Abstract:
An apparatus, system and method to compensate for the proximity effects in the imaging of patterns in a photolithography process. A light exposure of a photoresist layer is effectuated in predetermined patterns through an exposure mask having light-transmissive openings in correspondence to the predetermined patterns. The exposure mask has areas densely populated with the light-transmissive openings and areas sparsely populated with the light-transmissive openings. Light is attenuated through the densely populated light-transmissive openings by a different amount than through the sparsely populated light-transmissive openings.
Abstract:
A mask device includes a single layer of reflection mask on a transparent substrate to simply the growth fabricating of the reflection mask, therefore, using single layer of reflection mask can easier control the defect. Furthermore, a pattern-transferring method for a photolithography process is to utilize the incident exposing radiation with a grazing incident angle to illuminate the photolithography mask, such that the pattern can be transferred onto the wafer clearly, and the resolution of the photolithography would be improved.
Abstract:
The present invention discloses a method for aligning a reticle with a semiconductor wafer. The method includes the steps of (a) applying a light source and an optical system for directing an incident light beam to a plurality of reticle alignment marks on the reticle to project a reticle-mark beam to an alignment detector therefrom; (b) applying the light source and the optical system for directing the incident light beam to a plurality of wafer alignment marks on a second surface of the wafer for projecting a wafer-mark beam therefrom wherein the second surface opposite a first surface of the wafer facing the reticle; and (c)applying the optical system for directing the wafer-mark beam to the alignment detector for precisely aligning the reticle and the wafer.
Abstract:
A photomask with desired illumination conditions can be constructed by combining a base pattern of openings with an assist pattern which includes openings that are offset from respectively corresponding openings of the base pattern by a preset angular distance.
Abstract:
An apparatus and method for manufacturing a candy drinking straws includes a system for arranging a soft mass of sugar composition around a solid mold having a support cord extending from an end thereof, rolling the sugar composition along a surface of the solid mold using a plurality of rotating scrolls rotating around the solid mold to shape the sugar composition into a hollow tube, the sugar composition being pushed along the solid mold onto the support cord, pulling the sugar composition along the support cord to form hollow cylindrical candy, and cutting the hollow cylindrical candy into a plurality of hollow candy segments.
Abstract:
A method for preparing an electrode for a solid oxide fuel cell, in which a conductive material, such as a metal, is electrodeposited onto a porous electrode comprising a conductive material and an electrolyte. The method allows metals to be added directly to a porous electrode without the need for subsequent reduction steps. The method also permits the conductive materials to be deposited in controlled, layered structures, thereby enabling the use of different metals to achieve desired properties.
Abstract:
A method for performing editing in a multimedia training and presentation system that substantially providing user autonomy and transparency is disclosed. The method includes inputting a basic setting used in the multimedia synchronous training system. Next, a curriculum used in the multimedia synchronous training system is input, and multimedia teaching information is then input. After inputting points of emphasis, the teaching information and the points of emphasis are synchronized. Finally, miscellaneous settings are performed in the multimedia synchronous training system.
Abstract:
A method for improving illumination uniformity in an exposure process is described, wherein a light source, a reticle and a projection system are used to expose a substrate in the exposure process. A realtime adjustable gray filter like a gray LCD panel is placed in the light path between the light source and the exposed substrate to compensate the illumination nonuniformity on the substrate in real time.
Abstract:
A display template setting method in a multimedia synchronous system is disclosed. The method includes, first, displaying predetermined display template models, each including various areas; and selecting one of the predetermined display template models. Next, at least one projecting area having three-dimensional characteristics is set in the predetermined display template model. The positions and scales of the various areas corresponding to the selected display template model are calculated; and the various areas are displayed according to the calculated positions and scales and the setting of the projecting area.