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公开(公告)号:US08808457B2
公开(公告)日:2014-08-19
申请号:US10412133
申请日:2003-04-11
申请人: John Chris Pagano , Kenneth Jeffrey Nelson , Paul E. Burrows , Mark Edward Gross , Mac R. Zumhoff , Peter Maclyn Martin , Charles C. Bonham , Gordon Lee Graff , Lorenza Moro , Xi Chu
发明人: John Chris Pagano , Kenneth Jeffrey Nelson , Paul E. Burrows , Mark Edward Gross , Mac R. Zumhoff , Peter Maclyn Martin , Charles C. Bonham , Gordon Lee Graff , Lorenza Moro , Xi Chu
IPC分类号: C23C16/00 , C23C14/00 , B05D7/00 , C23C14/58 , C23C16/54 , H01L21/67 , H01L51/00 , H01L51/56
CPC分类号: B05D7/50 , C23C14/58 , C23C16/54 , H01L21/67236 , H01L51/001 , H01L51/56
摘要: A tool for depositing multilayer coatings onto a substrate. The tool includes a housing defining a vacuum chamber connected to a vacuum source, deposition stations each configured to deposit a layer of multilayer coating on the substrate, a curing station, and a contamination reduction device. At least one of the deposition stations is configured to deposit an inorganic layer, while at least one other deposition station is configured to deposit an organic layer. In one tool configuration, the substrate may travel back and forth through the tool as many times as needed to achieve the desired number of layers of multilayer coating. In another, the tool may include numerous housings adjacently spaced such that the substrate may make a single unidirectional pass. The contamination reduction device may be configured as one or more migration control chambers about at least one of the deposition stations, and further includes cooling devices, such as chillers, to reduce the presence of vaporous layer precursors. The tool is particularly well-suited to depositing multilayer coatings onto flexible substrates, as well as to encapsulating environmentally-sensitive devices placed on the flexible substrate.
摘要翻译: 用于将多层涂层沉积到基底上的工具。 该工具包括限定连接到真空源的真空室的壳体,每个沉积站被配置成在衬底上沉积多层涂层,固化站和污染减少装置。 沉积站中的至少一个被配置成沉积无机层,而至少一个其它沉积站配置成沉积有机层。 在一个工具配置中,基板可以根据需要多次前进穿过工具以实现所需数量的多层涂层。 另一方面,该工具可以包括相邻间隔开的许多外壳,使得基板可以进行单个单向通过。 污染减少装置可以被配置为围绕至少一个沉积站的一个或多个迁移控制室,并且还包括冷却装置,例如冷却器,以减少气相层前体的存在。 该工具特别适用于将多层涂层沉积在柔性基板上,以及封装放置在柔性基板上的环境敏感设备。
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公开(公告)号:US08955217B2
公开(公告)日:2015-02-17
申请号:US13353635
申请日:2012-01-19
申请人: Paul Burrows , J. Chris Pagano , Eric S. Mast , Peter M. Martin , Gordon L. Graff , Mark E. Gross , Charles C. Bonham , Wendy D. Bennett , Michael G. Hall
发明人: Paul Burrows , J. Chris Pagano , Eric S. Mast , Peter M. Martin , Gordon L. Graff , Mark E. Gross , Charles C. Bonham , Wendy D. Bennett , Michael G. Hall
CPC分类号: H01L23/562 , G02F2001/133337 , H01L23/564 , H01L51/003 , H01L51/5237 , H01L51/5256 , H01L2924/0002 , H01L2924/12044 , H01M2/08 , Y10T29/49146 , Y10T156/10 , Y10T428/10 , Y10T428/1059 , Y10T428/239 , H01L2924/00
摘要: An edge-sealed barrier film composite. The composite includes a substrate and at least one initial barrier stack adjacent to the substrate. The at least one initial barrier stack includes at least one decoupling layer and at least one barrier layer. One of the barrier layers has an area greater than the area of one of the decoupling layers. The decoupling layer is sealed by the first barrier layer within the area of barrier material. An edge-sealed, encapsulated environmentally sensitive device is provided. A method of making the edge-sealed barrier film composite is also provided.
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公开(公告)号:US07510913B2
公开(公告)日:2009-03-31
申请号:US11439474
申请日:2006-05-23
申请人: Lorenza Moro , Xi Chu , Martin Philip Rosenblum , Kenneth Jeffrey Nelson , Paul E. Burrows , Mark E. Gross , Mac R. Zumhoff , Peter M. Martin , Charles C. Bonham , Gordon L. Graff
发明人: Lorenza Moro , Xi Chu , Martin Philip Rosenblum , Kenneth Jeffrey Nelson , Paul E. Burrows , Mark E. Gross , Mac R. Zumhoff , Peter M. Martin , Charles C. Bonham , Gordon L. Graff
CPC分类号: C23C14/0694 , H01L51/5256 , H01L51/56
摘要: A method of making an encapsulated plasma sensitive device. The method comprises: providing a plasma sensitive device adjacent to a substrate; depositing a plasma protective layer on the plasma sensitive device using a process selected from non-plasma based processes, or modified sputtering processes; and depositing at least one barrier stack adjacent to the plasma protective layer, the at least one barrier stack comprising at least one decoupling layer and at least one barrier layer, the plasma sensitive device being encapsulated between the substrate and the at least one barrier stack, wherein the decoupling layer, the barrier layer, or both are deposited using a plasma process, the encapsulated plasma sensitive device having a reduced amount of damage caused by the plasma compared to an encapsulated plasma sensitive device made without the plasma protective layer. An encapsulated plasma sensitive device is also described.
摘要翻译: 一种制造封装等离子体敏感装置的方法。 该方法包括:提供与衬底相邻的等离子体敏感器件; 使用选自非等离子体工艺或改进的溅射工艺的工艺在等离子体敏感器件上沉积等离子体保护层; 以及沉积与所述等离子体保护层相邻的至少一个势垒堆叠,所述至少一个势垒堆叠包括至少一个去耦层和至少一个势垒层,所述等离子体敏感器件封装在所述衬底和所述至少一个阻挡层之间, 其中使用等离子体工艺沉积去耦层,阻挡层或两者,所述封装等离子体敏感器件与不具有等离子体保护层的封装的等离子体感应器件相比,具有由等离子体引起的损伤量减少。 还描述了封装的等离子体敏感器件。
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公开(公告)号:US20100193468A1
公开(公告)日:2010-08-05
申请号:US12758244
申请日:2010-04-12
申请人: Paul E. Burrows , Eric S. Mast , Peter M. Martin , Gordon L. Graff , Mark E. Gross , Charles C. Bonham , Wendy D. Bennett , Michael G. Hall
发明人: Paul E. Burrows , Eric S. Mast , Peter M. Martin , Gordon L. Graff , Mark E. Gross , Charles C. Bonham , Wendy D. Bennett , Michael G. Hall
CPC分类号: H01M2/08 , G02F2001/133337 , H01L23/562 , H01L23/564 , H01L51/003 , H01L51/5253 , H01L51/5256 , H01L2924/0002 , H01L2924/12044 , Y10T156/10 , Y10T428/1059 , H01L2924/00
摘要: An edge-sealed, encapsulated environmentally sensitive device. The device includes an environmentally sensitive device, and at least one edge-sealed barrier stack. The edge-sealed barrier stack includes a decoupling layer and at least two barrier layers. The environmentally sensitive device is sealed between an edge-sealed barrier stack and either a substrate or another edge-sealed barrier stack. A method of making the edge-sealed, encapsulated environmentally sensitive device is also disclosed.
摘要翻译: 边缘密封,密封的环保敏感设备。 该装置包括环境敏感装置和至少一个边缘密封阻挡层叠。 边缘密封势垒堆叠包括去耦层和至少两个阻挡层。 环境敏感装置被密封在边缘密封的阻挡层与衬底或另一边缘密封的阻挡层之间。 还公开了制造边缘密封的,封装的环境敏感装置的方法。
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公开(公告)号:US08900366B2
公开(公告)日:2014-12-02
申请号:US11112880
申请日:2005-04-22
申请人: Martin Philip Rosenblum , Xi Chu , Lorenza Moro , Kenneth Jeffrey Nelson , Paul Burrows , Mark E. Gross , Mac R. Zumhoff , Peter M. Martin , Charles C. Bonham , Gordon L. Graff
发明人: Martin Philip Rosenblum , Xi Chu , Lorenza Moro , Kenneth Jeffrey Nelson , Paul Burrows , Mark E. Gross , Mac R. Zumhoff , Peter M. Martin , Charles C. Bonham , Gordon L. Graff
IPC分类号: C23C14/00 , C23C16/00 , H01L51/52 , H01L21/67 , B05D3/06 , C23C14/56 , B05D7/00 , B05D1/00 , H01L51/00 , H01L51/56
CPC分类号: C23C14/568 , B05D1/60 , B05D3/067 , B05D7/52 , H01L21/67155 , H01L21/67207 , H01L21/67236 , H01L51/0001 , H01L51/001 , H01L51/5237 , H01L51/5256 , H01L51/56 , H01L2251/5338
摘要: A tool for depositing multilayer coatings onto a substrate. In one configuration, the tool includes a includes an in-line organic material deposition station operating under at least one of a pressure or temperature controlled environment. In another, it further is of a hybrid design that incorporates both in-line and cluster tool features. In this latter configuration, at least one of the deposition stations is configured to deposit an inorganic layer, while at least one other deposition station is configured to deposit an organic layer. The tool is particularly well-suited to depositing multilayer coatings onto discrete substrates, as well as to encapsulating environmentally-sensitive devices placed on the flexible substrate.
摘要翻译: 用于将多层涂层沉积到基底上的工具。 在一种配置中,该工具包括在压力或温度受控环境中的至少一个下操作的在线有机材料沉积站。 另一方面,它进一步是兼并在线和集群工具功能的混合设计。 在后一种构造中,至少一个沉积站配置成沉积无机层,而至少一个其它沉积站被配置成沉积有机层。 该工具特别适用于将多层涂层沉积到分立的基板上,以及封装放置在柔性基板上的环境敏感设备。
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公开(公告)号:US07727601B2
公开(公告)日:2010-06-01
申请号:US11693022
申请日:2007-03-29
申请人: Paul E. Burrows , Eric S. Mast , Peter M. Martin , Gordon L. Graff , Mark E. Gross , Charles C. Bonham , Wendy D. Bennett , Michael G. Hall
发明人: Paul E. Burrows , Eric S. Mast , Peter M. Martin , Gordon L. Graff , Mark E. Gross , Charles C. Bonham , Wendy D. Bennett , Michael G. Hall
IPC分类号: H01L21/56
CPC分类号: H01M2/08 , G02F2001/133337 , H01L23/562 , H01L23/564 , H01L51/003 , H01L51/5253 , H01L51/5256 , H01L2924/0002 , H01L2924/12044 , Y10T156/10 , Y10T428/1059 , H01L2924/00
摘要: An edge-sealed, encapsulated environmentally sensitive device. The device includes an environmentally sensitive device, and at least one edge-sealed barrier stack. The edge-sealed barrier stack includes a decoupling layer and at least two barrier layers. The environmentally sensitive device is sealed between an edge-sealed barrier stack and either a substrate or another edge-sealed barrier stack. A method of making the edge-sealed, encapsulated environmentally sensitive device is also disclosed.
摘要翻译: 边缘密封,密封的环保敏感设备。 该装置包括环境敏感装置和至少一个边缘密封阻挡层叠。 边缘密封势垒堆叠包括去耦层和至少两个阻挡层。 环境敏感装置被密封在边缘密封的阻挡层与衬底或另一边缘密封的阻挡层之间。 还公开了制造边缘密封的,封装的环境敏感装置的方法。
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公开(公告)号:US20090208754A1
公开(公告)日:2009-08-20
申请号:US12345912
申请日:2008-12-30
申请人: Xi Chu , Paul E. Burrows , Eric S. Mast , Peter M. Martin , Gordon L. Graff , Mark E. Gross , Charles C. Bonham , Wendy D. Bennett , Michael G. Hall , Martin Philip Rosenblum
发明人: Xi Chu , Paul E. Burrows , Eric S. Mast , Peter M. Martin , Gordon L. Graff , Mark E. Gross , Charles C. Bonham , Wendy D. Bennett , Michael G. Hall , Martin Philip Rosenblum
CPC分类号: H01L23/564 , H01L51/5256 , H01L2251/566 , H01L2924/0002 , H01L2924/12044 , Y10T428/31504 , H01L2924/00
摘要: A method of making an edge-sealed, encapsulated environmentally sensitive device. The method includes providing an environmentally sensitive device on a substrate; depositing a decoupling layer through one mask, the decoupling layer adjacent to the environmentally sensitive device, the decoupling layer having a discrete area and covering the environmentally sensitive device; increasing the distance between the one mask and the substrate; and depositing a first barrier layer through the one mask, the first barrier layer adjacent to the decoupling layer, the first barrier layer having an area greater than the discrete area of the decoupling layer and covering the decoupling layer, the decoupling layer being sealed between the edges of the first barrier layer and the substrate or an optional second barrier layer.
摘要翻译: 一种制造边缘密封,密封的环境敏感设备的方法。 该方法包括在基板上提供对环境敏感的装置; 通过一个掩模沉积去耦层,所述去耦层邻近环境敏感设备,去耦层具有离散区域并覆盖环境敏感设备; 增加一个掩模和基底之间的距离; 并且通过所述一个掩模沉积第一势垒层,所述第一势垒层与所述去耦层相邻,所述第一势垒层具有大于所述去耦层的离散区域并覆盖所述去耦层的区域,所述解耦层被密封在所述解耦层之间 第一阻挡层和基底的边缘或任选的第二阻挡层。
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公开(公告)号:US20090191342A1
公开(公告)日:2009-07-30
申请号:US12345787
申请日:2008-12-30
申请人: Xi Chu , Paul E. Burrows , Eric S. Mast , Peter M. Martin , Gordon L. Graff , Mark E. Gross , Charles C. Bonham , Wendy D. Bennett , Michael G. Hall , Martin Philip Rosenblum
发明人: Xi Chu , Paul E. Burrows , Eric S. Mast , Peter M. Martin , Gordon L. Graff , Mark E. Gross , Charles C. Bonham , Wendy D. Bennett , Michael G. Hall , Martin Philip Rosenblum
IPC分类号: B05D3/00
CPC分类号: H01L23/564 , H01L51/5256 , H01L2251/566 , H01L2924/0002 , H01L2924/12044 , H01L2924/00
摘要: Methods of making an edge-sealed, encapsulated environmentally sensitive device. One method includes providing an environmentally sensitive device with a contact on a substrate; depositing a decoupling layer adjacent to the environmentally sensitive device, the decoupling layer having a discrete area and covering the environmentally sensitive device and not covering the contact, the decoupling layer deposited using a printing process; depositing a first barrier layer adjacent to the decoupling layer, the first barrier layer having a first area greater than the discrete area of the decoupling layer, and the first barrier layer having a second area covering the decoupling layer and the contact, the decoupling layer being sealed between the edges of the first barrier layer and the substrate or an optional second barrier layer; and removing the second area of the first barrier layer from the contact.
摘要翻译: 制造边缘密封,密封环境敏感设备的方法。 一种方法包括在基板上提供具有接触的环境敏感装置; 沉积与环境敏感设备相邻的去耦层,所述去耦层具有离散区域并覆盖环境敏感设备而不覆盖接触,使用印刷工艺沉积的去耦层; 沉积与所述去耦层相邻的第一势垒层,所述第一势垒层具有大于所述去耦层的离散区域的第一区域,并且所述第一势垒层具有覆盖所述解耦层和所述接触的第二区域,所述去耦层为 密封在第一阻挡层的边缘与基底或任选的第二阻挡层之间; 以及从所述接触件移除所述第一阻挡层的所述第二区域。
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公开(公告)号:US20120118855A1
公开(公告)日:2012-05-17
申请号:US13353635
申请日:2012-01-19
申请人: Paul E. Burrows , J. Chris Pagano , Eric S. Mast , Peter M. Martin , Gordon L. Graff , Mark E. Gross , Charles C. Bonham , Wendy D. Bennett , Michael G. Hall
发明人: Paul E. Burrows , J. Chris Pagano , Eric S. Mast , Peter M. Martin , Gordon L. Graff , Mark E. Gross , Charles C. Bonham , Wendy D. Bennett , Michael G. Hall
CPC分类号: H01L23/562 , G02F2001/133337 , H01L23/564 , H01L51/003 , H01L51/5237 , H01L51/5256 , H01L2924/0002 , H01L2924/12044 , H01M2/08 , Y10T29/49146 , Y10T156/10 , Y10T428/10 , Y10T428/1059 , Y10T428/239 , H01L2924/00
摘要: An edge-sealed barrier film composite. The composite includes a substrate and at least one initial barrier stack adjacent to the substrate. The at least one initial barrier stack includes at least one decoupling layer and at least one barrier layer. One of the barrier layers has an area greater than the area of one of the decoupling layers. The decoupling layer is sealed by the first barrier layer within the area of barrier material. An edge-sealed, encapsulated environmentally sensitive device is provided. A method of making the edge-sealed barrier film composite is also provided.
摘要翻译: 边缘密封阻隔膜复合材料。 复合材料包括基底和邻近基底的至少一个初始势垒堆叠。 至少一个初始阻挡层包括至少一个去耦层和至少一个阻挡层。 阻挡层中的一个具有大于去耦层之一的面积的面积。 去耦层由阻挡材料区域内的第一阻挡层密封。 提供了边缘密封,密封的环境敏感设备。 还提供了制造边缘密封阻挡膜复合材料的方法。
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