Method suitable for batch ion etching of copper
    1.
    发明申请
    Method suitable for batch ion etching of copper 失效
    适用于铜离子间歇蚀刻的方法

    公开(公告)号:US20050272267A1

    公开(公告)日:2005-12-08

    申请号:US11131369

    申请日:2005-05-18

    摘要: A method for etching metal deposited on a substrate, the method comprising: depositing a metal layer above a substrate; coating at least a portion of the deposited metal layer with a photo-resist; pattering the photo-resist; etching the deposited metal layer with an inert gas plasma at an energy density of less than 0.5 Watt/cm2, the substrate being maintained at a temperature of less than 50° C.; and ashing a resultant crust with an ashing gas, the ashing gas comprising CF4 and O2.

    摘要翻译: 一种用于蚀刻沉积在衬底上的金属的方法,所述方法包括:在衬底上沉积金属层; 用光致抗蚀剂涂覆沉积的金属层的至少一部分; 图案光刻胶; 用能量密度小于0.5瓦特/平方厘米的惰性气体等离子体蚀刻沉积的金属层,将该衬底保持在小于50℃的温度; 并且用灰化气体灰化所得到的外壳,灰化气体包括CF 4和O 2。

    Optical Waveguide Structure Having Asymmetric Y-Shape and Transceiver for Bidirectional Optical Signal Transmission Using the Same
    2.
    发明申请
    Optical Waveguide Structure Having Asymmetric Y-Shape and Transceiver for Bidirectional Optical Signal Transmission Using the Same 审中-公开
    具有不对称Y型和收发器的光波导结构,用于双向光信号传输

    公开(公告)号:US20080267564A1

    公开(公告)日:2008-10-30

    申请号:US11596552

    申请日:2004-05-12

    IPC分类号: G02B6/42

    摘要: Disclosed are an asymmetric Y-shaped optical waveguide structure and an optical transceiver using the structure. The asymmetric Y-shaped optical waveguide structure includes a main axis optical waveguide extended in a longitudinal direction; and a branch optical waveguide extended from an extension start point in the main axis optical waveguide in a longitudinal direction as much as a predetermined region and then diverged outside. The main axis optical waveguide and the branch optical waveguide have effective refractive indexes, the magnitude relation of which is reversed for optical signals having first and second wavelength range. The optical transceiver includes an asymmetric Y-shaped optical waveguide structure, an optical fiber optically coupled to the structure for transmitting/receiving of the bi-directional optical signal, a laser diode and a photodiode. Accordingly, it is possible to miniaturize the optical transceiver, reduce a packaging cost, and improve reliability of the optical transceiver.

    摘要翻译: 公开了一种不对称的Y形光波导结构和使用该结构的光收发器。 不对称Y形光波导结构包括沿纵向延伸的主轴光波导; 以及分支光波导,从主轴光波导的延伸起点向长度方向延伸多达预定区域,然后在外侧发散。 主轴光波导和分支光波导具有有效折射率,对于具有第一和第二波长范围的光信号,该折射率的大小关系相反。 光收发器包括不对称的Y形光波导结构,光学耦合到用于发送/接收双向光信号的结构的光纤,激光二极管和光电二极管。 因此,可以使光收发器小型化,降低包装成本,并提高光收发器的可靠性。

    Method of connecting an optical element to a PLC
    3.
    发明申请
    Method of connecting an optical element to a PLC 失效
    将光学元件连接到PLC的方法

    公开(公告)号:US20050201667A1

    公开(公告)日:2005-09-15

    申请号:US11063531

    申请日:2005-02-24

    IPC分类号: G02B6/12

    摘要: A planar lightwave circuit and a method of producing such a planar lightwave circuit, the planar lightwave circuit having an element secured thereon. The planar lightwave circuit comprises: a substrate; a trench cut in the substrate; at least one solder pad deposited on a top surface deposited above the substrate; at least one of a waveguide defined in a layer deposited above the substrate and an optical fiber; and an optical element placed within the trench and in optical communication with the at least one of a waveguide and an optical fiber; at least one metal contact configured on the optical element to be adjacent to the metal pad, the solder pad being connected to the metal contact providing physical support to the optical element and an electrical connection between the metal pad and the metal contact.

    摘要翻译: 平面光波电路和制造这种平面光波电路的方法,该平面光波电路具有固定在其上的元件。 平面光波电路包括:基板; 在衬底中切割的沟槽; 沉积在沉积在所述衬底上的顶表面上的至少一个焊盘; 限定在沉积在衬底上的层中的波导中的至少一个和光纤; 以及光学元件,其放置在所述沟槽内并与所述至少一个波导和光纤光学连通; 配置在所述光学元件上以与所述金属焊盘相邻的至少一个金属触点,所述焊盘与所述金属触点连接,为所述光学元件提供物理支撑以及所述金属焊盘和所述金属触点之间的电连接。

    Coating formulation and method of production thereof for post print
waxable linerboard
    4.
    发明授权

    公开(公告)号:US5439707A

    公开(公告)日:1995-08-08

    申请号:US238402

    申请日:1994-05-05

    CPC分类号: D21H19/60 D21H19/38

    摘要: Coating formulations, unique methods for their production and use, which have high drying capacity, maintain high levels of brightness, even after the application of a wax coating onto the printed substrate. Precipitated amorphous silicates, titanium dioxide, and other fillers are combined and coated onto heavyweight linerboard to facilitate ink drying and minimize brightness loss associated with wax dipped cartons.

    摘要翻译: 具有高干燥能力的涂料配方,其生产和使用的独特方法,即使在将蜡涂层施加到印刷基材上之后也能保持高水平的亮度。 沉淀的无定形硅酸盐,二氧化钛和其他填料被组合并涂覆在重量级的纸板上以促进油墨干燥并最小化与蜡浸纸箱相关的亮度损失。

    Method of connecting an optical element to a PLC
    7.
    发明授权
    Method of connecting an optical element to a PLC 失效
    将光学元件连接到PLC的方法

    公开(公告)号:US07146080B2

    公开(公告)日:2006-12-05

    申请号:US11063531

    申请日:2005-02-24

    摘要: A planar lightwave circuit and a method of producing such a planar lightwave circuit, the planar lightwave circuit having an element secured thereon. The planar lightwave circuit comprises: a substrate; a trench cut in the substrate; at least one solder pad deposited on a top surface deposited above the substrate; at least one of a waveguide defined in a layer deposited above the substrate and an optical fiber; and an optical element placed within the trench and in optical communication with the at least one of a waveguide and an optical fiber; at least one metal contact configured on the optical element to be adjacent to the metal pad, the solder pad being connected to the metal contact providing physical support to the optical element and an electrical connection between the metal pad and the metal contact.

    摘要翻译: 平面光波电路和制造这种平面光波电路的方法,该平面光波电路具有固定在其上的元件。 平面光波电路包括:基板; 在衬底中切割的沟槽; 沉积在沉积在所述衬底上的顶表面上的至少一个焊盘; 限定在沉积在衬底上的层中的波导中的至少一个和光纤; 以及光学元件,其放置在所述沟槽内并与所述至少一个波导和光纤光学连通; 配置在所述光学元件上以与所述金属焊盘相邻的至少一个金属触点,所述焊盘与所述金属触点连接,为所述光学元件提供物理支撑以及所述金属焊盘和所述金属触点之间的电连接。

    Integrated capacitor for RF applications
    8.
    发明申请
    Integrated capacitor for RF applications 有权
    用于射频应用的集成电容器

    公开(公告)号:US20050272246A1

    公开(公告)日:2005-12-08

    申请号:US11131370

    申请日:2005-05-18

    申请人: Elad Irron Eitan Avni

    发明人: Elad Irron Eitan Avni

    摘要: A precision RF passive component comprising: a silicon substrate; a first dielectric layer deposited above the silicon substrate; a first metal layer formed above the first dielectric layer; a second dielectric layer formed above the first metal layer; and a second metal layer formed above the second dielectric layer. In one embodiment a passivation layer is added above the second metal layer. In an exemplary embodiment the first metal layer comprises a first adhesion layer, a metal sub-layer, and a second adhesion layer; and the second dielectric layer comprises a first diffusion barrier layer, a dielectric sub-layer and a second diffusion barrier. In an exemplary embodiment, the metal sub-layer comprises copper. In another exemplary embodiment the dielectric sub-layer comprises SiO2 or Si3N4 between diffusion barrier layers comprising SiN.

    摘要翻译: 一种精密RF无源元件,包括:硅衬底; 沉积在硅衬底上的第一电介质层; 形成在所述第一介电层上方的第一金属层; 形成在所述第一金属层上方的第二电介质层; 以及形成在所述第二介电层上方的第二金属层。 在一个实施例中,钝化层被添加在第二金属层上。 在示例性实施例中,第一金属层包括第一粘附层,金属子层和第二粘合层; 并且第二介电层包括第一扩散阻挡层,电介质子层和第二扩散阻挡层。 在示例性实施例中,金属子层包括铜。 在另一个示例性实施例中,电介质子层在包括SiN的扩散阻挡层之间包括SiO 2或Si 3 N 4 N 4。

    Real time mottle measuring device and method
    9.
    发明授权
    Real time mottle measuring device and method 失效
    实时斑驳测量装置及方法

    公开(公告)号:US4966455A

    公开(公告)日:1990-10-30

    申请号:US280166

    申请日:1988-12-05

    IPC分类号: G01N21/47 G01N21/57 G01N33/34

    摘要: Devices and methods for measuring mottle of paper-like materials are provided. the invention includes directing a radiation over a paper-like material and scanning it in a plurality of directions. Radiation scattered by the paper-like material is detected to produce an output. This output is processed to provide a reading proportional to the mottle of the paper-like material. The invention uses electro-optical devices and signal processing to quantify mottle as an appearance property. Gloss measurements of the paper-like material can also be quantified and simultaneously displayed.

    摘要翻译: 提供了用于测量纸状材料斑点的装置和方法。 本发明包括将辐射引导到纸状材料上并在多个方向上进行扫描。 被纸状材料散射的辐射被检测以产生输出。 该输出被处理以提供与纸状材料的斑点成比例的读数。 本发明使用电光装置和信号处理来定量斑点作为外观特性。 也可以量化并同时显示纸状材料的光泽度测量。

    Method suitable for batch ion etching of copper
    10.
    发明授权
    Method suitable for batch ion etching of copper 失效
    适用于铜离子间歇蚀刻的方法

    公开(公告)号:US07262139B2

    公开(公告)日:2007-08-28

    申请号:US11131369

    申请日:2005-05-18

    IPC分类号: H01L21/302

    摘要: A method for etching metal deposited on a substrate, the method comprising: depositing a metal layer above a substrate; coating at least a portion of the deposited metal layer with a photo-resist; pattering the photo-resist; etching the deposited metal layer with an inert gas plasma at an energy density of less than 0.5 Watt/cm2, the substrate being maintained at a temperature of less than 50° C.; and ashing a resultant crust with an ashing gas, the ashing gas comprising CF4 and O2.

    摘要翻译: 一种用于蚀刻沉积在衬底上的金属的方法,所述方法包括:在衬底上沉积金属层; 用光致抗蚀剂涂覆沉积的金属层的至少一部分; 图案光刻胶; 用能量密度小于0.5瓦特/平方厘米的惰性气体等离子体蚀刻沉积的金属层,将该衬底保持在小于50℃的温度; 并且用灰化气体灰化所得到的外壳,灰化气体包括CF 4和O 2。