公开(公告)号：US06424238B1

公开(公告)日：2002-07-23

申请号：US09757191

申请日：2001-01-08

Applicant: David Penunuri

Inventor： David Penunuri

IPC: H03H964

CPC classification number: H03H9/6483 ,  H03H3/08 ,  H03H9/605

Abstract: An acoustic wave filter (10) and a method (30) of forming the acoustic wave filter (10) are disclosed. The acoustic wave filter includes a substrate (20) supporting a first die (18) and a second die (18). The first die (18) and second die (18) include either a Surface Acoustic Wave (SAW) resonator or a Bulk Acoustic Wave (BAW) resonator, wherein one of the resonators is configured as a series resonator (12) of the acoustic wave filter (10) and the other resonator is configured as a shunt resonator (14) of the acoustic wave filter (10).

Abstract translation: 公开了一种形成声波滤波器（10）的声波滤波器（10）和方法（30）。 声波滤波器包括支撑第一模具（18）和第二模具（18）的基板（20）。 第一管芯（18）和第二管芯（18）包括表面声波（SAW）谐振器或体声波（BAW）谐振器，其中谐振器之一被配置为声波的串联谐振器（12） 滤波器（10），另一个谐振器被配置为声波滤波器（10）的并联谐振器（14）。

公开(公告)号：US5287036A

公开(公告)日：1994-02-15

申请号：US844333

申请日：1992-03-02

Applicant: David Penunuri

Inventor： David Penunuri

IPC: H03H9/00 ,  H03H9/02 ,  H01L41/08

CPC classification number: H03H9/02629

Abstract: An inductive element for impedance matching comprises an acoustic wave propagating substrate and an acoustic wave transducer coupled to the acoustic wave propagating substrate. The acoustic wave transducer has an effective length L.sub.eff such that Le.sub.eff .gtoreq.C.sub.2 v.sub.a /f.sub.o k.sup.2, where C.sub.2 is a numerical factor such that C.sub.2 .gtoreq.2, v.sub.a represents an acoustic velocity, f.sub.o represents an acoustic wave transducer center frequency and k.sup.2 denotes an acoustic wave propagating substrate electromechanical coupling coefficient. Reflecting elements are provided on the substrate in the principal acoustic propagation directions to form a resonant acoustic cavity. The device exhibits inductive impedance and high Q over a significant frequency range in small physical size.

Abstract translation: 用于阻抗匹配的电感元件包括声波传播衬底和耦合到声波传播衬底的声波换能器。 声波换能器具有有效长度Leff，使得Leeff> = C2va / fok2，其中C2是C2> = 2的数值因子，va表示声速，fo表示声波换能器中心频率，k2表示声学 波传播基板机电耦合系数。 反射元件设置在基板上的主声传播方向上以形成谐振声腔。 该器件在物理尺寸小的显着频率范围内显示出电感阻抗和高Q值。

公开(公告)号：US5237235A

公开(公告)日：1993-08-17

申请号：US767338

申请日：1991-09-30

Applicant: Frederick Y. Cho ,  David Penunuri ,  Robert F. Falkner, Jr.

Inventor： Frederick Y. Cho ,  David Penunuri ,  Robert F. Falkner, Jr.

IPC: H03H9/25 ,  H03H9/02 ,  H03H9/05

CPC classification number: H03H9/1071 ,  H03H9/02874 ,  H03H9/0585 ,  Y10T29/42

Abstract: A surface acoustic wave (SAW) device package for reducing insertion loss and direct RF feedthrough of the SAW device is disclosed. The package provides for extensive shielding of each of the input and output pads. The inputs and outputs to the SAW device are separated by maintaining the inputs on one surface of the substrate and the outputs on the opposite surface of the substrate. The SAW crystal substrate including the SAW devices is bonded to the package substrate and the package is hermetically sealed via a low-temperature glass seal or solder-type sealing, for example.

公开(公告)号：US5212115A

公开(公告)日：1993-05-18

申请号：US802929

申请日：1991-12-06

Applicant: Frederick Y. Cho ,  Gerald Norley ,  David Penunuri

Inventor： Frederick Y. Cho ,  Gerald Norley ,  David Penunuri

IPC: H01L23/522

CPC classification number: H01L23/5222 ,  H01L2924/0002 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/4913

Abstract: A method for microelectronic device encapsulation is described comprising steps of providing a microelectronic device (e.g., a surface acoustic wave device) having interconnection contacts disposed thereon and depositing a passivation layer over the microelectronic device and the interconnection contacts. The method further comprises steps of providing alternating current coupled electrodes positioned on the passivation layer and over the interconnection contacts, providing a base substrate (including pressure contact electrodes and vias) and bonding the base substrate to the microelectronic device with a bonding agent for providing a mechanical bond between the microelectronic device and the base and for providing a hermetically sealed environment for the microelectronic device. The method further comprises providing electrical coupling between the pressure contact electrodes and the alternating current coupled electrodes. This method realizes compact microelectronic device packages which can be mass produced from entire microelectronic device substrate.

Abstract translation: 描述了一种用于微电子器件封装的方法，其包括以下步骤：提供其上布置有互连触点的微电子器件（例如，表面声波器件），并在微电子器件和互连触点之上沉积钝化层。 该方法还包括以下步骤：提供位于钝化层上方和互连触点上的交流耦合电极，提供基底（包括压接触电极和通孔），并将基底衬底与用于提供 微电子器件与基底之间的机械结合，并为微电子器件提供气密密封的环境。 该方法还包括提供压力接触电极和交流耦合电极之间的电耦合。 该方法实现了可以从整个微电子器件衬底大规模生产的紧凑型微电子器件封装。

公开(公告)号：US5162689A

公开(公告)日：1992-11-10

申请号：US694516

申请日：1991-05-01

Applicant: Frederick M. Fliegel ,  David Penunuri ,  Thomas S. Hickernell

Inventor： Frederick M. Fliegel ,  David Penunuri ,  Thomas S. Hickernell

IPC: H03H9/02 ,  H03H9/145

CPC classification number: H03H9/02976 ,  H03H9/14505

Abstract: An acoustic transducer for an acoustic wave device which includes an acoustic wave propagating substrate, the transducer adapted to couple to an electrical load and/or source. The transducer includes at least a pair of comb electrodes formed on the substrate. It includes apparatus for applying an electrical load and/or source across the pair of comb electrodes. The first of the combs has a plurality of electrode fingers. The second comb has at least one electrode finger. The widths of the electrode fingers are the same. Gaps of at least two different widths are disposed between the electrodes.

Abstract translation: 一种用于声波装置的声换能器，其包括声波传播基片，所述换能器适于耦合到电负载和/或源。 换能器包括形成在基板上的至少一对梳状电极。 它包括用于在一对梳电极上施加电负载和/或源的装置。 第一梳子具有多个电极指。 第二梳具有至少一个电极指。 电极指的宽度相同。 至少两个不同宽度的间隙设置在电极之间。

公开(公告)号：US06777727B2

公开(公告)日：2004-08-17

申请号：US10304429

申请日：2002-11-26

Applicant: Gregory J. Dunn ,  Allyson Beuhler ,  David Penunuri

Inventor： Gregory J. Dunn ,  Allyson Beuhler ,  David Penunuri

IPC: H01L2980

CPC classification number: G01N29/245 ,  G01N29/022 ,  G01N29/222 ,  G01N2291/0256 ,  G01N2291/0427 ,  H01L27/20

Abstract: An exemplary system and method for providing an acoustic plate wave apparatus is disclosed as comprising inter alia: a monocrystalline silicon substrate (200); an amorphous oxide material (220); a monocrystalline perovskite oxide material (230); a monocrystalline piezoelectric material (240); and a flexural plate wave component (250, 270) having an input interdigitated transducer (270), an output interdigitated transducer (250) and an optional support layer (260). Deposition or removal of material on or from an absorptive thin film sensor surface (210), or changes in the mechanical properties of the thin film (210) in contact with various chemical species, or changes in the electrical characteristics of a solvent solution exposed to the thin film (210) generally operate to produce measurable perturbations in the vector quantities (e.g., velocity, etc.) and scalar quantities (e.g., attenuation, etc.) of the acoustic plate modes.

Abstract translation: 公开了一种用于提供声板波装置的示例性系统和方法，其包括：单晶硅衬底（200）; 无定形氧化物材料（220）; 单晶钙钛矿氧化物材料（230）; 单晶压电材料（240）; 以及具有输入交叉换能器（270）的弯曲板波分量（250,270），输出叉指换能器（250）和可选支撑层（260）。 在吸收薄膜传感器表面（210）上或从吸收薄膜传感器表面（210）上沉积或去除材料，或与各种化学物质接触的薄膜（210）的机械性能的变化，或暴露于 薄膜（210）通常用于在声板模式的矢量（例如，速度等）和标量（例如，衰减等）中产生可测量的扰动。

公开(公告)号：US5896636A

公开(公告)日：1999-04-27

申请号：US787059

申请日：1997-01-22

Applicant: David Penunuri

Inventor： David Penunuri

IPC: H04R17/00 ,  H01L41/09 ,  H01L41/22 ,  H03H3/08 ,  H03H9/02 ,  H03H9/17 ,  H03H9/25 ,  H04R31/00

CPC classification number: H03H9/02559 ,  H03H3/08 ,  Y10T29/42

Abstract: A piezoelectric substrate (120) and a method for preparing same. The method includes steps of (i) providing a boule of piezoelectric material, (ii) orienting the boule to Euler angles chosen to provide a boundary condition matched to a partially-metallized surface and (iii) sawing the boule into at least a first slice (120) having first and second surfaces, at least one of the first and second surfaces comprising a planar surface. The method desirably but not essentially further includes steps of (iv) polishing at least one of the first and second surfaces to provide a substantially planar polished surface, (v) disposing a layer of metal on the at least one of the first and second surfaces and (vi) patterning the layer of metal to provide at least one interdigitated pattern (105, 110) comprising an acoustic wave transducer (105, 110), the acoustic wave transducer (105, 110) providing the boundary condition matched to a partially-metallized surface.

Abstract translation: 一种压电基板（120）及其制备方法。 该方法包括以下步骤：（i）提供压电材料的原料块，（ii）将所述晶锭定向为所选择的欧拉角，以提供与部分金属化表面匹配的边界条件，以及（iii）将所述毛坯切割成至少第一切片 （120）具有第一和第二表面，所述第一和第二表面中的至少一个包括平坦表面。 该方法理想地但不是基本上进一步包括以下步骤：（iv）抛光第一和第二表面中的至少一个以提供基本平坦的抛光表面，（v）在第一和第二表面中的至少一个上设置金属层 提供至少一个包括声波传感器（105,110）的交错图案（105,110），所述声波换能器（105,110）提供与部分地耦合的边界条件匹配的边界条件， 金属化表面。

公开(公告)号：US5854579A

公开(公告)日：1998-12-29

申请号：US920192

申请日：1997-08-25

Applicant: David Penunuri

Inventor： David Penunuri

IPC: H03H9/64 ,  H03H9/72

CPC classification number: H03H9/6483

Abstract: An acoustic wave resonator filter (10) provides series and shunt resonator elements (22, 24) in a ladder network. The series elements (22) are configured in a lowpass configuration. The shunt elements (24) act as impedance inverters in a passband of the filter and they series resonate at an antiresonant frequency of the series elements (22) in a stopband which provides additional isolation. The electrodes (14) of the elements (22, 24) are of a metal thickness which improve the losses of a series resonant frequency in a passband which improves insertion loss. However, any increase in loss near the antiresonant frequency is compensated by the reduced loss near the resonant frequency of the shunt elements (24). The lowpass configuration and the aligned series element antiresonant frequency and shunt element resonant frequency provides good insertion loss, good isolation between transmitting and receiving bands, and maintains good stopband characteristics while reducing the number of elements required for the ladder network.

Abstract translation: 声波谐振器滤波器（10）在梯形网络中提供串联和并联谐振器元件（22,24）。 串联元件（22）被配置为低通配置。 分流元件（24）用作滤波器的通带中的阻抗反相器，并且它们以提供额外隔离的阻带中的串联元件（22）的反谐振频率串联谐振。 元件（22,24）的电极（14）具有金属厚度，其改善了通带中串联谐振频率的损耗，这改善了插入损耗。 然而，在反谐振频率附近的任何损耗增加都通过分流元件（24）的谐振频率附近的减小的损耗来补偿。 低通配置和对齐的串联元件反谐振频率和分流元件谐振频率提供良好的插入损耗，发射和接收频带之间的良好隔离，并且在减少梯形网络所需要的元件数量的同时保持良好的阻带特性。

公开(公告)号：US5635883A

公开(公告)日：1997-06-03

申请号：US520063

申请日：1995-08-28

Applicant: David Penunuri ,  Thomas S. Hickernell ,  Frederick Yi-Tung Cho

Inventor： David Penunuri ,  Thomas S. Hickernell ,  Frederick Yi-Tung Cho

IPC: H03H3/08 ,  H03H9/00 ,  H03H9/02 ,  H03H9/145 ,  H03H9/25 ,  H03H9/64

CPC classification number: H03H9/6436 ,  H03H9/1452

Abstract: An acoustic wave filter (200, 300) having a substrate for supporting propagation of acoustic waves, and first (220, 315), second (235, 330) and third (210, 310) acoustic wave transducers disposed on the substrate. The first acoustic wave transducer (220, 315) includes at least one bus bar (221, 316) electrically coupled to a first electrical port (205, 305) of the acoustic wave filter (200, 300). The second acoustic wave transducer (235, 330) is disposed on the substrate in line with the first acoustic wave transducer (220, 315) and is acoustically coupled thereto. The second acoustic wave transducer (235, 330) includes at least one bus bar (236', 331) electrically coupled to a second electrical port (240, 345) of the acoustic wave filter (200, 300). The third acoustic wave transducer (210, 310) includes at least one bus bar (211, 311') electrically coupled to the first electrical port (205, 305). The third acoustic wave transducer (210, 310) is acoustically decoupled from either the first (220, 315) or second (235, 330) acoustic wave transducers.

Abstract translation: 具有用于支撑声波传播的衬底的声波滤波器（200,300）和设置在衬底上的第一（220,315），第二（235,330）和第三（210,310）声波换能器。 第一声​​波换能器（220,315）包括电耦合到声波滤波器（200,300）的第一电气端口（205,305）的至少一个汇流条（221,316）。 第二声波换能器（235,330）设置在与第一声波换能器（220,315）一致的衬底上，并与其声学耦合。 第二声波换能器（235,330）包括电耦合到声波滤波器（200,300）的第二电端口（240,345）的至少一个汇流条（236'，331）。 第三声波换能器（210,310）包括电耦合到第一电气端口（205,305）的至少一个汇流条（211,311'）。 第三声波换能器（210,310）与第一声波换能器（220,315）或第二声波换能器（235,330）的声学去耦合。

公开(公告)号：US5365207A

公开(公告)日：1994-11-15

申请号：US999256

申请日：1992-12-31

Applicant: Jaime A. Borras ,  David Penunuri

Inventor： Jaime A. Borras ,  David Penunuri

IPC: H03H9/145 ,  H03H9/64

CPC classification number: H03H9/6403

Abstract: A multi-bandwidth SAW filter for an input signal is provided which includes an SAW transducer having a selectable length corresponding to the desired bandwidth of the filter. The SAW filter is responsive to a control signal which corresponds to a selectable bandwidth of the filter to present the input signal to an appropriately lengthed SAW transducer.

Abstract translation: 提供了一种用于输入信号的多带宽SAW滤波器，其包括具有对应于滤波器的期望带宽的可选择长度的SAW换能器。 SAW滤波器响应于对应于滤波器的可选带宽的控制信号，以将输入信号呈现给适当增长的SAW换能器。