公开(公告)号：US20120089117A1

公开(公告)日：2012-04-12

申请号：US13265787

申请日：2010-04-23

申请人： Hans Junginger ,  Giorgia Pastorin ,  Minrui Zheng ,  Chengkuo Lee

发明人： Hans Junginger ,  Giorgia Pastorin ,  Minrui Zheng ,  Chengkuo Lee

IPC分类号： A61M5/00 ,  B23P17/04 ,  A61M35/00 ,  B82Y5/00

CPC分类号： A61B17/205 ,  A61B2017/00526 ,  A61B2090/032 ,  A61M37/0015 ,  A61M2037/0023 ,  A61M2037/0046 ,  A61M2037/0053 ,  Y10T29/49 ,  Y10T29/49826 ,  Y10T29/49885

摘要： An apparatus that includes a nano-projection array and an application unit configured to displace the nano-projection array to thereby deliver a composition (e.g., vaccine) to a controlled depth within the skin. The nano-projection array includes nano-projections carried by a carrier substrate. The application unit includes a peripheral structure and a displaceable carrier. The nano-projection array can be disposed within the peripheral structure. Displacement of the displaceable carrier causes a corresponding displacement to the nano-projection array. The displacement of the displaceable carrier can be controlled. For instance the distance of displacement of the displaceable carrier can be controlled. A method or process for manufacturing the apparatus is also provided.

摘要翻译： 一种包括纳米投影阵列和应用单元的装置，其被配置为置换纳米投影阵列，从而将组合物（例如，疫苗）输送到皮肤内受控的深度。 纳米投影阵列包括由载体衬底承载的纳米投影。 应用单元包括外围结构和位移载体。 纳米投影阵列可以设置在外围结构内。 可位移载体的位移导致与纳米投影阵列的相应位移。 可移动的载体的位移可以被控制。 例如可以控制可位移载体的位移距离。 还提供了一种制造该装置的方法或工艺。

公开(公告)号：US06947657B1

公开(公告)日：2005-09-20

申请号：US10855702

申请日：2004-05-28

申请人： Chihchung Chen ,  Chengkuo Lee

发明人： Chihchung Chen ,  Chengkuo Lee

IPC分类号： G02B6/00 ,  G02B6/26 ,  G02B6/35 ,  H02N2/04

CPC分类号： G02B6/266 ,  G02B6/3512 ,  G02B6/3566 ,  G02B6/3584 ,  G02B6/3594

摘要： A variable optical attenuator for providing a new light attenuation mechanism based on using at least one of tilted mirrors to change and control the beam direction of reflected light beam toward output optical port in a two dimensional light path configuration is demonstrated to achieve the light attenuation in terms of changing and controlling the coupling loss among input optical port, reflective tilted mirrors, and output optical port. The tilted mirror is supported and connected by a suspended flexure spring at one side. This suspended spring is connected with tilted mirror at one side and is anchored on a substrate at the other side via a post (or a pivot). When the tilted mirror is driven by an actuator to generate movement including rotational mirror deflection and parallel mirror shifted displacement, the reflected light beam path is changed according to the particular mirror positions. The attenuation value is modified and controlled by the coupled light of reflected light beam to output port. The structure and materials of variable optical attenuator is designed and chose to be robust to environment mechanical and thermal noise.

摘要翻译： 一种用于在二维光路结构中基于使用倾斜镜中的至少一个来改变和控制反射光束朝向输出光学端口的光束方向提供新的光衰减机构的可变光衰减器被证明可实现光衰减 改变和控制输入光端口，反射倾斜镜和输出光口之间的耦合损耗的术语。 倾斜的镜子由一侧的悬浮的弯曲弹簧支撑和连接。 该悬挂弹簧在一侧与倾斜镜连接，并通过柱（或枢轴）在另一侧锚固在基底上。 当倾斜镜由致动器驱动以产生包括旋转镜偏转和平行镜移位移的移动时，反射光束路径根据特定镜位置而改变。 衰减值由反射光束到输出端口的耦合光进行修改和控制。 可变光衰减器的结构和材料被设计并选择为对环境机械和热噪声的鲁棒性。

公开(公告)号：US20050047721A1

公开(公告)日：2005-03-03

申请号：US10646927

申请日：2003-08-25

申请人： Chih-Chung Chen ,  Chengkuo Lee ,  Yen-Jyh Lai ,  Wen-Chih Chen ,  Ming-Hung Tsai

发明人： Chih-Chung Chen ,  Chengkuo Lee ,  Yen-Jyh Lai ,  Wen-Chih Chen ,  Ming-Hung Tsai

IPC分类号： G02B6/35 ,  G02B6/42

CPC分类号： G02B6/357 ,  G02B6/3514 ,  G02B6/3546 ,  G02B6/3552 ,  G02B6/358 ,  G02B6/3584 ,  G02B6/3594

摘要： Electrostatically operated micro-optical devices and method of manufacturing such devices is disclosed. In a preferred embodiment, the micro-optical devices using electrostatic comb drive actuators having new spring designs to overcome side instability and exhibit enlarged displacement, having new designs of comb finger electrode shapes to generate larger force output, and having new clip type latch mechanism to control the corresponding device at certain states in an analog manner without electrical power consumption. Based on the proposed optical path and device configurations, integration and assembly of a plurality of reflective micro-mirrors in conjunction with proposed new comb drive actuators is very promising way to provide micro-optical devices to get good optical performance and suitable for multi-channel applications. We also disclose several process techniques to manufacture the micro-optical devices with said electrostatic comb drive actuator in a mass production manner with higher yield.

摘要翻译： 公开了静电操作的微光学器件及其制造方法。 在优选实施例中，使用具有新弹簧设计的静电梳状驱动致动器的微型光学装置克服侧面不稳定性并展现出放大的位移，具有梳状电极形状的新设计以产生较大的力输出，并且具有新的夹式锁定机构 以模拟方式在某些状态下控制相应的设备，而无需电力消耗。 基于所提出的光路和器件配置，结合提出的新梳状驱动致动器的多个反射式微反射镜的集成和组装是提供微光学器件以获得良好的光学性能并且适合于多通道的非常有希望的方式 应用程序。 我们还公开了以大量生产方式以更高的产量制造具有所述静电梳驱动致动器的微光学装置的几种工艺技术。

公开(公告)号：US06996306B2

公开(公告)日：2006-02-07

申请号：US10646927

申请日：2003-08-25

申请人： Chih-Chung Chen ,  Chengkuo Lee ,  Yen-Jyh Lai ,  Wen-Chih Chen ,  Ming-Hung Tsai

发明人： Chih-Chung Chen ,  Chengkuo Lee ,  Yen-Jyh Lai ,  Wen-Chih Chen ,  Ming-Hung Tsai

IPC分类号： G02B6/26

CPC分类号： G02B6/357 ,  G02B6/3514 ,  G02B6/3546 ,  G02B6/3552 ,  G02B6/358 ,  G02B6/3584 ,  G02B6/3594

摘要： Electrostatically operated micro-optical devices and method of manufacturing such devices is disclosed. In a preferred embodiment, the micro-optical devices using electrostatic comb drive actuators having new spring designs to overcome side instability and exhibit enlarged displacement, having new designs of comb finger electrode shapes to generate larger force output, and having new clip type latch mechanism to control the corresponding device at certain states in an analog manner without electrical power consumption. Based on the proposed optical path and device configurations, integration and assembly of a plurality of reflective micro-mirrors in conjunction with proposed new comb drive actuators is very promising way to provide micro-optical devices to get good optical performance and suitable for multi-channel applications. We also disclose several process techniques to manufacture the micro-optical devices with said electrostatic comb drive actuator in a mass production manner with higher yield.

摘要翻译： 公开了静电操作的微光学器件及其制造方法。 在优选实施例中，使用具有新弹簧设计的静电梳状驱动致动器的微型光学装置克服侧面不稳定性并展现出放大的位移，具有梳状电极形状的新设计以产生较大的力输出，并且具有新的夹式锁定机构 以模拟方式在某些状态下控制相应的设备，而无需电力消耗。 基于所提出的光路和器件配置，结合提出的新梳状驱动致动器的多个反射式微反射镜的集成和组装是提供微光学器件以获得良好的光学性能并且适合于多通道的非常有希望的方式 应用程序。 我们还公开了以大量生产方式以更高的产量制造具有所述静电梳驱动致动器的微光学装置的几种工艺技术。

公开(公告)号：US06784020B2

公开(公告)日：2004-08-31

申请号：US10283129

申请日：2002-10-30

申请人： Chengkuo Lee ,  Yi-Mou Huang

发明人： Chengkuo Lee ,  Yi-Mou Huang

IPC分类号： H01L2148

CPC分类号： B81C1/00269 ,  B81C2203/0109 ,  H01L21/50 ,  H01L23/04 ,  H01L23/10 ,  H01L23/13 ,  H01L23/5389 ,  H01L24/24 ,  H01L24/45 ,  H01L24/48 ,  H01L2224/05554 ,  H01L2224/24226 ,  H01L2224/32225 ,  H01L2224/451 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/73265 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01019 ,  H01L2924/01033 ,  H01L2924/01047 ,  H01L2924/01075 ,  H01L2924/01076 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/01322 ,  H01L2924/09701 ,  H01L2924/10253 ,  H01L2924/12041 ,  H01L2924/12042 ,  H01L2924/12044 ,  H01L2924/14 ,  H01L2924/16152 ,  H01L2924/16235 ,  H01L2924/16315 ,  H01L2924/181 ,  H01L2924/19041 ,  H01L2924/3025 ,  Y10S438/974 ,  H01L2924/00014 ,  H01L2924/00

摘要： A package structure and method for making devices of system-in-a-package (SiP). Substrates with integrated and assembled elements can be aligned and pre-bonded together, and fluidic encapsulating materials is applied to seal the rest opening of pre-bonded interface of substrates. Three dimensional and protruding microstructures, elements, and MFMS devices can be accommodated and protected inside a spatial space formed by the bonded substrates. By applying the technologies of flip-chip, chip-scale-packaging, and wafer-level-packaging in conjunction with present invention, then plural elements and devices can be packaged together and become a system device in wafer-level-system-in-a-package (WLSiP) format.

摘要翻译： 一种用于制造系统级封装（SiP）器件的封装结构和方法。 具有集成和组装元件的衬底可以对准并预粘合在一起，并且施加流体封装材料以密封衬底的预键合界面的其余开口。 三维和突出的微结构，元件和MFMS器件可以由粘合的基底形成的空间空间内容纳和保护。 通过结合本发明应用倒装芯片，芯片级封装和晶片级封装的技术，可以将多个元件和器件封装在一起，并成为晶圆级系统中的系统器件， a-package（WLSiP）格式。

公开(公告)号：US06901182B2

公开(公告)日：2005-05-31

申请号：US10448392

申请日：2003-05-30

申请人： Jer-Liang A. Yeh ,  Chih-Chung Chen ,  Yen-Jyh Lai ,  Wen-Chih Chen ,  Chengkuo Lee

发明人： Jer-Liang A. Yeh ,  Chih-Chung Chen ,  Yen-Jyh Lai ,  Wen-Chih Chen ,  Chengkuo Lee

IPC分类号： G02B6/35

CPC分类号： G02B6/353 ,  G02B6/3546 ,  G02B6/3552 ,  G02B6/3568 ,  G02B6/3584

摘要： Disclosed is a retro-reflective type optical signal processing device and method, particularly to a device includes a set of optical mirror planes with retro-reflective type layout and configuration, and a set of micro-shutters controlled by microelectromechanical actuators, whereas the optical signals in propagation can be blocked or partially blocked in terms of the position of said a set of micro-shutters corresponding to the optical signal transmission path, thereby the method of said approach to determine the range of attenuated optical signal is a variable optical attenuation function demonstrated by present invention. Such a retro-reflective type optical signal processing device and method further comprises a set of three reflective mirrors and micro-shutters with reflective mirrors. Thereby this device has the capability to switch 2 sets of retro-reflected optical light transmission paths, the method of said approach is a demonstration of 2×2 optical switching function.

摘要翻译： 公开了一种逆反射型光信号处理装置和方法，特别涉及一种装置，包括具有回射型布局和配置的一组光学镜面，以及由微机电致动器控制的一组微快门，而光信号 就所述一组微光闸对应于光信号传输路径的位置而言，传播可被阻挡或部分阻塞，因此所述确定衰减光信号范围的方法是示出的可变光衰减函数 通过本发明。 这种回射型光信号处理装置和方法还包括一组具有反射镜的三个反射镜和微快门。 因此，该装置具有切换2组反射光传输路径的能力，所述方法的方法是2x2光切换功能的演示。

公开(公告)号：US06804036B1

公开(公告)日：2004-10-12

申请号：US10642218

申请日：2003-08-18

申请人： Wen-Chih Chen ,  Chia-Yu Wu ,  Chengkuo Lee

发明人： Wen-Chih Chen ,  Chia-Yu Wu ,  Chengkuo Lee

IPC分类号： G02B2600

CPC分类号： G02B6/358 ,  G02B6/3514 ,  G02B6/3546 ,  G02B6/357 ,  G02B6/3584 ,  G02B26/0841

摘要： Disclosed is an optical switch using V-beam electrothermal actuators, buckle beam springs, and movement translation mechanism with its bi-directional movable latched function for optical communication applications. In the preferred embodiments, various layout combinations of the V-beam electrothermal actuators, the buckle beam springs, a reflective mirror shutter connected to a shutter beam, and spatial joint to enable various operation approaches to realize the bi-stable switching function without external electrical load and electrical power consumption of said optical switch regarding the input optical signals transmitting toward the output channels, or the input optical signals transmitting forward to the reflective mirror shutter and then being reflected toward the output channel. The forward moving displacement generated by electrothermal V-beam actuators will move the shutter beam and reflective mirror shutter from one stable position to another stable position of the bi-stable positions of latched optical switch. The buckle beam springs exert spring force due to its natural deflection onto the shutter beam against the force from actuators, environment vibrations, and shocks, etc.; thus the optical switch performs the latch function with any external electrical load and electrical power consumption.

摘要翻译： 公开了一种使用V型电热致动器，带扣弹簧和移动平移机构的光学开关，其具有用于光通信应用的双向可移动锁定功能。 在优选实施例中，V形束电热致动器，带扣弹簧，连接到快门光束的反射镜快门和空间关节的各种布局组合，以实现不需要外部电气的各种操作方式实现双稳态切换功能 关于输入光信号朝向输出通道传输的所述光开关的负载和电功率消耗，或者向前传送到反射镜快门然后被反射向输出通道的输入光信号。 由电热V型光束致动器产生的向前移动位移将快门光束和反射镜快门从一个稳定位置移动到锁存光开关双稳态位置的另一个稳定位置。 扣梁弹簧由于其自身的偏转抵抗来自致动器的力，环境振动和冲击等因素而在弹簧梁上产生弹簧力; 因此光开关执行任何外部电力负载和电力消耗的锁定功能。

公开(公告)号：US06703763B2

公开(公告)日：2004-03-09

申请号：US10043119

申请日：2002-01-14

申请人： Shu-Hui Tsai ,  Chengkuo Lee

发明人： Shu-Hui Tsai ,  Chengkuo Lee

IPC分类号： H01L4108

CPC分类号： H03H9/703

摘要： A bulk acoustic wave multiplexer controlled by micro-electro-mechanical switches, it comprises: a substrate; a wave-filtering device disposed on the substrate; an input port disposed on one side of the wave-filtering device; an output port disposed on another side of the wave-filtering device; and micro-electro-mechanical switches disposed on the wave-filtering device for controlling the bulk acoustic wave multiplexer; the present invention provides a bulk acoustic wave multiplexer device having miniaturized size and less interference integrated with micro-electro-mechanical switch devices, so as to operate multiplexing function.

摘要翻译： 由微机电开关控制的体声波多路复用器，其包括：基板; 布置在所述基板上的波滤器; 输入端口，设置在所述滤波装置的一侧; 输出端口，设置在所述滤波装置的另一侧; 以及设置在所述滤波装置上用于控制所述体声波多路复用器的微机电开关; 本发明提供了一种具有小型化和较小干扰的体积声波多路复用器件，与微机电开关器件集成，从而实现多路复用功能。

公开(公告)号：US06300554B1

公开(公告)日：2001-10-09

申请号：US09392574

申请日：1999-09-09

申请人： Chen-Hsun Du ,  Bruce C. S. Chou ,  Chengkuo Lee

发明人： Chen-Hsun Du ,  Bruce C. S. Chou ,  Chengkuo Lee

IPC分类号： H01L3534

CPC分类号： H01L35/32 ,  G01J5/12 ,  H01L35/34

摘要： A thermoelectric sensor device is disclosed consisting of polysilicon, titanium or AlSiCu as the thermocouple of material for thermoelectric sensor device. The features of the present process are: Selecting a material such as aluminum, titanium, aluminum alloy or titanium alloy with lower thermal conductivity coefficient as thermocouple element line and making use of zigzag structure with thermocouple element line, and increasing the length of thermocouple element line. Employing front side Si bulk etching technique to etch the silicon substrate, which is under the device and empty of silicon substrate, so as to reduce the superficial measure of thermoelectric sensor module and increase the throughout of the silicon wafer. Simultaneously, fabricating a resistor to treat as a heater on the membrane for adjusting the device.

摘要翻译： 公开了一种由多晶硅，钛或AlSiCu组成的热电传感器装置，作为热电传感器装置的热电偶。 本工艺的特点是：选择较低导热系数的铝，钛，铝合金或钛合金材料作为热电偶元件线，并使用带有热电偶元件线的锯齿形结构，并增加热电偶元件线的长度 。 采用正面Si体蚀刻技术来蚀刻位于器件下方的硅衬底，并清空硅衬底，以便减少热电传感器模块的表面测量并增加整个硅晶片。 同时，制造电阻器作为膜上的加热器来调节装置。