METHODS OF FABRICATING CMOS IMAGE SENSORS
    2.
    发明申请
    METHODS OF FABRICATING CMOS IMAGE SENSORS 审中-公开
    制作CMOS图像传感器的方法

    公开(公告)号:US20080182354A1

    公开(公告)日:2008-07-31

    申请号:US11950249

    申请日:2007-12-04

    Abstract: CMOS image sensors and related methods of fabricating CMOS image sensors are disclosed. Fabrication of a CMOS image sensor can include forming a first impurity region having a first conductivity type in a semiconductor substrate. A second impurity region having a second conductivity type is formed in the semiconductor substrate adjacent to the first impurity region. A third impurity region having the first conductivity type is formed in the semiconductor substrate and located below the second impurity region. A transfer gate is formed on the semiconductor substrate and at least partially overlaps the first, second, and third impurity regions. A photo sensitive device is formed in the semiconductor substrate and adjacent to one side of the transfer gate. A floating diffusion region is formed in the semiconductor substrate and located adjacent to an opposite side of the transfer gate from the photosensitive device.

    Abstract translation: 公开了CMOS图像传感器和制造CMOS图像传感器的相关方法。 CMOS图像传感器的制造可以包括在半导体衬底中形成具有第一导电类型的第一杂质区域。 在与第一杂质区相邻的半导体衬底中形成具有第二导电类型的第二杂质区。 具有第一导电类型的第三杂质区形成在半导体衬底中并位于第二杂质区的下方。 传输栅极形成在半导体衬底上并且至少部分地与第一,第二和第三杂质区重叠。 光敏元件形成在半导体衬底中并与传输门的一侧相邻。 浮动扩散区域形成在半导体衬底中并且位于与传感栅极的与光敏器件相反的一侧。

    Image sensors
    3.
    发明授权
    Image sensors 有权
    图像传感器

    公开(公告)号:US08537255B2

    公开(公告)日:2013-09-17

    申请号:US12801740

    申请日:2010-06-23

    Abstract: Image sensors including a semiconductor substrate, a plurality of photo detecting elements, a dielectric layer, a plurality of color filters, and a plurality of micro lenses. The photo detecting elements may be in the semiconductor substrate and may convert an incident light into an electric signal. The dielectric layer may be on the semiconductor substrate and may include a plurality of photo blocking regions on regions between the photo detecting elements. The color filters may be on the dielectric layer and may be disposed corresponding to the plurality of photo detecting elements, respectively. The micro lenses may be on the plurality of color filters and may be disposed corresponding to the plurality of photo detecting elements, respectively.

    Abstract translation: 图像传感器包括半导体衬底,多个光电检测元件,电介质层,多个滤色器和多个微透镜。 光检测元件可以在半导体衬底中,并且可以将入射光转换成电信号。 电介质层可以在半导体衬底上并且可以包括在光检测元件之间的区域上的多个光阻挡区域。 滤色器可以在电介质层上,并且可以分别对应于多个光检测元件设置。 微透镜可以在多个滤色器上,并且可以分别对应于多个光检测元件设置。

    Image sensors
    4.
    发明申请
    Image sensors 审中-公开
    图像传感器

    公开(公告)号:US20100134668A1

    公开(公告)日:2010-06-03

    申请号:US12591721

    申请日:2009-11-30

    CPC classification number: H01L27/1463 H01L27/14629 H01L27/1464

    Abstract: An image sensor includes a plurality of wells for isolating a plurality of photodiodes from each other. Each of the wells includes a P-type well region and an N-type well region configured to receive a positive bias voltage. The image sensor provides a clearer image by suppressing a blooming effect and a dark current.

    Abstract translation: 图像传感器包括用于将多个光电二极管彼此隔离的多个阱。 每个阱包括配置成接收正偏置电压的P型阱区和N型阱区。 图像传感器通过抑制起霜效果和暗电流来提供更清晰的图像。

    Image sensor and image sensing system including the same
    5.
    发明申请
    Image sensor and image sensing system including the same 有权
    图像传感器和图像传感系统包括相同的

    公开(公告)号:US20100045836A1

    公开(公告)日:2010-02-25

    申请号:US12461608

    申请日:2009-08-18

    Abstract: An image sensor includes a conductive well in a semiconductor substrate, a photo sensitive device (PSD) in the semiconductor substrate below the conductive well, the PSD and conductive well overlapping each other, and a charge transmission unit in the semiconductor substrate and adjacent to the conductive well, the charge transmission unit having a structure of a recessed gate and being positioned in a recess region of the semiconductor substrate.

    Abstract translation: 图像传感器包括在半导体衬底中的导电阱,在导电阱下方的半导体衬底中的光敏器件(PSD),PSD和导电阱彼此重叠的光敏器件(PSD)以及半导体衬底中的电荷传输单元 所述电荷传输单元具有凹入栅极的结构并且位于所述半导体衬底的凹部区域中。

    CMOS image sensor
    6.
    发明申请
    CMOS image sensor 审中-公开
    CMOS图像传感器

    公开(公告)号:US20060289911A1

    公开(公告)日:2006-12-28

    申请号:US11472389

    申请日:2006-06-22

    Abstract: Disclosed is a CMOS image sensor, comprising a photodiode formed in a substrate, a floating diffusion region formed in the substrate in a manner such that it is distanced from the photodiode surrounds the photodiode and a transfer gate formed in a manner such that it is distanced from the photodiode and the floating diffusion region and formed in a boundary area between the photodiode and the floating diffusion region, thereby overlapping the photodiode and the floating diffusion region.

    Abstract translation: 公开了一种CMOS图像传感器,其包括形成在衬底中的光电二极管,以与光电二极管相隔的方式形成在衬底中的浮动扩散区域包围光电二极管,并且以使其远离的方式形成传输门 从光电二极管和浮动扩散区域形成在光电二极管和浮动扩散区域之间的边界区域中,从而与光电二极管和浮动扩散区域重叠。

    Image sensor and image sensing system including the same
    7.
    发明授权
    Image sensor and image sensing system including the same 有权
    图像传感器和图像传感系统包括相同的

    公开(公告)号:US08487351B2

    公开(公告)日:2013-07-16

    申请号:US12591632

    申请日:2009-11-25

    Abstract: The image sensor and an image sensing system including the same are provided. The image sensor includes a semiconductor substrate, a pixel array formed at a pixel area located in the semiconductor substrate and comprising a plurality of photoelectric converts, a plurality of driver circuits formed at a circuit area defined in the semiconductor substrate. The image sensor includes at least one heat blocker or heat shield. The at least one heat blocker may be formed between the pixel area and the circuit area in the semiconductor substrate. The heat blocker or heat shield may block or dissipate heat generated at the circuit area from being transferred to the pixel area through the semiconductor substrate. The heat blocker or heat shield may be used in image sensors using a back-side illumination sensor (BIS) structure or image sensors using a silicon on insulator (SOI) semiconductor substrate.

    Abstract translation: 提供了图像传感器和包括其的图像感测系统。 图像传感器包括半导体衬底,形成在位于半导体衬底中的像素区域并包括多个光电转换器的像素阵列,形成在半导体衬底中限定的电路区域的多个驱动电路。 图像传感器包括至少一个阻热器或隔热罩。 可以在像素区域和半导体衬底中的电路区域之间形成至少一个热阻挡器。 热阻挡器或隔热罩可以阻挡或消散在电路区域产生的热量,以通过半导体衬底传送到像素区域。 使用背面照明传感器(BIS)结构的图像传感器或使用绝缘体上硅(SOI)半导体衬底的图像传感器)可以使用热阻挡器或隔热罩。

    image sensor and image sensing system including the same
    8.
    发明申请
    image sensor and image sensing system including the same 有权
    图像传感器和包括其的图像感测系统

    公开(公告)号:US20100133635A1

    公开(公告)日:2010-06-03

    申请号:US12591632

    申请日:2009-11-25

    Abstract: The image sensor and an image sensing system including the same are provided. The image sensor includes a semiconductor substrate, a pixel array formed at a pixel area located in the semiconductor substrate and comprising a plurality of photoelectric converts, a plurality of driver circuits formed at a circuit area defined in the semiconductor substrate. The image sensor includes at least one heat blocker or heat shield. The at least one heat blocker may be formed between the pixel area and the circuit area in the semiconductor substrate. The heat blocker or heat shield may block or dissipate heat generated at the circuit area from being transferred to the pixel area through the semiconductor substrate. The heat blocker or heat shield may be used in image sensors using a back-side illumination sensor (BIS) structure or image sensors using a silicon on insulator (SOI) semiconductor substrate.

    Abstract translation: 提供了图像传感器和包括其的图像感测系统。 图像传感器包括半导体衬底,形成在位于半导体衬底中的像素区域并包括多个光电转换器的像素阵列,形成在半导体衬底中限定的电路区域的多个驱动电路。 图像传感器包括至少一个阻热器或隔热罩。 可以在像素区域和半导体衬底中的电路区域之间形成至少一个热阻挡器。 热阻挡器或隔热罩可以阻挡或消散在电路区域产生的热量,以通过半导体衬底传送到像素区域。 使用背面照明传感器(BIS)结构的图像传感器或使用绝缘体上硅(SOI)半导体衬底的图像传感器)可以使用热阻挡器或隔热罩。

    Silicon-on-nothing metal oxide semiconductor field effect transistor and method of manufacturing the same
    9.
    发明申请
    Silicon-on-nothing metal oxide semiconductor field effect transistor and method of manufacturing the same 审中-公开
    无硅金属氧化物半导体场效应晶体管及其制造方法

    公开(公告)号:US20060208342A1

    公开(公告)日:2006-09-21

    申请号:US11345052

    申请日:2006-02-01

    Abstract: The present invention relates to a SON MOSFET and method of manufacturing the same, in which a blister is formed within a silicon substrate, thus improving the disadvantages of a bulk structure and a Silicon-On-Insulator (SOI) structure at the same time. The SON MOSFET according to the present invention comprises isolation insulating films formed at both upper sides of a silicon substrate, a gate insulating film and a gate electrode that are sequentially formed on a surface of the silicon substrate between the isolation insulating films, a source region and a drain region that are formed on the silicon substrate between the gate insulating film and the isolation insulating films, a blister formed within the silicon substrate under the gate insulating film, and a silicon channel, which is surrounded by the blister, the source region and the drain region, within the silicon substrate, wherein the blister is formed of hydrogen or helium ion.

    Abstract translation: 本发明涉及一种SON MOSFET及其制造方法,其中在硅衬底内形成起泡,从而同时改善了本体结构和绝缘体上硅(SOI)结构的缺点。 根据本发明的SON MOSFET包括在硅衬底的两个上表面上形成的隔离绝缘膜,栅极绝缘膜和栅极电极,其顺序形成在隔离绝缘膜之间的硅衬底的表面上,源极区域 以及在栅极绝缘膜和隔离绝缘膜之间的硅衬底上形成的漏极区域,形成在栅极绝缘膜下方的硅衬底内的泡罩和被泡罩包围的硅沟道,源极区域 和硅衬底内的漏极区域,其中泡罩由氢或氦离子形成。

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