Manufacturing method of SOI substrate
    1.
    发明授权
    Manufacturing method of SOI substrate 有权
    SOI衬底的制造方法

    公开(公告)号:US08936999B2

    公开(公告)日:2015-01-20

    申请号:US13341057

    申请日:2011-12-30

    摘要: An SOI substrate including a semiconductor layer whose thickness is even is provided. According to a method for manufacturing the SOI substrate, the semiconductor layer is formed over a base substrate. In the method, a first surface of a semiconductor substrate is polished to be planarized; a second surface of the semiconductor substrate which is opposite to the first surface is irradiated with ions, so that an embrittled region is formed in the semiconductor substrate; the second surface is attached to the base substrate, so that the semiconductor substrate is attached to the base substrate; and separation in the embrittled region is performed. The value of 3σ (σ denotes a standard deviation of thickness of the semiconductor layer) is less than or equal to 1.5 nm.

    摘要翻译: 提供了包括厚度均匀的半导体层的SOI衬底。 根据SOI基板的制造方法,在基底基板上形成半导体层。 在该方法中,半导体衬底的第一表面被抛光以被平面化; 半导体衬底的与第一表面相对的第二表面被离子照射,从而在半导体衬底中形成脆化区域; 所述第二表面附接到所述基底基板,使得所述半导体基板被附接到所述基底基板; 并进行脆化区域的分离。 3&sgr的价值 (&sgr;表示半导体层的厚度的标准偏差)小于或等于1.5nm。

    Metal polish composition, polishing method using the composition and method for producing wafer using the polishing method
    2.
    发明申请
    Metal polish composition, polishing method using the composition and method for producing wafer using the polishing method 审中-公开
    金属抛光组合物,使用该抛光方法使用该组合物的抛光方法和用于制造晶片的方法

    公开(公告)号:US20050282387A1

    公开(公告)日:2005-12-22

    申请号:US10517149

    申请日:2003-06-06

    摘要: A metal polish composition contains an amine represented by general formula (1): wherein m represents an integer of from 1 to 3 and n represents an integer of from 0 to 2, with m and n being such that (3-n-m) is an integer of from 0 to 2; A represents a straight-chained or branched alkylene, phenylene or substituted phenylene group having 1 to 5 carbon atoms; R1 and R3 each independently represent hydrogen or a substituted or non-substituted hydrocarbon group having 1 to 5 carbon atoms; R3 represents a substituted or non-substituted hydrocarbon group having 1 to 20 carbon atoms; a combination of R1 and R2, a combination of R2 and R3 and a combination of A and R3 can form a ring structure; and R1, R2, R3 and A can individually form a ring structure.

    摘要翻译: 金属抛光组合物含有由通式(1)表示的胺:其中m表示1至3的整数,n表示0至2的整数,m和n使得(3-nm)为 从0到2的整数; A表示具有1至5个碳原子的直链或支链亚烷基,亚苯基或取代亚苯基; R 1和R 3各自独立地表示氢或具有1至5个碳原子的取代或未取代的烃基; R3表示碳原子数1〜20的取代或未取代的烃基; R1和R2的组合,R2和R3的组合以及A和R3的组合可以形成环结构; 并且R1,R2,R3和A可以单独形成环结构。

    SLURRY OBTAINED USING BINDER FOR BATTERY ELECTRODES, ELECTRODE OBTAINED USING THE SLURRY, AND LITHIUM ION SECONDARY BATTERY OBTAINED USING THE ELECTRODE
    3.
    发明申请
    SLURRY OBTAINED USING BINDER FOR BATTERY ELECTRODES, ELECTRODE OBTAINED USING THE SLURRY, AND LITHIUM ION SECONDARY BATTERY OBTAINED USING THE ELECTRODE 审中-公开
    使用电池电极的糊料获得的浆料,使用浆料获得的电极和使用电极获得的锂离子二次电池

    公开(公告)号:US20140054496A1

    公开(公告)日:2014-02-27

    申请号:US13985094

    申请日:2012-01-31

    IPC分类号: H01M4/62

    摘要: Provided is a slurry for lithium ion secondary battery electrodes, which has proper binding properties between active materials and between an active material and a current collector, an electrode using the slurry, and a lithium ion secondary battery using the electrode and having both a high initial discharge capacity and an excellent charge-discharge high-temperature cycle characteristic. The present invention relates to a slurry for lithium ion secondary battery electrodes, which is obtained using a binder for battery electrodes and an active material and has a pH of 3.0 to 6.0. Preferably, the slurry contains a binder for battery electrodes in an amount of 0.2 to 4.0% by mass based on the active material.

    摘要翻译: 提供了一种用于锂离子二次电池电极的浆料,其在活性材料之间以及活性材料和集电体之间具有适当的结合性,使用该浆料的电极和使用该电极的锂离子二次电池具有高的初始 放电容量和良好的充放电高温循环特性。 本发明涉及一种锂离子二次电池电极用浆料,其使用电池电极用粘合剂和活性物质,pH为3.0〜6.0。 优选地,浆料含有相对于活性物质为0.2〜4.0质量%的电池电极用粘合剂。

    MANUFACTURING METHOD OF SOI SUBSTRATE
    4.
    发明申请
    MANUFACTURING METHOD OF SOI SUBSTRATE 有权
    SOI衬底的制造方法

    公开(公告)号:US20120178238A1

    公开(公告)日:2012-07-12

    申请号:US13341057

    申请日:2011-12-30

    IPC分类号: H01L21/30

    摘要: An SOI substrate including a semiconductor layer whose thickness is even is provided. According to a method for manufacturing the SOI substrate, the semiconductor layer is formed over a base substrate. In the method, a first surface of a semiconductor substrate is polished to be planarized; a second surface of the semiconductor substrate which is opposite to the first surface is irradiated with ions, so that an embrittled region is formed in the semiconductor substrate; the second surface is attached to the base substrate, so that the semiconductor substrate is attached to the base substrate; and separation in the embrittled region is performed. The value of 3σ (σ denotes a standard deviation of thickness of the semiconductor layer) is less than or equal to 1.5 nm.

    摘要翻译: 提供了包括厚度均匀的半导体层的SOI衬底。 根据SOI基板的制造方法,在基底基板上形成半导体层。 在该方法中,半导体衬底的第一表面被抛光以被平面化; 半导体衬底的与第一表面相对的第二表面被离子照射,从而在半导体衬底中形成脆化区域; 所述第二表面附接到所述基底基板,使得所述半导体基板被附接到所述基底基板; 并进行脆化区域的分离。 3&sgr的价值 (&sgr;表示半导体层的厚度的标准偏差)小于或等于1.5nm。