F3/30 ,  H01L21/32125

Abstract: Compositions and methods suitable for the electrochemical mechanical planarization of a conductive material layer on a semiconductor workpiece. Compositions contain a phosphonic acid based electrolyte, a corrosion inhibitor, a chelating agent, a pH adjusting agent, and a solvent as the remainder.

Abstract translation: 适用于半导体工件上导电材料层的电化学机械平面化的组合物和方法。 组合物含有基于膦酸的电解质，腐蚀抑制剂，螯合剂，pH调节剂和作为其余的溶剂。

公开(公告)号：US06365227B2

公开(公告)日：2002-04-02

申请号：US09815023

申请日：2001-03-22

Applicant: Alan D. Zdunek ,  Eugene A. Kernerman ,  William Korzeniowski

Inventor： Alan D. Zdunek ,  Eugene A. Kernerman ,  William Korzeniowski

IPC: B05D722

CPC classification number: C23C8/02 ,  Y02E60/321 ,  Y10T137/7036 ,  Y10T137/87877

Abstract: A corrosion resistant gas cylinder and gas delivery system includes an electroless nickel-phosphorous layer overlying the inner surface of a steel alloy cylinder. The nickel-phosphorous layer has a thickness of at least about 20 micrometers and a porosity of no greater than about 0.1%. The electroless nickel-phosphorous layer has a phosphorous content of at least about 10% by weight and a surface roughness of no greater than about 5 micrometers. Prior to introducing liquefied gas into the gas cylinder, a cleaning process is carried out using a two-step baking process to clean the surface of the nickel-phosphorus layer. The nickel-phosphorous layer substantially reduces the contamination of liquefied corrosive gasses stored in the gas cylinder by metal from the steel wall surface underlying the nickel-phosphorous layer. Metal contamination levels of less than about 55 ppb of iron, 10 ppb of chromium, and 5 ppb of nickel by weight can be maintained in liquefied corrosive gasses stored for an extended period of time in the electroless nickel-phosphorus plated gas cylinder.

Abstract translation: 耐腐蚀气瓶和气体输送系统包括覆盖钢合金圆筒内表面的化学镀镍 - 磷层。 镍 - 磷层具有至少约20微米的厚度和不大于约0.1％的孔隙率。 无电镀镍磷层的磷含量为至少约10重量％，表面粗糙度不大于约5微米。 在将液化气引入气瓶之前，使用两步烘烤工艺进行清洁处理以清洁镍 - 磷层的表面。 镍 - 磷层通过金属从镍 - 磷层下面的钢壁表面大大减少储存在气瓶中的液化腐蚀性气体的污染。 在化学镀镍 - 磷电镀气瓶中长时间储存​​的液化腐蚀性气体中，可以维持小于约55ppb的铁，10ppb的铬和5ppb的镍的金属污染水平。

公开(公告)号：US06202885B1

公开(公告)日：2001-03-20

申请号：US09322667

申请日：1999-05-28

Applicant: Alan D. Zdunek ,  Eugene A. Kernerman ,  William Korzeniowski

Inventor： Alan D. Zdunek ,  Eugene A. Kernerman ,  William Korzeniowski

IPC: C23C1836

Abstract: A corrosion resistant gas cylinder and gas delivery system includes an electroless nickel-phosphorous layer overlying the inner surface of a steel alloy cylinder. The nickel-phosphorous layer has a thickness of at least about 20 micrometers and a porosity of no greater than about 0.1%. The electroless nickel-phosphorous layer has a phosphorous content of at least about 10% by weight and a surface roughness of no greater than about 5 micrometers. Prior to introducing liquefied gas into the gas cylinder, a cleaning process is carried out using a two-step baking process to clean the surface of the nickel-phosphorus layer. The nickel-phosphorous layer substantially reduces the contamination of liquefied corrosive gasses stored in the gas cylinder by metal from the steel wall surface underlying the nickel-phosphorous layer. Metal contamination levels of less than about 55 ppb of iron, 10 ppb of chromium, and 5 ppb of nickel by weight can be maintained in liquefied corrosive gasses stored for an extended period of time in the electroless nickel-phosphorus plated gas cylinder.

公开(公告)号：US06263904B1

公开(公告)日：2001-07-24

申请号：US09679090

申请日：2000-10-04

Applicant: Alan D. Zdunek ,  Eugene A. Kernerman ,  William Korzeniowski

Inventor： Alan D. Zdunek ,  Eugene A. Kernerman ,  William Korzeniowski

IPC: F16K1110

CPC classification number: C23C8/02 ,  Y02E60/321 ,  Y10T137/7036 ,  Y10T137/87877

Abstract: A corrosion resistant gas cylinder and gas delivery system includes an electroless nickel-phosphorous layer overlying the inner surface of a steel alloy cylinder. The nickel-phosphorous layer has a thickness of at least about 20 micrometers and a porosity of no greater than about 0.1%. The electroless nickel-phosphorous layer has a phosphorous content of at least about 10% by weight and a surface roughness of no greater than about 5 micrometers. Prior to introducing liquefied gas into the gas cylinder, a cleaning process is carried out using a two-step baking process to clean the surface of the nickel-phosphorus layer. The nickel-phosphorous layer substantially reduces the contamination of liquefied corrosive gasses stored in the gas cylinder by metal from the steel wall surface underlying the nickel-phosphorous layer. Metal contamination levels of less than about 55 ppb of iron, 10 ppb of chromium, and 5 ppb of nickel by weight can be maintained in liquefied corrosive gasses stored for an extended period of time in the electroless nickel-phosphorus plated gas cylinder.

Abstract translation: 耐腐蚀气瓶和气体输送系统包括覆盖钢合金圆筒内表面的化学镀镍 - 磷层。 镍 - 磷层具有至少约20微米的厚度和不大于约0.1％的孔隙率。 无电镀镍磷层的磷含量为至少约10重量％，表面粗糙度不大于约5微米。 在将液化气引入气瓶之前，使用两步烘烤工艺进行清洁处理以清洁镍 - 磷层的表面。 镍 - 磷层通过金属从镍 - 磷层下面的钢壁表面大大减少储存在气瓶中的液化腐蚀性气体的污染。 在化学镀镍 - 磷电镀气瓶中长时间储存​​的液化腐蚀性气体中，可以维持小于约55ppb的铁，10ppb的铬和5ppb的镍的金属污染水平。

公开(公告)号：US6106693A

公开(公告)日：2000-08-22

申请号：US345839

申请日：1999-07-01

Applicant: Alan D. Zdunek ,  Paul Vanecek ,  Eugene A. Kernerman

Inventor： Alan D. Zdunek ,  Paul Vanecek ,  Eugene A. Kernerman

IPC: G01B5/06 ,  G01B7/06 ,  G01N17/02 ,  G01N17/04 ,  G01N27/26

CPC classification number: G01N17/046 ,  G01B5/066 ,  G01B7/06 ,  G01N17/02

Abstract: A method and apparatus for measuring the quality, e.g., thickness, porosity, or corrosion rate, of a coating inside a hollow body having an opening. The method comprises attaching a probe from a coating measuring device to one end of an extender arm having a flexible portion therein, placing the probe inside the hollow body through the opening, and making the desired measurements of the coating.The apparatus includes a flexible extender arm for use with a coating measuring device. The flexible extender arm comprises an elongated, substantially rigid body portion; a handle assembly connected to one end of the substantially rigid body portion; a flexible portion connected to an opposite end of the substantially rigid body portion; a coating measurement probe holder portion connected to an end of the flexible portion opposite the substantially rigid body portion; and a pull connected at one end thereof to the substantially rigid body portion and connected at an opposite end thereof to the coating measurement probe holder portion.

Abstract translation: 用于测量具有开口的中空体内的涂层的质量（例如厚度，孔隙率或腐蚀速率）的方法和装置。 该方法包括将探针从涂层测量装置连接到其中具有柔性部分的延伸臂的一端，将探针放置在中空体内通过开口，并进行所需的涂层测量。 该装置包括与涂层测量装置一起使用的柔性延伸臂。 柔性延伸臂包括细长的，基本刚性的主体部分; 连接到所述基本上刚体部分的一端的手柄组件; 柔性部分，其连接到所述基本刚性的主体部分的相对端; 涂覆测量探针保持器部分，其连接到所述柔性部分的与所述基本刚性的主体部分相对的端部; 以及在其一端连接到基本刚性的本体部分并在其相对端连接到涂层测量探针保持器部分的拉。

公开(公告)号：US07022212B2

公开(公告)日：2006-04-04

申请号：US10277178

申请日：2002-10-21

Applicant: Alan D. Zdunek

Inventor： Alan D. Zdunek

IPC: G01N27/26

CPC classification number: C25D7/123 ,  C25D17/001 ,  C25D17/10 ,  C25D21/12

Abstract: A microstructured electrode coupled with an analytical method designed to simulate the actual conditions on the wafer and to measure critical parameters such as mass transfer of the active plating components, deposition rates of the copper in the plating bath solutions, and/or additive concentration is disclosed. Thus, an offline method for process control is provided. Additionally, the electrode and method can be incorporated into a copper interconnect bath tool or copper interconnect bath distribution system for online control of the process chemistry. The microstructured electrode design consists of a patterned electrode surface that simulates the dimensions of the interconnects and vias. The analytical method can be any type of method that allows diffusion or kinetic information to be obtained, such as electrochemical impedance, electrochemical noise, and other voltammetric or galvanostatic methods.

公开(公告)号：US06290088B1

公开(公告)日：2001-09-18

申请号：US09322667

申请日：1999-05-28

Applicant: Alan D. Zdunek ,  Eugene A. Kernerman ,  William Korzeniowski

Inventor： Alan D. Zdunek ,  Eugene A. Kernerman ,  William Korzeniowski

IPC: C23C1836

CPC classification number: C23C8/02 ,  Y02E60/321 ,  Y10T137/7036 ,  Y10T137/87877

Abstract: A corrosion resistant gas cylinder and gas delivery system includes an electroless nickel-phosphorous layer overlying the inner surface of a steel alloy cylinder. The nickel-phosphorous layer has a thickness of at least about 20 micrometers and a porosity of no greater than about 0.1%. The electroless nickel-phosphorous layer has a phosphorous content of at least about 10% by weight and a surface roughness of no greater than about 5 micrometers. Prior to introducing liquefied gas into the gas cylinder, a cleaning process is carried out using a two-step baking process to clean the surface of the nickel-phosphorus layer. The nickel-phosphorous layer substantially reduces the contamination of liquefied corrosive gasses stored in the gas cylinder by metal from the steel wall surface underlying the nickel-phosphorous layer. Metal contamination levels of less than about 55 ppb of iron, 10 ppb of chromium, and 5 ppb of nickel by weight can be maintained in liquefied corrosive gasses stored for an extended period of time in the electroless nickel-phosphorus plated gas cylinder.

公开(公告)号：US06207030B1

公开(公告)日：2001-03-27

申请号：US09597420

申请日：2000-06-19

Applicant: Alan D. Zdunek ,  Paul Vanecek ,  Eugene A. Kernerman

Inventor： Alan D. Zdunek ,  Paul Vanecek ,  Eugene A. Kernerman

IPC: G01N2726

CPC classification number: G01N17/046 ,  G01B5/066 ,  G01B7/06 ,  G01N17/02

Abstract: A method and apparatus for measuring the quality, e.g., thickness, porosity, or corrosion rate, of a coating inside a hollow body having an opening. The method comprises attaching a probe from a coating measuring device to one end of an extender arm having a flexible portion therein, placing the probe inside the hollow body through the opening, and making the desired measurements of the coating. The apparatus includes a flexible extender arm for use with a coating measuring device. The flexible extender arm comprises an elongated, substantially rigid body portion; a handle assembly connected to one end of the substantially rigid body portion; a flexible portion connected to an opposite end of the substantially rigid body portion; a coating measurement probe holder portion connected to an end of the flexible portion opposite the substantially rigid body portion; and a pull connected at one end thereof to the substantially rigid body portion and connected at an opposite end thereof to the coating measurement probe holder portion.

Abstract translation: 用于测量具有开口的中空体内的涂层的质量（例如厚度，孔隙率或腐蚀速率）的方法和装置。 该方法包括将探针从涂层测量装置连接到其中具有柔性部分的延伸臂的一端，将探针放置在中空体内通过开口，并进行所需的涂层测量。该装置包括柔性延伸器 手臂用于涂层测量装置。 柔性延伸臂包括细长的，基本刚性的主体部分; 连接到所述基本上刚体部分的一端的手柄组件; 柔性部分，其连接到所述基本刚性的主体部分的相对端; 涂覆测量探针保持器部分，其连接到所述柔性部分的与所述基本刚性的主体部分相对的端部; 以及在其一端连接到基本刚性的本体部分并在其相对端连接到涂层测量探针保持器部分的拉。

公开(公告)号：US5954940A

公开(公告)日：1999-09-21

申请号：US885351

申请日：1997-06-30

Applicant: Alan D. Zdunek ,  Paul Vanecek ,  Eugene A. Kernerman

Inventor： Alan D. Zdunek ,  Paul Vanecek ,  Eugene A. Kernerman

IPC: G01B5/06 ,  G01B7/06 ,  G01N17/02 ,  G01N17/04 ,  G01N27/26

CPC classification number: G01N17/046 ,  G01B5/066 ,  G01B7/06 ,  G01N17/02

Abstract: A method and apparatus for measuring the quality, e.g., thickness, porosity, or corrosion rate, of a coating inside a hollow body having an opening. The method comprises attaching a probe from a coating measuring device to one end of an extender arm having a flexible portion therein, placing the probe inside the hollow body through the opening, and making the desired measurements of the coating.The apparatus includes a flexible extender arm for use with a coating measuring device. The flexible extender arm comprises an elongated, substantially rigid body portion; a handle assembly connected to one end of the substantially rigid body portion; a flexible portion connected to an opposite end of the substantially rigid body portion; a coating measurement probe holder portion connected to an end of the flexible portion opposite the substantially rigid body portion; and a pull connected at one end thereof to the substantially rigid body portion and connected at an opposite end thereof to the coating measurement probe holder portion.