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    Image sensor system for monitoring condition of electrode for electrochemical process tools
    2.
    发明授权
    Image sensor system for monitoring condition of electrode for electrochemical process tools 有权
    用于电化学处理工具电极监测状态的图像传感器系统

    公开(公告)号：US07416648B2

    公开(公告)日：2008-08-26

    申请号：US11127361

    申请日：2005-05-12

    Applicant: Wen-Chih Chiou ,  Ying-Ho Chen ,  Cheng Hsun Chan

    Inventor： Wen-Chih Chiou ,  Ying-Ho Chen ,  Cheng Hsun Chan

    IPC: C25B9/02

    CPC classification number: B24B37/04 ,  B23H5/08 ,  B24B49/12 ,  H01L21/67288

    Abstract: A system for use in manufacturing semiconductor devices, is provided. The system includes an electrochemical processing tool and an image sensor. The electrochemical processing tool includes an electrode located at a central region of a platen. The electrode is adapted for contacting a wafer workpiece during certain processing of the wafer workpiece using the tool. At least part of the electrode is viewable from above the platen when the electrochemical processing tool is operably assembled. The image sensor is capable of capturing an image of the viewable part of the electrode. The image sensor is positioned above the platen. The image sensor is adapted to be aimed at the electrode when an image of the electrode is to be taken with the image sensor.

    Abstract translation: 提供一种用于制造半导体器件的系统。 该系统包括电化学处理工具和图像传感器。 电化学处理工具包括位于压板的中心区域的电极。 电极适于在使用该工具的晶片工件的某些处理期间接触晶片工件。 当电化学加工工具可操作地组装时，电极的至少部分可从压板上方观察。 图像传感器能够捕获电极的可视部分的图像。 图像传感器位于压板上方。 当用图像传感器拍摄电极的图像时，图像传感器适于瞄准电极。

    Reset signal filter
    4.
    发明授权
    Reset signal filter 有权
    复位信号滤波器

    公开(公告)号：US07746131B2

    公开(公告)日：2010-06-29

    申请号：US12344198

    申请日：2008-12-24

    Applicant: Cheng-Hsun Chan ,  Che-Li Lin

    Inventor： Cheng-Hsun Chan ,  Che-Li Lin

    IPC: H03L7/00

    CPC classification number: H03K17/22 ,  H03K5/1252

    Abstract: A reset signal filter includes a power voltage detector and a reset signal detector or includes only one reset signal detector. The power voltage detector includes a comparators and a basic logic gates (e.g. AND gate, OR gate, inverter, etc). The reset signal detector includes a comparator, N flip flops connected in series, an AND gate, an OR gate, a multiplexer and an output flip flop. The reset signal filter receives a first reset signal generated by a power voltage detector or a Schmitt trigger buffer and utilizes N flip flops to register the signal level of the first reset signal for N clock periods. Then the reset signal filter determines if the first rest signal is changed during N clock periods, and outputs a second reset signal.

    Abstract translation: 复位信号滤波器包括电源电压检测器和复位信号检测器，或仅包括一个复位信号检测器。 电源电压检测器包括比较器和基本逻辑门（例如，与门，或门，反相器等）。 复位信号检测器包括比较器，串联连接的N个触发器，与门，或门，复用器和输出触发器。 复位信号滤波器接收由电源电压检测器或施密特触发缓冲器产生的第一复位信号，并利用N个触发器在N个时钟周期内对第一复位信号的信号电平进行寄存。 然后，复位信号滤波器确定在N个时钟周期期间是否改变第一个静止信号，并输出第二个复位信号。

    Data Trigger Reset Device and Related Method
    5.
    发明申请
    Data Trigger Reset Device and Related Method 审中-公开
    数据触发复位器件及相关方法

    公开(公告)号：US20090174438A1

    公开(公告)日：2009-07-09

    申请号：US12142755

    申请日：2008-06-19

    Applicant: Jin-Ho Lin ,  Cheng-Hsun Chan ,  Che-Li Lin

    Inventor： Jin-Ho Lin ,  Cheng-Hsun Chan ,  Che-Li Lin

    IPC: H03K5/22

    CPC classification number: H03K17/22 ,  G06F1/24

    Abstract: A data trigger reset device for an electronic device is provided in order to avoid system errors due to out-of-sequence reset on electronic devices of an electronic system. The data trigger reset device includes a voltage converter and a voltage comparator. The voltage converter receives an input signal and then converts the input signal to generate a data voltage signal. The voltage comparator is coupled to the voltage converter and is used for comparing the data voltage signal with a reference voltage to generate a reset signal for resetting the electronic device.

    Abstract translation: 提供了一种用于电子设备的数据触发复位装置，以便避免由于电子系统的电子设备上的按顺序重置的系统错误。 数据触发复位装置包括电压转换器和电压比较器。 电压转换器接收输入信号，然后转换输入信号以产生数据电压信号。 电压比较器耦合到电压转换器，用于将数据电压信号与参考电压进行比较，以产生用于复位电子设备的复位信号。

    RESET SIGNAL FILTER
    8.
    发明申请
    RESET SIGNAL FILTER 有权
    复位信号滤波器

    公开(公告)号：US20100026357A1

    公开(公告)日：2010-02-04

    申请号：US12344198

    申请日：2008-12-24

    Applicant: Cheng-Hsun Chan ,  Che-Li Lin

    Inventor： Cheng-Hsun Chan ,  Che-Li Lin

    IPC: H03K3/02

    CPC classification number: H03K17/22 ,  H03K5/1252

    Abstract: A reset signal filter includes a power voltage detector and a reset signal detector or includes only one reset signal detector. The power voltage detector includes a comparators and a basic logic gates (e.g. AND gate, OR gate, inverter, etc). The reset signal detector includes a comparator, N flip flops connected in series, an AND gate, an OR gate, a multiplexer and an output flip flop. The reset signal filter receives a first reset signal generated by a power voltage detector or a Schmitt trigger buffer and utilizes N flip flops to register the signal level of the first reset signal for N clock periods. Then the reset signal filter determines if the first rest signal is changed during N clock periods, and outputs a second reset signal.

    Abstract translation: 复位信号滤波器包括电源电压检测器和复位信号检测器，或仅包括一个复位信号检测器。 电源电压检测器包括比较器和基本逻辑门（例如，与门，或门，反相器等）。 复位信号检测器包括比较器，串联连接的N个触发器，与门，或门，复用器和输出触发器。 复位信号滤波器接收由电源电压检测器或施密特触发缓冲器产生的第一复位信号，并利用N个触发器在N个时钟周期内对第一复位信号的信号电平进行寄存。 然后，复位信号滤波器确定在N个时钟周期期间是否改变第一个静止信号，并输出第二个复位信号。

    Rinsing Wafers Using Composition-Tunable Rinse Water in Chemical Mechanical Polish
    9.
    发明申请
    Rinsing Wafers Using Composition-Tunable Rinse Water in Chemical Mechanical Polish 有权
    在化学机械抛光中使用组合物可调冲洗水冲洗晶片

    公开(公告)号：US20100018029A1

    公开(公告)日：2010-01-28

    申请号：US12179347

    申请日：2008-07-24

    Applicant: Cheng Hsun Chan ,  Ming-Che Ho

    Inventor： Cheng Hsun Chan ,  Ming-Che Ho

    IPC: B23P17/00

    CPC classification number: H01L21/67046 ,  H01L21/67051 ,  Y10T29/49002

    Abstract: An apparatus for manufacturing integrated circuits on a wafer includes a polish pad; a rinse arm movable over the polish pad; and a post-polish cleaner. The post-polish cleaner includes a brush for brushing the wafer; and a nozzle aiming at the wafer. The apparatus further includes a mixer configured to mix an additive and di-ionized water; and a pipe connecting the mixer to at least one of the rinse arm and the nozzle.

    Abstract translation: 用于在晶片上制造集成电路的装置包括抛光垫; 漂洗臂可移动在抛光垫上; 和一个后抛光清洁剂。 后抛光清洁器包括用于刷洗晶片的刷子; 以及瞄准晶片的喷嘴。 该装置还包括配置成混合添加剂和二次电离水的混合器; 以及将混合器连接到冲洗臂和喷嘴中的至少一个的管道。

    CMP system with temperature-controlled polishing head
    10.
    发明授权
    CMP system with temperature-controlled polishing head 有权
    CMP系统带有温度控制的抛光头

    公开(公告)号：US07335088B1

    公开(公告)日：2008-02-26

    申请号：US11653615

    申请日：2007-01-16

    Applicant: Jerry Hwang ,  Cheng Hsun Chan

    Inventor： Jerry Hwang ,  Cheng Hsun Chan

    IPC: B24B51/00 ,  B24B1/00 ,  B24B5/00

    CPC classification number: B24B37/30 ,  B24B41/061 ,  B24B49/14

    Abstract: A chemical mechanical polish system for polishing a wafer includes a polishing head; an inner tube connected to the polishing head, wherein the inner tube is filled with a heat media; a media heater connected to the inner tube; and a pressure controller connected to the inner tube.

    Abstract translation: 用于抛光晶片的化学机械抛光系统包括抛光头; 连接到抛光头的内管，其中内管填充有热介质; 连接到内管的介质加热器; 以及连接到内管的压力控制器。

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