Structure and method for coupling light between dissimilar waveguides
    3.
    发明授权
    Structure and method for coupling light between dissimilar waveguides 有权
    用于在不同波导之间耦合光的结构和方法

    公开(公告)号:US07082235B2

    公开(公告)日:2006-07-25

    申请号:US10242682

    申请日:2002-09-10

    IPC分类号: G02B6/26

    摘要: A strip loaded waveguide comprises a slab and a strip, wherein the strip is separated from the slab. Nevertheless, a guiding region is provided for propagating an optical mode and this guiding region extends both within the strip and the slab. A layer of material having an index of refraction lower than that of the strip and the slab may be disposed between and separate the strip and the slab. In one embodiment, the slab comprises a crystalline silicon, the strip comprises polysilicon or crystalline silicon, and the layer of material therebetween comprises silicon dioxide. Such waveguides may be formed on the same substrate with transistors. These waveguides may also be electrically biased to alter the index of refraction and/or absorption of the waveguide.

    摘要翻译: 条带加载波导包括板坯和条带,其中条带与板坯分离。 然而,提供了用于传播光学模式的引导区域,并且该引导区域在条带和板块内均延伸。 具有低于带材和板坯折射率的折射率的材料层可以设置在条带和板坯之间并分离。 在一个实施例中,板坯包括晶体硅,条带包括多晶硅或晶体硅,并且其间的材料层包括二氧化硅。 这样的波导可以在与晶体管相同的衬底上形成。 这些波导也可以被电偏置以改变波导的折射率和/或吸收。

    MONITORING ENZYMATIC PROCESS
    5.
    发明申请
    MONITORING ENZYMATIC PROCESS 审中-公开
    监测酶学过程

    公开(公告)号:US20110045472A1

    公开(公告)日:2011-02-24

    申请号:US12746747

    申请日:2008-12-08

    IPC分类号: C12Q1/68 C12M1/34

    摘要: Techniques, apparatus and systems are described for performing label-free monitoring of processes. In one aspect, a label-free monitoring system includes an array of label-free optical sensors to detect an optical signal in response to synthesis of one or more target genetic structures. Each label-free optical sensor is functionalized with a respective target genetic structure. The system also includes a fluid flow control module that includes fluid receiving units to provide paths for different fluids to flow into the fluid flow control module and at least one switch connected to the fluid receiving units to selectively switch among the fluid receiving units to receive a select sequence of the fluids through the fluid receiving units. The select sequence of the fluids includes at least a dNTP or base. A fluid channel is connected between the fluid flow control module and the array of sensors to allow the select sequence of the fluids to flow from the fluid flow control module to the array of label-free optical sensors.

    摘要翻译: 描述了用于执行无标记监控过程的技术,装置和系统。 在一个方面,无标记监测系统包括无标记光学传感器的阵列,以响应于一个或多个靶遗传结构的合成来检测光信号。 每个无标签的光学传感器都用相应的目标遗传结构进行功能化。 该系统还包括流体流动控制模块,其包括流体接收单元,以提供用于不同流体流入流体流量控制模块的路径,以及连接到流体接收单元的至少一个开关,以在流体接收单元之间切换以接收流体 通过流体接收单元选择流体的顺序。 流体的选择顺序包括至少dNTP或碱。 流体通道连接在流体流量控制模块和传感器阵列之间,以允许流体的选择顺序从流体流动控制模块流向无标记的光学传感器阵列。

    Method of integrating optical devices and electronic devices on an integrated circuit
    7.
    发明授权
    Method of integrating optical devices and electronic devices on an integrated circuit 有权
    在集成电路上集成光器件和电子器件的方法

    公开(公告)号:US07067342B2

    公开(公告)日:2006-06-27

    申请号:US10988963

    申请日:2004-11-15

    IPC分类号: H01L21/00 H01L21/336

    CPC分类号: H01L27/0617 H01L21/84

    摘要: A semiconductor structure has a waveguide a transistor on the same integrated circuit. One trench isolation technique is used for defining a transistor region and another is used for optimizing a lateral boundary of the waveguide. Both the waveguide and the transistor have trenches with liners that can be separately optimized. The transistor has a salicide for source/drain contacts. During this process, a salicide block is used over the waveguide to prevent salicide formation in unwanted areas of the waveguide. The depth of the trench for the waveguide can be lower than that of the trench for the transistor isolation. Trench isolation depth can be set by an etch stop region that can be either a thin oxide layer or a buffer layer that is selectively etchable with respect to the top semiconductor layer and that can be used as a seed layer for growing the top semiconductor layer.

    摘要翻译: 半导体结构在同一集成电路上具有波导晶体管。 一种沟槽隔离技术用于限定晶体管区域,另一种用于优化波导的横向边界。 波导和晶体管都具有可以单独优化的具有衬垫的沟槽。 晶体管具有用于源/漏触点的自对准硅。 在该过程中,在波导上使用自对准硅化物块以防止波导的不需要的区域中的自对准硅化物形成。 用于波导的沟槽的深度可以低于用于晶体管隔离的沟槽的深度。 沟槽隔离深度可以通过可以是相对于顶部半导体层可选择性蚀刻的薄氧化物层或缓冲层的蚀刻停止区域来设置,并且可以用作用于生长顶部半导体层的种子层。

    Strip loaded waveguide with low-index transition layer
    8.
    发明授权
    Strip loaded waveguide with low-index transition layer 有权
    带载波导与低折射率过渡层

    公开(公告)号:US06834152B2

    公开(公告)日:2004-12-21

    申请号:US10241284

    申请日:2002-09-09

    IPC分类号: G02B610

    摘要: A strip loaded waveguide comprises a slab and a strip, wherein the strip is separated from the slab. Nevertheless, a guiding region is provided for propagating an optical mode and this guiding region extends both within the strip and the slab. A layer of material having an index of refraction lower than that of the strip and the slab may be disposed between and separate the strip and the slab. In one embodiment, the slab comprises a crystalline silicon, the strip comprises polysilicon or crystalline silicon, and the layer of material therebetween comprises silicon dioxide. Such waveguides may be formed on the same substrate with transistors. These waveguides may also be electrically biased to alter the index of refraction and/or absorption of the waveguide.

    摘要翻译: 条带加载波导包括板坯和条带,其中条带与板坯分离。 然而,提供了用于传播光学模式的引导区域,并且该引导区域在条带和板块内均延伸。 具有低于带材和板坯折射率的折射率的材料层可以设置在条带和板坯之间并分离。 在一个实施例中,板坯包括晶体硅,条带包括多晶硅或晶体硅,并且其间的材料层包括二氧化硅。 这样的波导可以在与晶体管相同的衬底上形成。 这些波导也可以被电偏置以改变波导的折射率和/或吸收。