THIN-FILM TRANSISTOR BASED PIEZOELECTRIC STRAIN SENSOR AND METHOD
    2.
    发明申请
    THIN-FILM TRANSISTOR BASED PIEZOELECTRIC STRAIN SENSOR AND METHOD 有权
    基于薄膜晶体管的压电应变传感器及方法

    公开(公告)号:US20110049579A1

    公开(公告)日:2011-03-03

    申请号:US12842298

    申请日:2010-07-23

    IPC分类号: H01L29/84 H01L21/28

    摘要: A piezoelectric strain sensor and method thereof for detecting strain, vibration, and/or pressure. The sensor incorporates a sequence of piezoelectric and semiconductor layers in a thin-film transistor structure. The thin-film transistor structure can be configured on a flexible substrate via a low-cost fabrication technique. The piezoelectric layer generates an electric charge resulting in a modulation of a transistor current, which is a measure of external strain. The sensor can be formed as a single gate field-effect piezoelectric sensor and a dual gate field-effect piezoelectric sensor. The semiconductor layer can be configured from a nanowire array resulting in a metal-piezoelectric-nanowire field effect transistor. The single and dual gate field-effect piezoelectric sensor offer increased sensitivity and device control due to the presence of the piezoelectric layer in the transistor structure and low cost manufacturability on large area flexible substrates.

    摘要翻译: 一种用于检测应变,振动和/或压力的压电应变传感器及其方法。 传感器在薄膜晶体管结构中包含一系列压电和半导体层。 薄膜晶体管结构可以通过低成本制造技术配置在柔性基板上。 压电层产生电荷,导致晶体管电流的调制,这是外部应变的量度。 传感器可以形成为单栅场效应压电传感器和双栅场效应压电传感器。 半导体层可以由纳米线阵列构成,形成金属压电纳米线场效应晶体管。 由于晶体管结构中存在压电层并且在大面积柔性基板上具有低成本可制造性,单栅双极场效应压电传感器提供增加的灵敏度和器件控制。

    METHODS OF OPERATION OF ELECTROCHEMICAL GAS SENSORS
    3.
    发明申请
    METHODS OF OPERATION OF ELECTROCHEMICAL GAS SENSORS 有权
    电化学气体传感器的操作方法

    公开(公告)号:US20100252455A1

    公开(公告)日:2010-10-07

    申请号:US12754023

    申请日:2010-04-05

    IPC分类号: G01N27/26

    CPC分类号: G01N27/404 G01N33/007

    摘要: A method of operating an electrochemical gas sensor includes: a) exposing, for a first predetermined duration, the electrochemical gas sensor to an atmosphere containing a target gas whilst the gas reaction capability of the electrode assembly is substantially reduced from a working level, such that target gas is collected within the housing; b) increasing the gas reaction capability of the electrode assembly to a level at which it consumes collected target gas and thereby outputs a signal to the sensing circuit, including an initial transient decay signal; c) monitoring the transient decay signal; and d) analysing the rate of decay of the transient decay signal to determine whether the performance of at least one component of the electrochemical gas sensor is within acceptable limits. An apparatus for operating an electrochemical gas sensor, adapted for connection to an electrochemical gas sensor via a sensing circuit for control thereof, can carry out the disclosed method(s).

    摘要翻译: 操作电化学气体传感器的方法包括:a)将电化学气体传感器第一预定持续时间暴露于含有目标气体的气氛,同时电极组件的气体反应能力从工作水平显着降低,使得 目标气体收集在壳体内; b)将电极组件的气体反应能力提高到消耗收集的目标气体的水平,从而将信号输出到感测电路,包括初始瞬态衰减信号; c)监测瞬态衰减信号; 以及d)分析瞬态衰减信号的衰减速率,以确定电化学气体传感器的至少一个部件的性能是否在可接受的极限内。 一种用于操作电化学气体传感器的装置,其可用于经由用于控制的感测电路连接到电化学气体传感器,可以执行所公开的方法。

    MATRIX NANOCOMPOSITE SENSING FILM FOR SAW/BAW BASED HYDROGEN SULPHIDE SENSOR AND METHOD FOR MAKING SAME
    4.
    发明申请
    MATRIX NANOCOMPOSITE SENSING FILM FOR SAW/BAW BASED HYDROGEN SULPHIDE SENSOR AND METHOD FOR MAKING SAME 有权
    基于SAW / BAW的硫化钠传感器的MATRIX纳米复合材料感光膜及其制造方法

    公开(公告)号:US20090280593A1

    公开(公告)日:2009-11-12

    申请号:US12116724

    申请日:2008-05-07

    IPC分类号: H01L51/40 C08K3/22

    摘要: A method can be adapted for design and preparation of a matrix nanocomposite sensing film for hydrogen sulphide SAW/BAW detection at room temperature. A matrix nanocomposite can be synthesized by incorporating both single-wall and multi-wall thiolated carbon nanotubes into conductive organic polymers or ceramic nanocrystalline in a properly functionalized manner. A thin organic sensing film can be prepared based on the matrix nanocomposite. The matrix nanocomposite sensing film can be prepared on a surface of a SAW/BAW device by an additive process or a direct printing process. Finally, the sensing film can be consolidated by thermal annealing or laser annealing under ambient conditions in order to obtain the stable sensing film with higher sensitivity and electrical properties for a SAW/BAW based H2S sensor.

    摘要翻译: 一种方法可以适用于在室温下用于硫化氢SAW / BAW检测的基质纳米复合材料感测膜的设计和制备。 可以通过将单壁和多壁硫醇化碳纳米管以适当的官能化方式并入导电有机聚合物或陶瓷纳米晶体中来合成基质纳米复合材料。 可以基于基体纳米复合材料制备薄的有机传感膜。 可以通过添加方法或直接印刷方法在SAW / BAW装置的表面上制备基质纳米复合材料感测膜。 最后,感应膜可以在环境条件下通过热退火或激光退火进行固结,以获得具有更高灵敏度和电气性能的稳定感测膜,用于基于SAW / BAW的H2S传感器。

    METHOD FOR SENSOR FABRICATION AND RELATED SENSOR AND SYSTEM
    5.
    发明申请
    METHOD FOR SENSOR FABRICATION AND RELATED SENSOR AND SYSTEM 有权
    传感器制造方法及相关传感器及系统

    公开(公告)号:US20090193903A1

    公开(公告)日:2009-08-06

    申请号:US12362741

    申请日:2009-01-30

    摘要: A method includes forming multiple trenches in a first wafer, forming a sensor structure on a first surface of a second wafer, and bonding the first wafer and the second wafer. The method also includes etching a second surface of the second wafer to form a sensor diaphragm in the second wafer. The method further includes removing a portion of the first wafer by cutting the first wafer in multiple areas of the first wafer associated with the trenches. A sensor includes a substrate and a surface acoustic wave (SAW) resonator on a first surface of the substrate. The sensor also includes a bonding pad electrically coupled to the SAW resonator and a notch formed in a second surface of the substrate. The sensor further includes a cover separated from the first surface of the substrate by a spacer. The SAW resonator is located between the cover and the substrate.

    摘要翻译: 一种方法包括在第一晶片中形成多个沟槽,在第二晶片的第一表面上形成传感器结构,以及结合第一晶片和第二晶片。 该方法还包括蚀刻第二晶片的第二表面以在第二晶片中形成传感器膜片。 该方法还包括通过在与沟槽相关联的第一晶片的多个区域中切割第一晶片来去除第一晶片的一部分。 传感器包括在基板的第一表面上的基板和表面声波(SAW)谐振器。 传感器还包括电耦合到SAW谐振器的接合焊盘和形成在衬底的第二表面中的凹口。 传感器还包括通过间隔件与衬底的第一表面分离的盖。 SAW谐振器位于盖和基板之间。

    COMPOSITION FOR MATERIAL SENSING AND RELATED METHOD AND APPARATUS
    6.
    发明申请
    COMPOSITION FOR MATERIAL SENSING AND RELATED METHOD AND APPARATUS 审中-公开
    用于材料感测的组合物及相关方法和装置

    公开(公告)号:US20090193897A1

    公开(公告)日:2009-08-06

    申请号:US12363842

    申请日:2009-02-02

    IPC分类号: G01N29/00 C12Q1/00

    摘要: A sensor includes a piezoelectric substrate and conductive elements formed in or over the substrate. The sensor also includes a sensing layer formed over the substrate. The sensing layer has one or more properties (such as a mass loading, an electrical property, or a visco-elastic property) that vary based on at least one measurand to be measured by the sensor (such as carbon dioxide). This may affect, for example, a propagation velocity of acoustic waves in the sensor and/or a resonant frequency of the sensor. The sensing layer includes a combination of polyaniline and carbonic anhydrase. The combination of polyaniline and carbonic anhydrase could be formed using an emeraldine base. For instance, an aniline can be dissolved in water to form a mixture, and hydrochloric acid and an oxidant can be added to the mixture. A chemical polymerization of the aniline in the mixture can be performed to form polyanilne.

    摘要翻译: 传感器包括压电基板和形成在基板内或上的导电元件。 传感器还包括形成在衬底上的感测层。 感测层具有基于由传感器(例如二氧化碳)测量的至少一个被测量而变化的一个或多个特性(例如质量负载,电性能或粘弹性)。 这可能会影响传感器中声波的传播速度和/或传感器的谐振频率。 感测层包括聚苯胺和碳酸酐酶的组合。 聚苯胺和碳酸酐酶的组合可以使用翠绿亚胺碱形成。 例如,苯胺可以溶解在水中以形成混合物,并且可以向混合物中加入盐酸和氧化剂。 可以进行混合物中苯胺的化学聚合以形成聚苯胺。

    Method for sensor fabrication and related sensor and system
    7.
    发明授权
    Method for sensor fabrication and related sensor and system 有权
    传感器制造方法及相关传感器及系统

    公开(公告)号:US07891252B2

    公开(公告)日:2011-02-22

    申请号:US12362741

    申请日:2009-01-30

    IPC分类号: G01L7/00

    摘要: A method includes forming multiple trenches in a first wafer, forming a sensor structure on a first surface of a second wafer, and bonding the first wafer and the second wafer. The method also includes etching a second surface of the second wafer to form a sensor diaphragm in the second wafer. The method further includes removing a portion of the first wafer by cutting the first wafer in multiple areas of the first wafer associated with the trenches. A sensor includes a substrate and a surface acoustic wave (SAW) resonator on a first surface of the substrate. The sensor also includes a bonding pad electrically coupled to the SAW resonator and a notch formed in a second surface of the substrate. The sensor further includes a cover separated from the first surface of the substrate by a spacer. The SAW resonator is located between the cover and the substrate.

    摘要翻译: 一种方法包括在第一晶片中形成多个沟槽,在第二晶片的第一表面上形成传感器结构,以及结合第一晶片和第二晶片。 该方法还包括蚀刻第二晶片的第二表面以在第二晶片中形成传感器膜片。 该方法还包括通过在与沟槽相关联的第一晶片的多个区域中切割第一晶片来去除第一晶片的一部分。 传感器包括在基板的第一表面上的基板和表面声波(SAW)谐振器。 传感器还包括电耦合到SAW谐振器的接合焊盘和形成在衬底的第二表面中的凹口。 传感器还包括通过间隔件与衬底的第一表面分离的盖。 SAW谐振器位于盖和基板之间。

    QUANTUM DOT SOLAR CELL
    8.
    发明申请

    公开(公告)号:US20100193025A1

    公开(公告)日:2010-08-05

    申请号:US12695914

    申请日:2010-01-28

    IPC分类号: H01L31/00

    CPC分类号: H01L31/0352 B82Y30/00

    摘要: A solar cell is disclosed that may include a quantum dot, an electron conductor, and a bifunctional ligand disposed between the quantum dot and the electron conductor. The bifunctional ligand may include a first anchor group that bonds to the quantum dot and a second anchor group that bonds to the electron conductor. The solar cell may include a hole conductor that is configured to reduce the quantum dot once the quantum dot absorbs a photon and ejects an electron through the bifunctional ligand and into the electron conductor. The hole conductor may be a p-type polymer.

    SURFACE ACOUSTIC WAVE BASED SENSOR APPARATUS AND METHOD UTILIZING SEMI-SYNCHRONOUS SAW RESONATORS
    9.
    发明申请
    SURFACE ACOUSTIC WAVE BASED SENSOR APPARATUS AND METHOD UTILIZING SEMI-SYNCHRONOUS SAW RESONATORS 审中-公开
    基于表面声波的传感器装置和利用同步SAW谐振器的方法

    公开(公告)号:US20100141087A1

    公开(公告)日:2010-06-10

    申请号:US12332064

    申请日:2008-12-10

    IPC分类号: H01L41/047

    摘要: A SAW based sensor apparatus utilizing semi-synchronous SAW resonator having a single resonance at Bragg frequency with very high quality factor is disclosed. The semi-synchronous SAW resonator includes at least one inter-digital transducer, which generates and receives surface acoustic wave and a number of grating reflectors, which reflect the surface acoustic wave and generate a standing wave between the reflectors, The interdigital transducer and the grating reflectors can be fabricated on a substrate (e.g., quartz) by photolithographic process. The resonance condition is independent of transducer directivity and reflection coefficient per finger. Such a SAW based sensor apparatus having three semi-synchronous SAW resonators can be utilized for measuring pressure and temperature for a wireless tire-pressure monitoring system.

    摘要翻译: 公开了一种利用具有非常高品质因数的布拉格频率具有单个谐振的半同步SAW谐振器的基于SAW的传感器装置。 半同步SAW谐振器包括至少一个数字间换能器,其产生和接收表面声波和多个反射表面声波并在反射器之间产生驻波的光栅反射器。叉指式换能器和光栅 可以通过光刻工艺在基板(例如石英)上制造反射器。 谐振条件与传感器方向性和每个手指的反射系数无关。 具有三个半同步SAW谐振器的这种基于SAW的传感器装置可用于测量无线轮胎压力监测系统的压力和温度。

    Patterned dielectric elastomer actuator and method of fabricating the same
    10.
    发明授权
    Patterned dielectric elastomer actuator and method of fabricating the same 有权
    图案介质弹性体致动器及其制造方法

    公开(公告)号:US07719164B2

    公开(公告)日:2010-05-18

    申请号:US12187124

    申请日:2008-08-06

    IPC分类号: H02N1/00

    摘要: A patterned dielectric elastomer actuator is disclosed which includes a series of thin parallel elastomer filaments, separated by certain distances sandwiched between a pair of rigid electrodes. The elastomer filaments and air acts as a patterned dielectric layer. The elastomer filaments can compress laterally from a circular cross-section to an elliptical shape when a voltage is applied between the rigid electrodes. The elastomer filaments can touch laterally, which implies no further squeezing in order to provide a minimal secure distance between the rigid electrodes. The dielectric elastomer actuator can be fabricated utilizing a reel-to-reel fabrication process with the thin elastomer filaments fabricated ahead of time, by extrusion techniques and cured completely before storing on reels.

    摘要翻译: 公开了一种图案化的介电弹性体致动器,其包括一系列薄的平行的弹性体细丝,其被夹在一对刚性电极之间的特定距离分开。 弹性体丝和空气用作图案化的介电层。 当在刚性电极之间施加电压时,弹性体长丝可以从圆形横截面横向压缩成椭圆形。 弹性体长丝可以横向接触,这意味着不再进一步挤压,以便在刚性电极之间提供最小的可靠距离。 电介质弹性体致动器可以利用卷对卷制造工艺制造,其中薄的弹性体细丝提前制造,通过挤出技术,并且在存储在卷轴之前完全固化。