Chamber for reducing contamination during chemical vapor deposition
    1.
    发明授权
    Chamber for reducing contamination during chemical vapor deposition 失效
    在化学气相沉积期间减少污染的室

    公开(公告)号:US6114227A

    公开(公告)日:2000-09-05

    申请号:US280258

    申请日:1999-03-29

    摘要: This invention relates to the design of apparatus for processing electronic devices, including equipment for chemical vapor deposition or transport polymerization. The new designs of gas separator plates, their configuration, and the regulation of gas flows through the system provides control over the pattern of precursor gas flow away from the separation plates, thereby decreasing the amount of byproducts that are deposited on the plates and throughout the reactor. New designs for shaping other surfaces of the dispersion head reduces contamination of those elements, and new designs for chamber panels decrease the deposition of byproducts on those surfaces, as well as other elements of the reactor. Decreasing deposition of byproducts increases the amount and the quality of the film that can be deposited without requiring the system to be shut down for cleaning. This increases the throughput of products in the deposition process, thereby increasing the efficiency of electronic device manufacture and lowering the cost.

    摘要翻译: 本发明涉及用于处理电子设备的装置的设计,包括用于化学气相沉积或运输聚合的设备。 气体分离器板的新设计,其结构和通过系统的气体流量的调节提供了控制离开分离板的前体气体流动的模式,从而减少了沉积在板上和整个过程中的副产物的量 反应堆。 用于成型分散头的其它表面的新设计减少了这些元件的污染,并且用于室板的新设计降低了在那些表面上以及反应器的其它元件的副产物的沉积。 副产物的沉积减少增加了可以沉积的膜的量和质量,而不需要系统关闭清洁。 这增加了沉积工艺中产品的生产量,从而提高了电子设备制造的效率并降低了成本。

    Enhanced resolution electrophotographic-type imaging station
    3.
    发明授权
    Enhanced resolution electrophotographic-type imaging station 失效
    增强分辨率电子照相式成像站

    公开(公告)号:US4928118A

    公开(公告)日:1990-05-22

    申请号:US281111

    申请日:1988-12-07

    摘要: An electrophotographic-type imaging station or printer includes a focusing lens positioned between the printer light source and a photosensitive medium. As the light source projects beams of light energy forming a row in a direction towards the photosensitive medium, the lens focuses each projected beam into a rectangular beam. The speed of the photosensitive medium and the operation of the light source are coordinated so that adjacent rows of generally rectangular beams are positioned in abutting relation with each other. The plurality of focused rows projected in row-at-a-time fashion onto the surface of the photosensitive medium form an informational array pattern having a resolution in a direction parallel with the direction of medium movement which is greater than the resolution of the pattern in a direction perpendicular to the direction of medium movement. By forming an informational array pattern in this manner, a desired informational array pattern gray scale may be achieved without a loss in the original resolution of the array pattern taken in a direction perpendicular to the direction of medium movement.

    Multiplexed thin film electroluminescent edge emitter structure and
electronic drive system therefrom
    4.
    发明授权
    Multiplexed thin film electroluminescent edge emitter structure and electronic drive system therefrom 失效
    多路复用薄膜电致发光边缘发射极结构及其电子驱动系统

    公开(公告)号:US4899184A

    公开(公告)日:1990-02-06

    申请号:US343697

    申请日:1989-04-24

    CPC分类号: B41J2/45 H05B33/12 H05B33/26

    摘要: A thin film electroluminescent edge emitter structure operable as an electronically controlled, high resolution light source includes a plurality of TFEL assemblies disposed in array-like fashion on a layer of substrate material. Each TFEL assembly includes a first layer of electrically conductive material, a second layer of electrically conductive material spaced from the first electrically conductive layer and an electrically energizable, light-emitting composite layer interposed therebetween. At least the second electrically conductive layer of each TFEL assembly is segmented to provide a plurality of second electrically conductive elements, and the plurality of second electrically conductive elements in combination with the remaining layers of the assembly form a pixel group including a plurality of individual light-emitting pixels. The portion of the light-emitting, composite layer associated with an individual pixel of a particular pixel group is operable to emit light energy at the light-emitting face of the individual pixel when a first electrical signal is applied to the first electrically conductive layer which is common to the pixel group simultaneously with the application of a second electrical signal to the individual pixel second electrically conductive element.

    Chamber for reducing contamination during chemical vapor deposition
    5.
    发明授权
    Chamber for reducing contamination during chemical vapor deposition 失效
    在化学气相沉积期间减少污染的室

    公开(公告)号:US6079353A

    公开(公告)日:2000-06-27

    申请号:US50228

    申请日:1998-03-28

    摘要: This invention relates to the design of apparatus for processing electronic devices, including equipment for chemical vapor deposition. The new designs of gas separator plates, their configuration, and the regulation of gas flows through the system provides control over the pattern of precursor gas flow away from the separation plates, thereby decreasing the amount of byproducts that are deposited on the plates and throughout the reactor. New designs for shaping other surfaces of the dispersion head reduces contamination of those elements, and new designs for chamber panels decrease the deposition of byproducts on those surfaces, as well as other elements of the reactor. Decreasing deposition of byproducts increases the amount of thin film, and the quality of the film which can be deposited without requiring the system to be shut down. This increases the throughput of products in the deposition process, thereby increasing the efficiency of electronic device manufacture and lowering the cost.

    摘要翻译: 本发明涉及用于处理电子设备的装置的设计,包括用于化学气相沉积的设备。 气体分离器板的新设计,其结构和通过系统的气体流量的调节提供了控制离开分离板的前体气体流动的模式,从而减少了沉积在板上和整个过程中的副产物的量 反应堆。 用于成型分散头的其它表面的新设计减少了这些元件的污染,并且用于室板的新设计降低了在那些表面上以及反应器的其它元件的副产物的沉积。 副产物的沉积减少增加了薄膜的量,以及可以在不需要系统关闭的情况下沉积的膜的质量。 这增加了沉积工艺中产品的生产量,从而提高了电子设备制造的效率并降低了成本。

    TFEL edge emitter structure with light emitting face at angle greater
than ninety degrees to substrate street
    6.
    发明授权
    TFEL edge emitter structure with light emitting face at angle greater than ninety degrees to substrate street 失效
    TFEL边缘发射器结构,发光面的角度大于衬底街道的九十度

    公开(公告)号:US5252895A

    公开(公告)日:1993-10-12

    申请号:US697371

    申请日:1991-05-09

    IPC分类号: H05B33/00 H05B33/12 G09G3/30

    CPC分类号: H05B33/12

    摘要: A TFEL edge emitter structure has a bottom substrate layer, a lower common electrode layer applied over the bottom substrate layer an upper control electrode layer, and a middle EL light-energy generating stack disposed between the lower common electrode and the upper control electrode layers. The middle EL stack includes a lower dielectric layer, an upper dielectric layer, and a middle light-energy generating layer. The lower dielectric layer overlies the lower common electrode layer and bottom substrate layer. The middle light-energy generating layer is deposited over the lower dielectric layer. The upper dielectric layer is deposited over the middle light-energy generating layer. A light emitting face on a front edge of the EL stack is disposed at an angle relative to a street on the front edge portion of the substrate layer that is greater than ninety degrees. The angle selected should be sufficiently greater than ninety degrees relative to the substrate layer street so that a divergent zone of light emitted by the face is not obstructed by the street. A focussing lens is located at a position spaced in front of the inclined light emitting face of the TFEL edge emitter structure where the lens will intercept and intensify a zone of light emerging from the inclined face. A central axis of the focussing lens extends perpendicular to the respective light emitting face.

    TFEL edge emitter module and packaging assembly employing sealed cavity
capacity varying mechanism
    7.
    发明授权
    TFEL edge emitter module and packaging assembly employing sealed cavity capacity varying mechanism 失效
    TFEL边缘发射器模块和封装组件采用密封腔容量变化机制

    公开(公告)号:US5017824A

    公开(公告)日:1991-05-21

    申请号:US434392

    申请日:1989-11-13

    CPC分类号: H05B33/04

    摘要: A thin film electroluminescent (TFEL) edge emitter module and packaging assembly is composed of a TFEL edge emitter module including an electroluminescent (EL) stack having a linear array of spaced-apart pixels with light-emitting front edges, an enclosure defining a sealed cavity which encloses at least a portion of the EL stack so as to sealably enclose the array of pixels in a contaminant-free environment, a thermally expansive and contractive liquid substantially filling the sealed cavity, and a cavity capacity expansion and contraction mechanism disposed in the enclosure in communication with the cavity and the liquid therein. In response to thermal expansion of the volume of the liquid filling the cavity, the capacity expansion and contraction mechanism is operable to change from a first condition toward a second condition and thereby increase the liquid-holding capacity of the enclosure cavity. Further, in response to thermal contraction of the volume of the liquid, the mechanism is operable to change from the second condition back toward the first condition and thereby decrease the liquid-holding capacity of the enclosure cavity. In such manner, the enclosure cavity liquid-holding capacity is continually maintained substantially equivalent to the enclosed volume of liquid filling the cavity.

    Thin film electroluminescent edge emitter structure with optical lens
and multi-color light emission systems
    8.
    发明授权
    Thin film electroluminescent edge emitter structure with optical lens and multi-color light emission systems 失效
    具有光学透镜和多色发光系统的薄膜电致发光边缘发射器结构

    公开(公告)号:US5043715A

    公开(公告)日:1991-08-27

    申请号:US353316

    申请日:1989-05-17

    摘要: A thin film electroluminescent edge emitter structure includes a common electrode layer and control electrodes disposed above the common electrode layer. At least one dielectric layer is disposed between the common electrode layer and control electrodes, and a phosphor layer is interposed between the one dielectric layer and common electrode layer. The common electrode layer, one dielectric layer and the phosphor layer define the light-emitting pixels of the emitter structure. Each pixel has a light-emitting face formed thereon and is operable upon application of electrical excitation to cause the radiation of light energy within its phosphor layer at least in a direction towards the pixel light-emitting face. An optical lens system associated with the pixels includes a preselected contour shaped on the light-emitting face of each pixel to define an optical lens integral therewith to project the light energy passed therethrough in a preselected direction and form a beam of light energy having a preselected beam pattern. A multi-color light emission system employed by the pixels includes a plurality of phosphor zones composing the phosphor layer and capable of projecting different light energy through the light-emitting faces of the pixels. Also, separate edge emitter structures projecting different colors of light can be utilized in a electrophotographic printer.

    摘要翻译: 薄膜电致发光边缘发射器结构包括公共电极层和设置在公共电极层上方的控制电极。 在公共电极层和控制电极之间设置至少一个电介质层,并且在一个电介质层和公共电极层之间插入荧光体层。 公共电极层,一个电介质层和荧光体层限定发射器结构的发光像素。 每个像素具有形成在其上的发光面,并且在施加电激励时可以至少在朝向像素发光面的方向上引起其荧光体层内的光能的辐射。 与像素相关联的光学透镜系统包括形状在每个像素的发光面上的预选轮廓,以限定与其成一体的光学透镜,以预选的方向投射穿过其中的光能,并形成具有预选的光束 光束图案。 由像素使用的多色发光系统包括构成荧光体层并能够通过像素的发光面投射不同光能的多个荧光体区域。 此外,在电子照相打印机中可以使用投射不同颜色的光的单独的边缘发射器结构。

    Facsimile machine using thin film electroluminescent device for spot
scanning
    10.
    发明授权
    Facsimile machine using thin film electroluminescent device for spot scanning 失效
    传真机使用薄膜电致发光器件进行点扫

    公开(公告)号:US5325207A

    公开(公告)日:1994-06-28

    申请号:US693258

    申请日:1991-04-29

    摘要: An improved facsimile machine having at least one edge emitting thin film electroluminescent line array, each array having a plurality of pixels wherein the pixels are selectively activated. A light beam from each pixel is directed to a known point along a line on a document and reflects to a sensor. The reflected beam corresponds to a grey level at the point of reflection on the document and causes the sensor to generate a signal corresponding to that greyness level. Sufficient pixels are provided to generate sufficient light beams to strike all points along a line across a document.

    摘要翻译: 一种具有至少一个边缘发射薄膜电致发光线阵列的改进的传真机,每个阵列具有多个像素,其中像素被选择性地激活。 来自每个像素的光束被引导到沿着文档上的线的已知点并且反射到传感器。 反射光束对应于文档反射点处的灰度级,并使传感器产生对应于该灰度级的信号。 提供足够的像素以产生足够的光束以沿着穿过文档的线的所有点。